公开(公告)号：US20020015431A1

公开(公告)日：2002-02-07

申请号：US09924814

申请日：2001-08-07

Applicant: Lambda Physik AG

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

Abstract translation: F2准分子激光器在157nm处具有多个紧密分布的感兴趣的谱线，并且通过波长选择光学器件选择一条线。 第一优选实施例的波长选择光学器件包括包围放电室的激光气体体积的双折射布鲁斯特窗口。 窗口优选地包括MgF 2，并且位于放电室的一端。 当窗口的光学厚度与窗口的可旋转调节的正交折射率配合选择时，选择两条线。 窗的透射率取决于正交折射率和窗口的光学厚度。 第二优选实施例的波长选择光学器件至少部分地在激光有源体积内。 以这种方式，以优化光和放电效率，谐振器尺寸和成本的组合的方式执行线选择。 波长选择单元优选地包括具有以布鲁斯特角取向的前表面的棱镜和定向成接收和反射在棱镜内以与该背面成直角的方式行进的普通折射光线的后表面。 背表面还优选地包括用作谐振器的高反射表面的高反射涂层。 波长选择单元优选地还包括用于调整棱镜的取向并且用于封闭与外耦合端相对的壳体的另一端的调节部件。

公开(公告)号：US20040252740A1

公开(公告)日：2004-12-16

申请号：US10338779

申请日：2003-01-06

Applicant: Lambda Physik AG.

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Juergen Kleinschmidt ,  Thomas Schroeder ,  Igor Bragin ,  Vadim Berger ,  Uwe Stamm ,  Wolfgang Zschocke ,  Sergei Govorkov

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G02B5/1814 ,  G02B5/1838 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08031 ,  H01S3/08045 ,  H01S3/0971 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a molecular fluorine component of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The molecular fluorine is provided at an initial partial pressure and is subject to depletion within the laser discharge chamber. Injections of gas including molecular fluorine are performed each to increase the partial pressure of molecular fluorine by a selected amount in the laser chamber preferably less than 0.2 mbar per injection, or 7% of an amount of F2 already within the laser chamber. A number of successive injections may be performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the molecular fluorine in the discharge chamber. The driving voltage is preferably determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

Abstract translation: 提供了一种用于通过使用气体供应单元和处理器将激光气体混合物的分子氟成分维持在预定分压来稳定气体放电激光器的输出光束参数的方法和装置。 分子氟以初始分压提供，并在激光放电室内耗尽。 每次喷射包括分子氟的气体，以在激光室中选择的量增加分子氟的分压，优选每次注射小于0.2mbar，或已经在激光室内的F2的量的7％。 可以以选定的间隔执行多次连续喷射，以维持构成气体基本处于初始分压，以维持稳定的输出光束参数。 每次注射量和/或注射间隔可以基于驱动电压的测量值和/或放电室中分子氟的计算量而变化。 驱动电压优选地被确定为基于系统的老化而被调整的多个驱动电压范围之一。 在每个范围内，气体注入和气体替换优选地基于对放电的总施加的电能和/或在时间和/或脉冲计数上进行。

公开(公告)号：US20030161374A1

公开(公告)日：2003-08-28

申请号：US10293906

申请日：2002-11-12

Applicant: Lambda Physik AG

Inventor： Peter Lokai

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  H01S3/005

Abstract: A spectrometer based on a high-resolution confocal Fabry-Perot interferometer for detection of wavelength, FWHM and/or 95% bandwidth of a laser beam of a narrow band tunable excimer or molecular fluorine lithography laser, or EUV generating source, preferably includes a reduction telescope for reducing the laser beam, a diffusor to homogenize the incident excimer or molecular fluorine lithography laser beam, a housing for mounting the confocal Fabry-Perot interferometer between windows in a sealed and temperature-stabilized housing, imaging optics for bringing the incident beam to focus at approximately a center of the interferometer, interferometer fringe imaging optics, and a photoelectric detector of the interferometer fringe image.

Abstract translation: 基于用于检测窄带可调谐准分子或分子氟光刻激光器或EUV产生源的激光束的波长，FWHM和/或95％带宽的基于高分辨率共焦法布里 - 珀罗干涉仪的光谱仪优选包括还原 用于减小激光束的望远镜，用于使入射的准分子或分子氟光刻激光束均匀化的扩散器，用于在密封和温度稳定的壳体中的窗口之间安装共焦法布里 - 珀罗干涉仪的壳体，用于将入射光束 聚焦在干涉仪的大约中心，干涉仪条纹成像光学器件和干涉仪条纹图像的光电检测器。

公开(公告)号：US20020131468A1

公开(公告)日：2002-09-19

申请号：US10112493

申请日：2002-03-28

Applicant: Lambda Physik AG.

