公开(公告)号：US08642487B2

公开(公告)日：2014-02-04

申请号：US13471587

申请日：2012-05-15

申请人： Hitoshi Kato ,  Shigehiro Ushikubo ,  Tatsuya Tamura ,  Shigenori Ozaki ,  Takeshi Kumagai ,  Hiroyuki Kikuchi

发明人： Hitoshi Kato ,  Shigehiro Ushikubo ,  Tatsuya Tamura ,  Shigenori Ozaki ,  Takeshi Kumagai ,  Hiroyuki Kikuchi

IPC分类号： H01L21/31

CPC分类号： H01L21/02274 ,  C23C16/345 ,  C23C16/4554 ,  H01J37/321 ,  H01J37/32449 ,  H01J37/32715 ,  H01J37/32733 ,  H01J37/32779 ,  H01L21/02164 ,  H01L21/0228

摘要： A film deposition method including: a step of carrying a substrate into a vacuum chamber, and placing the substrate on a turntable; a step of rotating the turntable; and an adsorption-formation-irradiation step of supplying a first reaction gas to the substrate from a first reaction gas supply part to adsorb the first reaction gas on the substrate; supplying a second reaction gas from a second reaction gas supply part so that the first reaction gas adsorbed on the substrate reacts with the second reaction gas so as to form a reaction product on the substrate; and supplying a hydrogen containing gas to a plasma generation part that is separated from the first reaction gas supply part and the second reaction gas supply part in a circumferential direction of the turntable so as to generate plasma above the turntable and to irradiate the plasma to the reaction product.

摘要翻译： 一种膜沉积方法，包括：将基板搬入真空室，并将基板放置在转台上的步骤; 转动转盘的一步; 以及吸附形成照射步骤，从第一反应气体供给部分向基板供给第一反应气体，以将第一反应气体吸附在基板上; 从第二反应气体供给部供给第二反应气体，使得吸附在基板上的第一反应气体与第二反应气体反应，以在基板上形成反应产物; 并向在第一反应气体供给部和第二反应气体供给部与旋转体的圆周方向分离的等离子体产生部供给含氢气体，以在转台上方产生等离子体，并将等离子体照射到 反应产物。

公开(公告)号：US08613435B2

公开(公告)日：2013-12-24

申请号：US13417584

申请日：2012-03-12

申请人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

发明人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

IPC分类号： B31F1/10

CPC分类号： B65H45/18 ,  B65H2701/13212 ,  B65H2801/27

摘要： A folding line is pressed using both a first and second pressing members of press roller pairs. Further, positions of the first and second pressing members are shifted from each other. When the number of the sheets included in a booklet is a predetermined number or less, the folding line is pressed by only the first pressing member. When the number of the sheets is more than the predetermined number, the folding line is pressed by both the first and second pressing members.

摘要翻译： 使用压辊对的第一和第二按压构件压制折叠线。 此外，第一和第二按压构件的位置彼此偏移。 当包含在小册子中的片材的数量是预定数量或更小时，折叠线仅由第一按压部件按压。 当纸张的数量大于预定数量时，折叠线被第一和第二按压部件都按压。

公开(公告)号：US08459631B2

公开(公告)日：2013-06-11

申请号：US13098059

申请日：2011-04-29

申请人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Hitoshi Kato ,  Tomoharu Sato

发明人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Hitoshi Kato ,  Tomoharu Sato

IPC分类号： B31F1/00

CPC分类号： B42B4/00 ,  B65H2701/13212

摘要： A sheet processing apparatus includes a sheet stacking unit, a binding unit, a folding unit, a conveyance unit, a press unit, a grasping unit, and a control unit. The binding unit performs binding processing on a sheet bundle stacked in the sheet stacking unit. The folding unit folds the sheet bundle that is subjected to binding processing. The conveyance unit conveys the folded sheet bundle. The press unit presses a fold line portion of the conveyed sheet bundle. The grasping unit is separate from the conveyance unit and switches between a first state in which the grasping unit grasps the conveyed sheet bundle to fix the sheet bundle in position and a second state in which the grasping unit does not grasp the conveyed sheet bundle. The control unit shifts the grasping unit to the first state and causes the press unit to press the sheet bundle.

