BI-LAYER METAL ELECTRODE FOR MICROMACHINED ULTRASONIC TRANSDUCER DEVICES

    公开(公告)号:US20200254487A1

    公开(公告)日:2020-08-13

    申请号:US16784186

    申请日:2020-02-06

    Abstract: A method of forming an ultrasonic transducer device includes forming a patterned metal electrode layer over a substrate, the patterned metal electrode layer comprising a lower layer and an upper layer formed on the lower layer; forming an insulation layer over the patterned metal electrode layer; and planarizing the insulation layer to the upper layer of the patterned metal electrode layer, wherein the upper layer comprises a electrically conductive material that serves as a chemical mechanical polishing (CMP) stop layer that has CMP selectivity with respect to the insulation layer and the lower layer, and wherein the upper layer has a CMP removal rate slower than that of the insulation layer.

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