公开(公告)号：US08422630B2

公开(公告)日：2013-04-16

申请号：US12802401

申请日：2010-06-07

Applicant: Yoshiki Matoba

Inventor： Yoshiki Matoba

IPC: G01N23/06

CPC classification number: G01N23/083

Abstract: In order to prevent misdetection and erroneous detection by clearly determining only a contrast caused by a foreign matter, there are provided an X-ray inspection method and an X-ray inspection device including: an X-ray tube (11) for irradiating a measurement sample with a characteristic X-ray having energy lower than an X-ray absorption edge of one element contained in the measurement sample and having energy higher than an X-ray absorption edge of a detection element; an X-ray detector (13) for receiving a transmission X-ray obtained when the X-ray passes through the sample; and an operation portion (15) for obtaining a contrast image from a transmission image of the transmission X-ray.

Abstract translation: 为了通过清楚地仅确定由异物引起的对比度来防止错误检测和错误检测，提供了一种X射线检查方法和X射线检查装置，其包括：用于照射测量的X射线管（11） 样品具有能量低于测量样品中包含的一种元素的X射线吸收边缘的能量的特征X射线，并且具有高于检测元件的X射线吸收边缘的能量; X射线检测器（13），用于接收当X射线通过样品时获得的透射X射线; 以及用于从透射X射线的透射图像获得对比度图像的操作部分（15）。

公开(公告)号：US08124932B2

公开(公告)日：2012-02-28

申请号：US12310149

申请日：2007-08-03

Applicant: Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

Inventor： Takashi Ogawa ,  Yo Yamamoto ,  Hiroshi Matsumura

IPC: G01N23/00

CPC classification number: H01J37/09 ,  H01J37/15 ,  H01J37/20 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/024 ,  H01J2237/0458

Abstract: A charged particle beam apparatus includes a charged particle source, an aperture, an object lens, an observing unit, an aperture driving portion, and a control portion. The control portion includes a spot pattern forming portion that forms a plurality of spot patterns on a surface of a sample by irradiating a charged particle beam, an analyzing portion that calculates a position of a spot center of the spot pattern and a geometrical center position of a halo, and an adjusting position determining portion that calculates an adjusting position based on a position of intersecting lines connecting the positions of the spot centers of the respective spot patterns and the center position of the halo. In this manner, the position of the aperture can be easily and accurately adjusted in a short period of time by moving the center axis of the aperture to the adjusting position.

Abstract translation: 带电粒子束装置包括带电粒子源，孔径，物镜，观察单元，孔径驱动部分和控制部分。 控制部分包括通过照射带电粒子束在样品的表面上形成多个斑点图案的斑点图形形成部分，计算斑点图案的斑点中心的位置和几何中心位置的分析部分 光圈和调整位置确定部分，其基于连接各个光点图案的光点中心的位置和光晕的中心位置的交叉线的位置来计算调整位置。 以这种方式，通过将孔的中心轴线移动到调节位置，可以在短时间内容易且精确地调节孔径的位置。

公开(公告)号：US08115367B2

公开(公告)日：2012-02-14

申请号：US12276740

申请日：2008-11-24

Applicant: Masato Iyoki

Inventor： Masato Iyoki

IPC: H01L41/08 ,  H01L41/047

CPC classification number: G01B7/18 ,  G01Q10/04 ,  H01L41/04 ,  H01L41/042 ,  H01L41/083 ,  H01L41/092

Abstract: By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element. A piezoelectric actuator includes the piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof. The piezoelectric actuator also includes a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element, a driver power supply for applying a voltage to generate strain in the piezoelectric element, resistors provided on the electrodes through intermediation of insulators, and a displacement detection device connected with the resistors. The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.

