公开(公告)号：US20060001887A1

公开(公告)日：2006-01-05

申请号：US11170936

申请日：2005-06-30

申请人： Eliseo Romolo Ranalli

发明人： Eliseo Romolo Ranalli

IPC分类号： G01B9/02

CPC分类号： G01B9/02027 ,  G01B9/02007 ,  G01B2290/70 ,  G03F7/70775

摘要： In general, in one aspect, the invention features assemblies that include a first polarizing beam splitter positioned in the paths of a pair of initial beams, the polarizing beam splitter being configured to combine the pair of initial beams to form an input beam. The assemblies further include an interferometer positioned to receive the input beam and configured to produce an output beam that includes information about an optical path difference between the paths of two component beams derived from the input beam. A second polarizing beam splitter is positioned in the path of the output beam and configured to split the output beam into a pair of secondary output beams that each include information about the optical path difference between the component beam paths.

摘要翻译： 通常，在一个方面，本发明的特征在于包括位于一对初始光束的路径中的第一偏振分束器的组件，所述偏振分束器被配置为组合所述一对初始光束以形成输入光束。 组件还包括定位成接收输入光束并被配置为产生输出光束的干涉仪，该输出光束包括关于从输入光束导出的两个分量光束的路径之间的光程差的信息。 第二偏振分束器位于输出光束的路径中，并且被配置为将输出光束分成一对次级输出光束，每一个副输出光束包括关于分量光束路径之间的光程差的信息。

公开(公告)号：US20050244096A1

公开(公告)日：2005-11-03

申请号：US11048521

申请日：2005-02-01

申请人： Larry Jeffers ,  John Berthold ,  Richard Lopushansky ,  David Needham

发明人： Larry Jeffers ,  John Berthold ,  Richard Lopushansky ,  David Needham

IPC分类号： G01B9/02 ,  G01D5/26 ,  G02B26/00 ,  G02B6/26

CPC分类号： G01B9/02007 ,  G01B9/02027 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/25 ,  G01B2290/45

摘要： A signal conditioner to measure the length of an interferometric gap in a Fabry-Perot sensor (interferometer). The invention includes a light source, a Fabry-Perot interferometer capable of spanning a range of gaps in response to physical changes in the environment, a second interferometer that is placed in series with the Fabry-Perot interferometer which does not filter any particular wavelengths of light but acts as an optical cross-correlator, a detector for converting the correlated light signal into electronic signals, and an electronic processor which controls system elements and generates a signal indicative of the length of the gap spanned by the Fabry-Perot sensor.

摘要翻译： 用于测量法布里 - 珀罗传感器（干涉仪）中干涉间隙长度的信号调节器。 本发明包括光源，法布里 - 珀罗干涉仪，其能够响应于环境中的物理变化而跨越一定范围的间隙;第二干涉仪与法布里 - 珀罗干涉仪串联放置，该干涉仪不过滤任何特定波长的 光，但用作光学互相关器，用于将相关光信号转换为电子信号的检测器，以及控制系统元件并产生指示由法布里 - 珀罗传感器跨越的间隙的长度的信号的电子处理器。

公开(公告)号：US20050237535A1

公开(公告)日：2005-10-27

申请号：US11112332

申请日：2005-04-22

申请人： Leslie Deck

发明人： Leslie Deck

IPC分类号： G01B9/02 ,  G01B11/02 ,  G01B11/24

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/0207 ,  G01B9/02076 ,  G01B9/02078 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B11/2441 ,  G01B2290/70

摘要： Scanning interferometry methods and related systems are described in which scanning interferometry data for a test object is provided. The data typically include intensity values for each of multiple scan positions for each of different spatial locations of the test object. The intensity values for each spatial location typically define an interference signal for the spatial location. The intensity values for a common scan position typically define a data set for that scan position. Scan values are provided for each scan position. In general, scan value increments between various scan values are non-uniform (e.g., different). Information is determined about the test object based on the scanning interferometry data and scan values. Typically, the determination includes transforming at least some of the interference signals into a frequency domain with respect to the scan values.

