PHOTOMASK STRUCTURE
    162.
    发明公开
    PHOTOMASK STRUCTURE 审中-公开

    公开(公告)号:US20240085780A1

    公开(公告)日:2024-03-14

    申请号:US17965730

    申请日:2022-10-13

    CPC classification number: G03F1/76 G03F1/36

    Abstract: A photomask structure having a first region and a second region is provided. The layout pattern density of the first region is smaller than the layout pattern density of the second region. The photomask structure includes a first layout pattern, a second layout pattern, and first assist patterns. The first layout pattern is located in the first region and the second region. The second layout pattern is located in the second region. The second layout pattern is located on one side of the first layout pattern. The first assist patterns are located on the first sidewall of the first layout pattern and separated from each other. The first sidewall is adjacent to the second layout pattern. The first assist patterns are adjacent to a boundary between the first region and the second region. The lengths of two adjacent first assist patterns decrease in the direction away from the boundary.

    HEMT and method of fabricating the same

    公开(公告)号:US11929431B2

    公开(公告)日:2024-03-12

    申请号:US18138145

    申请日:2023-04-24

    CPC classification number: H01L29/7787 H01L29/66462

    Abstract: A high electron mobility transistor includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer. The composition of the first III-V compound layer and the second III-V compound layer are different from each other. A shallow recess, a first deep recess and a second deep recess are disposed in the second III-V compound layer. The first deep recess and the second deep recess are respectively disposed at two sides of the shallow recess. The source electrode fills in the first deep recess and contacts the top surface of the first III-V compound layer. A drain electrode fills in the second deep recess and contacts the top surface of the first III-V compound layer. The shape of the source electrode and the shape of the drain electrode are different from each other. A gate electrode is disposed on the shallow recess.

    High voltage semiconductor device and manufacturing method thereof

    公开(公告)号:US11923435B2

    公开(公告)日:2024-03-05

    申请号:US17723438

    申请日:2022-04-18

    CPC classification number: H01L29/6656 H01L29/66674 H01L29/7801

    Abstract: A high voltage semiconductor device includes a semiconductor substrate, a first drift region, a gate structure, a first sub gate structure, a first spacer structure, a second spacer structure, and a first insulation structure. The first drift region is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate and separated from the first sub gate structure. The first sub gate structure and the first insulation structure are disposed on the first drift region. The first spacer structure is disposed on a sidewall of the gate structure. The second spacer structure is disposed on a sidewall of the first sub gate structure. At least a part of the first insulation structure is located between the first spacer structure and the second spacer structure. The first insulation structure is directly connected with the first drift region located between the first spacer structure and the second spacer structure.

    Semiconductor structure
    165.
    发明授权

    公开(公告)号:US11923373B2

    公开(公告)日:2024-03-05

    申请号:US17502026

    申请日:2021-10-14

    Abstract: A semiconductor structure includes a semiconductor on insulator (SOI) substrate, a first electrically conductive structure, and a second electrically conductive structure. The SOI substrate includes a base substrate, a buried insulation layer disposed on the base substrate, a semiconductor layer disposed on the buried insulation layer, and a trap rich layer disposed between the buried insulation layer and the base substrate. At least a part of the first electrically conductive structure and at least a part of the second electrically conductive structure are disposed in the trap rich layer. A part of the trap rich layer is disposed between the first electrically conductive structure and the second electrically conductive structure. The first electrically conductive structure, the second electrically conductive structure, and the trap rich layer disposed between the first electrically conductive structure and the second electrically conductive structure are at least a portion of an anti-fuse structure.

    HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FORMING THE SAME

    公开(公告)号:US20240072153A1

    公开(公告)日:2024-02-29

    申请号:US18506101

    申请日:2023-11-09

    CPC classification number: H01L29/66431 H01L29/7786

    Abstract: A method for forming a high electron mobility transistor includes the steps of providing a substrate, forming a channel layer, a barrier layer, and a first passivation layer sequentially on the substrate, forming a plurality of trenches through at least a portion of the first passivation layer, forming a second passivation layer on the first passivation layer and covering along sidewalls and bottom surfaces of the trenches, and forming a conductive plate structure on the second passivation layer and filling the trenches.

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