Abstract translation: 通过由压电元件附着的电阻器，可以通过压电元件的应变以高精度进行测量。 压电致动器包括形成任意形状的压电元件，其在任意方向上极化，并且包括设置在其厚度方向上相对的至少两个表面上的电极。 压电致动器还包括用于在电极之间施加电压以在压电元件中产生应变的驱动器电源，用于施加电压以在压电元件中产生应变的驱动器电源，通过绝缘体通过电极设置在电极上， 以及与电阻器连接的位移检测装置。 设置有电阻器的压电元件的电极设定为接地电位。

公开(公告)号：US08068583B2

公开(公告)日：2011-11-29

申请号：US12494851

申请日：2009-06-30

Applicant: Yoshiki Matoba ,  Kanji Nagasawa

Inventor： Yoshiki Matoba ,  Kanji Nagasawa

IPC: G01B15/00 ,  G01N23/201

CPC classification number: G01N23/223 ,  G01N2223/076

Abstract: Provided is an X-ray analysis apparatus including: an X-ray tubular bulb for irradiating a sample with a radiation beam; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray and outputting a signal containing energy information on the characteristic X-ray and the scattered X-ray; an analyzer for analyzing the signal; a sample stage capable of moving an irradiation point relatively with respect to the sample within a mapping area set in advance; and an X-ray mapping processing section for discriminating an X-ray intensity corresponding to a specific element, determining an intensity contrast in which a color or lightness is changed in accordance with the X-ray intensity, and for performing image display at a position corresponding to the irradiation point, in which the X-ray mapping processing section determines the intensity contrast of the X-ray intensity at the irradiation point by setting in advance the X-ray intensity discriminated as to a reference material in which a component element and a concentration thereof are known as a reference.

Abstract translation: 本发明提供一种X射线分析装置，其特征在于，包括：X射线管状灯泡，用于对辐射束照射样品; 用于检测特征X射线和散射X射线并输出包含关于特征X射线和散射X射线的能量信息的信号的X射线检测器; 用于分析信号的分析器; 能够在预先设定的映射区域内相对于样本移动照射点的样本台; 以及X射线映射处理部分，用于鉴别与特定元素相对应的X射线强度，确定根据X射线强度改变颜色或亮度的强度对比度，并且在位置处执行图像显示 对应于照射点，其中X射线测绘处理部分通过预先确定对于其中组分元素和/或组分的参考材料的X射线强度来确定在照射点处的X射线强度的强度对比度 其浓度被称为参考。

公开(公告)号：US08024816B2

公开(公告)日：2011-09-20

申请号：US12700236

申请日：2010-02-04

Applicant: Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

Inventor： Masato Iyoki ,  Yoshiteru Shikakura ,  Masafumi Watanabe

IPC: G01Q10/00 ,  G02B6/26

CPC classification number: G01Q10/06

Abstract: In detecting a displacement of a cantilever (2) by a displacement detecting mechanism (5) and allowing a probe (1) and a sample (8) to approach each other by at least one of a coarse-movement mechanism (13) and a vertical direction fine-movement mechanism (11) at the same time, an excitation mechanism (4) excites the cantilever (2) with a first excitation condition and the probe (1) and the sample (8) are allowed to approach each other with a first stop condition, and then the cantilever (2) is excited with a second excitation condition different from the first excitation condition, a second stop condition is set, and the probe (1) and the sample (8) are allowed to approach each other by the at least one of the vertical direction fine-movement mechanism (11) and the coarse-movement mechanism (13) until the second stop condition is satisfied.

Abstract translation: 在通过位移检测机构（5）检测悬臂（2）的位移并且允许探针（1）和样品（8）通过粗略运动机构（13）和 垂直方向微动机构（11）同时激励机构（4）以第一激励条件激发悬臂（2），使探头（1）和样品（8）彼此靠近 第一停止条件，然后用与第一激励条件不同的第二激励条件激励悬臂（2），设置第二停止条件，并且允许探头（1）和样品（8）接近每个 另外通过垂直方向微动机构11和粗动机构13中的至少一个，直到满足第二停止条件为止。

公开(公告)号：US07804066B2

公开(公告)日：2010-09-28

申请号：US12177563

申请日：2008-07-22

Applicant: Takashi Ogawa ,  Hiroto Muto

Inventor： Takashi Ogawa ,  Hiroto Muto

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/02 ,  H01J37/16 ,  H01J37/185 ,  H01J2237/022 ,  H01J2237/12 ,  H01J2237/31749

