Antenna structure for inductively coupled plasma generator
    131.
    发明授权
    Antenna structure for inductively coupled plasma generator 失效
    电感耦合等离子体发生器的天线结构

    公开(公告)号:US07079085B2

    公开(公告)日:2006-07-18

    申请号:US10766665

    申请日:2004-01-27

    CPC classification number: H01J37/321 H05H1/46

    Abstract: An antenna structure for an inductively coupled plasma generator suitable for processing large-diameter wafers or large, flat-panel display devices by making a plasma density distribution uniform and symmetrical with respect to a rotating direction inside a circular or rectangular chamber in which a wafer is processed. In the antenna structure having a powered end to which RF power is applied and a ground end connected to the ground, at least two loop antenna elements are disposed electrically in parallel with each other, the powered ends and ground ends of the respective antennas are disposed symmetrically with respect to the center of the antennas, and the antennas crossing each other such that the powered ends and ground ends thereof are disposed at a part far from a chamber and central parts thereof are disposed at a part close to the chamber.

    Abstract translation: 一种用于电感耦合等离子体发生器的天线结构,其适用于通过使等离子体密度分布在圆形或矩形室内相对于旋转方向均匀且对称的方式处理大直径晶片或大型平板显示装置,其中晶片为 处理。 在具有施加RF功率的动力端和连接到地面的接地端的天线结构中,至少两个环形天线元件彼此并联设置,各个天线的动力端和接地端被布置 相对于天线的中心对称,并且天线彼此交叉,使得其动力端和接地端设置在远离室的一部分处,并且其中心部分设置在靠近室的部分。

    Fuel cell stack
    132.
    发明申请
    Fuel cell stack 审中-公开
    燃料电池堆

    公开(公告)号:US20060051626A1

    公开(公告)日:2006-03-09

    申请号:US11221157

    申请日:2005-09-06

    Applicant: Sang-Won Lee

    Inventor: Sang-Won Lee

    Abstract: A fuel cell stack includes at least one electricity generating element that generates electrical energy through a reaction of fuel and oxygen, the electricity generating element including a membrane-electrode assembly, separators respectively positioned at both sides of the membrane-electrode assembly, and conducting elements respectively positioned between the separators and the membrane-electrode assembly and capable of enabling electrons, which are generated in the membrane-electrode assembly, to transfer through the fuel cell stack.

    Abstract translation: 燃料电池堆包括至少一个通过燃料和氧气的反应产生电能的发电元件,发电元件包括​​膜 - 电极组件,分别位于膜 - 电极组件的两侧的隔板和导电元件 分别位于分离器和膜 - 电极组件之间并且能够使在膜 - 电极组件中产生的电子能够转移通过燃料电池堆。

    Secondary battery
    133.
    发明申请
    Secondary battery 有权
    二次电池

    公开(公告)号:US20060024578A1

    公开(公告)日:2006-02-02

    申请号:US11179307

    申请日:2005-07-11

    Applicant: Sang-Won Lee

    Inventor: Sang-Won Lee

    Abstract: A secondary battery comprising an electrode assembly having a positive electrode plate, a negative electrode plate, and a separator between the positive and negative electrodes is provided. The secondary battery further comprises a case for containing the electrode assembly, and a cap assembly connected to the case. The cap assembly comprises positive and negative terminals electrically connected to the positive electrode plate and the negative electrode plate, respectively. Lead connectors are electrically connected to the positive and negative electrode plates and the positive and negative terminals. A support is connected to each end of the electrode assembly and surrounds the lead connectors. The supports are adapted to fit between the electrode assembly and the case.

    Abstract translation: 提供一种二次电池,其包括在正极和负极之间具有正极板,负极板和隔膜的电极组件。 二次电池还包括用于容纳电极组件的壳体和连接到壳体的帽组件。 盖组件包括分别与正极板和负极板电连接的正极和负极端子。 引线连接器电连接到正极板和正极板以及正极端子和负极端子。 支撑件连接到电极组件的每个端部并且围绕引线连接器。 支撑件适于装配在电极组件和壳体之间。

    Organic light emitting display and method of fabricating the same
    134.
    发明申请
    Organic light emitting display and method of fabricating the same 有权
    有机发光显示器及其制造方法

    公开(公告)号:US20050263755A1

    公开(公告)日:2005-12-01

    申请号:US11121992

    申请日:2005-05-05

    Abstract: An organic light emitting display and method of fabricating the same are provided, such that an organic light emitting display includes a substrate having formed thereon a thin film transistor including a gate electrode, a source electrode, and a drain electrode, a passivation layer formed on the substrate having a contact hole exposing the source or the drain electrode, a first insulating layer pattern formed on a portion of the passivation layer corresponding to an emission region and having a step portion that is higher than the passivation layer on the thin film transistor, a pixel electrode formed on a portion of the passivation layer and on a portion of the first insulating layer pattern that contacts the source or the drain electrode through the contact hole, and a second insulating layer pattern formed on portions of the passivation layer and the pixel electrode that defines the emission region.