摘要翻译： 片材处理装置包括片材堆垛单元，装订单元，折叠单元，输送单元，按压单元，把持单元和控制单元。 装订单元对堆叠在纸张堆叠单元中的纸张捆进行装订处理。 折叠单元折叠经受装订处理的片材束。 输送单元输送折叠的纸张束。 按压单元按压所输送的薄片束的折线部分。 夹持单元与输送单元分离，并且在第一状态和第二状态之间进行切换，在第一状态下，抓取单元抓住输送的纸张束以将纸张束固定在适当位置，并且第二状态中抓取单元不抓住输送的纸张束。 控制单元将把持单元移动到第一状态，并使按压单元按压片材束。

公开(公告)号：US08403325B2

公开(公告)日：2013-03-26

申请号：US12115491

申请日：2008-05-05

申请人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

发明人： Tsuyoshi Moriyama ,  Hitoshi Kato ,  Yasuo Fukatsu ,  Naoki Ishikawa

IPC分类号： B65H39/10

CPC分类号： B65H39/10 ,  B65H2511/10 ,  B65H2511/30 ,  B65H2511/415 ,  B65H2513/51 ,  B65H2515/20 ,  B65H2801/06 ,  G03G15/50 ,  G03G15/6552 ,  G03G2215/00421 ,  B65H2220/01 ,  B65H2220/11 ,  B65H2220/02

摘要： An image forming apparatus for printing multiple copies of a document, the document having N (where N is an integer) pages, includes an image forming unit configured to print images on a plurality of sheets according to an input print job, a sheet stacking unit configured to stack sheets printed by the image forming unit, and a control unit configured to divide a print job which prints M (where M is an integer) copies of each of the N pages of the document into a plurality of print operations in a case where a group mode in which sheets are stacked into N groups, each group having M copies of a respective page of the document, is set in the print job, wherein each of the plurality of print operations is for printing less than M copies of each of the N pages of the document.

摘要翻译： 一种用于打印文档的多个副本的图像形成装置，具有N（其中N是整数）页的文档包括：图像形成单元，被配置为根据输入的打印作业在多个纸张上打印图像;片材堆叠单元 被配置为堆叠由图像形成单元打印的纸张;以及控制单元，被配置为将在文档的N页中的每一页的M（其中M是整数）M的打印作业分割成多个打印操作 其中将打印纸堆叠成N组的组模式被设置在打印作业中，其中每个组具有文档的相应页面的M个副本，其中多个打印操作中的每一个用于打印少于每个 的N页的文件。

公开(公告)号：US08262073B2

公开(公告)日：2012-09-11

申请号：US13102881

申请日：2011-05-06

申请人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

发明人： Hitoshi Kato ,  Naoki Ishikawa ,  Yasuo Fukatsu ,  Tomoharu Sato

IPC分类号： B31F1/08

CPC分类号： B65H45/18 ,  B65H2511/20 ,  B65H2511/222 ,  B65H2511/224 ,  B65H2801/27 ,  B65H2220/02 ,  B65H2220/01 ,  B65H2220/11

摘要： A sheet processing apparatus includes a pushing member, a drive device, a first conveyance unit, a second conveyance unit provided on a downstream side of the first conveyance unit, a first detection unit, a second detection unit, and a control unit. The drive device moves the pushing member to push a portion of a sheet bundle to fold the sheet bundle. The first conveyance unit uses a roller pair to convey the folded sheet bundle folded. The second conveyance unit conveys the sheet bundle. The first detection unit detects an amount by which the pushing member is moved by the drive device. The second detection unit detects an amount by which the sheet bundle is conveyed by the first conveyance unit. The control unit separates the roller pair based on the amounts detected by the first and second detection units.

摘要翻译： 片材处理装置包括推动构件，驱动装置，第一输送单元，设置在第一输送单元的下游侧的第二输送单元，第一检测单元，第二检测单元和控制单元。 驱动装置移动推动构件以推动片材束的一部分以折叠片材束。 第一传送单元使用辊对来传送折叠的折叠片材束。 第二输送单元输送纸张束。 第一检测单元检测推动构件被驱动装置移动的量。 第二检测单元检测由第一输送单元输送纸张束的量。 控制单元基于由第一和第二检测单元检测到的量来分离辊对。

公开(公告)号：US20120142510A1

公开(公告)日：2012-06-07

申请号：US13300959

申请日：2011-11-21

申请人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Hitoshi Kato ,  Tomoharu Sato

