公开(公告)号：US4864220A

公开(公告)日：1989-09-05

申请号：US217793

申请日：1988-07-12

申请人： Shinichiro Aoshima ,  Yutaka Tsuchiya ,  Takuya Nakamura

发明人： Shinichiro Aoshima ,  Yutaka Tsuchiya ,  Takuya Nakamura

IPC分类号： G01R1/07 ,  G01R15/24 ,  G01R19/00 ,  G01R31/302 ,  H01L21/66

CPC分类号： G01R1/071 ,  G01R15/242

摘要： In a voltage detector using an electro-optic material whose refractive index is changed by a voltage developing in a selected area of an object under test, a light beam emitted from a light source is applied to a beam splitter, where it is split into a light beam advancing along a reference optical path and a light beam advancing along an optical path extended to an optical path length changing means made of the electro-optic material, and the light beams are returned from the reference optical path and the optical path length changing means after reflection to the beam splitter, where they are caused to interference with each other to provide an output light beam which is applied to a detector. The efficiency of light beam utilization is improved, and the voltage developing in the selected area of the object can be detected with high accuracy.

公开(公告)号：US4857836A

公开(公告)日：1989-08-15

申请号：US187336

申请日：1988-04-28

申请人： Gerald Soelkner

发明人： Gerald Soelkner

IPC分类号： G01R15/24 ,  G01R1/06 ,  G01R1/07 ,  G01R19/00 ,  G01R31/302 ,  G01R31/308 ,  G01R31/00 ,  G01R31/02

CPC分类号： G01R1/071 ,  G01R31/308

摘要： A mechanical probe for optical measurement of electrical signals. The probe for optical measurement of electrical signals with high chronological resolution is composed of a cuboid electro-optical crystal, of a co-planar waveguide structure located on a lateral face of the crystal and of a metallic tip applied to the end face of the crystal adjacent a measuring location. The signal at the measuring location, for example at an interconnect of an integrated circuit is taken with the metallic tip and is fed into the co-planar waveguide structure composed of two strip-shaped metallizations. Probe holders or electrostrictive manipulators known in the art of electrical metrology (probe measuring location) can be used for exact positioning of the probe onto the measuring location.

摘要翻译： 用于电信号光学测量的机械探针。 用于具有高时间分辨率的电信号的光学测量用探针由长方体电光晶体构成，位于晶体的侧面上的共平面波导结构和施加到晶体的端面的金属尖端 相邻的测量位置。 测量位置处的信号，例如在集成电路的互连处采用金属尖端，并被馈送到由两个条形金属化构成的共平面波导结构中。 可以使用电气测量领域（探头测量位置）中已知的探头支架或电致伸缩机械手将探头精确定位在测量位置。

公开(公告)号：US4851768A

公开(公告)日：1989-07-25

申请号：US212047

申请日：1988-06-24

申请人： Masahiro Yoshizawa ,  Akira Kikuchi ,  Kou Wada ,  Minpei Fujinami ,  Nobuo Shimazu

发明人： Masahiro Yoshizawa ,  Akira Kikuchi ,  Kou Wada ,  Minpei Fujinami ,  Nobuo Shimazu

IPC分类号： H01L21/66 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q90/00 ,  G01R31/26 ,  G01R31/302 ,  G01R31/305 ,  G01R31/3183 ,  H01J37/28

CPC分类号： G01R31/305

摘要： In a characteristic test apparatus for an electronic device, a number of voltage supply beams are radiated onto predetermined irradiation positions of the electronic device placed on a sample table. In addition, a potential measuring beam is radiated onto a number of irradiation positions including the predetermined irradiation positions of the voltage supply beams. A secondary electron signal based on the potential measuring beam is detected to measure a potential. When the irradiation position of the potential measuring beam coincides with that of the voltage supply beam, the voltage supply beam is controlled to adjust a potential at the irradiation position to a set value by controlling, e.g., an acceleration power source for the voltage supply beam. When the irradiation position of the potential measuring beam is different from that of the voltage supply beam, a potential at this position is measured. Then, characteristics of the electronic device are calculated based on the obtained potentials at the respective irradiation positions.

摘要翻译： 在用于电子设备的特征测试装置中，多个电压供应光束照射到放置在样品台上的电子设备的预定照射位置上。 此外，将潜在的测量光束照射到包括电压供应光束的预定照射位置的多个照射位置。 检测基于电位测量光束的二次电子信号来测量电位。 当电位测量光束的照射位置与电压供应光束的照射位置一致时，电压供应光束被控制以通过控制例如电压源光束的加速度电源来将照射位置处的电位调整到设定值 。 当电位测量光束的照射位置与电压供应光束的照射位置不同时，测量该位置处的电位。 然后，基于在各个照射位置处获得的电位来计算电子设备的特性。

公开(公告)号：US4779046A

公开(公告)日：1988-10-18

申请号：US880553

申请日：1986-06-30

申请人： Jean-Michel Rouberoi ,  Francois Costa de Beauregard

发明人： Jean-Michel Rouberoi ,  Francois Costa de Beauregard

IPC分类号： H01L21/66 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/302 ,  G01R31/305 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28 ,  H01J37/147 ,  G01R31/26 ,  H01J37/153

CPC分类号： H01J37/268 ,  G01R31/305

摘要： An electric beam integrated circuit tester including a source of primary electrons, a support for the integrated circuit, and an electronic column fixed above the support for the integrated circuit for focusing the primary electron beam emitted at the surface of the circuit on the points of the circuit to be tested. It also includes an accelerator of the secondary electrons emitted by the integrated circuit in a direction colinear and opposite that of the primary electron beam, a separator with three pole pieces for directing out of the column the beam of secondary electrons accelerated by the accelerator and an energy spectrometer coupled to the separator and fixed to the outside of the column for analyzing, depending on their energy, the electrons of the beam of secondary electrons emitted separately by the separator.