公开(公告)号：US20050225772A1

公开(公告)日：2005-10-13

申请号：US11154130

申请日：2005-06-15

申请人： Henry Hill

发明人： Henry Hill

IPC分类号： G01B9/02 ,  G02B9/02 ,  G02B11/02 ,  G03F7/20 ,  G05B19/19

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

公开(公告)号：US20050057756A1

公开(公告)日：2005-03-17

申请号：US10823389

申请日：2004-04-13

申请人： Christopher Fang-Yen ,  Gabriel Popescu ,  Changhuei Yang ,  Adam Wax ,  Ramachandra Dasari ,  Michael Feld

发明人： Christopher Fang-Yen ,  Gabriel Popescu ,  Changhuei Yang ,  Adam Wax ,  Ramachandra Dasari ,  Michael Feld

IPC分类号： G01B9/02 ,  G01J9/04 ,  G01N21/45

CPC分类号： G01B9/02091 ,  A61B5/14532 ,  A61B5/1455 ,  A61B5/7232 ,  G01B9/02002 ,  G01B9/02007 ,  G01B9/02011 ,  G01B9/02057 ,  G01B9/02063 ,  G01B9/02067 ,  G01B9/02069 ,  G01B9/02071 ,  G01B9/02072 ,  G01B9/02078 ,  G01B9/02083 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G01J9/04 ,  G01N21/45

摘要： Preferred embodiments of the present invention are directed to systems for phase measurement which address the problem of phase noise using combinations of a number of strategies including, but not limited to, common-path interferometry, phase referencing, active stabilization and differential measurement. Embodiment are directed to optical devices for imaging small biological objects with light. These embodiments can be applied to the fields of, for example, cellular physiology and neuroscience. These preferred embodiments are based on principles of phase measurements and imaging technologies. The scientific motivation for using phase measurements and imaging technologies is derived from, for example, cellular biology at the sub-micron level which can include, without limitation, imaging origins of dysplasia, cellular communication, neuronal transmission and implementation of the genetic code. The structure and dynamics of sub-cellular constituents cannot be currently studied in their native state using the existing methods and technologies including, for example, x-ray and neutron scattering. In contrast, light based techniques with nanometer resolution enable the cellular machinery to be studied in its native state. Thus, preferred embodiments of the present invention include systems based on principles of interferometry and/or phase measurements and are used to study cellular physiology. These systems include principles of low coherence interferometry (LCI) using optical interferometers to measure phase, or light scattering spectroscopy (LSS) wherein interference within the cellular components themselves is used, or in the alternative the principles of LCI and LSS can be combined to result in systems of the present invention.

摘要翻译： 本发明的优选实施例涉及用于相位测量的系统，其使用多种策略的组合来解决相位噪声问题，包括但不限于公共路径干涉测量，相位参考，主动稳定和差分测量。 实施例涉及用于用光成像小生物物体的光学装置。 这些实施方案可以应用于例如细胞生理学和神经科学领域。 这些优选实施例基于相位测量和成像技术的原理。 使用相位测量和成像技术的科学动机源于例如亚微米级别的细胞生物学，其可以包括但不限于成像发育异常起源，细胞通讯，神经元传播和遗传密码的实现。 亚细胞组分的结构和动力学目前不能使用现有的方法和技术（例如x射线和中子散射）在其天然状态下研究。 相比之下，具有纳米分辨率的基于光的技术使得能够以其天然状态研究细胞机械。 因此，本发明的优选实施例包括基于干涉测量和/或相位测量的原理的系统，并且用于研究细胞生理学。 这些系统包括使用光学干涉仪来测量相位的低相干干涉测量（LCI）原理，或使用其中使用细胞部件本身内部的干扰的光散射光谱（LSS），或者替代地，LCI和LSS的原理可以组合以产生 在本发明的系统中。

公开(公告)号：US06856402B2

公开(公告)日：2005-02-15

申请号：US10364666

申请日：2003-02-11

申请人： Henry A. Hill

发明人： Henry A. Hill

IPC分类号： G01B9/02 ,  G03F7/20 ,  H01L21/027

CPC分类号： G03F7/70775 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02019 ,  G01B9/02021 ,  G01B9/02061 ,  G01B9/02068 ,  G01B2290/70

