METHOD FOR FABRICATING A MULTI-LAYER CAPACITOR AND A MULTI-LAYER CAPACITOR
    101.
    发明申请
    METHOD FOR FABRICATING A MULTI-LAYER CAPACITOR AND A MULTI-LAYER CAPACITOR 有权
    制造多层电容器和多层电容器的方法

    公开(公告)号:US20120140379A1

    公开(公告)日:2012-06-07

    申请号:US13397287

    申请日:2012-02-15

    Abstract: The method comprises fabricating a layer stack on a substrate, the layer stack comprising at least two electrically conducting layers and at least one electrically insulating layer arranged between the two electrically conducting layers, and displacing a first portion of the layer stack away from its original position, the first portion comprising an edge portion of the layer stack, and bending the first portion back towards a second portion of the layer stack. The bending may comprise a rolling-up of the first portion of the layer stack.

    Abstract translation: 该方法包括在衬底上制造层堆叠,该层叠层包括至少两个导电层和布置在两个导电层之间的至少一个电绝缘层,并且使叠层的第一部分远离其原始位置 ,所述第一部分包括所述层堆叠的边缘部分,并且将所述第一部分向所述层堆叠的第二部分弯曲。 弯曲可以包括层叠体的第一部分的卷起。

    Light pressure rotator and light pressure rotating device
    102.
    发明授权
    Light pressure rotator and light pressure rotating device 失效
    轻压转子和轻压旋转装置

    公开(公告)号:US07963691B2

    公开(公告)日:2011-06-21

    申请号:US11632962

    申请日:2005-07-21

    Applicant: Hiroo Ukita

    Inventor: Hiroo Ukita

    Abstract: The light pressure rotator (1) is the light pressure rotator being light pressure trapped by irradiation with light and light pressure rotating about the central axis O of rotation, characterized in that a reverse torque generating section generating a torque for rotating the rotator in the direction reverse to the predetermined direction is removed from a section arranged with three blades (2) each having a first side face (3) extending in the radial direction from the central axis O of rotation, a second side face (4) facing the central axis O of rotation, a third side face (5) facing the first side face (3), a lower surface (6) intersecting the central axis O of the rotation, and an upper surface (7) facing the lower surface (6). The light pressure rotating device comprises the light pressure rotator (1), a light source (C), and an objective (condenser) lens D.

    Abstract translation: 轻压旋转器(1)是轻压力旋转器,其是通过围绕中心轴线O旋转的光和轻压照射而被捕获的轻压力,其特征在于,产生用于使旋转器沿方向旋转的转矩的反转扭矩产生部 从具有从旋转中心轴线O沿径向延伸的第一侧面(3)的三个叶片(2)布置的部分去除与预定方向相反的部分,第二侧面(4)面向中心轴线 旋转的第三侧面(5),与第一侧面(3)相对的第三侧面(5),与旋转的中心轴线O相交的下表面(6)和面向下表面(6)的上表面(7)。 轻压旋转装置包括轻压旋转器(1),光源(C)和物镜(聚光镜)D.

    ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME
    104.
    发明申请
    ELECTROSTATIC DRIVE MEMS ELEMENT AND METHOD OF PRODUCING THE SAME 审中-公开
    静电驱动MEMS元件及其制造方法

    公开(公告)号:US20100213789A1

    公开(公告)日:2010-08-26

    申请号:US12707928

    申请日:2010-02-18

    Inventor: Yasushi IGARASHI

    CPC classification number: H02N1/006 B81B3/0008 B81B2201/038 B81B2203/0118

    Abstract: An electrostatic drive MEMS (Micro Electro Mechanical Systems) element includes a substrate; a fixed electrode disposed on the substrate; a movable electrode arranged to face the fixed electrode in a vertical direction and be movable toward the fixed electrode through an electrostatic force generated between the fixed electrode and the movable electrode; and an insulation film disposed on one of an upper surface of the fixed electrode and a lower surface of the movable electrode and formed of an insulation member containing a conductive fine particle.

