Plasma process apparatus including ground electrode with protection film
    102.
    发明授权
    Plasma process apparatus including ground electrode with protection film 失效
    等离子体处理装置,包括具有保护膜的接地电极

    公开(公告)号:US5432315A

    公开(公告)日:1995-07-11

    申请号:US203035

    申请日:1994-02-28

    IPC分类号: H01J37/32 H05H1/46 B23K10/00

    摘要: A microwave plasma processing apparatus includes a vacuum chamber which is evacuated to a predetermined pressure and into which processing gas is introduced, a sample table, disposed in the vacuum chamber, to which an AC voltage is applied, a microwave generating device for generating microwaves and introducing the microwaves towards a surface to be processed of a sample located on the sample table, a magnetic field generating device for generating a magnetic field in the vacuum chamber, an insulator disposed on a part of the vacuum chamber exposed to a plasma produced in the vacuum chamber by interaction of the processing gas, the microwaves, and the magnetic field, and a ground electrode disposed in the vacuum chamber at a place which is on a microwave introduction side of the vacuum chamber with respect to the surface of the sample table on which the sample is placed, a surface of the ground electrode being covered by a semiconducting thin film.

    摘要翻译: 微波等离子体处理装置包括真空室,其被抽真空至预定压力并被加入到处理气体中,设置在施加有交流电压的真空室中的样品台,用于产生微波的微波产生装置, 将微波引导到位于样品台上的样品的待处理表面,用于在真空室中产生磁场的磁场产生装置,设置在暴露于等离子体中产生的等离子体的真空室的一部分上的绝缘体 通过处理气体,微波和磁场的相互作用的真空室和设置在真空室中相对于样品台的表面在微波引入侧的位置处的真空室中的接地电极 样品被放置,接地电极的表面被半导体薄膜覆盖。

    Power-on-reset circuit
    103.
    发明授权
    Power-on-reset circuit 失效
    上电复位电路

    公开(公告)号:US5300822A

    公开(公告)日:1994-04-05

    申请号:US997191

    申请日:1992-12-28

    IPC分类号: H03K17/22 G05F3/26

    CPC分类号: H03K17/223

    摘要: A power-on-reset circuit includes a plurality of MOS transistors and a first depletion type N-channel MOS transistor connected in series to an input terminal of a current mirror circuit. A capacitor is connected between the input terminal and a voltage supply terminal. A second depletion type N-channel MOS transistor having a low current driving capacity is connected to an output terminal of the current mirror circuit. The degree of integration can be increased by constituting an integrating circuit with depletion type N-channel MOS transistors in place of a resistor. In addition, the voltage supply voltage is compared to the sum of the threshold voltage of the plurality of MOS transistors. This makes it possible to initialize the internal circuit positively even if the rise time of the voltage supply voltage becomes larger than the time constant of the integrating circuit.

    摘要翻译: 上电复位电路包括与电流镜电路的输入端串联连接的多个MOS晶体管和第一耗尽型N沟道MOS晶体管。 电容器连接在输入端子和电源端子之间。 具有低电流驱动能力的第二耗尽型N沟道MOS晶体管连接到电流镜电路的输出端。 可以通过构成具有耗尽型N沟道MOS晶体管的积分电路代替电阻来增加积分度。 此外,将电源电压与多个MOS晶体管的阈值电压之和进行比较。 这使得即使电源电压的上升时间变得大于积分电路的时间常数,也能够正确地初始化内部电路。

    Process for etching
    104.
    发明授权
    Process for etching 失效
    蚀刻工艺

    公开(公告)号:US5110408A

    公开(公告)日:1992-05-05

    申请号:US658254

    申请日:1991-02-20

    摘要: The present invention relates to the etching of a gate film, a tungsten film, a silicon film, etc. In the present invention, use is made of an etching gas comprising a mixture composed of a reductive fluoride gas, a hydrocarbon gas and a halogen gas having a larger atomic diameter than a material to be etched, or a mixture composed of a reductive fluoride gas and a Cl-containing hydrocarbon gas, and the process comprises the step of conducting anisotropic etching of a material to be etched with an etching gas (a reductive fluoride gas), the step of forming a protective film by a depositing gas (a hydrocarbon gas), and the step of removing excess deposits formed as the protective film by means of a gas reactive with the protective film (a halogen gas or a Cl-containing hydrogen gas), wherein anisotropic etching is conducted by forming a protective film on a side wall while removing excess deposits formed as the protective film, thus enabling the anisotropic etching to be conducted with good accuracy.

    摘要翻译: 本发明涉及栅极膜,钨膜,硅膜等的蚀刻。在本发明中,使用包括由还原氟化物气体,烃气体和卤素组成的混合物的蚀刻气体 具有比待蚀刻材料更大的原子直径的气体或由还原性氟化物气体和含Cl的烃气体组成的混合物,该方法包括用蚀刻气体进行各向异性腐蚀蚀刻的步骤 (还原氟化物气体),通过沉积气体(烃气体)形成保护膜的步骤,以及通过与保护膜反应的气体(卤素气体)除去形成为保护膜的多余的沉积物的步骤 或含Cl的氢气),其中通过在侧壁上形成保护膜进行各向异性蚀刻,同时除去形成为保护膜的多余的沉积物,从而能够进行各向异性蚀刻 准确度好

