公开(公告)号：US20240183026A1

公开(公告)日：2024-06-06

申请号：US18440068

申请日：2024-02-13

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  HunTeak Lee ,  Sell Jung ,  HeeSoo Lee

IPC: C23C14/50 ,  C23C14/34 ,  H01L23/00 ,  H01L23/498 ,  H01L23/552

CPC classification number: C23C14/50 ,  C23C14/34 ,  H01L23/49838 ,  H01L23/552 ,  H01L24/16 ,  H01L2224/16227 ,  H01L2924/19105 ,  H01L2924/19106 ,  H01L2924/3025

Abstract: A semiconductor manufacturing device has a cooling pad with a plurality of movable pins. The cooling pad includes a fluid pathway and a plurality of springs disposed in the fluid pathway. Each of the plurality of springs is disposed under a respective movable pin. A substrate includes an electrical component disposed over a surface of the substrate. The substrate is disposed over the cooling pad with the electrical component oriented toward the cooling pad. A force is applied to the substrate to compress the springs. At least one of the movable pins contacts the substrate. A cooling fluid is disposed through the fluid pathway.

公开(公告)号：US11932933B2

公开(公告)日：2024-03-19

申请号：US17814796

申请日：2022-07-25

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  HunTeak Lee ,  Sell Jung ,  HeeSoo Lee

IPC: C23C14/50 ,  C23C14/34 ,  H01L23/00 ,  H01L23/498 ,  H01L23/552

CPC classification number: C23C14/50 ,  C23C14/34 ,  H01L23/49838 ,  H01L23/552 ,  H01L24/16 ,  H01L2224/16227 ,  H01L2924/19105 ,  H01L2924/19106 ,  H01L2924/3025

Abstract: A semiconductor manufacturing device has a cooling pad with a plurality of movable pins. The cooling pad includes a fluid pathway and a plurality of springs disposed in the fluid pathway. Each of the plurality of springs is disposed under a respective movable pin. A substrate includes an electrical component disposed over a surface of the substrate. The substrate is disposed over the cooling pad with the electrical component oriented toward the cooling pad. A force is applied to the substrate to compress the springs. At least one of the movable pins contacts the substrate. A cooling fluid is disposed through the fluid pathway.

公开(公告)号：US11434561B2

公开(公告)日：2022-09-06

申请号：US17032437

申请日：2020-09-25

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  HunTeak Lee ,  Sell Jung ,  HeeSoo Lee

IPC: C23C14/50 ,  H01L23/00 ,  H01L23/498 ,  H01L23/552 ,  C23C14/34

Abstract: A semiconductor manufacturing device has a cooling pad with a plurality of movable pins. The cooling pad includes a fluid pathway and a plurality of springs disposed in the fluid pathway. Each of the plurality of springs is disposed under a respective movable pin. A substrate includes an electrical component disposed over a surface of the substrate. The substrate is disposed over the cooling pad with the electrical component oriented toward the cooling pad. A force is applied to the substrate to compress the springs. At least one of the movable pins contacts the substrate. A cooling fluid is disposed through the fluid pathway.

公开(公告)号：US20210301390A1

公开(公告)日：2021-09-30

申请号：US17032437

申请日：2020-09-25

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  HunTeak Lee ,  SeIl Jung ,  HeeSoo Lee

IPC: C23C14/50 ,  H01L23/00 ,  H01L23/498 ,  H01L23/552 ,  C23C14/34

Abstract: A semiconductor manufacturing device has a cooling pad with a plurality of movable pins. The cooling pad includes a fluid pathway and a plurality of springs disposed in the fluid pathway. Each of the plurality of springs is disposed under a respective movable pin. A substrate includes an electrical component disposed over a surface of the substrate. The substrate is disposed over the cooling pad with the electrical component oriented toward the cooling pad. A force is applied to the substrate to compress the springs. At least one of the movable pins contacts the substrate. A cooling fluid is disposed through the fluid pathway.

