Electric braking apparatus
    91.
    发明申请
    Electric braking apparatus 审中-公开
    电动制动装置

    公开(公告)号:US20050145448A1

    公开(公告)日:2005-07-07

    申请号:US11070101

    申请日:2005-03-01

    摘要: One of brake pads 5 is pressed against the disc rotor D by a piston of a caliper 3 which is floatably supported on the carrier 2, and in reaction thereto, the other brake pad 5 is pressed against the disc rotor D by a claw portion 14 on the caliper 3, thereby producing a braking force. During brake release, the spring force of a return spring 22 separates the brake pad 5 from the disc rotor D. A positioning convex portion 27 is provided on the carrier 2 in a standing position adjacent to the return spring 22, and serves to restrict the sideward movement of the distal end portion of the return spring 22. Thus displacement and deformation of the return spring can be prevented, and its functions can be maintained.

    摘要翻译: 刹车片5中的一个通过可移动地支撑在载体2上的卡钳3的活塞压在盘形转子D上,并且与此相反,另一个制动片5通过爪部14压靠在盘形转子D上 在制动钳3上,从而产生制动力。 在制动器释放期间,复位弹簧22的弹簧力将制动衬块5与盘形转子D分开。定位凸部27以与复位弹簧22相邻的立位设置在托架2上,用于限制 因此能够防止复位弹簧的位移和变形,能够维持其功能。

    Polymers, chemical amplification resist compositions and patterning process
    95.
    发明授权
    Polymers, chemical amplification resist compositions and patterning process 有权
    聚合物,化学放大抗蚀剂组合物和图案化工艺

    公开(公告)号:US06730451B2

    公开(公告)日:2004-05-04

    申请号:US09735521

    申请日:2000-12-14

    IPC分类号: G03F7038

    摘要: Polymers comprising recurring units of an acrylic derivative of fluorinated backbone represented by formula (1) are novel. R1, R2 and R3 are independently H, F, C1-20 alkyl or fluorinated C1-20 alkyl, at least one of R1, R2 and R3 contains fluorine, and R4 is an acid labile group. Using such polymers, resist compositions featuring low absorption of F2 excimer laser light are obtained.

    摘要翻译: 包含由式(1)表示的氟化主链的丙烯酸衍生物的重复单元的聚合物是新颖的.R 1,R 2和R 3独立地是H,F,C 1-20烷基或氟化C 1-20烷基 ,R 1,R 2和R 3中的至少一个含有氟,R 4是酸不稳定基团。 使用这种聚合物,获得具有F2准分子激光的低吸收性的抗蚀剂组合物。

    Onium salts, photoacid generators, resist compositions, and patterning process
    97.
    发明授权
    Onium salts, photoacid generators, resist compositions, and patterning process 有权
    鎓盐,光酸产生剂,抗蚀剂组合物和图案化方法

    公开(公告)号:US06692893B2

    公开(公告)日:2004-02-17

    申请号:US09983155

    申请日:2001-10-23

    IPC分类号: G03C173

    摘要: Onium salts of arylsulfonyloxynaphthalenesulfonate anions with iodonium or sulfonium cations are novel. A chemically amplified resist composition comprising the onium salt as a photoacid generator is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution, improved focal latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris after coating, development and peeling, and improved pattern profile after development.

    摘要翻译: 芳基磺酰氧基萘磺酸盐与碘鎓或锍阳离子的鎓盐是新颖的。 包含作为光致酸发生剂的鎓盐的化学放大抗蚀剂组合物特别适用于微细加工,特别是通过深紫外光刻技术,因为许多优点,包括改进的分辨率,改善的焦点纬度,最小化的线宽变化或甚至在长期PED下的形状退化 涂层,显影和剥离后的碎屑,以及显影后改进的图案轮廓。

    Chemical amplification, positive resist compositions
    98.
    发明授权
    Chemical amplification, positive resist compositions 有权
    化学放大,正光刻胶组合物

    公开(公告)号:US06682869B2

    公开(公告)日:2004-01-27

    申请号:US09799052

    申请日:2001-03-06

    IPC分类号: G03F7004

    摘要: A chemical amplification, positive resist composition is provided comprising (A) a photoacid generator and (B) a resin which changes its solubility in an alkali developer under the action of acid and has substituents of the formula: Ph—(CH2)nOCH(CH2CH3)— wherein Ph is phenyl and n=1 or 2. The composition has many advantages including improved focal latitude, improved resolution, minimized line width variation or shape degradation even on long-term PED, minimized defect left after coating, development and stripping, and improved pattern profile after development and is suited for microfabrication by any lithography, especially deep UV lithography.

    摘要翻译: 提供化学放大正性抗蚀剂组合物,其包含(A)光酸产生剂和(B)在酸的作用下改变其在碱显影剂中的溶解度并具有下式的取代基的树脂:Ph-(CH 2)n OCH(CH 2 CH 3 ) - 其中Ph是苯基并且n = 1或2.组合物具有许多优点,包括改进的焦点纬度,改进的分辨率,最小化的线宽变化或形状退化,即使在长期PED上,涂覆后剩余的最小化缺陷,显影和剥离, 并且在显影后改进的图案轮廓,并且适用于通过任何光刻,特别是深UV光刻的微细加工。