SELF-PASSIVATING PLASMA RESISTANT MATERIAL FOR JOINING CHAMBER COMPONENTS
    91.
    发明申请
    SELF-PASSIVATING PLASMA RESISTANT MATERIAL FOR JOINING CHAMBER COMPONENTS 有权
    用于接合室组件的自钝性等离子体材料

    公开(公告)号:US20080029211A1

    公开(公告)日:2008-02-07

    申请号:US11461689

    申请日:2006-08-01

    IPC分类号: B32B37/00

    CPC分类号: C23C16/4409 H01J37/32467

    摘要: Embodiments of the invention provide a robust bonding material suitable for joining semiconductor processing chamber components. Other embodiments provide semiconductor processing chamber components joined using a bonding material having metal filler disposed in an adhesive layer. Other embodiments include methods for manufacturing a semiconductor processing chamber component having a bonding material that includes metal filled disposed in an adhesive layer. The metal filler is suitable for reacting with halogen containing plasmas such that a halogen based metal layer is formed on the exposed portion of the bonding material upon exposure to the plasma.

    摘要翻译: 本发明的实施例提供了适用于接合半导体处理室部件的坚固的接合材料。 其他实施例提供使用布置在粘合剂层中的具有金属填料的接合材料连接的半导体处理室部件。 其他实施例包括用于制造半导体处理室部件的方法,所述半导体处理室部件具有包括设置在粘合剂层中的填充金属的接合材料。 金属填料适于与含卤素的等离子体反应,使得在暴露于等离子体时在接合材料的暴露部分上形成卤素基金属层。

    Pre-assembling drag-and-drop objects before committing a drop object
    92.
    发明申请
    Pre-assembling drag-and-drop objects before committing a drop object 有权
    在提交拖放对象之前预先装配拖放对象

    公开(公告)号:US20070245302A1

    公开(公告)日:2007-10-18

    申请号:US11405998

    申请日:2006-04-18

    IPC分类号: G06F9/44

    CPC分类号: G06F8/38

    摘要: A method, apparatus and computer-readable medium for assembling objects in an IDE is presented. The method includes the steps of creating a pre-drop assembly area in an Integrated Development Environment (IDE); combining multiple component descriptors in the pre-drop assembly area, wherein the multiple component descriptors are interpreted through an extensible language mechanism that contains a plurality of extensible solutions; and upon a determination that combined multiple component descriptors have met a pre-defined condition, committing the combined multiple component descriptors to execution. In one embodiment, only one solution from the plurality of extensible solutions is used to interpret the multiple component descriptors, wherein the one solution is selected according to a user role of a user who is utilizing the IDE. The multiple component descriptors may be combined in the pre-drop assembly area by dragging the multiple component descriptors individually and sequentially to the pre-drop assembly area.

    摘要翻译: 提出了一种用于在IDE中组装对象的方法,装置和计算机可读介质。 该方法包括在集成开发环境(IDE)中创建预放置组装区域的步骤; 在所述预放置组装区域中组合多个组件描述符,其中所述多个组件描述符通过包含多个可扩展解决方案的可扩展语言机制来解释; 并且在组合的多个组件描述符已经满足预定义条件的确定时,将组合的多个组件描述符提交到执行。 在一个实施例中,仅使用来自多个可扩展解决方案的一个解决方案来解释多个组件描述符,其中根据正在使用IDE的用户的用户角色选择一个解决方案。 多个组件描述符可以通过将多个组件描述符单独地和顺序地拖动到预放置组装区域而组合在预放置组装区域中。

    Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate
    93.
    发明申请
    Cleaning method used in removing contaminants from a solid yttrium oxide-containing substrate 有权
    用于从含固体含氧化钇的底物中除去污染物的清洁方法

    公开(公告)号:US20070151581A1

    公开(公告)日:2007-07-05

    申请号:US11592905

    申请日:2006-11-03

    IPC分类号: B08B3/00

    摘要: Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm3, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.

    摘要翻译: 本文公开了一种用于处理室的气体分配组件中的气体分配板,其中气体分配板由可能还包括氧化铝的固体含氧化钇衬底制成。 气体分配板包括通常为月牙形的多个通孔。 通过超声波钻孔在固体含氧化钇基质中形成的通孔特别好。 固体含氧化钇的基材通常包含至少99.9%的氧化钇,并且具有至少4.92g / cm 3的密度,约0.02%或更低的吸水率和平均颗粒 尺寸在约10um至约25um的范围内。 本文还公开了用于制造和清洁含氧化钇气体分配板的方法。

    Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
    97.
    发明申请
    Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate 有权
    由固体含氧化钇基底制成的气体分配板

    公开(公告)号:US20050056218A1

    公开(公告)日:2005-03-17

    申请号:US10918232

    申请日:2004-08-13

    IPC分类号: C23C16/44 C23C28/00 C23C16/00

    摘要: Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate-typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm3, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.

