公开(公告)号：US09494535B2

公开(公告)日：2016-11-15

申请号：US14690442

申请日：2015-04-19

Applicant: KLA-Tencor Corporation

Inventor： Abdurrahman Sezginer ,  John Hench ,  Michael S. Bakeman

IPC: G01N23/201 ,  H01L21/66

CPC classification number: G01N23/201 ,  G01N2223/611 ,  G01N2223/645 ,  H01L22/12

Abstract: Methods and systems for performing measurements of semiconductor structures and materials based on scatterometry measurement data are presented. Scatterometry measurement data is used to generate an image of a material property of a measured structure based on the measured intensities of the detected diffraction orders. In some examples, a value of a parameter of interest is determined directly from the map of the material property of the measurement target. In some other examples, the image is compared to structural characteristics estimated by a geometric, model-based parametric inversion of the same measurement data. Discrepancies are used to update the geometric model of the measured structure and improve measurement performance. This enables a metrology system to converge on an accurate parametric measurement model when there are significant deviations between the actual shape of a manufactured structure subject to model-based measurement and the modeled shape of the structure.

Abstract translation: 介绍了基于散射测量数据进行半导体结构和材料测量的方法和系统。 散射测量测量数据用于基于检测到的衍射级的测量强度来生成测量结构的材料特性的图像。 在一些示例中，直接从测量对象的材料属性的映射确定感兴趣的参数的值。 在一些其他示例中，将图像与通过相同测量数据的几何，基于模型的参数反演估计的结构特征进行比较。 差异用于更新测量结构的几何模型，并提高测量性能。 当使基于模型的测量的制造结构的实际形状与结构的建模形状之间存在显着的偏差时，这使测量系统能够收敛于精确的参数测量模型。

公开(公告)号：US09412481B1

公开(公告)日：2016-08-09

申请号：US13999172

申请日：2014-01-22

Applicant: Michael Keith Fuller

Inventor： Michael Keith Fuller

IPC: G21K1/10 ,  G01N23/20 ,  G01N23/201 ,  G01N23/04

CPC classification number: G21K1/10 ,  G01N23/04 ,  G01N23/201 ,  G21K1/065 ,  G21K2207/005

Abstract: A method and device is disclosed for the generation of high-contrast, localized sinusoidal patterns or stepped-intensity modulated patterns from spatially non-coherent or coherent illumination, and using such patterns for imaging the internal features of objects.

Abstract translation: 公开了用于从空间非相干或相干照明产生高对比度，局部正弦曲线图或阶梯强度调制图案的方法和装置，并且使用这种图案来成像物体的内部特征。

公开(公告)号：US09335281B2

公开(公告)日：2016-05-10

申请号：US14350073

申请日：2012-10-04

Applicant: Duke University

Inventor： Daniel Marks ,  David Jones Brady

IPC: G01N23/201 ,  G01N23/20

CPC classification number: G01N23/201 ,  G01N23/20008 ,  G21K2207/005

Abstract: A system and method for producing images of the structure and composition of an object based on measurements of the low-angle x-ray diffraction properties of the object. The imaging system includes a coded aperture that encodes spatial and spectral features onto radiation scattered from image points within the object. The radiation is detected at a two-dimensional array of detectors, whose output is deconvolved and processed to estimate a three-dimensional image having molecular specificity.

Abstract translation: 基于物体的低角度X射线衍射特性的测量来生成物体的结构和组成的图像的系统和方法。 成像系统包括编码孔径，其将空间和光谱特征编码到物体内的图像点散射的辐射上。 在检测器的二维阵列处检测辐射，其输出被去卷积和处理以估计具有分子特异性的三维图像。

公开(公告)号：US20150353580A1

公开(公告)日：2015-12-10

申请号：US14634676

申请日：2015-02-27

Applicant: University of Oregon

Inventor： James E. Hutchison ,  Edward W. Elliott, III ,  Zachary Kennedy ,  Patrick Haben

IPC: C07F1/00 ,  G01N33/52

CPC classification number: C07F1/005 ,  C07F5/003 ,  G01N15/0227 ,  G01N23/04 ,  G01N23/201 ,  G01N33/54346 ,  G01N33/54353 ,  G01N33/551 ,  G01N33/587

Abstract: Disclosed herein are embodiments of gold nanoparticles and methods of making and using the gold nanoparticles. The disclosed gold nanoparticles have core sizes and polydispersities controlled by the methods of making the gold nanoparticles. In some embodiments, the methods of making the gold nanoparticles can concern using flow reactors and reaction conditions controlled to make gold nanoparticles having a desired core size. The gold nanoparticles disclosed herein also comprise various ligands that can be used to facilitate the use of the gold nanoparticles in a variety of applications.

