公开(公告)号：US06809316B2

公开(公告)日：2004-10-26

申请号：US10221844

申请日：2003-02-11

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： B01D5944

CPC分类号： H01J49/0031 ,  H01J49/0431 ,  H01J49/165

摘要： Because of a low flow rate of the micro LC/MS, the dead volume or the diameter of a capillary tube must be minimized, and a sample and salt are likely to deposit in the capillary tube, with the result that clogging of the capillary tube and ESI nozzle often occurs. An electrospray ionization mass analysis apparatus and its system of the present invention predicts clogging, permit earlier cleaning or parts replacement, and detect clogging even if it has occurred, thereby suspending measurement and preventing samples from being introduced into an injector, with the result that waste of samples is avoided and effective data is ensured. The aforementioned electrospray ionization mass analysis apparatus directly coupled to the micro LC prevents a micro LC, piping and ESI capillary tube from being clogged, and records an alarm in the data and stops the system whenever clogging has occurred, whereby highly reliable direct coupling with micro LC is ensured. In the aforementioned electrospray ionization mass analysis apparatus and its system, a sample solution from a chromatograph is introduced into a capillary tube, and an electrospray ion source arranged for generating ions under atmospheric pressure generates ions, which are led into a mass spectrometer disposed in a vacuum chamber where the ion is subjected to mass analysis. The current value or strength of the ion having a specified mass in the sample solution is measured, and, when the current value has reduced below a threshold value, an error state is displayed.

公开(公告)号：US06737640B2

公开(公告)日：2004-05-18

申请号：US10221845

申请日：2002-09-16

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： H01J2700

CPC分类号： H01J49/165 ,  G01N27/62 ,  G01N30/7266 ,  Y10T436/24

摘要： The object of the present invention is to provide an electrospray ionization mass analysis apparatus and the method thereof provided with an ESI ion source that can be directly coupled to a micro LC. The present invention provides an electrospray ionization mass analysis apparatus characterized in that a sample solution is led into a capillary tube, and high voltage is applied to the tip of this capillary tube, thereby allowing a spray ion flow of the aforementioned solution to be generated by an electrospray ion source provided therein. The ion flow generated by this ion source is led to an ion storage type spectrometer disposed in an vacuum chamber where it is subjected to mass sweeping, and the swept ion is detected by a detector so that a mass spectrum is obtained. This electrospray ionization mass analysis apparatus is further characterized by comprising a high voltage DC power source for application of the aforementioned high voltage formed by AC voltage superimposed on the DC voltage, and a AC power source. This invention ensures stable and highly sensitive ESI ionization to be performed at a flow rate ranging from several 10 &mgr;L/min to several &mgr;L/min.

摘要翻译： 本发明的目的是提供一种电喷雾离子化质量分析装置及其提供有可直接耦合到微LC的ESI离子源的方法。本发明提供一种电喷雾离子质量分析装置，其特征在于， 溶液被引入毛细管中，并且高压施加到毛细管的尖端，从而允许由其中提供的电喷雾离子源产生上述溶液的喷雾离子流。 由该离子源产生的离子流被导入设置在真空室中的离子存储型光谱仪，在其中进行质量扫描，并且通过检测器检测扫描离子，从而获得质谱。 该电喷雾离子化质量分析装置的特征还在于，包括用于施加由叠加在直流电压上的交流电压形成的上述高电压的高压直流电源和交流电源。本发明确保了稳定且高灵敏度的ESI电离 以几10L / min至几μL/ min的流速进行。

公开(公告)号：US06736755B2

公开(公告)日：2004-05-18

申请号：US10130309

申请日：2002-05-16

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： B60K4120

CPC分类号： F16H61/0021 ,  B60W10/06 ,  B60W10/115 ,  B60W30/18018 ,  F16H59/54 ,  F16H61/0206 ,  F16H61/20 ,  F16H63/50 ,  F16H2061/0477 ,  F16H2200/0047 ,  F16H2200/201 ,  F16H2312/02 ,  F16H2312/14 ,  Y10T477/644 ,  Y10T477/6895

摘要： There are arranged an engine 10 having idle-stop control means and an automatic transmission 20 having as a hydraulic-pressure supply source a main pump 22 driven by the engine 10 to perform speed change control. There are arranged a bypass hydraulic passage 45 for ensuring communication between said main pump 22 and a point immediately before an engagement-pressure supply port of a forward engagement element L/C in the automatic transmission, a switching valve 44 on the bypass hydraulic passage 45 for allowing switching between the communicating state and the non-communicating state, and switching-valve control means for switching the switching valve 44 between the communicating state and the non-communicating state. With this, the main pump is stopped at idle-stop control to supply the hydraulic pressure required for restart, allowing smooth running.

