Low inductance laser diode arrays, laser diode array assemblies, and fabrication thereof
    91.
    发明授权
    Low inductance laser diode arrays, laser diode array assemblies, and fabrication thereof 失效
    低电感激光二极管阵列,激光二极管阵列组件及其制造

    公开(公告)号:US06757309B1

    公开(公告)日:2004-06-29

    申请号:US10291956

    申请日:2002-11-07

    IPC分类号: H01S304

    CPC分类号: H01S5/4031 H01S5/0425

    摘要: A laser diode array, having one or a plurality of electrically mounted laser diode bars, in which current paths through the array are sufficiently parallel and close together to result in a substantial reduction of inductance. As a result, higher duty cycles at lower pulse widths are possible. In some embodiments, a heatsink is provided as part of an overall assembly. The heatsink may provide part or all of a return portion of the current path for the array. Alternatively, the heatsink may be insulated from the rest of the array. The array itself may be fabricated in any of a number of known manners.

    摘要翻译: 具有一个或多个电安装的激光二极管条的激光二极管阵列,其中通过阵列的电流路径足够平行并且靠近在一起以导致电感的显着减小。 因此,较低脉冲宽度下的较高占空比是可能的。 在一些实施例中,提供散热器作为整体组件的一部分。 散热器可以提供阵列的当前路径的部分或全部返回部分。 或者,散热器可以与阵列的其余部分绝缘。 阵列本身可以以许多已知方式中的任何一种制造。

    Laser diode arrays with replaceable laser diode bars and methods of removing and replacing laser diode bars

    公开(公告)号:US06724792B2

    公开(公告)日:2004-04-20

    申请号:US10242055

    申请日:2002-09-12

    申请人: Robert Rex Rice

    发明人: Robert Rex Rice

    IPC分类号: H01S304

    摘要: The laser diode arrays with removable linear laser diode bars and the methods of removing and replacing linear laser diode bars of the present invention provide easy and immediate removal of individual linear laser diode bars in laser diode arrays. The laser diode array is at least partially made of a plurality of removable linear laser diode bars and a plurality of spacers, such that each removable linear laser diode bar is disposed between a respective pair of spacers. A linear laser diode bar may be slideably removed from between the respective pair of spacers in the laser diode array without breaking any mechanical connection between the removable linear laser diode bar and the respective pair of spacers. A replacement linear laser diode bar may then be slideably inserted between the respective pair of spacers without forming a mechanical connection between the replacement linear laser diode bar and the spacers.

    Laser facet phase control
    94.
    发明授权
    Laser facet phase control 有权
    激光刻面相位控制

    公开(公告)号:US06724790B1

    公开(公告)日:2004-04-20

    申请号:US10335775

    申请日:2002-12-31

    IPC分类号: H01S304

    摘要: A tunable external cavity laser apparatus and method of laser operation. The apparatus includes a gain medium having first and second facets defining a facet laser cavity in which a first portion of light is internally reflected to produce a first lasing condition having a first reflection phase. A reflective element is positioned opposite the second facet of the gain medium, forming an external laser cavity defined by the first facet and reflective element. A second portion of light is internally reflected within the external cavity to produce a second lasing condition having a second reflection phase. A phase adjustment means is employed to adjust the first reflection phase relative to the second reflection phase so as to control a characteristic of the output beam emitted from the apparatus, such as the power output level of the beam. In one aspect, the relative phase is adjusted by controlling the temperature of the gain medium.

    摘要翻译: 一种可调谐外腔激光装置及其激光手术方法。 该装置包括增益介质,该增益介质具有限定小平面激光腔的第一和第二面,其中第一部分光在内部被反射以产生具有第一反射相位的第一激光状态。 反射元件与增益介质的第二面相对设置,形成由第一面和反射元件限定的外部激光腔。 第二部分光在外部空腔内部反射以产生具有第二反射相位的第二激光条件。 使用相位调整装置来相对于第二反射相位调节第一反射相位,以便控制从装置发射的输出光束的特性,例如光束的功率输出电平。 在一个方面,通过控制增益介质的温度来调整相对相位。

    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
    95.
    发明授权
    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube 有权
    准分子激光振荡装置和方法,准分子激光曝光装置和激光管

    公开(公告)号:US06690702B1

    公开(公告)日:2004-02-10

    申请号:US09528183

    申请日:2000-03-17

    IPC分类号: H01S304

    摘要: In an excimer laser oscillation apparatus including a laser chamber (20) constituted by a laser tube (2) for storing a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, He and F2 gas, and an optical resonator consisting of a pair of reflection mirrors (5, 6) arranged to sandwich the laser chamber (20) therebetween, the inner surface of the laser chamber (20) for storing the laser gas has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, and a means (waveguide 1) for introducing a microwave for exciting the laser gas in the laser chamber (20) is prepared. With this arrangement, an excimer laser oscillation apparatus, an oscillation method, and an exposure apparatus can be provided, which can reduce the load on the lens material and its surface, can simplify the mirror or laser scanning control system, and are satisfactorily used in mass production since the service life of an excimer laser can be sufficiently prolonged.