    Abstract translation: 静电驱动MEMS(微机电系统)元件包括基板; 设置在所述基板上的固定电极; 可动电极,其设置成在垂直方向上面对固定电极,并且可通过固定电极和可动电极之间产生的静电力朝向固定电极移动; 以及绝缘膜,其设置在所述固定电极的上表面和所述可动电极的下表面之一上,并且由包含导电性微粒的绝缘构件形成。

    MEMS DEVICES AND SYSTEMS ACTUATED BY AN ENERGY FIELD
    105.
    发明申请
    MEMS DEVICES AND SYSTEMS ACTUATED BY AN ENERGY FIELD 失效
    由能源领域实施的MEMS器件和系统

    公开(公告)号:US20100194237A1

    公开(公告)日:2010-08-05

    申请号:US12596091

    申请日:2008-04-17

    CPC classification number: B81B3/0029 B81B2201/038 B81B2203/0118 H01H59/0009

    Abstract: A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS device is configured to actuate the MEMS device through Coulombic interactions by pumping charges to the actuator when subject to an energy field. A method of actuating a MEMS device includes irradiating an actuator of the MEMS device with an energy field thereby building up electrical charges on the actuator, and actuating the MEMS device with Coulomb forces from the built up electrical charges.

    Abstract translation: 微机电系统(MEMS)装置包括具有多个电荷收集元件的致动器。 电荷收集元件中的至少一个被配置为通过与能量场直接相互作用来建立电荷,从而通过库仑相互作用来致动MEMS。 用于MEMS器件的致动器被配置为当经受能量场时将电荷泵送到致动器,通过库仑相互作用来致动MEMS器件。 致动MEMS器件的方法包括用能量场照射MEMS器件的致动器,从而在致动器上建立电荷,并且利用来自建立的电荷的库仑力来致动MEMS器件。

    MULTILAYER COMPOSITE AND A METHOD OF MAKING SUCH
    107.
    发明申请
    MULTILAYER COMPOSITE AND A METHOD OF MAKING SUCH 有权
    多层复合材料及其制造方法

    公开(公告)号:US20090239039A1

    公开(公告)日:2009-09-24

    申请号:US12476780

    申请日:2009-06-02

    Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.

    Abstract translation: 多层复合材料包括至少两种复合材料,每种复合材料具有膜和电子导电层。 层压几种复合材料以提供机械和电能之间的增加的转换,这不仅是由于每层效应的增加,而且由于多层结构本身使多层复合材料更加刚性的事实。 此外,多层结构有助于在较薄的结构部分上施加电场,从而在电极之间需要更少的电位差。

    Multilayer composite and a method of making such
    109.
    发明授权
    Multilayer composite and a method of making such 有权
    多层复合材料及其制造方法

    公开(公告)号:US07548015B2

    公开(公告)日:2009-06-16

    申请号:US11592651

    申请日:2006-11-03

    Abstract: A multilayer composite includes at least two composites, each composite having a film and an electronically conductive layer. Several composites are laminated to provide an increased conversion between mechanical and electrical energies not only due to the multiplication of the effect of each layer, but also due to the fact that the multilayer structure itself renders the multilayer composite more rigid. In addition, the multilayer structure facilitates application of an electrical field over thinner portions of the structure, thereby requiring much less potential difference between electrodes.

    Abstract translation: 多层复合材料包括至少两种复合材料,每种复合材料具有膜和电子导电层。 层压几种复合材料以提供机械和电能之间的增加的转换,这不仅是由于每层效应的增加,而且由于多层结构本身使多层复合材料更加刚性的事实。 此外,多层结构有助于在较薄的结构部分上施加电场,从而在电极之间需要更少的电位差。

    Microfabrication
    110.
    发明申请
    Microfabrication 审中-公开
    微加工

    公开(公告)号:US20080292888A1

    公开(公告)日:2008-11-27

    申请号:US11597281

    申请日:2006-10-20

    Abstract: A method of forming a surface of micrometer dimensions conforming to a desired contour for a MEMS device, the method comprising providing a crystalline silicon substrate with a recess in an upper surface, providing a thinner layer of crystalline silicon over the upper surface of the substrate, fusion bonding the layer to the substrate under vacuum conditions, and applying heat to the layer and applying atmospheric pressure on the layer, such as to plastically deform the diaphragm within the recess to the desired contour. The substrate may form the fixed electrode of an electrostatic MEMS actuator, operating on the zip principle.

    Abstract translation: 一种形成符合MEMS器件的期望轮廓的微米尺寸表面的方法,所述方法包括在上表面提供具有凹陷的晶体硅衬底,在衬底的上表面上提供更薄的晶体硅层, 在真空条件下将层熔合到衬底上,并且将热量施加到层上并在层上施加大气压力,例如使凹部内的隔膜塑性变形到期望的轮廓。 基板可以形成静电MEMS致动器的固定电极,以拉链原理运行。

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