公开(公告)号：US10797039B2

公开(公告)日：2020-10-06

申请号：US15976455

申请日：2018-05-10

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： DeokKyung Yang ,  OhHan Kim ,  HeeSoo Lee ,  HunTeak Lee ,  InSang Yoon ,  Il Kwon Shim

IPC: H01L25/00 ,  H01L23/00 ,  H01L21/56 ,  H01L23/552 ,  H01L25/065 ,  H01L25/16 ,  H01L23/498 ,  H01L23/31 ,  H01L23/538 ,  H01L23/50

Abstract: A semiconductor device has a first substrate and a second substrate. An opening is formed through the second substrate. A first semiconductor component and second semiconductor component are disposed between the first substrate and second substrate. The second substrate is electrically coupled to the first substrate through the first semiconductor component. A first terminal of the first semiconductor component is electrically coupled to the first substrate. A second terminal of the first semiconductor component is electrically coupled to the second substrate. The second semiconductor component extends into the opening. An encapsulant is deposited over the first substrate and second substrate.

公开(公告)号：US10418341B2

公开(公告)日：2019-09-17

申请号：US15686584

申请日：2017-08-25

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： JinHee Jung ,  OhHan Kim ,  InSang Yoon

IPC: H01L23/00 ,  H01L21/56 ,  H01L21/48 ,  H01L23/31 ,  H01L23/498 ,  H01L23/552

Abstract: A semiconductor device has a carrier with an adhesive layer formed over the carrier. Alignment marks are provided for picking and placing the electrical component on the carrier or adhesive layer. An electrical component is disposed on the adhesive layer by pressing terminals of the electrical component into the adhesive layer. The electrical component can be a semiconductor die, discrete component, electronic module, and semiconductor package. A leadframe is disposed over the adhesive layer. A shielding layer is formed over the electrical component. An encapsulant is deposited over the electrical component. The carrier and adhesive layer are removed so that the terminals of the electrical component extend out from the encapsulant for electrical interconnect. A substrate includes a plurality of conductive traces. The semiconductor device is disposed on the substrate with the terminals of the electrical component in contact with the conductive traces.

公开(公告)号：US20180269195A1

公开(公告)日：2018-09-20

申请号：US15459997

申请日：2017-03-15

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  KyungHwan Kim ,  WoonJae Beak ,  HunTeak Lee ,  InSang Yoon

IPC: H01L25/00 ,  H01L23/58 ,  H01L23/552 ,  H01L23/00 ,  H01L21/683 ,  H01L21/56

Abstract: A semiconductor device has a semiconductor die or component, including an IPD, disposed over an attach area of a penetrable film layer with a portion of the semiconductor die or component embedded in the penetrable film layer. A conductive layer is formed over a portion of the film layer within the attach area and over a portion of the film layer outside the attach area. An encapsulant is deposited over the film layer, conductive layer, and semiconductor die or component. The conductive layer extends outside the encapsulant. An insulating material can be disposed under the semiconductor die or component. A shielding layer is formed over the encapsulant. The shielding layer is electrically connected to the conductive layer. The penetrable film layer is removed. The semiconductor die or component disposed over the film layer and covered by the encapsulant and shielding layer form an SIP module without a substrate.

公开(公告)号：US20180158768A1

公开(公告)日：2018-06-07

申请号：US15830644

申请日：2017-12-04

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  DeokKyung Yang ,  HunTeak Lee ,  InSang Yoon ,  Il Kwon Shim