摘要翻译： 包括一次电子源的电子束集成电路测试器，集成电路的支撑和固定在用于集成电路的支撑件上的电子柱，用于将在电路表面处发射的一次电子束聚焦在 电路要测试。 它还包括由集成电路发射的二次电子的加速器，其方向与一次电子束的方向并联，并且与一次电子束的方向相反;具有三个极片的分离器，用于将由加速器加速的二次电子束引出列， 能量光谱仪耦合到分离器并固定到柱的外部，用于根据其能量分析由分离器单独发射的二次电子束的电子。

公开(公告)号：US4769527A

公开(公告)日：1988-09-06

申请号：US903454

申请日：1986-09-04

申请人： Alan D. Hart ,  Alan P. Pritchard

发明人： Alan D. Hart ,  Alan P. Pritchard

IPC分类号： B41J2/355 ,  F41J2/02 ,  G01R31/302 ,  H05B1/00

CPC分类号： B41J2/355 ,  F41J2/02 ,  G01R31/302

摘要： A thermal image producing device comprising an array of separately addressable thin-film resistors on a substrate with a heat sink at its near face and, so as to render the heat flux flowing through the substrate into the heat sink spatially and temporarily uniform, e.g. to avoid smearing, an array of compensating resistors, each beneath a respective one of the image producing resistors and separated therefrom by an insulating layer. Each compensating resistor is controlled so that, it and its associated image producing resistor together, produce a uniform total heat flux.

摘要翻译： 一种热图像产生装置，包括在其近侧具有散热器的基板上的独立可寻址的薄膜电阻器的阵列，并且使得热通量在空间上暂时均匀地流过衬底进入散热器，例如， 以避免涂抹一组补偿电阻器，每个补偿电阻器各自位于图像产生电阻器的相应一个下方，并通过绝缘层与其分离。 控制每个补偿电阻器，使其及其相关联的图像产生电阻器一起产生均匀的总热通量。

公开(公告)号：US4730158A

公开(公告)日：1988-03-08

申请号：US871231

申请日：1986-06-06

申请人： Ichiro Kasai ,  Roderic L. Osgood ,  Charley B. Burgett ,  Richard J. Joyce ,  Michael D. Warfield

发明人： Ichiro Kasai ,  Roderic L. Osgood ,  Charley B. Burgett ,  Richard J. Joyce ,  Michael D. Warfield

IPC分类号： G01R31/26 ,  G01R31/265 ,  G01R31/28 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  H01L31/10

CPC分类号： G01R31/2653 ,  G01R31/2603 ,  G01R31/2635 ,  H02S50/10

摘要： Method and apparatus for testing photodiode arrays using an electron beam. The diodes are charged at successive intervals over the RC time constant curve to develop successively increasing voltages at the ends of succeeding time intervals. Diode voltage and current are measured at the end of each interval and the resulting data are used to develop a current-voltage characteristic for each diode.

摘要翻译： 使用电子束测试光电二极管阵列的方法和装置。 二极管在RC时间常数曲线上以连续的间隔充电，以在随后的时间间隔的末端形成连续增加的电压。 在每个间隔结束时测量二极管电压和电流，并且使用所得数据来开发每个二极管的电流 - 电压特性。

公开(公告)号：US4712057A

公开(公告)日：1987-12-08

申请号：US705341

申请日：1985-01-18

申请人： Louis F. Pau

发明人： Louis F. Pau

IPC分类号： G01R31/28 ,  G01R19/00 ,  G01R19/155 ,  G01R31/302 ,  G01R31/304 ,  G01R31/305 ,  G01R31/308 ,  G01R31/02

CPC分类号： G01R31/305 ,  G01R31/304 ,  G01R31/308

摘要： This method is based on the radiation-matter interaction in a structure having discontinuities and where electron transport occurs in at least one layer. To this end, a stimulation signal is sent through the device under test and simultaneously at least one source of radiation sends incident radiation towards the surface of the device. The secondary radiation emitted by the device is detected together with the response of the device. The signals are compared, either individually or in combination, with a reference.

