Semiconductor Manufacturing Device and Method of Enhancing Mold Gate Injector and Air Vent to Reduce Voids in Encapsulant

    公开(公告)号:US20220250296A1

    公开(公告)日:2022-08-11

    申请号:US17304339

    申请日:2021-06-18

    Abstract: A semiconductor manufacturing device has a strip panel and a plurality of electrical components disposed over the strip panel. An encapsulant is disposed over the electrical components using a mold gate injector and directed in a path toward higher flow resistance for the encapsulant over the electrical components. The mold gate injector can be shifted toward a side of the strip panel with the path toward higher flow resistance for the encapsulant. The mold gate injector can have a discharge port smaller than the mold gate injector directed at the path toward higher flow resistance for the encapsulant. The discharge port injector can be shifted toward a side of the strip panel with the path toward higher flow resistance for the encapsulant. An air vent and air tank can be coupled to the mold gate injector to aid in release of excess air from the encapsulant.

    Semiconductor device and method of forming microelectromechanical systems (MEMS) package

    公开(公告)号:US11370655B2

    公开(公告)日:2022-06-28

    申请号:US16825567

    申请日:2020-03-20

    Abstract: A semiconductor device has a first semiconductor die and a modular interconnect structure adjacent to the first semiconductor die. An encapsulant is deposited over the first semiconductor die and modular interconnect structure as a reconstituted panel. An interconnect structure is formed over the first semiconductor die and modular interconnect structure. An active area of the first semiconductor die remains devoid of the interconnect structure. A second semiconductor die is mounted over the first semiconductor die with an active surface of the second semiconductor die oriented toward an active surface of the first semiconductor die. The reconstituted panel is singulated before or after mounting the second semiconductor die. The first or second semiconductor die includes a microelectromechanical system (MEMS). The second semiconductor die includes an encapsulant and an interconnect structure formed over the second semiconductor die. Alternatively, the second semiconductor die is mounted to an interposer disposed over the interconnect structure.

    Semiconductor device and method of forming SIP module over film layer

    公开(公告)号:US11309193B2

    公开(公告)日:2022-04-19

    申请号:US17010221

    申请日:2020-09-02

    Abstract: A semiconductor device has a semiconductor die or component, including an IPD, disposed over an attach area of a penetrable film layer with a portion of the semiconductor die or component embedded in the penetrable film layer. A conductive layer is formed over a portion of the film layer within the attach area and over a portion of the film layer outside the attach area. An encapsulant is deposited over the film layer, conductive layer, and semiconductor die or component. The conductive layer extends outside the encapsulant. An insulating material can be disposed under the semiconductor die or component. A shielding layer is formed over the encapsulant. The shielding layer is electrically connected to the conductive layer. The penetrable film layer is removed. The semiconductor die or component disposed over the film layer and covered by the encapsulant and shielding layer form an SIP module without a substrate.

    Method and Device for Reducing Metal Burrs When Sawing Semiconductor Packages

    公开(公告)号:US20220115332A1

    公开(公告)日:2022-04-14

    申请号:US17645257

    申请日:2021-12-20

    Abstract: A semiconductor device has a substrate. A conductive layer is formed over the substrate and includes a ground plane. A first tab of the conductive layer extends from the ground plane and less than half-way across a saw street of the substrate. A shape of the first tab can include elliptical, triangular, parallelogram, or rectangular portions, or any combination thereof. An encapsulant is deposited over the substrate. The encapsulant and substrate are singulated through the saw street. An electromagnetic interference (EMI) shielding layer is formed over the encapsulant. The EMI shielding layer contacts the first tab of the conductive layer.

    Semiconductor Device with Encapsulant Deposited Along Sides and Surface Edge of Semiconductor Die in Embedded WLCSP

    公开(公告)号:US20220093417A1

    公开(公告)日:2022-03-24

    申请号:US17457719

    申请日:2021-12-06

    Abstract: A semiconductor device has a semiconductor wafer including a plurality of semiconductor die. An insulating layer is formed over the semiconductor wafer. A portion of the insulating layer is removed by LDA to expose a portion of an active surface of the semiconductor die. A first conductive layer is formed over a contact pad on the active surface of the semiconductor die. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is disposed over a carrier with the active surface of the semiconductor die offset from the carrier. An encapsulant is deposited over the semiconductor die and carrier to cover a side of the semiconductor die and the exposed portion of the active surface. An interconnect structure is formed over the first conductive layer. Alternatively, a MUF material is deposited over a side of the semiconductor die and the exposed portion of the active surface.

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