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公开(公告)号：US06975917B2
公开(公告)日：2005-12-13
申请号：US10485575
申请日：2002-08-05
CPC分类号： H01L21/67253 , F27D19/00 , H01L21/67098 , H01L21/67109 , Y10T29/41
摘要： A thermal processing method selects a batch size range including the number of workpieces to be processed from a plurality of batch size ranges including batch size ranges in which reference numbers smaller than the holding capacity of a workpiece holder are maximums. The workpieces are distributed in the workpiece holder on the basis of the workpiece distribution pattern determined corresponding to the specified batch size range. Processing conditions of the thermal process are determined according to the workpiece distribution pattern. A thermal processing apparatus comprises a controller capable of carrying out the thermal processing method.
摘要翻译： 热处理方法从包括小于工件保持器的保持容量的参考数量最大的批量范围的多个批量范围中选择包括待加工的工件数量的批量范围。 工件根据对应于指定批量范围确定的工件分配图案分布在工件夹持器中。 根据工件分布模式确定热处理的加工条件。 热处理装置包括能够执行热处理方法的控制器。
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112.发明授权公开(公告)号：US06922522B2
公开(公告)日：2005-07-26
申请号：US10611908
申请日：2003-07-03
申请人： Wenling Wang , Koichi Sakamoto , Fujio Suzuki , Takashi Yokota
发明人： Wenling Wang , Koichi Sakamoto , Fujio Suzuki , Takashi Yokota
IPC分类号： G01J5/02 , C23C16/46 , C23C16/52 , F27B5/06 , F27D19/00 , G01J5/00 , G01J5/10 , G01K15/00 , H01L21/205 , H05B1/02
CPC分类号： G01K15/005
摘要： A heat treatment apparatus has a controller (100) provided with a temperature estimator (110) for estimating a temperature of a wafer by detection signals of temperature sensors (Sin, Sout) and a temperature calibrator (120) for correcting the estimated temperature of the wafer. In order to calibrate the temperature, an offset value stored in an offset table (122) is used. The offset value is determined based on the relationship between film-thickness of films formed in an experimental heat treatment process and process temperatures.
摘要翻译： 一种热处理设备，具有设置有温度估计器（110）的控制器（100），用于通过温度传感器（Sin，Sout）和温度校准器（120）的检测信号来估计晶片的温度， 晶圆。 为了校准温度，使用存储在偏移表（122）中的偏移值。 基于在实验热处理工艺中形成的膜的膜厚与工艺温度之间的关系来确定偏移值。
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公开(公告)号：US20050091831A1
公开(公告)日：2005-05-05
申请号：US10975990
申请日：2004-10-29
申请人： Fumiyoshi Murakami , Akinori Hoshino , Koichi Sakamoto , Noriaki Nonaka , Haruji Suzuki , Tsuneo Shishido
发明人： Fumiyoshi Murakami , Akinori Hoshino , Koichi Sakamoto , Noriaki Nonaka , Haruji Suzuki , Tsuneo Shishido
CPC分类号： B21D39/032 , B23P11/00 , F16B5/045 , F16B17/008 , Y10T29/49908 , Y10T29/49936 , Y10T29/49938 , Y10T29/4994 , Y10T29/49954 , Y10T29/49959 , Y10T403/49 , Y10T403/4966
摘要： A connecting structure includes a first member including a hole which has narrower width at an opening portion than width at a bottom portion and a projecting portion projected toward the opening portion at the bottom portion of the hole, and a second member with a longer shape than the depth of the hole of the first member wherein the second member is inserted into the hole of the first member, the second member is plastically deformed by pushing the second member into the bottom portion of the first member with pressure.
摘要翻译： 连接结构包括：第一构件，其包括孔，其开口部的宽度比底部的宽度窄;突出部，其朝向孔的底部的开口部突出;第二构件，其形状比 其中第二构件的第一构件的孔的深度插入到第一构件的孔中，第二构件通过将第二构件压力推入第一构件的底部而塑性变形。
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114.发明授权High-frequency circuit device using slot line and communication apparatus having high frequency circuit device 失效高频电路器件采用插槽线和具有高频电路器件的通信设备公开(公告)号：US06778031B2
公开(公告)日：2004-08-17
申请号：US10397170
申请日：2003-03-27
申请人： Takahiro Baba , Koichi Sakamoto , Shigeyuki Mikami , Hiroyasu Matsuzaki , Takatoshi Kato , Yohei Ishikawa , Koichi Takizawa
发明人： Takahiro Baba , Koichi Sakamoto , Shigeyuki Mikami , Hiroyasu Matsuzaki , Takatoshi Kato , Yohei Ishikawa , Koichi Takizawa
IPC分类号： H03B518
CPC分类号： H01L23/66 , H01L2223/6627 , H01L2924/0002 , H01L2924/1903 , H01L2924/19105 , H01L2924/3011 , H03B5/1852 , H01L2924/00
摘要： A high-frequency circuit device includes a substrate and a high-frequency circuit. The high-frequency circuit is provided on the substrate and has a signal line. The signal line is configured with a slot line provided by electrodes that are arranged side-by-side with a space therebetween on the substrate. The slot line can facilitates circuit design compared to a microstrip line and has significantly low conduction loss compared to a coplanar line, and can improve the Q-value of the high frequency circuit. This can provide an improved high-frequency circuit device having small phase noise. The high-frequency circuit device, which also serves as an oscillator, employs a slot output and thus can provide an advantage of better continuity for a class-B push-pull amplifier that operates more efficiently than a class-A one.