    Abstract translation: 提供有机发光显示器及其制造方法,使得有机发光显示器包括其上形成有包括栅电极,源电极和漏电极的薄膜晶体管的基板,形成在 所述基板具有暴露所述源极或漏极的接触孔,形成在所述钝化层的与发光区域对应的部分上并且具有比所述薄膜晶体管上的钝化层高的台阶部分的第一绝缘层图案, 形成在所述钝化层的一部分上的所述第一绝缘层图案的部分以及通过所述接触孔与所述源极或漏极接触的部分的像素电极,以及形成在所述钝化层和所述像素的部分上的第二绝缘层图案 限定发射区域的电极。

    Flat panel display device
    135.
    发明授权
    Flat panel display device 有权
    平板显示设备

    公开(公告)号:US06927464B2

    公开(公告)日:2005-08-09

    申请号:US10390719

    申请日:2003-03-19

    CPC classification number: H01L27/1288 H01L27/1214 H01L29/78621

    Abstract: A method of manufacturing a flat panel display device using fewer masks and resulting in a device with high brightness is disclosed. The resulting devices includes at least first to fourth thin film transistors, the first, third, and fourth thin film transistors having a first conductive type, and the second thin film transistors having a second conductive type. The method includes: a) providing a substrate having a non-display region on which the first thin film transistor and the second thin film transistor are formed, and a display region on which the third thin film transistor and the fourth thin film transistor are formed; b) forming first to fourth semiconductor layers of the first to the fourth thin film transistors on the substrate; c) forming a gate insulating layer over the whole surface of the substrate; d) forming first to fourth conductive patterns and a pixel electrode on the gate insulating layer, the first to fourth conductive patterns formed over the first to fourth semiconductor layers, the pixel electrode formed over a portion of the display region; e) forming first to fourth gate electrodes and a fifth conductive pattern, the first to fourth gate electrodes formed on the first to fourth conductive patterns, respectively, the fifth conductive pattern formed on the pixel electrode; f) ion-implanting a first conductive-type high-density impurity into the first, third, and fourth semiconductor layers to form first conductive-type high-density source and drain regions; g) etching the first to fourth conductive patterns using the first to fourth gate electrodes as an etching mask; h) forming a photoresist pattern to expose a portion of the non-display region corresponding to the second semiconductor layer; and i) ion-implanting a second conductive-type high-density impurity into the second semiconductor layer to form second conductive-type high-density source and drain regions.

    Abstract translation: 公开了一种制造使用较少掩模并产生具有高亮度的装置的平板显示装置的方法。 所得到的器件至少包括第一至第四薄膜晶体管,第一,第三和第四薄膜晶体管具有第一导电类型,第二薄膜晶体管具有第二导电类型。 该方法包括:a)提供具有形成第一薄膜晶体管和第二薄膜晶体管的非显示区域的基板和形成有第三薄膜晶体管和第四薄膜晶体管的显示区域 ; b)在基板上形成第一至第四薄膜晶体管的第一至第四半导体层; c)在所述基板的整个表面上形成栅极绝缘层; d)在栅极绝缘层上形成第一至第四导电图案和像素电极,在第一至第四半导体层上形成的第一至第四导电图案,形成在显示区域的一部分上的像素电极; e)形成第一至第四栅电极和第五导电图案,分别在第一至第四导电图案上形成的第一至第四栅电极形成在像素电极上的第五导电图案; f)将第一导电型高密度杂质离子注入到第一,第三和第四半导体层中以形成第一导电型高密度源极和漏极区; g)使用第一至第四栅电极作为蚀刻掩模蚀刻第一至第四导电图案; h)形成光致抗蚀剂图案以暴露对应于第二半导体层的非显示区域的一部分; 以及i)将第二导电型高密度杂质离子注入到所述第二半导体层中以形成第二导电型高密度源极和漏极区。

    Inductively coupled plasma generator having lower aspect ratio
    136.
    发明申请
    Inductively coupled plasma generator having lower aspect ratio 失效
    具有较低纵横比的电感耦合等离子体发生器

    公开(公告)号:US20050156530A1

    公开(公告)日:2005-07-21

    申请号:US11043207

    申请日:2005-01-26

    CPC classification number: H01J37/321 H05H1/46

    Abstract: An inductively coupled plasma generator having a lower aspect ratio reaction gas, comprising a chamber having a gas inlet through which a reaction gas is supplied, a vacuum pump for maintaining the inside of the chamber vacuum and a gas outlet for exhausting the reaction gas after completion of the reaction, a chuck for mounting a target material to be processed inside the chamber, and an antenna to which high-frequency power is applied, the antenna provided at the upper and lateral portions of the chamber, wherein the antenna has parallel antenna elements in which a discharge of a high frequency can be allowed and impedance is low to ensure a low electron temperature, the antenna is disposed such that a powered end of each of the antenna elements and a ground end of each of the antenna elements opposite to the powered end are symmetrical in view of the center of an imaginary circle formed by the antenna to establish rotation symmetry of plasma density profiles, the antenna elements are twisted in a helical manner, and the powered end of each of the antenna elements is positioned to be far from the chamber and the ground end of each of the antenna elements is positioned to be close to the chamber, thereby compensating for a drop in the plasma density due to ion loss occurring at the powered end.