摘要翻译： 具有怠速停止控制装置的发动机10和具有由发动机10驱动的主泵22作为液压供给源的自动变速器20进行变速控制。 设置有用于确保主泵22与紧接在自动变速器中的前进接合元件L / C的接合压力供给口之间的点之间的连通的旁通液压通道45，旁通液压通道45上的切换阀44 用于允许在通信状态和非通信状态之间切换;以及切换阀控制装置，用于在通信状态和非通信状态之间切换切换阀44。 这样，主泵在怠速停止控制下停止供给重新启动所需的液压，允许平稳运行。

公开(公告)号：US06709293B2

公开(公告)日：2004-03-23

申请号：US10213028

申请日：2002-08-06

申请人： Fumikatsu Mori ,  Yoshiaki Kato

发明人： Fumikatsu Mori ,  Yoshiaki Kato

IPC分类号： H01R13648

CPC分类号： H01R12/7023 ,  H01R12/724

摘要： A connector mounted on a printed-circuit board includes a case and a plurality of terminals extending from the case. A base is arranged on a bottom surface of the case. Two metal plates are arranged on the base. Soldering is performed with the two metal plates and the terminals inserted through the printed-circuit board. This facilitates the coupling of the connector to the printed-circuit board. The base and the two metal plates are arranged within an area defined by the case. This decreases the area occupied by the connector on the printed-circuit board.

摘要翻译： 安装在印刷电路板上的连接器包括壳体和从壳体延伸的多个端子。 底座布置在外壳的底面上。 两个金属板布置在基座上。 通过两块金属板和插入印刷电路板的端子进行焊接。 这有助于连接器与印刷电路板的耦合。 基座和两个金属板布置在由壳体限定的区域内。 这减少了印刷电路板上连接器占用的面积。

公开(公告)号：US06580176B2

公开(公告)日：2003-06-17

申请号：US09760640

申请日：2001-01-17

申请人： Shinichi Domae ,  Hiroshi Masuda ,  Yoshiaki Kato ,  Kousaku Yano

发明人： Shinichi Domae ,  Hiroshi Masuda ,  Yoshiaki Kato ,  Kousaku Yano

IPC分类号： H01L2348

CPC分类号： H01L22/34 ,  H01L21/2855 ,  H01L21/28556 ,  H01L21/32051 ,  H01L21/76805 ,  H01L21/76838 ,  H01L21/76843 ,  H01L23/5226 ,  H01L23/53219 ,  H01L2924/0002 ,  H01L2924/00

摘要： A multilayer wiring structure of a semiconductor device having a stacked structure is arranged to restrain reliability degradation due to stress applied to the region of wiring between opposite upper and lower plugs. The rate of overlap of contact surface between upper plug and wiring on contact surface between lower plug and wiring, is small to the extent that no void is generated. The multilayer wiring structure is produced such that no grain boundary is contained in the region of wiring between upper and lower plugs. The difference in thermal expansion coefficient between the material of wiring and the material of upper and lower plugs, is small to the extent that no void is generated.

摘要翻译： 布置具有层叠结构的半导体器件的多层布线结构，以抑制由于施加到相对的上部和下部插塞之间的布线区域的应力的可靠性降低。 上插头与下插头与布线之间的接触面上的布线之间的接触面的重叠速率小，不产生空隙的程度。 制造多层布线结构，使得在上部和下部插塞之间的布线区域中不包含晶界。 布线材料与上，下插头材料之间的热膨胀系数差异小到不产生空隙的程度。

公开(公告)号：US06566652B1

公开(公告)日：2003-05-20

申请号：US09660166

申请日：2000-09-12

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： B01D5944

CPC分类号： H01J49/165 ,  H01J49/045

摘要： In order to provide an atmospheric pressure ionization mass spectrometry apparatus in which the internal chamber of an ion source is not contaminated by ambient air, by automatically providing gas such as nitrogen to the ion source, with a simple means and without demanding a special operation by an operator when the measurement is finished, a sample solution from a liquid chromatograph is nebulized as fine droplets, each having a charge, from a nebulizer probe, and sample ions included therein are expelled into an atmosphere in the atmospheric pressure ion source and transferred to a mass spectrometer in a high vacuum part through a aperture, an intermediate pressure chamber and aperture. The ions are mass-analyzed, are detected by a detector, and mass spectra are provided and processed by a data processing device. When the measurement is finished, the stop valve is closed by a controller and a data processor 19, and the gas is supplied from the gas cylinder 40 to the nebulizer probe 4 through a by-pass pipe arrangement 41. Thereby, the atmospheric pressure ion source 7 is prevented from reaching a negative pressure.

