公开(公告)号：US20160109383A1

公开(公告)日：2016-04-21

申请号：US14876192

申请日：2015-10-06

Applicant: GII ACQUISITION, LLC dba GENERAL INSPECTION, LLC

Inventor： Michael G. Nygaard

IPC: G01N21/952

CPC classification number: G01N21/952 ,  B07C5/342 ,  F42B35/00 ,  G01B11/2425 ,  G01B11/2433 ,  G01N21/909 ,  G01N21/9515 ,  G01N2201/02 ,  G01N2201/0621 ,  G01N2201/0638 ,  G01N2201/103 ,  G01N2201/12

Abstract: A method and system for optically inspecting the ends of a manufactured part at a single inspection station having a measurement axis are provided. The system includes a fixture assembly having a rotatable first fixturing component and a rotatable second fixturing component mating with and removably connected to the first fixturing component to transmit torque from the first fixturing component to the second fixturing component. The second fixturing component has a device for holding the part in a generally horizontal orientation and permit rotation of the horizontally held part between first and second angular positions about the measurement axis. The system also includes an actuator assembly, an illumination device, a lens and detector assembly and at least one processor to process electrical signals generated by the lens and detector assembly to determine at least one geometric dimension or any visual defects at the ends of the part.

Abstract translation: 提供了一种用于在具有测量轴的单个检查站上光学地检查制造部件的端部的方法和系统。 该系统包括具有可旋转的第一夹紧部件和可旋转的第二夹紧部件的夹具组件，该可旋转的第二夹紧部件与第一夹持部件配合并可拆卸地连接，以将力矩从第一夹持部件传递到第二夹持部件。 第二固定部件具有用于将部件保持在大致水平取向并允许水平保持部分围绕测量轴线在第一和第二角度位置之间旋转的装置。 该系统还包括致动器组件，照明装置，透镜和检测器组件以及至少一个处理器，用于处理由透镜和检测器组件产生的电信号，以确定部件端部处的至少一个几何尺寸或任何视觉缺陷 。

公开(公告)号：US09285321B2

公开(公告)日：2016-03-15

申请号：US14438255

申请日：2013-11-06

Applicant: Sharp Kabushiki Kaisha

Inventor： Ryohhei Kawamuki

IPC: G11B7/09 ,  G01N21/64 ,  G01N27/447

CPC classification number: G01N21/6486 ,  G01N21/6454 ,  G01N21/6456 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6463 ,  G01N2201/061 ,  G01N2201/10 ,  G01N2201/103 ,  G01N2201/105

Abstract: A fluorescence detection device includes: a light source that emits excitation light in a first direction; a base unit (30) to which the light source is attached; an opening (30a) that is provided on a side in the first direction of the base unit (30) with respect to the light source; a cantilever (31) that is cantilevered to the base unit (30) to extend from an inner edge of the opening (30a) toward a center side of the opening (30a); an optical path conversion unit (20) that is fixed to a free end of the cantilever (31), converts a traveling direction of the excitation light emitted from the light source into a second direction different from the first direction, and irradiates a measurement object with the excitation light turned in the second direction; and a photodetection element that is disposed on a side of the opening (30a) opposite to the measurement object and detects fluorescence passing through the opening (30a) in fluorescence emitted from the measurement object irradiated with the excitation light. Accordingly, a loss in the fluorescence guided to the photodetection element can be reduced, and thus fluorescence detection efficiency can be improved.

Abstract translation: 荧光检测装置包括：在第一方向上发射激发光的光源; 安装光源的基座单元（30）; 相对于所述光源设置在所述基座单元（30）的所述第一方向的一侧的开口（30a） 悬臂（31），其悬臂连接到所述基座单元（30），以从所述开口（30a）的内边缘朝向所述开口（30a）的中心侧延伸; 固定到悬臂（31）的自由端的光路转换单元（20）将从光源发射的激发光的行进方向转换成与第一方向不同的第二方向，并且照射测量对象 激发光在第二个方向转动; 以及光检测元件，其设置在与所述测量对象相对的所述开口（30a）的一侧上，并且检测从所述激发光照射的所述测量对象发出的荧光中穿过所述开口（30a）的荧光。 因此，可以降低引导到光检测元件的荧光的损失，从而可以提高荧光检测效率。