摘要翻译： 高频电路器件包括衬底和高频电路。 高频电路设置在基板上，并具有信号线。 信号线被配置有由电极提供的槽线，该槽线并排布置在衬底上的空间之间。 与微带线相比，插槽线可以有助于电路设计，并且与共面线相比具有显着低的导通损耗，并且可以提高高频电路的Q值。 这可以提供具有小的相位噪声的改进的高频电路装置。 也用作振荡器的高频电路器件采用插槽输出，因此可以提供比A类更有效的B类推挽放大器具有更好连续性的优点。
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公开(公告)号：US06512421B1
公开(公告)日：2003-01-28
申请号：US09684274
申请日：2000-10-06
IPC分类号： H03B1110
CPC分类号： H03B9/147
摘要： An oscillation circuit is constructed by providing a line and a Gunn diode on a dielectric substrate, and an oscillation signal as the fundamental frequency signal of an oscillator is injected into the Gunn diode through a DC bias line. By disposing a dielectric stripline between upper and lower conductor plates, at NRD guide as an output transmission line is constructed, and the line and the NRD guide are coupled. The cutoff frequency of the NRD guide is determined so that the fundamental wave component of oscillation signal of the oscillation circuit is cut off and a harmonic is propagated.
摘要翻译： 通过在介质基板上设置线路和耿氏二极管构成振荡电路，通过DC偏置线将振荡器的基频信号注入耿氏二极管。 通过在上导体板和下导体板之间设置介质带状线，构成输出传输线的NRD导轨，并将线路和NRD导线连接。 确定NRD波导的截止频率，使得振荡电路的振荡信号的基波分量被切断并且谐波被传播。
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公开(公告)号：US06369676B2
公开(公告)日：2002-04-09
申请号：US09240241
申请日：1999-01-29
申请人： Koichi Sakamoto , Sadao Yamashita , Takatoshi Kato , Yasutaka Fujii , Kenichi Iio , Toshiro Hiratsuka
发明人： Koichi Sakamoto , Sadao Yamashita , Takatoshi Kato , Yasutaka Fujii , Kenichi Iio , Toshiro Hiratsuka
IPC分类号： H01P710
CPC分类号： H03B5/1876 , H03B5/1852 , H03B2200/0024 , H03B2200/004 , H03B2201/0208
摘要： A high-frequency module which includes a dielectric resonator defined by a dielectric sheet; a pair of electrodes formed on each of the main surfaces of the dielectric sheet and having aligned openings which form a dielectric resonator; a substrate stacked on the sheet; and lines disposed on the substrate for being coupled to the dielectric resonator. At least one of the lines is curved and is disposed just inside the opening and runs substantially along the edges of the openings.
摘要翻译： 一种高频模块，包括由电介质片限定的介质谐振器; 一对电极，形成在电介质片的每个主表面上并具有形成介质谐振器的对准的开口; 堆叠在片材上的衬底; 以及设置在所述基板上用于耦合到所述介质谐振器的线。 线中的至少一条是弯曲的并且刚好位于开口内部并且基本沿着开口的边缘延伸。
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公开(公告)号：US06344779B1
公开(公告)日：2002-02-05
申请号：US09680905
申请日：2000-10-06
IPC分类号： H03B714
CPC分类号： H03B9/148
摘要： An oscillation circuit is constructed by providing a line, a Gunn diode, and a dielectric resonator on a dielectric substrate; by disposing a dielectric stripline between upper and lower conductor plates to form an NRD guide which serves as a output transmission line; and the line and the NRD guide are coupled.