摘要： An interferometry system includes: i) a first polarizing beam splitter which during operation separates an input beam into a measurement beam and a reference beam; ii) a beam steering element positioned to direct the measurement beam, and not the reference beam, the measurement beam contacting the beam steering element; iii) an interferometer positioned to receive at least a portion of the measurement beam and direct it to a measurement object, which reflects it to define a return measurement beam, and wherein the interferometer is further positioned to receive at least a portion of the reference beam and direct it to a reference object, which reflects it to define a return reference beam; and (iv) an electronic control circuit coupled to the beam steering element. During operation the control circuit adjusts the orientation of the beam steering element in response to changes in the angular orientation of the measurement object. The beam steering element is further positioned to direct the return reference beam, and not the return measurement beam, the return reference beam contacting the beam steering element. The first polarizing beam splitter recombines the return reference beam and the return measurement beam to form an output beam.

摘要翻译： 干涉测量系统包括：i）第一偏振分束器，其在操作期间将输入光束分离成测量光束和参考光束; ii）定位成引导测量光束而不是参考光束的光束操纵元件，测量光束接触光束操纵元件; iii）干涉仪，其定位成接收所述测量光束的至少一部分并将其引导到测量对象，所述测量对象反射其以限定返回测量光束，并且其中所述干涉仪还被定位成接收所述参考光束的至少一部分 并将其引导到参考对象，反映其定义返回参考光束; 以及（iv）耦合到所述光束操纵元件的电子控制电路。 在操作期间，控制电路响应于测量对象的角度定向的变化来调整光束操纵元件的取向。 光束操纵元件进一步定位成引导返回参考光束而不是返回测量光束，返回参考光束接触光束操纵元件。 第一偏振分束器将返回参考光束和返回测量光束重新组合以形成输出光束。

公开(公告)号：US20050008322A1

公开(公告)日：2005-01-13

申请号：US10913195

申请日：2004-08-06

申请人： Mark Sullivan ,  Carol Courville ,  Paul Zorabedian ,  Kerry Bagwell ,  David Kittell

发明人： Mark Sullivan ,  Carol Courville ,  Paul Zorabedian ,  Kerry Bagwell ,  David Kittell

IPC分类号： G01B9/02 ,  G02B26/08 ,  G02B27/28 ,  G02F2/02 ,  G02B6/00

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B2290/45 ,  G01B2290/70

摘要： A manipulator for a fiber optic cable assembly (FOCA) provides microradian accuracy in control of the direction of a beam emanating from the FOCA. Such manipulators can control FOCAs to control the incidence angles of beams at a beam combiner in a beam-combining unit. Accordingly, fewer additional optical elements are required for control of input paths in the beam-combining unit. The manipulator and the beam-combining unit are accurate enough for use in an interferometer that combines beams with different frequencies and polarizations. One such interferometer includes a Zeeman split laser providing a heterodyne beam. A beam splitter separates frequency components of the beams, and AOMs increase the frequency separation between the separated beams. The separated beams can be sent via optical fibers to the beam-combining unit, which combines the beams for use in interferometer optics.

摘要翻译： 用于光纤电缆组件（FOCA）的操纵器提供微控制精度来控制从FOCA发射的光束的方向。 这样的操纵器可以控制FOCA来控制波束组合单元中的波束组合器处的波束的入射角。 因此，需要更少的附加光学元件来控制光束组合单元中的输入路径。 操纵器和光束组合单元足够准确地用于组合具有不同频率和偏振的光束的干涉仪。 一种这样的干涉仪包括提供外差光束的塞曼分割激光器。 分束器分离光束的频率分量，并且AOM增加分离的光束之间的频率间隔。 分离的光束可以通过光纤发送到光束组合单元，其组合用于干涉仪光学元件的光束。

公开(公告)号：US06842254B2

公开(公告)日：2005-01-11

申请号：US10270647

申请日：2002-10-16

申请人： Richard Van Neste ,  Claude Belleville ,  Daniel Pronovost ,  Alain Proulx

发明人： Richard Van Neste ,  Claude Belleville ,  Daniel Pronovost ,  Alain Proulx

IPC分类号： G01B9/02

CPC分类号： G01B9/02012 ,  G01B9/02007 ,  G01B9/02023 ,  G01B9/02081 ,  G01B9/0209 ,  G01B2290/25 ,  G01B2290/45

摘要： An apparatus and a method of measuring an optical path difference in a sensing interferometer. Light from a source is directed in the sensing interferometer. The light reflected from the sensing interferometer is splitted into first and second beams respectively directed into two reference interferometers having optical path differences greater than the coherence length of the source and such that the optical signals are in quadrature. The intensities of the light transmitted by the reference interferometers and recombined light reflected from the reference interferometers are detected for measuring the optical path difference in the sensing interferometer. Additional light sources allow for correction of internal perturbations and absolute measurement of the optical path difference in the sensing interferometer.