摘要翻译： PCT No.PCT / CH84 / 00081 Sec。 371日期1985年1月18日 102（e）日期1985年1月18日PCT提交1984年5月22日PCT公布。 第WO84 / 04819号公报 日期为1984年12月6日。该方法基于具有不连续性的结构中的辐射 - 物质相互作用，并且电子传输发生在至少一层中。 为此，刺激信号通过被测设备发送，同时至少一个辐射源将入射辐射发射到设备的表面。 与设备的响应一起检测由设备发射的二次辐射。 将信号单独地或组合地与参考进行比较。

公开(公告)号：US4683376A

公开(公告)日：1987-07-28

申请号：US773863

申请日：1985-09-09

申请人： Hans-Peter Feuerbaum

发明人： Hans-Peter Feuerbaum

IPC分类号： G01R19/00 ,  G01Q30/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/05 ,  H01J37/26 ,  G01N23/00

CPC分类号： H01J37/05 ,  G01R31/305 ,  H01J37/268

摘要： An electrostatic opposing field spectrometer has an extraction electrode (AN) and an opposing field electrode arrangement with a pair of planar opposing field electrodes (EG1 and EG2) mounted to an outer electrode part (EM) at either end of a truncated conical shaped bore extending therethrough, where the smaller opening of the bore is in the direction of the extraction electrode (AN). The planar opposing field electrodes (EG1 and EG2), in conjunction with the bore surface, generates substantially spherical equi-potential lines (A1 and A2) which transmit a larger solid angle distribution of secondary electrons (SE) triggered at a measuring point (M) on the specimen surface (PR).

摘要翻译： 静电相对场光谱仪具有提取电极（AN）和相对的场电极装置，其具有一对平面相对的场电极（EG1和EG2），其安装到在截锥形孔延伸的任一端的外电极部分（EM） 其中孔的较小开口沿着提取电极（AN）的方向。 平面相对的场电极（EG1和EG2）与孔表面一起产生基本上球形的等电位线（A1和A2），其传播在测量点（M）处触发的二次电子（SE）的较大立体角分布 ）在样品表面（PR）上。

公开(公告)号：US4658137A

公开(公告)日：1987-04-14

申请号：US662001

申请日：1984-10-18

申请人： Simon C. J. Garth ,  William C. Nixon

发明人： Simon C. J. Garth ,  William C. Nixon

IPC分类号： G01R19/155 ,  G01R19/00 ,  G01R31/28 ,  G01R31/302 ,  G01R31/305 ,  H01J37/244 ,  H01J37/26

CPC分类号： H01J37/244 ,  G01R31/305 ,  H01J37/05 ,  H01J2237/053 ,  H01J2237/2443 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

摘要： Electron detector apparatus and method for detecting secondary electrons released from a body, of particular utility in testing integrated circuits in an operational state. The apparatus utilizes a magnetic lens having an axis of symmetry, for producing a magnetic field that progressively weakens along the axis, so that the secondary electrons travel through the magnetic lens in progressively elongated helical paths and approach an electron retarding means, for example a planar grid, at approach angles to the direction of the axis such that their approach speeds along the axis are substantially equal to their actual speeds. The secondary electrons are collected after passage through the retarding means. Alternatively, the secondary electrons may be directed through a magnetic lens having an axis of symmetry to focus them at a small region at one end of the lens on which a part spherical electron retarding electrode is centered, such that the focussed secondary electrons proceed along radial paths to the retarding electrode, such that their approach speeds are substantially equal to their actual speeds.

摘要翻译： 用于检测从身体释放的二次电子的电子检测器装置和方法，特别用于在操作状态下测试集成电路。 该装置利用具有对称轴的磁性透镜，用于产生沿着轴逐渐变弱的磁场，使得二次电子以逐渐伸长的螺旋路径行进通过磁性透镜，并接近电子延迟装置，例如平面 在与轴线方向接近的角度处，使得它们沿着轴的进近速度基本上等于它们的实际速度。 二次电子通过阻滞装置后被收集。 或者，二次电子可以被引导通过具有对称轴的磁性透镜，以将它们聚焦在部分球形电子延迟电极所在的透镜的一端的小区域处，使得聚焦的二次电子沿着径向 到达延迟电极的路径，使得其接近速度基本上等于其实际速度。

公开(公告)号：US4609867A

公开(公告)日：1986-09-02

申请号：US513763

申请日：1983-07-14

申请人： Helmut Schink

发明人： Helmut Schink

IPC分类号： G01R31/26 ,  G01Q30/02 ,  G01R31/265 ,  G01R31/302 ,  H01L21/66

CPC分类号： G01R31/265

摘要： A method is provided for measuring electrical potentials at solid state matter wherein an ionizing radiation is directed against a measuring point at the surface, whereby a conductive connection between the measuring point at the surface and a measuring point at the solid state matter is produced, its electrical potential to be measured. Electrical potentials are measured at a solid state substance even when the solid state matter is hidden beneath at least one conductive layer and at least one insulating layer. The electrical potential at the solid state matter is identified by measuring induced specimen current.

摘要翻译： 提供了一种用于测量固体物质电位的方法，其中电离辐射指向表面处的测量点，由此产生表面上的测量点与固态物质的测量点之间的导电连接，其 要测量的电位。 即使当固体物质隐藏在至少一个导电层和至少一个绝缘层下方时，电势也在固态物质下测量。 通过测量诱导的样品电流来识别固态物质的电位。