Abstract: Provided is a charged-particle beam apparatus capable of preventing a small amount of dust from being attached to an electrostatic lens serving as an objective lens to apply a high voltage to the electrostatic lens.The charged-particle beam apparatus 1 includes a chamber 2 which has an interior 2a evacuated by an intra-chamber evacuating means 4, and a lens-barrel 3 which emits a charged-particle beam B1 onto a sample S put in the interior 2a of the chamber 2. The lens-barrel 3 includes a cylindrical body 5 which includes an emission outlet 6 for emission of the charged-particle beam B1, a charged-particle supply part 7 which is housed at a side of a proximal end 5b in an interior 5a of the cylindrical body 5 and releases the charged-particle beam B1, and an objective lens 11 which is housed at a side of a distal end 5b in the interior 5b of the cylindrical body 5 and has an electrostatic lens for generating an electric field and converging the charged-particle beam B1 released from the charged-particle supply part 7. The cylindrical body 5 of the lens-barrel 3 is provided with a gas supplying means 12 capable of supplying a gas G to the interior 5b of the cylindrical body 5, and the gas supplying means 12 is provided at a side of a proximal end of the objective lens 11.

Abstract translation: 本发明提供一种能够防止少量灰尘附着在作为物镜的静电透镜上以对静电透镜施加高电压的带电粒子束装置。 带电粒子束装置1包括：腔室2，其具有通过室内排气装置4抽真空的内部2a;以及透镜筒3，其将带电粒子束B1发射到放置在内部2a的内部2a中的样品S上 透镜镜筒3包括圆柱体5，其包括用于发射带电粒子束B1的发射出口6，带电粒子供应部分7，其被容纳在基端部5b的一侧 圆筒体5的内部5a并释放带电粒子束B1，以及物镜11，其容纳在圆筒体5的内部5b中的远端5b的一侧，并具有用于产生电 并且使从带电粒子供应部件7释放的带电粒子束B1会聚。透镜镜筒3的圆柱体5设置有气体供给装置12，其能够将气体G供应到圆柱形 主体5和气体供应 g装置12设置在物镜11的近端的一侧。

公开(公告)号：US07789557B2

公开(公告)日：2010-09-07

申请号：US11810767

申请日：2007-06-07

Applicant: Keiichi Tanaka ,  Akikazu Odawara ,  Satoshi Nakayama

Inventor： Keiichi Tanaka ,  Akikazu Odawara ,  Satoshi Nakayama

IPC: G01K7/00 ,  G01K17/00 ,  H01L39/00

CPC classification number: G01T1/26 ,  G01T1/1606

Abstract: A superconducting radiometry apparatus has a micro-calorie meter that detects an energy of a radiant ray as a temperature change. A signal detection mechanism detects an electric current flowing to the micro-calorie meter. A heat addition device adds a quantity of heat to the micro-calorie meter. A peak value monitor measures, in synchronization with the addition of the quantity of heat to the micro-calorie meter, a peak value of an output voltage corresponding to an output signal from the signal detection mechanism. An energy correction device corrects, on the basis of an output from the peak value monitor, an energy value so as to become a peak value corresponding to the quantity of heat added to the micro-calorie meter.

Abstract translation: 超导辐射测量装置具有微量热量计，其将辐射光的能量作为温度变化进行检测。 信号检测机构检测流向微量热仪的电流。 加热装置将一定量的热量加热到微量热计。 峰值监视器与向微卡计量器加热量同步地测量与来自信号检测机构的输出信号对应的输出电压的峰值。 能量校正装置根据峰值监视器的输出校正能量值，以便成为与添加到微量热计的热量对应的峰值。

公开(公告)号：US07787133B2

公开(公告)日：2010-08-31

申请号：US11840549

申请日：2007-08-17

Applicant: Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

Inventor： Masato Iyoki ,  Hiroyoshi Yamamoto ,  Kazutoshi Watanabe

IPC: G01B11/14

CPC classification number: G01Q20/02

Abstract: The optical displacement-detecting mechanism has: a light source for irradiating a target for measurement with light; a light source-driving circuit for driving the light source; an optical detector made from a semiconductor for receiving light after the irradiation of the target for measurement by the light source and converting the light into an electric signal thereby to detect an intensity of light; and an amplifier including a current-voltage conversion circuit for performing current-to-voltage conversion on a detection signal of the optical detector with a predetermined amplification factor. In the optical displacement-detecting mechanism, a light source having a spectrum half width of 10 nm or larger is used, whereby the light source can be driven with an output power of 2 mW or larger without generating mode hop noise and optical feedback noise.