摘要翻译： 一种测量感测干涉仪中的光程差的装置和方法。 来自光源的光被引导到感测干涉仪中。 从感测干涉仪反射的光被分裂成分别引导到具有大于源的相干长度的光程差的两个参考干涉仪中的第一和第二光束，并且使得光信号是正交的。 检测由参考干涉仪透射的光的强度和从参考干涉仪反射的复合光，以测量感测干涉仪中的光程差。 附加的光源允许校正内部扰动和传感干涉仪光程差的绝对测量。

公开(公告)号：US20040239938A1

公开(公告)日：2004-12-02

申请号：US10854426

申请日：2004-05-27

申请人： DUKE UNIVERSITY

发明人： Joseph A. Izatt

IPC分类号： G01B009/02

CPC分类号： G01B9/02007 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02044 ,  G01B9/02079 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/40 ,  G01B2290/45 ,  G01B2290/70

摘要： Optical coherence tomography (OCT) is an imaging method which can image with micrometer-scale resolution up to a few millimeters deep into, for example, living biological tissues and preserved tissue samples. An improved apparatus and image reconstruction algorithm for parallel Fourier Domain OCT which greatly eases requirements for interferometer stability and also allows for more efficient parallel image acquisition is provided. The apparatuses and algorithms reconstruct images from interfered, low-coherence, multiwave length signals having a null radian phase difference relative to one another. Other numbers of signals and other phase differences may be alternatively used, with some combinations resulting in higher resolution and image stability. The apparatus also eliminates a need for bulk optics to modulate a phase delay in a reference arm of the optical path. Images may be reconstructed using two spectrometers, where each is coupled to a detector array such as a photodiode array.

摘要翻译： 光学相干断层扫描（OCT）是一种成像方法，可以将尺寸分辨率高达几毫米的微米尺度分辨率成像到例如活的生物组织和保留的组织样本中。 提供了一种用于并行傅里叶域OCT的改进的装置和图像重建算法，其大大减轻了干涉仪稳定性的要求，并且还提供了更有效的并行图像采集。 这些装置和算法从干涉，低相干，多波长信号重建图像，该信号具有相对于彼此的π弧度相位差。 可以替代地使用其他数量的信号和其它相位差，其中一些组合导致更高的分辨率和图像稳定性。 该装置还消除了对光学路径的参考臂中的相位延迟调制体光学器件的需要。 可以使用两个光谱仪重建图像，其中每个光谱仪耦合到诸如光电二极管阵列的检测器阵列。

公开(公告)号：US20040169837A1

公开(公告)日：2004-09-02

申请号：US10719067

申请日：2003-11-24

申请人： ASML NETHERLANDS B.V.

发明人： Wouter Onno Pril ,  Engelbertus Antonius F. Van De Pasch ,  Robert F. Dillon ,  Philip Dennis Henshaw

IPC分类号： G03B027/52

CPC分类号： G03F7/70958 ,  G01B9/02007 ,  G01B9/02014 ,  G01B9/02027 ,  G01B9/0207 ,  G01B9/02074 ,  G01B2290/45 ,  G01B2290/60 ,  G01B2290/70 ,  G03F7/70775 ,  G03F7/70883

摘要： Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.

摘要翻译： 使用来自二次谐波干涉仪（SHI）的测量，对诸如压力，温度和湍流的大气条件的变化校正干涉测量系统的测量。 在使用SHI数据之前，除去表示SHI数据对路径长度的依赖性的斜坡。 SHI可以包括作为光源的无源Q开关激光器和接收器模块中的布鲁斯特棱镜。 光纤可以用于向检测器传导光。 反映测量光束的反射镜具有选择的厚度的涂层，以使SHI数据对涂层厚度变化的敏感性最小化。