摘要翻译： 为了提供一种大气压电离质谱仪，其中离子源的内室不被环境空气污染，通过以简单的方式自动向离子源提供氮气等，并且不需要专门的操作 操作者在测量完成时，将来自液相色谱仪的样品溶液作为细微液滴喷雾，每个微滴均由雾化器探针带电，其中包含的样品离子被排出到大气压离子源的气氛中并转移到 通过孔的高真空部分的质谱仪，中压室和孔。 离子被质量分析，由检测器检测，质谱由数据处理装置提供和处理。 当测量结束时，通过控制器和数据处理器19关闭截止阀，并且气体通过旁通管装置41从气瓶40供应到雾化器探针4.由此，大气压离子 防止源7达到负压。

公开(公告)号：US06541767B1

公开(公告)日：2003-04-01

申请号：US09417167

申请日：1999-10-12

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： B01D5944

CPC分类号： H01J49/044 ,  Y10T436/24 ,  Y10T436/25

摘要： A solution containing nonvolatile salts is pumped from a pump to an electrospray nebulization probe in the LC/MS interface, and spouted out from a tip of the probe into an atmospheric pressure environment in a form of fine liquid droplets having charges. The sample ions contained in the droplets are deflected by a deflector and enter into a mass analysis portion through an ion sampling aperture to be mass analyzed. On the other hand, the nonvolatile salts travel straight without being affected by the deflector, and collide against and are collected on a wall of a particle collector. The collected salts are precipitated in a form of crystals. The collected salts are washed away by spraying a particle washing solution from the washing nozzle. The above-described structure can provide an atmospheric pressure ionization mass spectrometer which can prevent effects of nonvolatile salts on the mass analysis without deteriorating the vacuum condition of the mass analysis portion by the preventing action.

摘要翻译： 将包含非挥发性盐的溶液从泵泵送到LC / MS界面中的电喷雾雾化探针，并从具有电荷的细液滴的形式从探针的尖端喷出到大气压环境中。 包含在液滴中的样品离子被偏转器偏转并通过离子采样孔进入质量分析部分进行质量分析。 另一方面，非挥发性盐直接行进而不受偏转器的影响，并且碰撞并收集在颗粒收集器的壁上。 收集的盐以晶体的形式沉淀。 通过从洗涤喷嘴喷射颗粒洗涤溶液来洗涤收集的盐。 上述结构可以提供大气压离子化质谱仪，其能够防止非挥发性盐对质量分析的影响，而不会由于防止作用而使质量分析部的真空状态恶化。

公开(公告)号：US06492665B1

公开(公告)日：2002-12-10

申请号：US09714130

申请日：2000-11-17

申请人： Susumu Akamatsu ,  Toshitaka Hibi ,  Takehiko Ueda ,  Tadami Shimizu ,  Yoshiaki Kato ,  Tatsuya Obata ,  Toyoyuki Shimazaki

发明人： Susumu Akamatsu ,  Toshitaka Hibi ,  Takehiko Ueda ,  Tadami Shimizu ,  Yoshiaki Kato ,  Tatsuya Obata ,  Toyoyuki Shimazaki

IPC分类号： H01L31072

CPC分类号： H01L29/665 ,  H01L21/76897 ,  H01L21/823475 ,  H01L29/1045 ,  H01L29/6653 ,  H01L29/66598 ,  H01L29/7833 ,  Y10S257/90

摘要： After a gate insulating film, a gate electrode and an on-gate protective layer have been formed in this order on an Si substrate, lightly-doped source/drain regions are formed in the substrate. First and second sidewalls are formed on the sides of the gate electrode and then heavily-doped source/drain regions are formed by implanting dopant ions using these sidewalls as a mask. After the second sidewall has been selectively removed, pocket implanted regions are formed and an overall protective film is deposited. Thereafter, an interlevel dielectric film is deposited, contact holes are formed to reach the heavily-doped source/drain regions and then plug electrodes are formed. Since the second sidewall has already been removed when the overall protective film is deposited, the gap between adjacent gate electrodes is not completely filled in. Accordingly, it is possible to provide a method for fabricating a semiconductor device contributing to device miniaturization without causing a shortcircuit between the gate electrode and a contact member.

