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公开(公告)号:US20240206175A1
公开(公告)日:2024-06-20
申请号:US18540147
申请日:2023-12-14
Applicant: Micron Technology, Inc.
Inventor: Sidhartha Gupta , Adam W. Saxler , Andrew Li , John D. Hopkins
Abstract: A method used in forming memory circuitry comprises forming a stack comprising vertically-alternating first tiers and second tiers directly above a conductor tier. The first tiers comprise sacrificial material and the second tiers comprise non-sacrificial material that is of different composition from that of the sacrificial material. The stack comprises horizontally-elongated trenches extending through the first tiers and the second tiers and are individually between immediately-laterally-adjacent memory-block regions. Channel-material strings are formed that extend through the first and second tiers in the memory-block regions. Through the horizontally-elongated trenches, the sacrificial material is replaced with conductive material that comprises control-gate lines in the memory-block regions. After the replacing, conducting material is formed in a lowest of the first tiers and directly electrically couples together the channel material of the channel-material strings and conductor material of the conductor tier. Other embodiments, including structure, are disclosed.
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172.
公开(公告)号:US20240203496A1
公开(公告)日:2024-06-20
申请号:US18588407
申请日:2024-02-27
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins , Alyssa N. Scarbrough
IPC: G11C16/04 , H01L21/28 , H01L29/423 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/27 , H10B43/35
CPC classification number: G11C16/0483 , H01L29/40114 , H01L29/40117 , H01L29/42328 , H01L29/42344 , H10B41/10 , H10B41/27 , H10B41/35 , H10B43/10 , H10B43/27 , H10B43/35
Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers comprising laterally-spaced memory-block regions having horizontally-elongated trenches there-between. Two of the first tiers have different vertical thicknesses relative one another. Channel-material strings of memory cells extend through the first tiers and the second tiers. Through the horizontally-elongated trenches, first conductive material is formed in void space in the two first tiers. The first conductive material fills the first tier of the two first tiers that has a smaller of the different vertical thicknesses in individual of the memory-block regions. The first conductive material less-than-fills the first tier of the two first tiers that has a larger of the different vertical thicknesses in the individual memory-block regions. Through the horizontally-elongated trenches, the first conductive material is isotropically etched from the first tier having the larger vertical thickness in the individual memory-block regions to leave the first conductive material in the first tier having the smaller vertical thickness in the individual memory-block regions. After the isotropically etching of the first conductive material and through the horizontally-elongated trenches, second conductive material is formed in the first tier having the larger vertical thickness in the individual memory-block regions. Other embodiments, including structure independent of method, are disclosed.
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公开(公告)号:US20240186267A1
公开(公告)日:2024-06-06
申请号:US18442498
申请日:2024-02-15
Applicant: Micron Technology, Inc.
Inventor: Rohit Kothari , Adam L. Olson , John D. Hopkins , Jeslin J. Wu
IPC: H01L23/00 , H01L21/3105 , H01L21/311 , H01L21/762
CPC classification number: H01L23/562 , H01L21/31053 , H01L21/31144 , H01L21/76224
Abstract: A method of forming a semiconductor device comprising forming a patterned resist over a stack comprising at least one material and removing a portion of the stack exposed through the patterned resist to form a stack opening. A portion of the patterned resist is laterally removed to form a trimmed resist and an additional portion of the stack exposed through the trimmed resist is removed to form steps in sidewalls of the stack. A dielectric material is formed between the sidewalls of the stack to substantially completely fill the stack opening, and the dielectric material is planarized. Additional methods are disclosed, as well as semiconductor devices.
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公开(公告)号:US20240164093A1
公开(公告)日:2024-05-16
申请号:US18415928
申请日:2024-01-18
Applicant: Micron Technology, Inc.
Inventor: Jordan D. Greenlee , Alyssa N. Scarbrough , John D. Hopkins
Abstract: Some embodiments include an integrated assembly having a memory region and another region adjacent the memory region. Channel-material-pillars are arranged within the memory region, and conductive posts are arranged within said other region. A source structure is coupled to lower regions of the channel-material-pillars. A panel extends across the memory region and said other region, and separates a first memory-block-region from a second memory-block-region. Doped-semiconductor-material is directly adjacent to the panel within the memory region and the other region. Rings laterally surround lower regions of the conductive posts. The rings are between the conductive posts and the doped-semiconductor-material. The rings include laminates of two or more materials, with at least one of said two or more materials being insulative. Some embodiments include methods for forming integrated assemblies.
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175.
公开(公告)号:US20240130121A1
公开(公告)日:2024-04-18
申请号:US18047230
申请日:2022-10-17
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins , Jordan D. Greenlee
IPC: H01L27/11582
CPC classification number: H01L27/11582
Abstract: A microelectronic device comprising tiers of alternating dielectric materials and conductive materials, pillars extending through the tiers, and a doped dielectric material adjacent to the tiers. The doped dielectric material comprises a heterogeneous chemical composition comprising one or more dopants. Conductive contact structures are in the doped dielectric material. Additional microelectronic devices, microelectronic systems, and methods of forming microelectronic devices are disclosed.