    Method of and apparatus for detecting an end point of plasma treatment
    106.
    发明授权
    Method of and apparatus for detecting an end point of plasma treatment 失效
    用于检测等离子体处理终点的方法和装置

    公开(公告)号:US4615761A

    公开(公告)日:1986-10-07

    申请号:US712032

    申请日:1985-03-15

    摘要: The present invention relates to a method of and apparatus for detecting the end point of plasma treatment. The method includes steps: selecting a plasma spectrum having a characteristic wavelength from the plasma spectrum occurring at the time of the plasma treatment reaction of a specimen; computing a secondary differential value of a function of the quantity of the plasma spectrum selected and the plasma treatment reaction time of the specimen; and detecting the end point of the plasma treatment reaction of the specimen by comparing the secondary differential value computed with preset reference values for judgment. The apparatus comprises a means of selecting plasma spectrum having a particular wavelength from the plasma spectrum occurring at the time of the plasma treatment reaction of the specimen, a means of converting the quantity of the plasma spectrum selected into an analog electric signal, a means of converting the analog electric signal into a value of digital data, a means of counting the plasma treatment reaction time of the specimen, a means of secondarily differentiating a function of the value of digital data and the plasma treatment reaction time, a means of making judgment by comparing the secondary differential value with preset reference values for judgment, and a means of giving an instruction for starting judgment to said means. Thus, accurate detection is achieved regardless of which curve is taken by the change in the reaction time of the quantity of plasma spectrum.

    摘要翻译: 本发明涉及一种用于检测等离子体处理终点的方法和装置。 该方法包括以下步骤:从样品的等离子体处理反应时发生的等离子体光谱中选择具有特征波长的等离子体光谱; 计算所选择的等离子体光谱的量和样品的等离子体处理反应时间的函数的二次微分值; 并通过比较用预先设定的基准值进行判断的二次微分值,来检测试样的等离子体处理反应的终点。 该装置包括从样品的等离子体处理反应时出现的等离子体光谱中选择具有特定波长的等离子体光谱的方法,将所选择的等离子体光谱的量转换为模拟电信号的装置, 将模拟电信号转换为数字数据的值,对样本的等离子体处理反应时间进行计数的方法,二次区分数字数据的值和等离子体处理反应时间的功能的手段,进行判断的手段 通过将二次微分值与用于判断的预设参考值进行比较,以及向所述装置发出开始判断的指令的装置。 因此,无论通过等离子体光谱量的反应时间的变化采取哪个曲线,都能实现准确的检测。

    Disc brake
    107.
    发明授权
    Disc brake 失效
    盘式制动器

    公开(公告)号:US4317508A

    公开(公告)日:1982-03-02

    申请号:US119380

    申请日:1980-02-07

    摘要: A disc brake of ventilated disc rotor type wherein air is positively introduced into the air passages formed in the disc rotor. In the dust cover of this type disc brake an air introducing hole is formed. On the outside of the dust cover an air collector is disposed for positively collecting and introducing the air flowing in the vicinity of the dust cover. On the inside of the dust cover an air guide is disposed for guiding the air taken through the air introducing hole as far as the entrance of the air passages in the disc rotor.

    摘要翻译: 通风盘式转子式盘式制动器,其中空气被积极地引入形成在盘式转子中的空气通道中。 在这种盘式制动器的防尘罩中形成空气导入孔。 在防尘罩的外侧设置集尘器,用于积极地收集和引导在防尘罩附近流动的空气。 在防尘罩的内侧设置有空气引导件,用于引导通过空气导入孔的空气直到盘形转子中的空气通道的入口。

    Sealed type hydraulic reservoir
    108.
    发明授权
    Sealed type hydraulic reservoir 失效
    密封式液压油箱

    公开(公告)号:US4181147A

    公开(公告)日:1980-01-01

    申请号:US848562

    申请日:1977-11-04

    IPC分类号: B60T11/26 B60T17/22 F15B7/10

    摘要: A sealed type hydraulic reservoir including a check valve for normally preventing communication between a sealed chamber in which brake fluid is stored and the surrounding atmospheric environment. The check valve allows atmospheric air to flow into the sealed chamber only when the pressure in the chamber drops below atmospheric level. A second check valve may be included for allowing air flow only out of the sealed chamber when the pressure in the chamber rises above atmospheric level.

    摘要翻译: 一种密封型液压储存器,包括用于正常地防止存储制动流体的密封室与周围大气环境之间的连通的止回阀。 只有当室内的压力下降到低于大气压水平时,止回阀才允许大气空气流入密封室。 可以包括第二止回阀,用于当腔室中的压力升高到高于大气压水平时允许气流仅从密封腔室流出。

    Document reading device and image forming apparatus including same

    公开(公告)号:US09648194B2

    公开(公告)日:2017-05-09

    申请号:US14637890

    申请日:2015-03-04

    IPC分类号: H04N1/04 H04N1/203

    CPC分类号: H04N1/2034

    摘要: A document reading device including an image reader. The image reader includes a first reader to read a first image from a first face of a document fed by a document feeder and a second reader to read a second face of the document. An operation mode is switchable between a normal operation mode in which the image reader is in an operation enabled state and an energy-saving mode in which the image reader is in an operation stop state. In a return from the energy saving mode to the normal operation mode, the image reader performs a start-up operation including a first initial operation for returning the first reader to the normal operation mode and then performs a second initial operation for returning the second reader to the normal operation mode.