公开(公告)号：US20150292940A1

公开(公告)日：2015-10-15

申请号：US14437871

申请日：2013-08-22

Applicant: SHARP KABUSHIKI KAISHA

Inventor： Yukio Watanabe

IPC: G01J1/04 ,  G01N21/64

CPC classification number: G01J1/0411 ,  G01J1/0422 ,  G01J1/0488 ,  G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/10 ,  G01N2201/103 ,  G02B17/08 ,  G02B19/0028

Abstract: A photodetection apparatus includes an objective lens element (17) that collects light from a measurement object (16) and a photodetection element that detects the light collected by the objective lens element (17). The objective lens element (17) includes a center portion (28) that collects the light through refraction and a peripheral portion (29) located around the center portion (28) that collects the light through reflection. Thus, light at a large emission angle which may not be collected in a normal convex lens can also be collected, and thus collecting efficiency can be improved and the sensitivity of the photodetection element can be increased.

Abstract translation: 光检测装置包括收集来自测量对象（16）的光的物镜元件（17）和检测由物镜元件（17）收集的光的光检测元件。 物镜元件（17）包括通过折射收集光的中心部分（28）和围绕通过反射收集光的中心部分（28）周围的周边部分（29）。 因此，也可以收集在正常的凸透镜中未被收集的大的发射角的光，从而可以提高收集效率，并且可以提高光检测元件的灵敏度。

公开(公告)号：US09046499B2

公开(公告)日：2015-06-02

申请号：US13929030

申请日：2013-06-27

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Shigeru Matsui

IPC: G01N21/00 ,  G01N21/95

CPC classification number: G01N21/9501 ,  G01N2201/103

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot. With this control, the inspection time can be shortened while the deterioration in the detection sensitivity and the increase in the thermal damage during the surface inspection are suppressed.

Abstract translation: 表面检查装置将作为辅助扫描的半导体晶片100作为主扫描旋转半导体晶片100（检查对象），用照明光21照射半导体晶片100的表面，从而形成照明点3作为照明 照射光21的区域，检测来自照明光点的散射或衍射或反射的光，并且基于以下方式检测存在于半导体晶片100的表面上的异物或半导体晶片100的表面附近的异物 检测结果。 在表面检查装置中，根据从主扫描中的半导体晶片100的旋转中心到照明点的距离来控制辅助扫描的平移速度。 通过该控制，可以在检测灵敏度的劣化和表面检查时的热损伤的增加被抑制的同时缩短检查时间。

公开(公告)号：US20140162268A1

公开(公告)日：2014-06-12

申请号：US14178442

申请日：2014-02-12

Applicant: OLYMPUS CORPORATION

Inventor： Tetsuya Tanabe ,  Mitsushiro Yamaguchi

IPC: G01N21/64

CPC classification number: G01N21/64 ,  G01N15/14 ,  G01N15/1429 ,  G01N15/1434 ,  G01N21/51 ,  G01N21/6408 ,  G01N21/645 ,  G01N21/6452 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/103 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/008

Abstract: In the scanning molecule counting method detecting light of a light-emitting particle in a sample solution using a confocal or multiphoton microscope, there is provided an optical analysis technique enabling the scanning in a sample solution with moving a light detection region in a broader area or along a longer route while making the possibility of detecting the same light-emitting particle as different particles as low as possible and remaining the size or shape of the light detection region unchanged as far as possible. In the inventive optical analysis technique, there are performed detecting light from the light detection region and generating time series light intensity data during moving the light detection region along the second route whose position is moved along the first route, and thereby, the signal indicating light from each light-emitting particle in a predetermined route is individually detected using the time series light intensity data.

Abstract translation: 在使用共聚焦或多光子显微镜检测样品溶液中的发光粒子的光的扫描分子计数方法中，提供了一种光学分析技术，其能够在较宽区域中移动光检测区域的样品溶液中进行扫描，或 沿着较长的路线，同时尽可能地检测与不同粒子相同的发光粒子的可能性，并尽可能地保持光检测区域的尺寸或形状不变。 在本发明的光学分析技术中，在沿着沿第一路线移动位置的第二路径移动光检测区域的同时，进行来自光检测区域的检测光并产生时间序列光强度数据，由此，指示光 使用时间序列光强度数据分别检测来自预定路线中的每个发光粒子。