Abstract translation: 光学位移检测机构具有：用光照射被测物的光源; 用于驱动光源的光源驱动电路; 由半导体制成的光检测器，用于在由光源照射测量目标物之后接收光，并将光转换成电信号从而检测光的强度; 以及放大器，其包括用于以预定的放大系数对光学检测器的检测信号进行电流 - 电压转换的电流 - 电压转换电路。 在光学位移检测机构中，使用光谱半宽度为10nm以上的光源，由此可以以2mW以上的输出功率驱动光源，而不产生模式跳噪声和光反馈噪声。

公开(公告)号：US07641384B2

公开(公告)日：2010-01-05

申请号：US11879554

申请日：2007-07-18

Applicant: Rintaro Nakatani ,  Ryoichi Kinoshita ,  Shinya Nishimura

Inventor： Rintaro Nakatani ,  Ryoichi Kinoshita ,  Shinya Nishimura

IPC: G01K17/02

CPC classification number: G01N25/20

Abstract: To enable the reduction in working efforts by hand by performing control a drying operation by appropriately selecting dry conditions depending on the connection mode of the cooling device, and removal of moisture and the like without fail. The thermal analysis system uses a heater and a cooling device to raise and decrease the temperature inside the purge box. In the drying method for the thermal analysis system, the drying operation is performed by: previously setting dry conditions depending on the connection mode of the cooling device; starting control of an opening time dry process upon activation of the thermal analysis system; supplying a predetermined amount of dry gas into the purge box in accordance with the dry conditions corresponding to the selected connection mode of the cooling device with the cooling device kept off; and making the temperature control module control the temperature of the dry gas.

Abstract translation: 为了通过根据冷却装置的连接方式适当地选择干燥条件并且不会失去湿气等而进行干燥操作来实现手工减少工作。 热分析系统使用加热器和冷却装置来提高和降低清洗箱内的温度。 在热分析系统的干燥方法中，通过以下方式进行干燥操作：根据冷却装置的连接方式预先设定干燥条件; 在激活热分析系统时开始控制开放时间干燥过程; 根据与冷却装置的所选择的连接模式相对应的干燥条件将冷却装置保持关闭的预定量的干燥气体供应到净化箱中; 并使温度控制模块控制干燥气体的温度。

公开(公告)号：US07571639B2

公开(公告)日：2009-08-11

申请号：US11796996

申请日：2007-04-27

Applicant: Toshio Doi ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto

Inventor： Toshio Doi ,  Kazutoshi Watanabe ,  Osamu Takaoka ,  Atsushi Uemoto

IPC: H01J37/352

CPC classification number: G03F1/72 ,  G01Q10/06 ,  G01Q30/06 ,  G01Q80/00

Abstract: An opaque defect is processed by scanning with a high load or height fixed mode using a probe harder than a pattern material of a photomask at the time of going scanning, and is observed by scanning with a low load or intermittent contact mode at the time of returning scanning so as to detect an ending point of the opaque defect by the height information. When there is a portion reaching to a glass substrate as an ending point, this portion is not scanned by the high load or height fixed mode in the next processing, and only a portion not reaching to the ending point is scanned by the high load or height fixed mode.

Abstract translation: 通过使用在扫描时比光掩模的图案材料更硬的探针，以高负载或高度固定模式进行扫描来处理不透明缺陷，并且通过在低负载或间歇接触模式下扫描来观察不透明缺陷 返回扫描，以便通过高度信息检测不透明缺陷的终点。 当到达玻璃基板的部分为终点时，在下一个处理中该部分不被高负载或高度固定模式扫描，并且只有未到达终点的部分被高负载扫描 高度固定模式。