IPC: H01L23/498 ,  H01L23/00 ,  H01L23/31 ,  H01L23/552 ,  H01L25/065 ,  H01L23/538 ,  H01L21/56 ,  H01L21/48

CPC classification number: H01L23/49838 ,  H01L21/4803 ,  H01L21/4846 ,  H01L21/56 ,  H01L21/561 ,  H01L23/13 ,  H01L23/3128 ,  H01L23/49811 ,  H01L23/49827 ,  H01L23/49833 ,  H01L23/5385 ,  H01L23/552 ,  H01L24/16 ,  H01L24/81 ,  H01L24/97 ,  H01L25/0652 ,  H01L25/162 ,  H01L2224/0401 ,  H01L2224/05111 ,  H01L2224/05124 ,  H01L2224/05139 ,  H01L2224/05144 ,  H01L2224/05147 ,  H01L2224/05155 ,  H01L2224/11334 ,  H01L2224/1146 ,  H01L2224/13023 ,  H01L2224/13111 ,  H01L2224/13113 ,  H01L2224/13116 ,  H01L2224/13124 ,  H01L2224/13139 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13155 ,  H01L2224/16235 ,  H01L2224/16237 ,  H01L2224/16238 ,  H01L2224/48091 ,  H01L2224/48179 ,  H01L2224/73265 ,  H01L2224/81815 ,  H01L2224/97 ,  H01L2924/15151 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/19043 ,  H01L2924/19102 ,  H01L2924/19105 ,  Y02P80/30

Abstract: A semiconductor device has a first substrate. A first semiconductor component and second semiconductor component are disposed on the first substrate. In some embodiments, a recess is formed in the first substrate, and the first semiconductor component is disposed on the recess of the first substrate. A second substrate has an opening formed through the second substrate. A third semiconductor component is disposed on the second substrate. The second substrate is disposed over the first substrate and second semiconductor component. The first semiconductor component extends through the opening. An encapsulant is deposited over the first substrate and second substrate.

公开(公告)号：US11342294B2

公开(公告)日：2022-05-24

申请号：US16821093

申请日：2020-03-17

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： DeokKyung Yang ,  HunTeak Lee ,  OhHan Kim ,  HeeSoo Lee ,  DaeHyeok Ha ,  Wanil Lee

IPC: H01L23/00 ,  H01L23/538 ,  H01L23/31

Abstract: A semiconductor device has a first substrate and a semiconductor die disposed over the first substrate. A second substrate has a multi-layered conductive post. The conductive post has a first conductive layer and a second conductive layer formed over the first conductive layer. The first conductive layer is wider than the second conductive layer. A portion of the conductive post can be embedded within the second substrate. The second substrate is disposed over the first substrate adjacent to the semiconductor die. An encapsulant is deposited around the second substrate and semiconductor die. An opening is formed in the second substrate aligned with the conductive post. An interconnect structure is formed in the opening to contact the conductive post. A discrete electrical component is disposed over a surface of the first substrate opposite the semiconductor die. A shielding layer is formed over the discrete electrical component.

公开(公告)号：US10804119B2

公开(公告)日：2020-10-13

申请号：US15459997

申请日：2017-03-15

Applicant: STATS ChipPAC Pte. Ltd.

Inventor： OhHan Kim ,  KyungHwan Kim ,  WoonJae Beak ,  HunTeak Lee ,  InSang Yoon

IPC: H01L21/00 ,  H01L21/56 ,  H01L23/58 ,  H01L23/552 ,  H01L23/31 ,  H01L21/683 ,  H01L23/00 ,  H01L25/16

Abstract: A semiconductor device has a semiconductor die or component, including an IPD, disposed over an attach area of a penetrable film layer with a portion of the semiconductor die or component embedded in the penetrable film layer. A conductive layer is formed over a portion of the film layer within the attach area and over a portion of the film layer outside the attach area. An encapsulant is deposited over the film layer, conductive layer, and semiconductor die or component. The conductive layer extends outside the encapsulant. An insulating material can be disposed under the semiconductor die or component. A shielding layer is formed over the encapsulant. The shielding layer is electrically connected to the conductive layer. The penetrable film layer is removed. The semiconductor die or component disposed over the film layer and covered by the encapsulant and shielding layer form an SIP module without a substrate.