    摘要翻译: 本文公开了一种用于处理室的气体分配组件中的气体分配板,其中气体分配板由可能还包括氧化铝的固体含氧化钇衬底制成。 气体分配板包括通常为月牙形的多个通孔。 通过超声波钻孔在固体含氧化钇基质中形成的通孔特别好。 含固体氧化钇的基材通常包含至少99.9%的氧化钇,其密度为至少4.92g / cm 3,吸水率为约0.02%或更低,平均晶粒尺寸为 约10毫米至约25毫米。 本文还公开了用于制造和清洁含氧化钇气体分配板的方法。

    Wavy and roughened dome in plasma processing reactor
    98.
    发明授权
    Wavy and roughened dome in plasma processing reactor 失效
    等离子体处理反应堆中波浪和粗糙圆顶

    公开(公告)号:US06623595B1

    公开(公告)日:2003-09-23

    申请号:US09536478

    申请日:2000-03-27

    IPC分类号: C23F100

    摘要: A ceramic dome for in a plasma processing chamber having an RF coil disposed outside of said dome. The interior of the dome is formed with macroscopic grooves, and the grooves are roughened into a microscopic structure. The roughening provides increased adhesion to a residue film deposited on the dome during plasma processing. The macroscopic grooves increase the effective area of the dome and thus decreases the thickness of deposited film. The grooves may be formed by machining a green form of the ceramic material cast prior to sintering. The roughening may be formed by bead blasting the machined green form. Thereafter, the green form is fired to form a sintered ceramic dome.

    摘要翻译: 一种用于等离子体处理室的陶瓷圆顶,其具有设置在所述圆顶外侧的RF线圈。 圆顶的内部形成有宏观的凹槽,并且凹槽被粗糙化成微观结构。 在等离子体处理过程中,粗糙化对沉积在穹顶上的残留膜提供增加的粘合力。 宏观沟槽增加了圆顶的有效面积,从而减小了沉积膜的厚度。 凹槽可以通过在烧结之前加工铸造的陶瓷材料的绿色形成。 粗糙化可以通过喷砂加工的绿色形式来形成。 此后,烧成绿色形状以形成烧结的陶瓷圆顶。

    Power management via coordination and selective operation of timer-related tasks
    99.
    发明授权
    Power management via coordination and selective operation of timer-related tasks 有权
    通过协调定时器相关任务的选择性操作进行电源管理

    公开(公告)号:US08898487B2

    公开(公告)日:2014-11-25

    申请号:US13057738

    申请日:2010-12-27

    摘要: Mobile computing device power consumption can be reduced by using expiration window timers, state-based timers and/or the coordination of keep-alive timers. Upon detecting a trigger event causing a mobile computing device to transition from a low-power state to an active state, the device can determine whether the trigger event occurs within the expiration window of a timer, and execute tasks associated with the trigger event and the timer. Tasks associated with state-based timers can be executed if the mobile computing device or a component thereof is in (or, alternatively, not in) a specified state. A mobile computing device can execute tasks associated with multiple keep-alive timers used for maintaining communication links between the device and cloud-based service providers in a single active state. A cloud-based keep-alive service can maintain mobile computing device-service provider communication links by sending one keep-alive communication to a mobile computing device in place of multiple communications.

    摘要翻译: 通过使用到期窗口定时器,基于状态的定时器和/或保持活动定时器的协调,可以减少移动计算设备的功耗。 当检测到触发事件导致移动计算设备从低功率状态转换到活动状态时,设备可以确定触发事件是否在定时器的到期窗口内发生,并且执行与触发事件相关联的任务以及 定时器 如果移动计算设备或其组件处于(或替代地,不在)指定状态,则可以执行与基于状态的定时器相关联的任务。 移动计算设备可以执行与用于在单个活动状态中在设备和基于云的服务提供商之间维护通信链路的多个保持活动定时器相关联的任务。 基于云的保持活动服务可以通过向移动计算设备发送一个保持活动的通信来代替多个通信来维护移动计算设备 - 服务提供商的通信链路。

    Magazine assembly for nailer
    100.
    发明授权
    Magazine assembly for nailer 有权
    钉枪杂志组装

    公开(公告)号:US08690036B2

    公开(公告)日:2014-04-08

    申请号:US13213397

    申请日:2011-08-19

    IPC分类号: B25C1/00

    CPC分类号: B25C1/188 B25C1/06

    摘要: A cordless nailer is provided having a magazine assembly with improved features. An improved latch mechanism for clearing nail jams is provided that reduces wear on the latch. A driver retention feature is provided to retain a drive blade from accidentally escaping the nailer. A pusher assembly is provided having a simplified and efficient construction. A pusher retention feature is provided that prevents the driver blade from impacting a nail pusher. A nail retention feature is provided to allow easy loading and unloading of nails into the nailer. Finally, a method of assembling the magazine assembly is provided.

    摘要翻译: 提供了一种具有改进特征的盒组件的无绳钉枪。 提供了用于清除卡子的改进的闩锁机构,其减少了闩锁上的磨损。 提供驱动器保持特征以保持驱动器叶片不小心脱离钉枪。 提供具有简化且有效结构的推动器组件。 提供了推动器保持特征,其防止驱动器叶片撞击钉子推动器。 提供指甲保持功能,以便容易地将指甲装载和卸载到钉枪中。 最后,提供了一种组装盒组件的方法。