Abstract:
An antenna structure for an inductively coupled plasma generator suitable for processing large-diameter wafers or large, flat-panel display devices by making a plasma density distribution uniform and symmetrical with respect to a rotating direction inside a circular or rectangular chamber in which a wafer is processed. In the antenna structure having a powered end to which RF power is applied and a ground end connected to the ground, at least two loop antenna elements are disposed electrically in parallel with each other, the powered ends and ground ends of the respective antennas are disposed symmetrically with respect to the center of the antennas, and the antennas crossing each other such that the powered ends and ground ends thereof are disposed at a part far from a chamber and central parts thereof are disposed at a part close to the chamber.
Abstract:
A fuel cell stack includes at least one electricity generating element that generates electrical energy through a reaction of fuel and oxygen, the electricity generating element including a membrane-electrode assembly, separators respectively positioned at both sides of the membrane-electrode assembly, and conducting elements respectively positioned between the separators and the membrane-electrode assembly and capable of enabling electrons, which are generated in the membrane-electrode assembly, to transfer through the fuel cell stack.
Abstract:
A secondary battery comprising an electrode assembly having a positive electrode plate, a negative electrode plate, and a separator between the positive and negative electrodes is provided. The secondary battery further comprises a case for containing the electrode assembly, and a cap assembly connected to the case. The cap assembly comprises positive and negative terminals electrically connected to the positive electrode plate and the negative electrode plate, respectively. Lead connectors are electrically connected to the positive and negative electrode plates and the positive and negative terminals. A support is connected to each end of the electrode assembly and surrounds the lead connectors. The supports are adapted to fit between the electrode assembly and the case.
Abstract:
An organic light emitting display and method of fabricating the same are provided, such that an organic light emitting display includes a substrate having formed thereon a thin film transistor including a gate electrode, a source electrode, and a drain electrode, a passivation layer formed on the substrate having a contact hole exposing the source or the drain electrode, a first insulating layer pattern formed on a portion of the passivation layer corresponding to an emission region and having a step portion that is higher than the passivation layer on the thin film transistor, a pixel electrode formed on a portion of the passivation layer and on a portion of the first insulating layer pattern that contacts the source or the drain electrode through the contact hole, and a second insulating layer pattern formed on portions of the passivation layer and the pixel electrode that defines the emission region.
Abstract:
A method of manufacturing a flat panel display device using fewer masks and resulting in a device with high brightness is disclosed. The resulting devices includes at least first to fourth thin film transistors, the first, third, and fourth thin film transistors having a first conductive type, and the second thin film transistors having a second conductive type. The method includes: a) providing a substrate having a non-display region on which the first thin film transistor and the second thin film transistor are formed, and a display region on which the third thin film transistor and the fourth thin film transistor are formed; b) forming first to fourth semiconductor layers of the first to the fourth thin film transistors on the substrate; c) forming a gate insulating layer over the whole surface of the substrate; d) forming first to fourth conductive patterns and a pixel electrode on the gate insulating layer, the first to fourth conductive patterns formed over the first to fourth semiconductor layers, the pixel electrode formed over a portion of the display region; e) forming first to fourth gate electrodes and a fifth conductive pattern, the first to fourth gate electrodes formed on the first to fourth conductive patterns, respectively, the fifth conductive pattern formed on the pixel electrode; f) ion-implanting a first conductive-type high-density impurity into the first, third, and fourth semiconductor layers to form first conductive-type high-density source and drain regions; g) etching the first to fourth conductive patterns using the first to fourth gate electrodes as an etching mask; h) forming a photoresist pattern to expose a portion of the non-display region corresponding to the second semiconductor layer; and i) ion-implanting a second conductive-type high-density impurity into the second semiconductor layer to form second conductive-type high-density source and drain regions.
Abstract:
An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.
Abstract:
A chip scale package has first and second sets of external signal terminals arranged in rows and columns at respective sides of the bottom surface of the package The spacing between the rows of the first set of signal terminals is greater than the spacing between the rows of the second set of signal terminals. The chip scale packages are mounted to and integrated by a printed circuit board having corresponding lands in each of a plurality of chip scale package regions. Thus, the spacing between adjacent rows of a first set of lands is greater than the spacing between adjacent rows of a second set of lands. The rows of the first lands are spaced wider apart so that a plurality of first signal lines can extend contiguously between each adjacent pair of rows of first lands, in each of the chip scale package regions. A method of designing the printed circuit board lays out the lands of the PCB in rows and columns, sets the spacing thereof, and traces out the signal lines. The signal lines of the printed circuit board are arranged efficiently so that the number of the layers of the printed circuit board necessary for accommodating the lines can be minimized, and the production costs thereof can be kept correspondingly low.
Abstract:
A sealed battery includes a can for receiving an electric generator, a shape-variable plate crimped on an opening of the can, a gasket disposed between the can and the shape-variable plate, a fixing plate disposed under the shape-variable plate, an insulating member disposed between the shape-variable plate and the fixing plate, and a projection extending from the fixing plate and welded on the shape-variable plate. The projection is provided with a mechanically weak portion which is designed to be broken at an internal pressure lower than that for separating a welding portion of the projection and the shape-variable plate.
Abstract:
A cathode for an electron tube includes a base metal containing nickel as a major component and an electron-emissive material layer which is formed on the base metal and comprises an alkaline earth metal oxide including barium oxide as its main component, wherein the electron-emissive material layer further comprises a lanthanum-magnesium-manganese oxide. The cathode of the present invention is fully interchangeable with conventional oxide cathodes and has a longer lifetimes and an improved cut-off drift characteristic.
Abstract:
A thermion emitting oxide cathode comprising a metal cap and a cathode sleeve, the metal cap being coated with a thermion emitting material layer containing a barium-based alkaline earth metal, wherein the thermion emitting material layer is made of a titanate of the barium-based alkaline earth metal. The thermion emitting oxide cathode is made by mixing a titanium tetrachloride (TiCl.sub.4) with an aqueous solution of barium-strontium-calcium dichloride �(Ba--Sr--Ca)Cl.sub.2 !, dropping the mixture into an oxalate solution of 80.degree. C., thereby precipitating a barium-strontium-calcium titanate hydrate �(Ba--Sr--Ca)TiO(C.sub.2 O.sub.4).sub.2.4H.sub.2 O!, and treating the precipitated barium-strontium-calcium titanate hydrate at a temperature of 500.degree. to 700.degree. C. to remove a plurality of water molecules, thereby producing a suspension of barium-strontium-calcium titanate �(Ba--Sr--Ca)TiO.sub.3 !.