Abstract:
A non-volatile memory device comprises a cell region defined at a substrate and a plurality of device isolation layers formed in the cell region to define a plurality of active regions. A charge storage insulator covers substantially the entire top surface of the cell region. A plurality of gate lines are formed on the charge storage insulator that cross over the device isolation layers. Conductive patterns are disposed between predetermined gate lines that penetrate the charge storage insulator to electrically connect with the active regions. According to the method of fabricating the device, a plurality of device isolation layers are formed in the substrate and then a charge storage insulator is formed on an entire surface of the substrate and the device isolation layers. A plurality of parallel gate lines that cross over the device isolation layers are formed on the charge storage insulator and then conductive patterns are formed between predetermined gate lines. The conductive patterns penetrate the charge storage insulator and electrically connect with the active regions.
Abstract:
Flash memory devices are provided including an integrated circuit substrate and a stack gate structure on the integrated circuit substrate. A trench isolation region is provided on the integrated circuit substrate adjacent the stack gate structure. A portion of the stack gate structure adjacent a trench sidewall of the trench isolation region may include a first nitrogen doped layer.
Abstract:
A lower insulation layer, a charge storing layer, and an upper insulation layer are sequentially stacked on a substrate to form a gate insulation layer. A gate conductive layer is formed on the gate insulation layer. The gate electrode is patterned to expose a surface of the gate insulation layer. The charge storing layer is a barrier layer to oxygen diffusion during oxidization for curing etching damages caused by patterning. Thus, a gate bird's beak is prevented in the lower insulation layer. Spacers are formed on sidewalls of the gate electrode. The upper insulation layer is etched using the gate electrode and the spacers as an etch mask. Impurity ions are implanted into the substrate adjacent to the gate electrode to form an impurity region. Since an upper insulation layer is not exposed during the ion implantation process, the upper insulation layer is not damaged.
Abstract:
The present invention is disclosed to maintain a stable installation state of a brake pedal under normal conditions and to automatically release a fixed state of the brake pedal when the pedal receives a thrusting force from a vehicle collision to thereby transmit that impact toward the driver, thus preventing the pedal from impacting the driver and minimizing injury to the driver.
Abstract:
A lower insulation layer, a charge storing layer, and an upper insulation layer are sequentially stacked on a substrate to form a gate insulation layer. A gate conductive layer is formed on the gate insulation layer. The gate electrode is patterned to expose a surface of the gate insulation layer. The charge storing layer is a barrier layer to oxygen diffusion during oxidization for curing etching damages caused by patterning. Thus, a gate bird's beak is prevented in the lower insulation layer. Spacers are formed on sidewalls of the gate electrode. The upper insulation layer is etched using the gate electrode and the spacers as an etch mask. Impurity ions are implanted into the substrate adjacent to the gate electrode to form an impurity region. Since an upper insulation layer is not exposed during the ion implantation process, the upper insulation layer is not damaged.
Abstract:
A non-volatile memory device and fabrication method thereof are provided. A floating region is formed on an active region on a substrate. Trenches define the active region. The floating region is made of an ONO layer. A gate electrode is formed on the floating region. A mask is formed on the gate electrode. A thermal oxidation is performed to make a sidewall oxide and a trench oxide on the sidewall of the gate electrode and the trench, respectively. As a result, the widths of the gate electrode and the active region become less than the width of the floating region, thereby forming protrusions at ends of the floating region. Isolation regions are formed in the trenches and include the sidewall oxide and the trench oxide. The isolation regions surround the protrusions. As a result, electric field induced on the sidewall of the floating region is decreased. Moreover, the thermal oxidation cures any damage to the sidewalls of the floating region. Accordingly, leakage current can be substantially suppressed at the boundary region between the isolation region and the floating region.
Abstract:
A non-volatile memory device includes a cell region having a memory gate pattern with a charge storage layer, and a peripheral region having a high-voltage-type gate pattern, a low-voltage-type gate pattern, and a resistor pattern. To fabricate the above memory device, a device isolation layer is formed in a substrate. Gate insulating layers having difference thickness are formed in low-and high-voltage regions of the peripheral region, respectively. A first conductive layer is formed over substantially the entire surface of a gate insulating layer in the peripheral region. A triple layer including a tunneling insulating layer, a charge storage layer, and a blocking insulating layer and a second conductive layer are sequentially formed over substantially the entire surface of the substrate including the first conductive layer.
Abstract:
A photocathode structure having a photoelectric face plate protective layer, in order to prevent a photoelectric effect from being deteriorated sharply due to a high reaction of oxygen with respect to most of existing photoelectric face plate materials when the photoelectric face plate used for generating photoelectrons by a photoelectric effect is exposed to the atmosphere, is provided. For example, a diamond-like carbon thin layer is used as a photocathode protective layer, to thereby perform a function of protection of the photoelectric face plate through isolation of the photoelectric face plate from the atmosphere and enable electrons generated from the photoelectric face plate to pass through a diamond-like carbon thin layer, which is deposited thinly, by the tunneling effect so that the performance of the photocathode is not affected. By using the protective layer, the processes subsequent to the photoelectric face plate deposition process can be freely performed in the atmosphere, to thereby simplify the whole process. As a result, a production cost is lowered, and manufacturing of a device or apparatus using a large-are photocathode is facilitated.
Abstract:
The invention relates to a diamond saw blade which is made by attaching improved undercut preventing tips, produced by diffusing and joining cobalt-based powder onto ultra hard tips at a high temperature, to respective shank slot walls formed on the circumference of a diamond saw blade by means of laser welding in order to remove drawbacks of high cost or insecurity with the conventional art. According to the present invention, there is proposed a diamond saw blade with a shank, and with plural diamond tips provided on the circumference of the shank at a finite interval, slots for discharging cut chips being positioned between the adjoining diamond tips, further comprising undercut preventing tips disposed on respective walls of said slots, said undercut preventing tips including tungsten-carbide-based ultra hard tips provided with cobalt-based layer, wherein said undercut preventing tips are formed by diffusing and joining the cobalt-based powder to said ultra hard tips at a high temperature and said undercut preventing tips are fixed on respective walls of said slots by means of laser welding.
Abstract:
An adhesive sheet for noise and shock absorption and a saw blade making use of it and manufacturing methods therefor for use in joining components of a cutting or grinding apparatus to generate vibrations and noises such as a cutting saw machine for a grinding or cutting material such as brick, concrete, granite, marble, etc. The adhesive sheet according to the present invention is composed of a resin adhesive such as denaturalized epoxy resin, phenol resin, rubber, or compound composition thereof etc., and a noise and shock absorption material infiltrated with the resin adhesive, and fabricated by infiltrating the noise and shock absorption material such as non-woven fabric, paper, or textiles with the resin adhesive such as denaturalized epoxy resin, phenol resin, rubber, or compound composition thereof etc., and drying the infiltrated noise and shock absorption material at a predetermined temperature for several minutes and hardening it by half. The saw blade for use in the cutting or grinding apparatus of the present invention is composed of a wheel body for connecting with a shaft of an electric motor having upper and lower wheel portions, and an adhesive sheet layer including a noise and shock absorption material disposed between upper and lower wheel portions of the wheel body, and fabricated by positioning the adhesive sheet for noise and shock absorption between upper and lower wheel portions of the wheel body, and hardening wheel portions and the adhesive sheet therebetween at a predetermined temperature and pressure for given times.