摘要翻译： 振荡电路是通过在电介质基片上设置线，耿氏二极管和介质谐振器构成的; 通过在上导体板和下导体板之间布置介质带状线以形成用作输出传输线的NRD引导件; 并且线和NRD指南耦合。
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公开(公告)号：US06246298B1
公开(公告)日：2001-06-12
申请号：US09176362
申请日：1998-10-21
申请人： Yohei Ishikawa , Koichi Sakamoto , Toru Tanizaki , Hiroshi Nishida , Taiyo Nishiyama , Nobuhiro Kondo , Atsushi Saitoh , Yoshinori Taguchi , Hideaki Yamada
发明人： Yohei Ishikawa , Koichi Sakamoto , Toru Tanizaki , Hiroshi Nishida , Taiyo Nishiyama , Nobuhiro Kondo , Atsushi Saitoh , Yoshinori Taguchi , Hideaki Yamada
IPC分类号： H01P110
摘要： A dielectric line switch is provided which is capable of easily controlling the propagation of an electromagnetic wave. Also provided is an antenna device employing said dielectric line switch. As an embodiment of the invention, a plurality of dielectric lines and a plurality of primary radiators are provided on a rotary unit. With the rotation of the rotary unit, the dielectric lines are switched ON and OFF by virtue of mechanical means, so that a desired change-over may be effected among the plurality of primary radiators in a time sharing manner, and the positions of the primary radiators may be shifted within a plane of the focal point of a dielectric lens, thereby enabling the transmission wave beam and/or reception wave beam to scan in a desired manner.
摘要翻译： 提供了能够容易地控制电磁波的传播的介质线路开关。 还提供了采用所述介质线路开关的天线装置。 作为本发明的实施例，在旋转单元上设置多个介质线和多个一次辐射器。 随着旋转单元的旋转，通过机械装置将介质线切换为ON和OFF，从而可以以分时方式在多个主辐射器之间实现期望的切换，并且主 散热器可以在介电透镜的焦点的平面内移动，从而使得透射波束和/或接收波束能够以期望的方式扫描。
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119.发明授权Dielectric resonator, dielectric filter, dielectric duplexer, and oscillator 失效介质谐振器，介质滤波器，介质双工器和振荡器公开(公告)号：US06172572B2
公开(公告)日：2001-01-09
申请号：US09319823
申请日：1999-07-13
IPC分类号： H03B518
CPC分类号： H01P1/20318 , H01P1/2135 , H01P7/10 , H03B5/1864
摘要： A dielectric resonator allowing size reduction and easy modulation of coupling between adjacent resonating sections and electrodes is provided. A configuration is such that electric conductors 2a and 2b having openings on two main faces of a dielectric substrate 2 are arranged so as to oppose each other. Electrodes 5 and 6 are respectively formed on one main face each of supporting members 3a and 3b, the supporting members 3a and 3b are arranged via spacers 9 so as to oppose each other and so as to be apart from each other with a predetermined spacing in the thickness direction of the dielectric substrate 2 for the dielectric substrate 2, first and second conductor plates 4a and 4b are arranged apart with a predetermined spacing from the supporting members 3a and 3b, and the dielectric substrate positioning between the openings opposing each other is used as a resonating section.
摘要翻译： 提供了允许尺寸减小并且容易调制相邻谐振部分和电极之间的耦合的介质谐振器。 在电介质基板2的两个主面上具有开口的电导体2a，2b配置成彼此相对的结构。 电极5和6分别形成在每个支撑构件3a和3b的一个主面上，支撑构件3a和3b经由间隔件9布置成彼此相对并且以预定间隔彼此分开 电介质基板2的电介质基板2的厚度方向，第一导体板4a，第二导体板4b以与支撑部件3a，3b隔开规定的间隔配置，使用位于彼此相对的开口之间的电介质基板 作为共鸣部分。
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公开(公告)号：US6163688A
公开(公告)日：2000-12-19
申请号：US315737
申请日：1999-05-20
CPC分类号： H03B5/1864
摘要： An oscillator comprises a dielectric resonator, a circuit board, and an adjustment mechanism for adjusting the relative positional relationship between the dielectric resonator and the circuit board; the dielectric resonator having a dielectric substrate, electrodes provided on two opposite faces of the dielectric substrate, and electrode removal portions provided at predetermined positions on the electrodes; and the adjustment mechanism comprising screws and springs for moving the dielectric resonator.
摘要翻译： 振荡器包括介质谐振器，电路板和用于调节介质谐振器和电路板之间的相对位置关系的调节机构; 所述介电谐振器具有电介质基板，设置在所述电介质基板的两个相对面上的电极以及设置在所述电极上的预定位置处的电极去除部; 并且该调节机构包括用于移动介质谐振器的螺钉和弹簧。
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