摘要:
An apparatus for manufacturing a semiconductor device includes an out-heater including a heater element formed in an annular shape with a disconnected portion at one place, a first electrode component connected to a first heater electrode part of the heater element, a second electrode component connected to a second heater electrode part of the heater element, and a base including a first groove in which the first electrode component is fixedly disposed, and a second groove in which the second electrode component is movably disposed and a groove width in a circumferential direction of the heater element is formed such that a width of a second gap formed between a side of the second electrode component and an inner wall of the groove is wider than a width of a first gap formed between a side of the first electrode component and an inner wall of the first groove.
摘要:
A vapor phase deposition apparatus includes: a chamber, a supply unit configured to supply a raw gas into the chamber, a support table disposed in the chamber and configured to support a substrate in the chamber, a rotatable bladed wheel configured to have a plurality of blades, to be arranged to surround the support table, and to discharge the raw gas from above the substrate, and a exhaust unit configured to exhaust the raw gas discharged by the bladed wheel after a vapor phase deposition reaction from the chamber.
摘要:
A light-emitting element which at least includes a monomolecular layer including a luminescent center material with a fluorescent light-emitting property, and a monomolecular layer including a host material with a carrier (electron or hole)-transport property and a band gap larger than a band gap (note that a band gap refers to the energy difference between a HOMO level and a LUMO level) of the luminescent center material, between a pair of electrodes, in which the monomolecular layer including the host material and the monomolecular layer including the luminescent center material share the same interface, is provided.
摘要:
It is an object of the present invention to provide a film-forming apparatus and a film-forming method that can prolong the lifetime of heaters used under high temperature conditions in an epitaxial growth technique. An inert gas discharge portion supplies an inert gas into the space containing the heater, gas is then discharged through the gas discharge portion without influence on the semiconductor substrate during film formation. It is therefore possible to prevent the reaction gas entering into the space containing the high-temperature heaters. This makes it possible to prevent a reaction between hydrogen gas contained in the reaction gas and SiC constituting the heaters. Therefore, it is possible to prevent carbon used as a base material of the heaters from being exposed due to the decomposition of SiC and then reacting with hydrogen gas. This makes it possible to prolong the lifetime of the heaters.
摘要:
A process for producing (meth)acrylic acid of the present invention comprises the steps in the following order: a crystallization step of supplying a cooling medium cooled by a heat source device to a crystallizer to obtain a (meth)acrylic acid crystal from a crude (meth)acrylic acid solution; an adjustment step of returning the cooling medium discharged from the crystallizer to the crystallizer without cooling; a sweating step of supplying a heating medium to the crystallizer to partially melt the (meth)acrylic acid crystal, thereby obtaining a melted liquid, and discharging the melted liquid from the crystallizer; and a melting step of supplying the heating medium to the crystallizer to melt the (meth)acrylic acid crystal, thereby obtaining purified (meth)acrylic acid. According to the present invention, purified (meth)acrylic acid with high purity can be obtained.
摘要:
A torque distributing apparatus 8 comprises a differential gear unit 14, a planetary gear set 31 arranged between first and second output shafts 12L and 12R, a motor 32 driving the planetary gear set 31, and a speed change gear set 51 compensating a speed change ratio of the planetary gear set 31. The planetary gear set 31 and the speed change gear set 51 are arranged coaxially outward of the first output shaft 12L. The motor 32 is arranged coaxially outward of the planetary gear set 31 and the speed change gear set 51.
摘要:
It is an object of the present invention to provide a differential apparatus for a vehicle obtaining efficiently differential restricting force necessary and enough for a stable running performance and reducing the total cost and the total length of the apparatus.The differential apparatus for the vehicle comprises a differential mechanism having a planet carrier 2A rotated by driving torque from a driving source, an planetary gear 2B rotated for self-rotation around own axis by receiving rotational force of the planet carrier 2A, and a sun gear 2C and an internal gear 2D differentially distributing the rotational force to a pair of output shafts by receiving the rotational force of the planet carrier 2A from the planetary gear 2B, and a differential restricting mechanism 2 having an inner clutch plates 3A and an outer clutch plates 3B restricting a differential of the differential mechanism 3. The planet carrier 2A is disposed between the sun gear 2C and the internal gear 2D, and the sun gear 2C and the internal gear 2D are respectively connected each other in a state to be able to transmit torque through the inner clutch plates 3A and the outer clutch plates 3B.
摘要:
This portable electromagnetic induction heating device is used to carry an induction current in a conductor, make the conductor generate heat by Joule's heat, and heat adhesive by the heat generating conductor. A heating induction coil (13a) is formed by a plurality of coil bodies (21-24 and 51-54), the respective coil bodies can change mutually center-to-center distances. Simultaneously, by changing any one of polarities thereof, a polarity and a position of a magnetic force line generated by the conductor are changed, whereby a heating state of the adhesive can be changed depending on a region of the adhesive.
摘要:
There is provided an engine control unit to ensure operational performance and safety performance of a vehicle by carrying out switchover of combustion according to an operating condition of a vehicle (automobile). A vehicle peripheral condition such as vehicular gap, etc., a traveling geographical state, a condition that ensures vehicle stability, etc. are acquired, and switchover of combustion, for example, switchover between compression ignition combustion and spark ignition combustion is effected correspondingly.
摘要:
An electromagnetic clutch includes a first magnetic member with a large-diameter cylindrical portion made of a magnetic metal and a second magnetic member with a small-diameter cylindrical portion made of a magnetic metal and contained in the large-diameter cylindrical portion are joined to an annular member of a non-magnetic material interposed between the large and small-diameter cylindrical portions to constitute a magnetic path forming member. The outer and inner circumferential edges of the annular member are welded to the large-diameter cylindrical portion and the small-diameter cylindrical portion, with the front end surface of the annular member receding a second predetermined distance (L2) from the front end surfaces of the large and small-diameter cylindrical portions. Then, the front end surfaces of the large and small-diameter cylindrical portions are cut until the receded distance of the front end surface of the annular member becomes a first predetermined distance (L1).