摘要:
An electron beam projection apparatus providing a magnetic refocusing lens for adjusting a focal position of an electron beam on an object. An axis of an auxiliary magnetic field produced by the magnetic refocusing lens is required equivalently to agree to that of a convergent magnetic field produced by a magnetic object lens. An inclination adjustment apparatus of the magnetic refocusing lens provides a rolling mechanism being independently rotatable on two axes being perpendicular to each other and also perpendicular to a direction of an axis of a convergent magnetic field. With this inclination adjustment apparatus, adjustment operation is improved.
摘要:
A transmission mask is used when exposing patterns by a charged particle beam which passes therethrough. The transmission mask includes a plate, and a plurality of rectangular blocks formed on a surface of the plate and having an area approximately equal to a cross sectional area of the charged particle beam irradiated thereon, where the blocks include a first block in which at least one transmission hole is provided and a second block in which no transmission hole is provided. The transmission of the first block is partly irradiated by the charged particle beam when varying the size of the exposing pattern. A single second block is provided immediately adjacent to at least two first blocks, so that an irradiating position of the charged particle beam can be varied with respect to both the two first blocks from the single second block.
摘要:
An electron beam exposure system having a capability of checking a pattern to be written on an object comprises an electron beam source for producing an electron beam along an optical axis toward the object, a block mask provided on the optical axis and having selectable aperture patterns therein for correspondingly shaping the electron beam, an addressing deflector fixture for selectively passing the electron beam through a desired aperture on the block mask, an electron optical system for focusing the electron beam shaped by the block mask on the object such that an image of the aperture of the block mask is projected on the object, a screen provided along the optical axis between the block mask and the object for interrupting the electron beam when the electron beam is offset from the alignment with the optical axis, the screen having a through-hole in alignment with the optical axis for passing the electron beam therethrough a controller for controlling the electron optical system such that an image of the aperture of the beam shaping means through which the electron beam has passed is projected on the screen when checking the pattern of the apertures on the block mask, and a detection unit for detecting the image of the aperture that is projected on the screen.
摘要:
An electron beam exposure system comprises a pattern data generator for producing first pattern data indicative of a desired pattern of electron beam to be written on a wafer and second pattern data indicative of the number of repetitions of the pattern specified by the first pattern data, as a time sequential mixture of the first and second pattern data. The time sequential mixture of the data is sorted in a data sorting unit into a parallel data of the first pattern data and the second pattern data. Then, a discrimination is made whether the data is the first pattern data or the second pattern data, and when the data is the second pattern data, the data that follows immediately behind the second pattern data is transferred to an output path simultaneously with the second pattern data, which is transferred to another output path. Thereby, the first and second pattern data form a parallel data. The parallel data thus formed is next compressed by deleting the data, that follows immediately behind the data which contains the second pattern data, from both output paths.
摘要:
A steering wheel core is disclosed which comprises a boss, a core piece of a ring part disposed around the boss, and core pieces of spoke parts interconnecting the boss and the core piece of the ring part. The core pieces of the spoke parts are formed by die casting an aluminum alloy containing magnesium, iron, manganese, silicon, and unavoidable impurities. The magnesium content in the aluminum alloy is not less than 1.5% by weight and less than 2.5% by weight.
摘要:
A photoelectron image projection apparatus has a device for detecting an image of a pattern of a mask within a predetermined projection region of the mask. An image signal describing the detected image is compared with a reference image signal which is known from the pattern of the mask, and a defect in the projection pattern is detected when the two compared image signals differ.
摘要:
A radio communication apparatus has a modulating portion for modulating a carrier with a signal to be transmitting so as to produce a transmission signal. A signal transmitting portion causes the transmissible signal to be subjected to power amplification. The transmissible signal is transmitted after having been subjected to power amplification. A cooling device is provided for cooling by force a heat source contained in the signal transmitting portion in response to a condition detector for detecting a temperature condition or an operating condition of the signal transmitting portion. An operation control unit is operative to cause the cooling device to be in operation when a particular temperature condition in which temperature of the signal transmitting portion has exceeded a predetermined value or a particular operating condition in which the signal transmitting portion has been in a predetermined state is detected by the condition dectector.
摘要:
The present invention provides a process for producing a grid for use in lead acid batteries which comprises superposing, on a sheet bar of a lead-calcium alloy, a sheet or a foil of a lead-silver-tin alloy consisting of 0.01-1.0% by weight of tin and a residual quantity of lead and having a thickness smaller than that of the sheet bar, pressure-bonding both the materials by cold rolling to prepare an elementary sheet, and subjecting the elementary sheet to an expanding process or a punching process.The grid obtained according to the process of the invention is improved in the charge-discovery characteristics after overdischarging and standing and does not deteriorate the maintenance-free characteristic of lead-calcium-tin alloy.
摘要:
In a telephone apparatus used for a telephone system such that the telephone set is connected to a remote destination telephone set through telephone circuits after an ID number of a subscriber has been transmitted to the telephone company, the handset comprises a key entry section including plural dial keys, a memory section for storing the ID number and destination telephone numbers, a display section for displaying a destination telephone number corresponding to an operated dial key, and a control section for enabling a display of the ID number when the ID number is written but disabling a display of the ID number when read. Since the ID number is not displayed while being read to transmit it to the telephone company, the ID number of the subscriber is kept secret from others.
摘要:
An imidazole derivative of the formula: ##STR1## wherein each of R.sup.1 and R.sup.4 is a hydrogen atom or a lower alkyl group; each of R.sup.2 and R.sup.3 is a hydrogen atom, a halogen atom, a hydroxyl group, a lower alkyl group, a lower alkoxy group, an aralkyloxy group, a nitro group or an amino group; A is --O--, --S--, --CH.dbd.CH-- pr --CH.dbd.N--; Z is an aryl group, a thienyl group, a pyridyl group or a furyl group, in which definition these aromatic (heterocyclic) rings may have 1 to 3 substituents, each substituent being independently selected from a halogen atom, a lower alkyl group, a cyclic alkyl group, a lower alkoxy group, a hydroxyl group, a carboxyl group, a lower alkoxycarbonyl group, a carboxy-lower-alkoxy group, a di-lower-alkylamino-lower-alkoxy group and a nitro group; and a pharmaceutically acceptable acid addition salt thereof, a method for preparing the same and a pharmaceutical composition containing such compound. Such compounds have inhibitory activities on biosynthesis of thromboxane A.sub.2, inhibitory activities on platelet aggregation, vasodilative activities and protective effects on liver disorders.