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公开(公告)号:US11956950B2
公开(公告)日:2024-04-09
申请号:US18080382
申请日:2022-12-13
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins , Nancy M. Lomeli
IPC: H10B41/27 , G11C5/02 , G11C5/06 , H01L21/768 , H10B43/27
CPC classification number: H10B41/27 , G11C5/025 , G11C5/06 , H01L21/76838 , H10B43/27
Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming laterally-spaced memory blocks individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings of memory cells extend through the insulative tiers and the conductive tiers. The conductive tiers comprise metal along sides of the memory blocks. Silicon is formed between the memory blocks over the metal of the conductive tiers. The silicon and the metal react to form metal silicide therefrom that is directly against and longitudinally-along the metal of individual of the conductive tiers. After the reacting, unreacted of the silicon is removed from between the memory blocks and intervening material is formed between and longitudinally-along the memory blocks. Other embodiments, including structure independent of method, are disclosed.
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177.
公开(公告)号:US11955330B2
公开(公告)日:2024-04-09
申请号:US17804978
申请日:2022-06-01
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins , Damir Fazil
IPC: H01L21/02 , H01L21/311
CPC classification number: H01L21/02164 , H01L21/02532 , H01L21/31111 , H01L21/02271
Abstract: A method of forming a microelectronic device comprises forming openings in an interdeck region and a first deck structure, the first deck structure comprising alternating levels of a first insulative material and a second insulative material, forming a first sacrificial material in the openings, removing a portion of the first sacrificial material from the interdeck region to expose sidewalls of the first insulative material and the second insulative material in the interdeck region, removing a portion of the first insulative material and the second insulative material in the interdeck region to form tapered sidewalls in the interdeck region, removing remaining portions of the first sacrificial material from the openings, and forming at least a second sacrificial material in the openings. Related methods of forming a microelectronic devices and related microelectronic devices are disclosed.
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178.
公开(公告)号:US20240081057A1
公开(公告)日:2024-03-07
申请号:US17929933
申请日:2022-09-06
Applicant: Micron Technology, Inc.
Inventor: Jordan D. Greenlee , John D. Hopkins , Andrew L. Li
IPC: H01L27/11582 , H01L21/285 , H01L27/11565
CPC classification number: H01L27/11582 , H01L21/28518 , H01L27/11565
Abstract: An electronic device includes a source contact adjacent to a source stack, the source stack including one or more conductive materials, tiers of alternating conductive material and dielectric materials adjacent to the source contact, pillars extending vertically through the tiers and the source contact and at least partially into the source contact, a fill material extending vertically through the tiers to the source contact, and a metal silicide material between the fill material and an upper surface of the source contact. Related devices, systems, and methods are also disclosed.
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179.
公开(公告)号:US20240074178A1
公开(公告)日:2024-02-29
申请号:US17823276
申请日:2022-08-30
Applicant: Micron Technology, Inc.
Inventor: John D. Hopkins
IPC: H01L27/11582 , H01L27/11556
CPC classification number: H01L27/11582 , H01L27/11556 , H01L21/28518
Abstract: An electronic device comprising one or more blocking regions. The electronic device also comprises a source stack comprising one or more conductive materials, a source contact vertically adjacent to the source stack, and a doped semiconductive material vertically adjacent to the source contact. Tiers of alternating conductive materials and dielectric materials are vertically adjacent to the doped semiconductive material, and pillars extend through the tiers of alternating conductive materials and dielectric materials, the doped semiconductive material, and the source contact and into the source stack. The one or more blocking regions are laterally adjacent to the semiconductive material. Additional electronic devices, electronic systems, and methods are also disclosed.
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公开(公告)号:US11917817B2
公开(公告)日:2024-02-27
申请号:US17125200
申请日:2020-12-17
Applicant: Micron Technology, Inc.
Inventor: Shuangqiang Luo , John D. Hopkins , Lifang Xu , Nancy M. Lomeli , Indra V. Chary , Kar Wui Thong , Shicong Wang
CPC classification number: H10B41/27 , G11C5/025 , G11C5/06 , H01L21/768 , H10B43/27
Abstract: A microelectronic device comprises a stack structure comprising a vertically alternating sequence of conductive material and insulative material arranged in tiers. The stack structure has blocks separated from one another by first dielectric slot structures. Each of the blocks comprises two crest regions, a stadium structure interposed between the two crest regions in a first horizontal direction and comprising opposing staircase structures each having steps comprising edges of the tiers of the stack structure, and two bridge regions neighboring opposing sides of the stadium structure in a second horizontal direction orthogonal to the first horizontal direction and having upper surfaces substantially coplanar with upper surfaces of the two crest regions. At least one second dielectric slot structure is within horizontal boundaries of the stadium structure in the first horizontal direction and partially vertically extends through and segmenting each of the two bridge regions. Memory devices, electronic systems, and methods of forming microelectronic devices are also described.
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