公开(公告)号：US09110090B2

公开(公告)日：2015-08-18

申请号：US13635581

申请日：2011-01-19

申请人： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

发明人： Reinhard Neul ,  Christian Rettig ,  Achim Trautmann ,  Daniel Christoph Meisel ,  Alexander Buhmann ,  Manuel Engesser ,  Ando Feyh

IPC分类号： G01P15/12 ,  G01P15/09 ,  G01P15/08

CPC分类号： G01P15/09 ,  G01P15/0802 ,  G01P15/12 ,  G01P15/123

摘要： A piezoresistive micromechanical sensor component includes a substrate, a seismic mass, at least one piezoresistive bar, and a measuring device. The seismic mass is suspended from the substrate such that it can be deflected. The at least one piezoresistive bar is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected. The at least one piezoresistive bar has a lateral and/or upper and/or lower conductor track which at least partially covers the piezoresistive bar and extends into the region of the substrate. The measuring device is electrically connected to the substrate and to the conductor track and is configured to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and/or upper and/or lower conductor track.

摘要翻译： 压阻微机电传感器部件包括基板，抗震块，至少一个压阻棒和测量装置。 地震质量从基板悬挂使其能够偏转。 所述至少一个压阻棒设置在所述基底和所述抗震块之间，并且当所述地震质量被偏转时，所述至少一个压阻棒经受阻力的变化。 至少一个压阻棒具有至少部分地覆盖压阻棒并延伸到衬底的区域中的横向和/或上部和/或下部导体轨道。 测量装置电连接到基板和导体轨道，并且被配置成测量电路的电阻变化，该电阻通过基板通过压阻棒和从压阻棒通过横向和/或上部和/ 或下导体轨道。

公开(公告)号：US08950258B2

公开(公告)日：2015-02-10

申请号：US13479746

申请日：2012-05-24

申请人： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

发明人： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC分类号： G01P15/10 ,  G01P15/12 ,  G01P15/09 ,  H01L41/113

CPC分类号： G01P15/0922 ,  H01L41/1132

摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

摘要翻译： 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。

公开(公告)号：US08875574B2

公开(公告)日：2014-11-04

申请号：US13120276

申请日：2009-08-05

申请人： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

发明人： Robert Sattler ,  Daniel Christoph Meisel ,  Joerg Hauer

IPC分类号： G01C19/56 ,  B23P11/00

CPC分类号： G01C19/56 ,  Y10T29/49826

摘要： A coupling structure for a rotation rate sensor apparatus, having at least one first oscillating mass; and having a first frame, surrounding the first oscillating mass, to which the first oscillating mass is coupled; the first frame encompassing four angle elements, each of which angle elements has at least one first limb and one second limb and is respectively coupled with the first limb and with the second limb to another adjacent angle element of the four angle elements. Also described is a further coupling structure for a rotation rate sensor apparatus, to a rotation rate sensor apparatus, to a manufacturing method for a coupling structure for a rotation rate sensor apparatus, and to a manufacturing method for a rotation rate sensor apparatus.

摘要翻译： 一种用于旋转速率传感器装置的联接结构，具有至少一个第一振荡块; 并且具有围绕所述第一振荡块的第一框架，所述第一振荡块被耦合到所述第一框架; 第一框架包括四个角度元件，每个角度元件具有至少一个第一分支和一个第二分支，并且分别与第一分支和第二分支耦合到四个角度元素的另一相邻角度元素。 还描述了用于旋转速率传感器装置，旋转速率传感器装置，用于旋转速率传感器装置的联接结构的制造方法以及旋转速率传感器装置的制造方法的另外的联接结构。

公开(公告)号：US08826735B2

公开(公告)日：2014-09-09

申请号：US13259976

申请日：2010-01-28

申请人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

发明人： Axel Franke ,  Frank Freund ,  Daniel Christoph Meisel

IPC分类号： G01C19/56

CPC分类号： G01C19/5755

摘要： A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

摘要翻译： 提供了一种用于共振驱动微机械系统的装置，该微机械系统包括由弹簧振动支撑的至少一个地震质量，用于驱动地震质量块的振动的至少一个驱动器和与地震质量块动态耦合的至少一个元件。 此外，该装置包括至少一个检测元件，用于检测与动力耦合元件和检测元件之间的地震质量的振动而变化的关系参数，检测元件被配备成引起振动驱动的中断，当 达到关系参数的预定值。

公开(公告)号：US20140117475A1

公开(公告)日：2014-05-01

申请号：US14059202

申请日：2013-10-21

申请人： Johannes CLASSEN ,  Axel FRANKE ,  Jens FREY ,  Heribert WEBER ,  Frank FISCHER ,  Patrick WELLNER ,  Mirko HATTASS ,  Daniel Christoph MEISEL

发明人： Johannes CLASSEN ,  Axel FRANKE ,  Jens FREY ,  Heribert WEBER ,  Frank FISCHER ,  Patrick WELLNER ,  Mirko HATTASS ,  Daniel Christoph MEISEL

IPC分类号： B81B7/00

CPC分类号： B81C1/00246 ,  B81C1/0023 ,  B81C2203/075 ,  B81C2203/0771 ,  H01L2224/48463

摘要： A component has at least one MEMS element and at least one cap made of a semiconductor material. The cap, in addition to its mechanical function as a terminus of a cavity and protection of the micromechanical structure, is provided with an electrical functionality. The micromechanical structure of the MEMS element of the component is situated in a cavity between a carrier and the cap, and includes at least one structural element which is deflectable out of the component plane within the cavity. The cap includes at least one section extending over the entire thickness of the cap, which is electrically insulated from the adjoining semiconductor material in such a way that it may be electrically contacted independently from the remaining sections of the cap.