    Abstract translation: 一种具有较低纵横比的反应气体的电感耦合等离子体发生器,包括具有供应反应气体的气体入口的腔室,用于维持腔室真空内部的真空泵和用于在完成后排出反应气体的气体出口 的反应,用于在室内安装待处理的目标材料的卡盘以及设置在室的上部和外侧部分处的高频电力的天线,其中天线具有平行的天线元件 其中可以允许高频放电并且阻抗低以确保低电子温度,天线被布置成使得每个天线元件的动力端和每个天线元件的接地端与 鉴于由天线形成的假想圆的中心,以建立等离子体密度分布的旋转对称性,动力端对称,天线元件ar e以螺旋方式扭曲,并且每个天线元件的动力端定位成远离腔室,并且每个天线元件的接地端被定位成靠近腔室,从而补偿了下降 由于在动力端发生离子损失引起的等离子体密度。

    Sealed battery
    138.
    发明授权
    Sealed battery 有权
    密封电池

    公开(公告)号:US06649301B1

    公开(公告)日:2003-11-18

    申请号:US09619903

    申请日:2000-07-19

    CPC classification number: H01M2/1241 H01M2/0413

    Abstract: A sealed battery includes a can for receiving an electric generator, a shape-variable plate crimped on an opening of the can, a gasket disposed between the can and the shape-variable plate, a fixing plate disposed under the shape-variable plate, an insulating member disposed between the shape-variable plate and the fixing plate, and a projection extending from the fixing plate and welded on the shape-variable plate. The projection is provided with a mechanically weak portion which is designed to be broken at an internal pressure lower than that for separating a welding portion of the projection and the shape-variable plate.

    Abstract translation: 密封电池包括用于接收发电机的罐,卷绕在罐的开口上的形状可变的板,设置在罐和形状可变板之间的垫圈,设置在形状可变板下方的固定板, 设置在形状可变板和固定板之间的绝缘构件和从固定板延伸并焊接在形状可变板上的突起。 突起设置有机械弱部,该机械弱部被设计成在比用于分离突起和形状可变板的焊接部的内压低的内部压力下断裂。

    Thermion emitting oxide cathode and method for making the same
    140.
    发明授权
    Thermion emitting oxide cathode and method for making the same 失效
    发热氧化阴极及其制造方法

    公开(公告)号:US5684357A

    公开(公告)日:1997-11-04

    申请号:US569706

    申请日:1995-12-08

    CPC classification number: C01G23/006 H01J1/142

    Abstract: A thermion emitting oxide cathode comprising a metal cap and a cathode sleeve, the metal cap being coated with a thermion emitting material layer containing a barium-based alkaline earth metal, wherein the thermion emitting material layer is made of a titanate of the barium-based alkaline earth metal. The thermion emitting oxide cathode is made by mixing a titanium tetrachloride (TiCl.sub.4) with an aqueous solution of barium-strontium-calcium dichloride �(Ba--Sr--Ca)Cl.sub.2 !, dropping the mixture into an oxalate solution of 80.degree. C., thereby precipitating a barium-strontium-calcium titanate hydrate �(Ba--Sr--Ca)TiO(C.sub.2 O.sub.4).sub.2.4H.sub.2 O!, and treating the precipitated barium-strontium-calcium titanate hydrate at a temperature of 500.degree. to 700.degree. C. to remove a plurality of water molecules, thereby producing a suspension of barium-strontium-calcium titanate �(Ba--Sr--Ca)TiO.sub.3 !.

    Abstract translation: 一种包含金属盖和阴极套的热发射氧化物阴极,金属帽涂覆有含有钡基碱土金属的热离子发射材料层,其中热电子发射材料层由钡基碱金属的钛酸盐 碱土金属。 通过将四氯化钛(TiCl 4)与二氯化锶 - 二氯化钙[(Ba-Sr-Ca)Cl 2]的水溶液混合,将该混合物倒入80℃的草酸盐溶液中, 从而使钡 - 锶 - 钛酸钙水合物[(Ba-Sr-Ca)TiO(C2O4)·2.4H2O]析出,并在500〜700℃的温度下处理沉淀的钛酸钡 - 锶 - 钛酸钙水合物,以除去 多个水分子,从而产生钛酸锶 - 钛酸钙[(Ba-Sr-Ca)TiO 3]的悬浮液。

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