摘要翻译： 在栅极绝缘膜之后，在Si衬底上依次形成栅电极和栅极保护层，在衬底中形成轻掺杂源极/漏极区。 第一和第二侧壁形成在栅电极的侧面上，然后通过使用这些侧壁作为掩模注入掺杂剂离子形成重掺杂的源/漏区。 在第二侧壁被选择性地去除之后，形成袋注入区域并且沉积整个保护膜。 此后，沉积层间电介质膜，形成接触孔以到达重掺杂的源/漏区，然后形成插塞电极。 由于当整个保护膜沉积时第二侧壁已经被去除，所以相邻栅电极之间的间隙没有被完全填充。因此，可以提供一种用于制造半导体器件的方法，该半导体器件有助于器件小型化而不引起短路 在栅电极和接触构件之间。

公开(公告)号：US06462335B1

公开(公告)日：2002-10-08

申请号：US09597939

申请日：2000-06-20

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： B01D5944

CPC分类号： H01J49/04

摘要： A method and a system for monitoring combustion condition are provided for monitoring the state of combustion in a garbage incinerator, an internal combustion engine, or the like. Combustion off-gas produced by combustion is collected and ionized to produce ions which are fed to a mass spectrometer for detecting a signal strength associated with an ion for each mass-to-charge ratio. The degree of unsaturation is calculated for an ion detected by the mass spectrometer from the mass-to-charge ratio of the ion. Then, signal strength values associated with ions having the same degree of unsaturation are accumulated for each degree of unsaturation. The monitoring system can keep track of components in combustion off-gas classified into respective compound groups in real time to monitor an exact combustion condition.

摘要翻译： 提供了一种用于监测燃烧条件的方法和系统，用于监测垃圾焚烧炉，内燃机等中的燃烧状态。 由燃烧产生的燃烧废气被收集并离子化以产生离子，其被馈送到质谱仪，用于检测与每个质荷比的离子相关联的信号强度。 根据离子的质荷比计算由质谱仪检测的离子的不饱和度。 然后，对于每个不饱和度累积与具有相同不饱和度的离子相关联的信号强度值。 监控系统可以实时跟踪分类到各化合物组的燃烧废气中的组分，以监测精确的燃烧条件。

公开(公告)号：US06459081B2

公开(公告)日：2002-10-01

申请号：US09931910

申请日：2001-08-20

申请人： Yoshiaki Kato

发明人： Yoshiaki Kato

IPC分类号： H01J4912

CPC分类号： H01J49/044 ,  Y10T436/24 ,  Y10T436/25

摘要： A solution containing nonvolatile salts is pumped from a pump to an electrospray nebulization probe in the LC/MS interface, and spouted out from a tip of the probe into an atmospheric pressure environment in a form of fine liquid droplets having charges. The sample ions contained in the droplets are deflected by a deflector and enter into a mass analysis portion through an ion sampling aperture to be mass analyzed. On the other hand, the nonvolatile salts travel straight without being affected by the deflector, and collide against and are collected on a wall of a particle collector. The collected salts are precipitated in a form of crystals. The collected salts are washed away by spraying a particle washing solution from the washing nozzle. The above-described structure can provide an atmospheric pressure ionization mass spectrometer which can prevent effects of nonvolatile salts on the mass analysis without deteriorating the vacuum condition of the mass analysis portion by the preventing action.

摘要翻译： 将包含非挥发性盐的溶液从泵泵送到LC / MS界面中的电喷雾雾化探针，并从具有电荷的细液滴的形式从探针的尖端喷出到大气压环境中。 包含在液滴中的样品离子被偏转器偏转并通过离子采样孔进入质量分析部分进行质量分析。 另一方面，非挥发性盐直接行进而不受偏转器的影响，并且碰撞并收集在颗粒收集器的壁上。 收集的盐以晶体的形式沉淀。 通过从洗涤喷嘴喷射颗粒洗涤溶液来洗涤收集的盐。 上述结构可以提供大气压离子化质谱仪，其能够防止非挥发性盐对质量分析的影响，而不会由于防止作用而使质量分析部的真空状态恶化。