发明人： Naoki Ishikawa ,  Yasuo Fukatsu ,  Hitoshi Kato ,  Tomoharu Sato

IPC分类号： B31F1/00

CPC分类号： B65H45/18 ,  B65H2701/13212 ,  B65H2801/27

摘要： A sheet bundle treatment apparatus may include a folding device, a conveying unit, a flattening device, and a control unit. The folding device performs a folding process on a sheet bundle to produce a folded sheet bundle. The conveying unit conveys the folded sheet bundle. The flattening device performs a flattening process to press a folded portion of the sheet bundle from the folded portion toward a fore edge to flatten the folded portion after the conveyance of the sheet bundle. The control unit causes the sheet bundle to be conveyed at a first velocity when the flattening process is not to be performed, and causes the sheet bundle to be conveyed at a second velocity which is slower than the first velocity when the flattening process is to be performed, thereby stopping the sheet bundle at a position where the flattening process is to be performed.

摘要翻译： 片材捆处理装置可以包括折叠装置，输送单元，平坦化装置和控制单元。 折叠装置对片材捆进行折叠处理以产生折叠的片材束。 输送单元输送折叠的纸张束。 扁平装置进行扁平化处理，以将片材摞的折叠部分从折叠部分朝向前边缘挤压，以便在输送片材束之后使折叠部分平坦化。 当不进行平坦化处理时，控制单元使得片材以第一速度被输送，并且当扁平化处理为第一速度时，使得片材束以比第一速度慢的第二速度被输送 从而将片材束停止在要进行平坦化处理的位置。

公开(公告)号：US20120052693A1

公开(公告)日：2012-03-01

申请号：US13216350

申请日：2011-08-24

申请人： Shigenori OZAKI ,  Hitoshi Kato ,  Takeshi Kumagai

发明人： Shigenori OZAKI ,  Hitoshi Kato ,  Takeshi Kumagai

IPC分类号： H01L21/31 ,  H01L21/318 ,  H01L21/316 ,  B05C11/00 ,  B05C11/10

CPC分类号： C23C16/45548 ,  C23C16/402 ,  C23C16/45536

摘要： When alternately performing a film deposition step where a silicon-containing gas and O3 gas are alternately supplied to a substrate on a susceptor by rotating the susceptor thereby to forma thin film of the reaction product, and an alteration step where the reaction product is altered by irradiating plasma to the substrate, plasma intensity of the plasma is changed during film deposition. Specifically, the plasma intensity is lower when a thickness of the thin film is small (or at an initial stage of the film deposition—alteration step), and is increased as the thin film becomes thicker (or as the number of the film deposition steps is increased). Alternatively, the plasma intensity is higher when the thin film is relatively thin and then reduced.

摘要翻译： 当交替地进行薄膜沉积步骤，其中通过旋转基座将含硅气体和O 3气体交替地供应到基座上的基板，从而形成反应产物的薄膜，以及反应产物被改变的改变步骤 将等离子体照射到基板上，在膜沉积期间等离子体的等离子体强度发生变化。 具体地说，当薄膜的厚度小（或在薄膜沉积 - 改变步骤的初始阶段）时，等离子体强度较低，并且随着薄膜变厚而增加（或者作为薄膜沉积步骤的数量） 增加）。 或者，当薄膜相对较薄然后减小时，等离子体强度较高。

公开(公告)号：US08119988B2

公开(公告)日：2012-02-21

申请号：US12664427

申请日：2008-06-20

申请人： Shigeki Daido ,  Naohisa Oyama ,  Hitoshi Kato ,  Shinji Tsuji ,  Juji Suzuki ,  Takayuki Shibuya ,  Kodo Kawase

发明人： Shigeki Daido ,  Naohisa Oyama ,  Hitoshi Kato ,  Shinji Tsuji ,  Juji Suzuki ,  Takayuki Shibuya ,  Kodo Kawase

IPC分类号： G01J5/02

CPC分类号： B01D46/442 ,  B01D46/0063 ,  B01D46/0086 ,  B01D46/2418 ,  B01D2273/22 ,  B01D2279/30 ,  F01N3/025 ,  F01N9/002 ,  F01N2550/04 ,  F01N2560/05 ,  F01N2560/06 ,  F01N2560/08 ,  F01N2560/12 ,  Y02T10/47

摘要： A filter 2 for collecting PMs, a microwave transmitter 30 for emitting electromagnetic waves whose frequency is dozens of GHz-a few of THz onto the filter 2, a microwave receiver 31 for detecting an intensity of the electromagnetic waves that have transmitted through the filter 2, and a computing means for computing a collection amount of PMs from the intensity that has been detected with the microwave receiver 31 are included. Since it is possible to detect the distribution of the collection amount of PMs with good accuracy, it is possible to carry out a recycling process in a state where the collection amount does not become too much, and thereby it is possible to make a reducing-agent supply amount into exhaust gases minimum at the time of the recycling process.

