摘要:
A processing gas constituted of C5F8, O2 and Ar achieving a flow rate ratio of 1≦C5F8 flow rate/O2 flow rate≦1.625 is supplied into a processing chamber 102 of an etching apparatus 100 and the atmosphere pressure is set within a range of 45 mTorr˜50 mTorr. High-frequency power is applied to a lower electrode 110 sustained within a temperature range of 20° C.˜40° C. on which a wafer W is mounted to raise the processing gas to plasma, and using the plasma, a contact hole 210 is formed at an SiO2 film 208 on an SiNx film 206 formed at the wafer W. The use of C5F8 and O2 makes it possible to form a contact hole 210 achieving near-perfect verticality at the SiO2 film 208 and also improves the selection ratio of the SiO2 film 208 relative to the SiNx film 206. C5F8, which becomes decomposed over a short period of time when released into the atmosphere, does not induce the greenhouse effect.
摘要:
Disclosed herein is an optical switch including: a dielectric substrate having a pair of main surfaces opposed to each other; and a pair of electrodes formed on the main surfaces of the dielectric substrate; wherein a direction of emergence of a light beam propagating in the dielectric substrate is controlled according to an electric field applied from the electrodes to the dielectric substrate; the dielectric substrate being formed with a periodic structure of polarization inverted domains each having a given shape; the light beam being incident on domain walls of the polarization inverted domains; the electrode formed on at least one of the main surfaces being separated into at least first and second electrodes in a direction of propagation of the light beam.
摘要:
There is provided an insertion and withdrawal connector apparatus in which a plurality of connectors can move only in a range of capable of engaging and separating with and from a plurality of mating connectors within a connector receiving body. A connector receiving body (1) has a pair of parallel frames (3), a pair of frame blocks (4) positioned at both end portions, and a plurality of partition members (5). One connector (10) and one mating connector are received in each of a plurality of space portions, that is, receiving chambers partitioned by a pair of frames, a pair of frame blocks, and a plurality of partition members. Each of the partition members has a pair of lances (5f, 5g) having a spring characteristic and each of the connectors has a pair of interlocking groove portions (10g) on both side surfaces. The lance (5f) interlocks with the interlocking groove portion on one of the side surfaces in the connector, and the lance (5g) interlocks with the interlocking groove portion on the other of the side surfaces in the connector. Each of the connectors has a convex portion (10d) at an upper end portion on one of the side surfaces and at a lower end portion on the other of the side surfaces, and each of the convex portions interlocks with each of the partition members.
摘要:
A method for producing oxidation-treated carbon black, which comprises oxidizing carbon black by ozone in the presence of water until the total amount of acid groups of the carbon black becomes at least 3 .mu.equ/m.sup.2.
摘要:
A watertight equipment cover for outdoor or marine use that includes an interior and exterior surface, with the interior surface configured to fit substantially adjacent to and to completely enclose a piece of equipment such as photographic equipment or portable electronic equipment. The cover includes transparent portions that allow, as required for operation, either the equipment to transmit or receive light, or the operator to view specific areas of the equipment while the equipment is enclosed in the cover. The cover further includes resiliently deformable portions that enable operation of the equipment control functions while the equipment is enclosed in the cover. The cover further includes a watertight sealing mechanism that is sealable and resealable by the end user. An outdoor or marine protective cover system that includes a watertight cover and a piece of equipment.
摘要:
An anti-stress agent for animals for reducing the growth inhibition or mortality of animals and a method of reducing stress using a feed composition having blended therein the anti-stress agent. The anti-stress agent for animals comprises one or more substances selected from L-ascorbic acid-2-phosphoric acid, a salt thereof and an L-ascorbic acid-2-glucoside, as an active ingredient, for inhibiting the increase of blood plasma lactate dehydrogenase (LDH), malate dehydrogenase (MDH) and aspartate aminotransferase (AspAT) and for inhibiting the increase of stress proteins in blood, which occur when animals are placed under stress. Also disclosed is a feed composition comprising the anti-stress agent, and a method of reducing the stress of animals by supplying the same as feed.
摘要:
A television signal processor selectively processing each television signal transmitted by a plurality of different television systems and displaying the processed television signal using any of multiple displays having different synchronizing frequencies and aspect ratios. The television signal processor includes a signal processing device for decoding a received signal in accordance with the system generating the received television signal, and a control mechanism for processing a television signal from the signal processing device in accordance with specification data corresponding to a display for displaying the television signal.
摘要:
A recording liquid comprising an aqueous medium and at least one dye selected from dyes, free acid forms of which are represented by formulae (I) and (II): ##STR1## The symbols in formulae (I) and (II) are defined in the specification.
摘要:
A lighting apparatus is comprised of an illumination unit arranged so as to project from a light apparatus body by a predetermined distance, a spring for spring-biasing the illumination unit in the direction in which the illumination unit is projected from the light apparatus body, a power switch for the illumination unit which is switched in accordance with a movement of the illumination unit, an engaging portion for engaging the illumination unit at the position close to the light apparatus body, and a releasing portion for releasing the engaging portion, wherein the lighting apparatus can be energized only when the illumination unit is projected from the lighting apparatus body. Also, an electrode apparatus attached to power source equipments such as a battery pack or the like is comprised of an electrode cover for shielding an electrode portion, wherein the electrode cover can be opened by a projected electrode portion of the equipments to which the power source equipment is attached.
摘要:
A carbon micro-sensor electrode is disclosed which is prepared by impregnating, adsorbing or chemically modifying a pure composite carbon wire having many micropores extending to its surface and interior with a reactant such as an enzyme, a metal complex compound, an organic compound or a metabolite; and a method for preparing this carbon micro-sensor electrode is also disclosed.The above-mentioned electrode can be used for a long period of time, since the reactant is received in the many micropores. Furthermore, after used, the electrode may be cut off to expose a new electrode surface, and this new electrode surface may be coated with a material which does not impede an electrode reaction, whereby the reactant can be prevented from flowing out. Thus, the carbon micro-sensor electrode of the present invention can be repeatedly utilized.