Abstract translation: 本文公开了金纳米颗粒的实施方案和制备和使用金纳米颗粒的方法。 所公开的金纳米颗粒具有通过制备金纳米颗粒的方法控制的核心尺寸和多分散性。 在一些实施方案中，制备金纳米颗粒的方法可以涉及使用流动反应器和控制的反应条件以制备具有所需核心尺寸的金纳米颗粒。 本文公开的金纳米颗粒还包括可用于促进在各种应用中使用金纳米颗粒的各种配体。

公开(公告)号：US09146201B2

公开(公告)日：2015-09-29

申请号：US13748036

申请日：2013-01-23

Applicant: American Science and Engineering, Inc.

Inventor： Jeffrey Schubert ,  Jeffrey M. Denker ,  Jason Toppan ,  Michael Chesna ,  Richard Mastronardi ,  Robyn Smith ,  Richard Schueller ,  Jeffrey Illig

IPC: G01N23/203 ,  G01N23/04 ,  G01N23/201 ,  G01V5/00

CPC classification number: G01N23/203 ,  G01N23/04 ,  G01N23/201 ,  G01V5/0008 ,  G01V5/0025

Abstract: An x-ray inspection system using backscatter of an x-ray beam emitted through a scan panel contiguous with, but of a material distinct from, an enclosure that contains an x-ray source by which the x-ray beam is generated. The scan panel is contoured in such a manner as to be visibly blended with a shape characterizing the enclosure. In some embodiments, the beam traverses multiple scan panels, where one or more of the scan panels may be selected for beam filtration properties. The scan panel may be disposed interior to a sliding door, and may be structured to serve as a scatter shield.

Abstract translation: X射线检查系统使用通过与包含产生x射线束的x射线源的外壳不同的扫描面板发射的X射线束的反向散射。 扫描面板的轮廓是这样的，以便与表征外壳的形状可见地混合。 在一些实施例中，光束横穿多个扫描面板，其中可以选择一个或多个扫描面板用于束过滤特性。 扫描面板可以设置在滑动门的内部，并且可以被构造成用作散射屏蔽。

公开(公告)号：US20150241367A1

公开(公告)日：2015-08-27

申请号：US14424682

申请日：2012-12-06

Applicant: KOREA ATOMIC ENERGY RESEARCH INSTITUTE

Inventor： Jang Ho Ha ,  Young Soo Kim ,  Han Soo Kim ,  Sun Mog Yeo

IPC: G01N23/201 ,  G01N23/202

CPC classification number: G01N23/201 ,  G01N23/04 ,  G01N23/06 ,  G01N23/083 ,  G01N23/087 ,  G01N23/20 ,  G01N23/202

Abstract: A radiation imaging device capable of matter-element information acquisition and image based selection comprises: a radiation source generating radiation; at least one scattering device receiving radiation which includes radiation transmitting a subject and scattered radiation and scattering the received radiation; and an imaging device receiving the radiation which includes the radiation transmitting the subject and the scattered radiation to measure energy and positional information so as to calculate a two-dimensional image.

Abstract translation: 能够进行物质信息获取和基于图像的选择的放射线成像装置包括：辐射源产生辐射; 至少一个接收辐射的散射装置，其包括辐射物体和散射的辐射并散射所接收的辐射; 以及摄像装置，其接收包含发射对象的辐射和散射辐射的辐射，以测量能量和位置信息，以计算二维图像。

公开(公告)号：US20150204802A1

公开(公告)日：2015-07-23

申请号：US14161942

申请日：2014-01-23

Applicant: Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

Inventor： Heath A. Pois ,  David A. Reed ,  Bruno W. Schueler ,  Rodney Smedt ,  Jeffrey T. Fanton

IPC: G01N23/201

CPC classification number: G01N23/201 ,  G01N2223/054 ,  H01L22/12

Abstract: Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.