摘要翻译： 用于收集PM的滤波器2，用于发射频率为几十GHz的电磁波的微波发射器30，几个THz到滤波器2上的微波接收器31，用于检测通过滤波器2的电磁波的强度的微波接收器31 并且包括用于根据已经用微波接收器31检测到的强度来计算PM的收集量的计算装置。 由于可以高精度地检测P​​M的收集量的分布，所以可以在收集量不会变得太多的状态下进行再循环处理，从而可以进行还原 - 在回收过程中，废气中的试剂供应量最小。

公开(公告)号：US08083220B2

公开(公告)日：2011-12-27

申请号：US12569366

申请日：2009-09-29

申请人： Hitoshi Kato ,  Tsuyoshi Moriyama ,  Yasuo Fukatsu ,  Naoki Ishikawa

发明人： Hitoshi Kato ,  Tsuyoshi Moriyama ,  Yasuo Fukatsu ,  Naoki Ishikawa

IPC分类号： B65H39/00

CPC分类号： B65H39/10 ,  B65H29/6609 ,  B65H2301/4213 ,  B65H2511/11 ,  B65H2511/222 ,  B65H2801/06 ,  B65H2801/27 ,  B65H2220/01 ,  B65H2220/02

摘要： A sheet processing apparatus capable of reliably superposing a sheet to be buffered and a following sheet in a manner displaced by an allowable displacement amount, thereby making it possible to suppress generation of misalignment. A sheet discharged from an image forming apparatus is temporarily held back, and a following sheet is superposed on the held-back sheet in a state displaced in a conveying direction. A length in the conveying direction of the sheet to be held back and a length in the conveying direction of a sheet bundle of the superposed sheets are measured. A displacement amount provided between the superposed sheets, computed as a difference between the measured length of the sheet and the measured length of the sheet bundle, is adjusted such that the displacement amount becomes a target displacement amount.

摘要翻译： 一种片材处理设备，其能够以可允许位移量移位的方式可靠地叠加待缓冲的片材和后续片材，从而可以抑制未对准的产生。 从图像形成装置排出的纸张被暂时保持，并且在沿着输送方向移位的状态下，将后续纸张叠置在保持纸上。 测量要被保持的片材的输送方向上的长度和重叠片材的片材束的输送方向上的长度。 作为片材的测定长度与片材束的测定长度之间的差计算出的叠置片材之间的位移量被调整为位移量成为目标位移量。

公开(公告)号：US20110104395A1

公开(公告)日：2011-05-05

申请号：US12912910

申请日：2010-10-27

申请人： Takeshi KUMAGAI ,  Yasushi Takeuchi ,  Hitoshi Kato

发明人： Takeshi KUMAGAI ,  Yasushi Takeuchi ,  Hitoshi Kato

IPC分类号： C23C16/46 ,  C23C16/44 ,  B05D3/00

CPC分类号： C23C16/402 ,  C23C16/4401 ,  C23C16/45551 ,  C23C16/46

摘要： In a film deposition apparatus where bis (tertiary-butylamino) silane (BTBAS) gas is adsorbed on a wafer and then O3 gas is adsorbed on the wafer so that the BTBAS gas is oxidized by the O3 gas thereby depositing a silicon oxide film by rotating a turntable on which the wafer is placed, a laser beam irradiation portion is provided that is capable of irradiating a laser beam to an area spanning from one edge to another edge of a substrate receiving area of the turntable along a direction from an inner side to an outer side of the table.

摘要翻译： 在其中双（叔丁基氨基）硅烷（BTBAS））气体吸附在晶片上，然后O 3气体被吸附在晶片上的成膜装置中，使得BTBAS气体被O 3气体氧化，从而通过旋转沉积氧化硅膜 设置有晶片的转盘，设置有激光束照射部，该激光束照射部能够将激光照射到从转盘的基板接收区域的一边缘到另一边缘的区域，该区域沿着从内侧到 桌子的外侧。