摘要翻译： 元件具有至少一个MEMS元件和至少一个由半导体材料制成的盖。 盖子除了作为空腔的终端的机械功能以及微机械结构的保护之外，还具有电功能。 元件的MEMS元件的微机械结构位于载体和盖之间的空腔中，并且包括至少一个结构元件，其可在空腔内偏离组件平面。 该帽包括至少一个在盖的整个厚度上延伸的部分，其与相邻的半导体材料电绝缘，使得其可以独立于帽的其余部分电接触。

公开(公告)号：US08453502B2

公开(公告)日：2013-06-04

申请号：US12924756

申请日：2010-10-05

申请人： Daniel Christoph Meisel

发明人： Daniel Christoph Meisel

IPC分类号： G01C19/56

CPC分类号： G01C19/5747

摘要： A micromechanical yaw rate sensor includes a substrate having a main plane of extension and two Coriolis elements. The first Coriolis element may be driven to a first vibration along a second direction which is parallel to the main plane of extension. The second Coriolis element may be driven to a second vibration which is antiparallel to the first vibration. A first deflection of the first Coriolis element and a second deflection of the second Coriolis element, in each case along a first direction which is parallel to the main plane of extension and perpendicular to the second direction, may be detected. The micromechanical sensor also has a rocker element indirectly or directly coupled to the first Coriolis element and to the second Coriolis element, which rocker element has a torsional axis essentially parallel to the second direction.

摘要翻译： 微机械摆动速率传感器包括具有主平面延伸的基板和两个科里奥利元件。 第一科里奥利元件可以沿着平行于延伸主平面的第二方向被驱动到第一振动。 第二科里奥利元件可被驱动到与第一振动反平行的第二振动。 可以检测第一科里奥利元件的第一偏转和第二科里奥利元件的第二偏转，在每种情况下沿着平行于延伸的主平面并垂直于第二方向的第一方向。 微机械传感器还具有间接或直接耦合到第一科里奥利元件和第二科里奥利元件的摇臂元件，该摇臂元件具有基本上平行于第二方向的扭转轴。

公开(公告)号：US08443668B2

公开(公告)日：2013-05-21

申请号：US12925750

申请日：2010-10-27

申请人： Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

发明人： Torsten Ohms ,  Burkhard Kuhlmann ,  Markus Heitz ,  Robert Sattler ,  Daniel Christoph Meisel ,  Thorsten Balslink

IPC分类号： G01C19/56

CPC分类号： G01C19/5747

摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.

摘要翻译： 描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可被第二激励装置激发到第二振动 并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

公开(公告)号：US20120297878A1

公开(公告)日：2012-11-29

申请号：US13479746

申请日：2012-05-24

申请人： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

发明人： Reinhard Neul ,  Torsten Ohms ,  Mirko Hattass ,  Daniel Christoph Meisel

IPC分类号： G01P15/097

CPC分类号： G01P15/0922 ,  H01L41/1132

摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.

摘要翻译： 公开了一种用于测量角加速度的微机械角加速度传感器。 传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。 压阻和/或压电元件布置在地震块的切口中。 还公开了传感器的相应方法和用途。

公开(公告)号：US20120011933A1

公开(公告)日：2012-01-19

申请号：US13116821

申请日：2011-05-26

申请人： Torsten OHMS ,  Burkhard KUHLMANN ,  Daniel Christoph MEISEL ,  Rolf SCHEBEN

发明人： Torsten OHMS ,  Burkhard KUHLMANN ,  Daniel Christoph MEISEL ,  Rolf SCHEBEN

IPC分类号： G01P15/14

CPC分类号： G01C19/5747

摘要： A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.

摘要翻译： 描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利 用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于 振动。

公开(公告)号：US20110219877A1

公开(公告)日：2011-09-15

申请号：US13057045

申请日：2009-08-03

申请人： Daniel Christoph Meisel

发明人： Daniel Christoph Meisel

IPC分类号： G01P15/125

CPC分类号： G01P15/125 ,  B81B3/0086 ,  B81B2201/0235

摘要： A micromechanical sensor having at least one movably mounted measuring element which is opposite at least one stationary electrode, the electrode being situated in a first plane, and being contacted by at least one printed conductor track which is situated in a second plane. A third plane is located between the first plane and the second plane, the third plane including an electrically conductive material.

摘要翻译： 一种微机械传感器，其具有至少一个可移动地安装的测量元件，其与至少一个固定电极相对，所述电极位于第一平面中，并且被位于第二平面中的至少一个印刷导体轨道接触。 第三平面位于第一平面和第二平面之间，第三平面包括导电材料。