Abstract translation: 公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。 例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个 入射角和多个方位角。 该方法还涉及收集散射的X射线束的至少一部分。

公开(公告)号：US09020100B2

公开(公告)日：2015-04-28

申请号：US14057564

申请日：2013-10-18

Applicant: American Science and Engineering, Inc.

Inventor： Richard Mastronardi ,  Dean Fleury ,  Jeffrey R. Schubert ,  Joseph DiMare ,  Richard Schueller ,  Alexander Chalmers

IPC: G01N23/203 ,  G01K5/04 ,  G01K5/10 ,  H05G1/02 ,  G01V5/00 ,  G01N23/20 ,  G01N23/201

CPC classification number: G01V5/0008 ,  G01N23/20083 ,  G01N23/201 ,  G01N23/203 ,  G01V5/0016 ,  G01V5/0025

Abstract: An apparatus and method for inspecting personnel or their effects. A first and second carriage each carries a source for producing a beam of penetrating radiation incident on a given subject. A positioner provides for relative motion of each beam vis-à-vis the subject in a motion, the vertical component of which is one-way. A detector receives radiation produced by at least one of the sources after the radiation interacts with the subject.

Abstract translation: 用于检查人员或其影响的装置和方法。 第一和第二托架每个都带有用于产生入射在给定主体上的穿透辐射束的源。 定位器提供每个梁相对于被摄体在运动中的相对运动，其垂直分量是单向的。 在辐射与受试者相互作用之后，检测器接收由至少一个源产生的辐射。

公开(公告)号：US09014335B2

公开(公告)日：2015-04-21

申请号：US13912338

申请日：2013-06-07

Applicant: Rigaku Innovative Technologies, Inc.

Inventor： Licai Jiang

IPC: G01N23/201

CPC classification number: G01N23/201 ,  G01N2223/308

Abstract: A system for analyzing a sample is provided. The system includes a beam selection device for selecting between a one-dimensional operation mode for providing a one-dimensional x-ray beam to the sample and a two-dimensional operation mode for providing a two-dimensional x-ray beam to the sample.

Abstract translation: 提供了一种用于分析样品的系统。 该系统包括用于在用于向样本提供一维x射线束的一维操作模式和用于向样本提供二维X射线束的二维操作模式之间进行选择的束选择装置。

公开(公告)号：US20150051877A1

公开(公告)日：2015-02-19

申请号：US14461416

申请日：2014-08-17

Applicant: KLA-Tencor Corporation

Inventor： Michael S. Bakeman ,  Andrei V. Shchegrov ,  Kevin Peterlinz ,  Thaddeus Gerard Dziura

IPC: G06F17/50 ,  G01N23/223 ,  G01N23/201

CPC classification number: G01N23/223 ,  G01N23/201 ,  G01N2223/6116

Abstract: Methods and systems for performing simultaneous X-ray Fluorescence (XRF) and small angle x-ray scattering (SAXS) measurements over a desired inspection area of a specimen are presented. SAXS measurements combined with XRF measurements enables a high throughput metrology tool with increased measurement capabilities. The high energy nature of x-ray radiation penetrates optically opaque thin films, buried structures, high aspect ratio structures, and devices including many thin film layers. SAXS measurements of a particular location of a planar specimen are performed at a number of different out of plane orientations. This increases measurement sensitivity, reduces correlations among parameters, and improves measurement accuracy. In addition, specimen parameter values are resolved with greater accuracy by fitting data sets derived from both SAXS and XRF measurements based on models that share at least one material parameter. The fitting can be performed sequentially or in parallel.

Abstract translation: 提出了在样本的期望检查区域上执行同时X射线荧光（XRF）和小角度X射线散射（SAXS）测量的方法和系统。 SAXS测量结合XRF测量，可实现高吞吐量测量工具，增加测量能力。 x射线辐射的高能量性质穿透光学不透明的薄膜，掩埋结构，高纵横比结构以及包括许多薄膜层的器件。 平面样本的特定位置的SAXS测量在多个不同的平面外取向进行。 这增加了测量灵敏度，降低了参数之间的相关性，并提高了测量精度。 此外，通过根据共享至少一个材料参数的模型拟合从SAXS和XRF测量得到的数据集，可以更准确地解决样本参数值。 可以顺序地或并行地执行装配。