    摘要翻译: 在包括由激光管(2)构成的激光室(20)的准分子激光振荡装置中,所述激光管(2)用于存储含有选自Kr,Ar和Ne的至少一种惰性气体的气体混合物的激光气体,He 和F2气体,以及由设置成将激光室(20)夹在其间的一对反射镜(5,6)构成的光谐振器,用于存储激光气体的激光室(20)的内表面具有反射 - 相对于248nm,193nm或157nm的所需波长的光的自由表面,并且内表面的最上表面由氟化物组成,并且用于引入微波激励激光气体的装置(波导1) 在激光室(20)中。 通过这种布置,可以提供准分子激光振荡装置,振荡方法和曝光装置,其可以减少透镜材料及其表面上的负载,可以简化镜子或激光扫描控制系统,并且令人满意地使用 由于准分子激光器的使用寿命可以充分延长,因此大量生产。

    High powered laser
    96.
    发明授权
    High powered laser 有权
    大功率激光

    公开(公告)号:US06687271B2

    公开(公告)日:2004-02-03

    申请号:US10157852

    申请日:2002-05-31

    IPC分类号: H01S304

    摘要: High powered laser including a microchip laser array having an array of microchip laser beam shooting parts, and a heat transfer member of a material with a high thermal conductivity fitted between, and in contact with, the microchip laser beam shooting parts, for transferring heat from the microchip laser beam shooting parts to the outside of the high powered laser, thereby enhancing an output.

    摘要翻译: 包括具有微芯片激光束拍摄部件阵列的微芯片激光器阵列的高功率激光器以及与微芯片激光束拍摄部件接合并与之接触的具有高热导率的材料的传热部件,用于将热量从 微芯片激光束拍摄部件到高功率激光器的外部,从而增强输出。

    Gas laser with cooled coaxial electrode tubes

    公开(公告)号:US06650680B2

    公开(公告)日:2003-11-18

    申请号:US09960542

    申请日:2001-09-21

    申请人: Thomas Zeller

    发明人: Thomas Zeller

    IPC分类号: H01S304

    摘要: A laser has at least two coaxial electrode tubes spaced apart to provide a laser cavity therebetween and a cooling system including cooling coils about the outer surface of the outer electrode and about the inner surface of the inner electrode and in heat exchange contact therewith. Support pipes are provided about the outside of the outside cooling coil and about the inside surface of the inner cooling coil. The cooling coils are deformed into improved heat exchange contact with the electrode tubes by internal pressure and may be softened by annealing or the like before the application of the deformation pressure.

    Barrier layer and method of making the same
    100.
    发明授权
    Barrier layer and method of making the same 有权
    阻隔层和制作方法

    公开(公告)号:US06590913B1

    公开(公告)日:2003-07-08

    申请号:US09312435

    申请日:1999-05-14

    IPC分类号: H01S304

    摘要: A barrier layer is formed within a microfabricated device, such as a semiconductor laser assembly. The barrier layer is used to separate bonding material from an underlying layer that is located beneath the barrier layer. The barrier layer includes at least three thin layers that have alternating levels of electronegativity. Therefore, a significant amount of intermetallics are formed between the thin layers, thereby creating strong bonds between the thin layers at relatively low temperatures. It is difficult for the bonding material to break the strong bonds of the thin layers, and the bonding material is, therefore, prevented from penetrating the barrier layer and reacting with the underlying layer.

    摘要翻译: 在微制造装置(例如半导体激光器组件)内形成阻挡层。 阻挡层用于将粘合材料与位于阻挡层下方的下层分离。 阻挡层包括具有交替电负性水平的至少三个薄层。 因此,在薄层之间形成大量的金属间化合物,从而在相对较低的温度下在薄层之间形成强结合。 接合材料难以破坏薄层的强键,因此阻止接合材料穿透阻挡层并与下层反应。