公开(公告)号：US20130050689A1

公开(公告)日：2013-02-28

申请号：US13565702

申请日：2012-08-02

Applicant: Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

Inventor： Juergen Reich ,  Charles Amsden ,  Jiayao Zhang ,  Christian Wolters

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/555 ,  G01N2021/8835 ,  G01N2021/8845 ,  G01N2201/103 ,  H01L22/12

Abstract: The illumination power density of a multi-spot inspection system is adjusted in response to detecting a large particle in the inspection path of an array of primary illumination spots. At least one low power, secondary illumination spot is located in the inspection path of an array of relatively high power primary illumination spots. Light scattered from the secondary illumination spot is collected and imaged onto one or more detectors without overheating the particle and damaging the wafer. Various embodiments and methods are presented to distinguish light scattered from secondary illumination spots. In response to determining the presence of a large particle in the inspection path of a primary illumination spot, a command is transmitted to an illumination power density attenuator to reduce the illumination power density of the primary illumination spot to a safe level before the primary illumination spot reaches the large particle.

Abstract translation: 响应于检测主照明点阵列的检查路径中的大颗粒，调整多点检查系统的照明功率密度。 至少一个低功率次级照明点位于相对较高功率的初级照明点的阵列的检查路径中。 从二次照明点散射的光被收集并成像到一个或多个检测器上，而不会使颗粒过热并损坏晶片。 呈现各种实施例和方法来区分从二次照明点散射的光。 响应于确定主照明点的检查路径中的大颗粒的存在，将命令发送到照明功率密度衰减器，以将主照明点的照明功率密度降低到初级照明点之前的安全水平 到达大颗粒。

公开(公告)号：US20120073972A1

公开(公告)日：2012-03-29

申请号：US13123518

申请日：2009-10-09

Applicant: Fraser McNeil Watson

Inventor： Fraser McNeil Watson

IPC: G01N27/447 ,  G01N15/02 ,  G01N21/00

CPC classification number: G01N21/253 ,  B01L3/5025 ,  B01L2300/0829 ,  B01L2400/0421 ,  G01N21/03 ,  G01N21/51 ,  G01N27/44721 ,  G01N2015/1493 ,  G01N2021/0346 ,  G01N2021/4707 ,  G01N2021/513 ,  G01N2201/103 ,  G01N2201/105

Abstract: A high-throughput optical suspension characterization instrument is disclosed, which can include hydraulically separate and at least partially transparent sample containers. A selection mechanism is operative to selectively direct light from a light source (12) through different ones of the sample containers along an optical axis, and an off-axis scattering detector (38,24) is responsive to scattered light from the light source after it has interacted with a sample. Phase analysis light scattering is used to determine the electrophoretic mobility and zeta potential of samples. A second instrument is disclosed, wherein all sample containers are illuminated simultaneously. Transmitted light is collected by a camera. The electrophoretic mobility and hydrodynamic size of the samples may be determined.

Abstract translation: 公开了一种高通量光学悬浮表征仪器，其可以包括液压分离和至少部分透明的样品容器。 选择机构可操作以沿着光轴选择性地将来自光源（12）的光引导通过不同的样本容器，并且离轴散射检测器（38,24）响应于来自光源的散射光， 它已经与样本进行了互动。 相位分析光散射用于确定样品的电泳迁移率和ζ电位。 公开了第二种仪器，其中所有的样品容器都是同时照射的。 透射光被照相机收集。 可以确定样品的电泳迁移率和流体动力学尺寸。

公开(公告)号：US20120044505A1

公开(公告)日：2012-02-23

申请号：US13202681

申请日：2010-01-22

Applicant: Shigeru Matsui

Inventor： Shigeru Matsui

IPC: G01B11/24

CPC classification number: G01N21/9501 ,  G01N2201/103

Abstract: A surface inspecting apparatus rotates a semiconductor wafer 100 (inspection object) as a main scan while translating the semiconductor wafer 100 as an auxiliary scan, illuminates the surface of the semiconductor wafer 100 with illuminating light 21, thereby forms an illumination spot 3 as the illumination area of the illuminating light 21, detects scattered or diffracted or reflected light from the illumination spot, and detects a foreign object existing on the surface of the semiconductor wafer 100 or in a part of the semiconductor wafer 100 in the vicinity of the surface based on the result of the detection. In the surface inspecting apparatus, the translation speed of the auxiliary scan is controlled according to the distance from the rotation center of the semiconductor wafer 100 in the main scan to the illumination spot. With this control, the inspection time can be shortened while the deterioration in the detection sensitivity and the increase in the thermal damage during the surface inspection are suppressed.

