摘要:
Embodiments of the invention provide a robust bonding material suitable for joining semiconductor processing chamber components. Other embodiments provide semiconductor processing chamber components joined using a bonding material having metal filler disposed in an adhesive layer. Other embodiments include methods for manufacturing a semiconductor processing chamber component having a bonding material that includes metal filled disposed in an adhesive layer. The metal filler is suitable for reacting with halogen containing plasmas such that a halogen based metal layer is formed on the exposed portion of the bonding material upon exposure to the plasma.
摘要:
A method, apparatus and computer-readable medium for assembling objects in an IDE is presented. The method includes the steps of creating a pre-drop assembly area in an Integrated Development Environment (IDE); combining multiple component descriptors in the pre-drop assembly area, wherein the multiple component descriptors are interpreted through an extensible language mechanism that contains a plurality of extensible solutions; and upon a determination that combined multiple component descriptors have met a pre-defined condition, committing the combined multiple component descriptors to execution. In one embodiment, only one solution from the plurality of extensible solutions is used to interpret the multiple component descriptors, wherein the one solution is selected according to a user role of a user who is utilizing the IDE. The multiple component descriptors may be combined in the pre-drop assembly area by dragging the multiple component descriptors individually and sequentially to the pre-drop assembly area.
摘要:
Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm3, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.
摘要翻译:本文公开了一种用于处理室的气体分配组件中的气体分配板,其中气体分配板由可能还包括氧化铝的固体含氧化钇衬底制成。 气体分配板包括通常为月牙形的多个通孔。 通过超声波钻孔在固体含氧化钇基质中形成的通孔特别好。 固体含氧化钇的基材通常包含至少99.9%的氧化钇,并且具有至少4.92g / cm 3的密度,约0.02%或更低的吸水率和平均颗粒 尺寸在约10um至约25um的范围内。 本文还公开了用于制造和清洁含氧化钇气体分配板的方法。
摘要:
A metal cutting drill bit has a shank portion, a flute portion defining a helix angle and a tip. The tip has a primary cutting edge extending to an outer periphery of the drill bit. The primary cutting edge has a rake face defining a rake angle. The rake angle is different from the helix angle at the tip of the drill bit.
摘要:
A contact trip assembly for a power nailer, wherein a contact member includes a curved portion that loops rearwardly towards a handle of the nailer. Also provided is an adjustment assembly including an adjustment plate and a pinion gear, a trigger that is slidably engageable within a housing of the tool, a trigger lock including a ring element, an anti-discharge mechanism including a stop member, and a contact trip lock.
摘要:
A system (18) for controlling a safety system (44) of an automotive vehicle (10) includes a longitudinal acceleration sensor (36), a vehicle speed sensor (20), a lateral acceleration sensor (32), a yaw rate sensor, and a controller (26). The controller (26) determines a reference pitch in response to the longitudinal acceleration signal and the vehicle speed signal and a reference roll angle in response to the yaw rate signal, the wheel speed signal and the lateral acceleration signal. The controller (26) determines a roll stability index and a pitch stability index. The controller (26) determines an adjusted pitch angle in response to the reference pitch angle and the pitch stability index and an adjusted roll angle in response to the reference roll angle and the roll stability index. The controller (26) controls the safety system (44) in response to the adjusted roll angle and the adjusted pitch angle.
摘要:
Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate-typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm3, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 μm to about 25 μm. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.
摘要翻译:本文公开了一种用于处理室的气体分配组件中的气体分配板,其中气体分配板由可能还包括氧化铝的固体含氧化钇衬底制成。 气体分配板包括通常为月牙形的多个通孔。 通过超声波钻孔在固体含氧化钇基质中形成的通孔特别好。 含固体氧化钇的基材通常包含至少99.9%的氧化钇,其密度为至少4.92g / cm 3,吸水率为约0.02%或更低,平均晶粒尺寸为 约10毫米至约25毫米。 本文还公开了用于制造和清洁含氧化钇气体分配板的方法。
摘要:
A ceramic dome for in a plasma processing chamber having an RF coil disposed outside of said dome. The interior of the dome is formed with macroscopic grooves, and the grooves are roughened into a microscopic structure. The roughening provides increased adhesion to a residue film deposited on the dome during plasma processing. The macroscopic grooves increase the effective area of the dome and thus decreases the thickness of deposited film. The grooves may be formed by machining a green form of the ceramic material cast prior to sintering. The roughening may be formed by bead blasting the machined green form. Thereafter, the green form is fired to form a sintered ceramic dome.
摘要:
Mobile computing device power consumption can be reduced by using expiration window timers, state-based timers and/or the coordination of keep-alive timers. Upon detecting a trigger event causing a mobile computing device to transition from a low-power state to an active state, the device can determine whether the trigger event occurs within the expiration window of a timer, and execute tasks associated with the trigger event and the timer. Tasks associated with state-based timers can be executed if the mobile computing device or a component thereof is in (or, alternatively, not in) a specified state. A mobile computing device can execute tasks associated with multiple keep-alive timers used for maintaining communication links between the device and cloud-based service providers in a single active state. A cloud-based keep-alive service can maintain mobile computing device-service provider communication links by sending one keep-alive communication to a mobile computing device in place of multiple communications.
摘要:
A cordless nailer is provided having a magazine assembly with improved features. An improved latch mechanism for clearing nail jams is provided that reduces wear on the latch. A driver retention feature is provided to retain a drive blade from accidentally escaping the nailer. A pusher assembly is provided having a simplified and efficient construction. A pusher retention feature is provided that prevents the driver blade from impacting a nail pusher. A nail retention feature is provided to allow easy loading and unloading of nails into the nailer. Finally, a method of assembling the magazine assembly is provided.