Abstract translation: 表面检查装置将作为辅助扫描的半导体晶片100作为主扫描旋转半导体晶片100（检查对象），用照明光21照射半导体晶片100的表面，从而形成照明点3作为照明 照射光21的区域，检测来自照明光点的散射或衍射或反射的光，并且基于以下方式检测存在于半导体晶片100的表面上的异物或半导体晶片100的表面附近的异物 检测结果。 在表面检查装置中，根据从主扫描中的半导体晶片100的旋转中心到照明点的距离来控制辅助扫描的平移速度。 通过该控制，可以在检测灵敏度的劣化和表面检查时的热损伤的增加被抑制的同时缩短检查时间。

公开(公告)号：US20110267600A1

公开(公告)日：2011-11-03

申请号：US13142554

申请日：2009-12-16

Applicant: Toshihiko Ouchi ,  Shintaro Kasai

Inventor： Toshihiko Ouchi ,  Shintaro Kasai

IPC: G01N21/35 ,  G01B11/28

CPC classification number: G01N21/3581 ,  G01N21/3563 ,  G01N21/8806 ,  G01N21/9505 ,  G01N2201/103

Abstract: In an examining apparatus or method, values of thickness and characteristic of an object, or distributions thereof can be simultaneously acquired. The examining apparatus includes a portion 9 for irradiating an object 2 with radiation, a portion 10 for detecting the radiation from the object, an acquiring portion 26, a storing portion 21 and a calculating portion 20. The acquiring portion acquires transmission time associated with detection time of radiation, and amplitude of the radiation. The storing portion beforehand stores relationship data between the transmission time and amplitude, and representative values of characteristic of the object. The calculating portion obtains values of thickness and characteristic of the object based on the transmission time, amplitude and relationship data.

Abstract translation: 在检查装置或方法中，可以同时获取对象的厚度和特征值或其分布。 检查装置包括用于对物体2照射辐射的部分9，用于检测来自物体的辐射的部分10，获取部分26，存储部分21和计算部分20.获取部分获取与检测相关的传输时间 辐射时间和辐射幅度。 存储部预先存储发送时间和振幅之间的关系数据以及对象的特征的代表值。 计算部分根据传输时间，幅度和关系数据，获得对象的厚度和特征值。

公开(公告)号：US20100123088A1

公开(公告)日：2010-05-20

申请号：US12692758

申请日：2010-01-25

Applicant: Petri KIVELÄ

Inventor： Petri KIVELÄ

IPC: G01J1/58

CPC classification number: G01N21/253 ,  G01N21/13 ,  G01N21/6428 ,  G01N21/6452 ,  G01N21/76 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2021/6471 ,  G01N2021/6482 ,  G01N2021/6484 ,  G01N2201/0446 ,  G01N2201/0453 ,  G01N2201/0826 ,  G01N2201/103

Abstract: The present invention relates generally to the field of biochemical laboratory instrumentation for different applications of measuring properties of samples on e.g. microtitration plates and corresponding sample supports. The object of the invention is achieved by providing an optical measurement instrumentation wherein a sample (281-285) is activated (212AS, 218AS) and the emission is detected (291, 292), wherein between the activation and detection phases of measuring the sample, a shift is made in the relative position between the sample and means (218) directing the activation radiation to the sample as well as in the relative position between the sample and the means (293) receiving the emission radiation from the sample. This can be implemented e.g. by moving (299) the sample assay plate and/or a measuring head between the activation and emission phases of a sample. The invention allows a simultaneous activation of a first sample and detecting emission from a second sample thus enhancing efficiency of the measurement.

Abstract translation: 本发明一般涉及生物化学实验室仪器领域，用于不同应用样品的测量性质。 微量滴定板和相应的样品支架。 本发明的目的是通过提供一种光学测量仪器实现的，其中样品（281-285）被激活（212AS，218AS）并且检测到发射（291,292），其中在测量样品的激活和检测阶段之间 在样品和将激活辐射指向样品的装置（218）之间的相对位置以及样品和接收来自样品的发射辐射的装置（293）之间的相对位置进行位移。 这可以被实现。 通过在样品的活化和发射阶段之间移动（299）样品测定板和/或测量头。 本发明允许同时激活第一样品并检测来自第二样品的发射，从而提高测量的效率。