Inventor： Hans-Stephan Albrecht ,  Peter Heist ,  Klaus Wolfgang Volger

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/08036 ,  H01S3/08 ,  H01S3/08081 ,  H01S3/1305 ,  H01S3/139 ,  H01S3/225

Abstract: An apparatus and method are provided for bandwidth narrowing of an excimer laser to nullnullnull6 pm or less with high spectral purity and minimized output power loss. Output stability with respect to pulse energy, beam pointing, beam size and beam output location is also provided. The excimer laser includes an active laser medium for generating a spectral beam at an original wavelength, means for selecting and narrowing the broadband output spectrum of the excimer laser, a resonator having at least one highly reflecting surface, and an output coupler. Means for adapting a divergence of the resonating band within the resonator is further included in the apparatus of the invention. The divergence adapting causes the spectral purity to improve by between 20% and 50% and the output power to reduce by less than 10%. A method according to the invention includes selecting and aligning the divergence adapting means.

公开(公告)号：US20020110174A1

公开(公告)日：2002-08-15

申请号：US10121292

申请日：2002-04-12

Applicant: Lambda Physik AG

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Thomas Schroeder

IPC: H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

公开(公告)号：US20020101901A1

公开(公告)日：2002-08-01

申请号：US10114184

申请日：2002-04-01

Applicant: Lambda Physik AG

Inventor： Hans-Stephan Albrecht ,  Klaus Wolfgang Vogler ,  Thomas Schroeder

IPC: H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/134 ,  H01S3/225

Abstract: A method and apparatus is provided for stabilizing output beam parameters of a gas discharge laser by maintaining a constituent gas of the laser gas mixture at a predetermined partial pressure using a gas supply unit and a processor. The constituent gas of the laser gas mixture is provided at an initial partial pressure and the constituent gas is subject to depletion within the laser discharge chamber. Injections of the constituent gas are performed each to increase the partial pressure by a selected amount in the discharge chamber preferably less than 0.2 mbar per injection. A number of successive injections is performed at selected intervals to maintain the constituent gas substantially at the initial partial pressure for maintaining stable output beam parameters. The amount per injection and/or the interval between injections may be varied based on the measured value of the driving voltage and/or a calculated amount of the constituent gas in the discharge chamber. The driving voltage is determined to be in one of multiple driving voltage ranges that are adjusted based on the aging of the system. Within each range, gas injections and gas replacements are preferably performed based on total applied electrical energy to the discharge and/or alternatively, on time and/or pulse count.

公开(公告)号：US20020041616A1

公开(公告)日：2002-04-11

申请号：US09925041

申请日：2001-08-07

Applicant: Lambda Physik AG.

Inventor： Jurgen Kleinschmidt ,  Peter Heist ,  Frank Voss ,  Andreas Gortler

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/225 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/1062

Abstract: An F2-excimer laser has multiple closely-spaced spectral lines of interest around 157 nm, and one of the lines is selected by wavelength selection optics. The wavelength selection optics of a first preferred embodiment include a birefringent Brewster window enclosing the laser gas volume of the discharge chamber. The window preferably comprises MgF2 and is located at one end of the discharge chamber. One line is selected of the two when the optical thickness of the window is selected in coordination with rotatably adjustable, orthogonal refractive indices of the window. The transmissivity of the window is dependent on the orthogonal refractive indices and the optical thickness of the window. The wavelength selection optics of a second preferred embodiment include are at least partially within the laser active volume. In this way, line selection is performed in a manner which optimizes the combination of optical and discharge efficiency, resonator size and cost. The wavelength selection unit preferably includes a prism having a front surface oriented at Brewster's angle and a back surface oriented to receive and reflect an ordinary refracted ray travelling within the prism at a right angle to the back surface. The back surface also preferably includes a highly reflective coating to serve as the highly reflective surface of the resonator. The wavelength selection unit preferably further comprises an adjustment component for adjusting the orientation of the prism and for enclosing the other end of the housing, opposite the outcoupling end.

公开(公告)号：US20020041615A1

公开(公告)日：2002-04-11

申请号：US09922241

申请日：2001-08-02

Applicant: Lambda Physik AG.

Inventor： Vladimir Mikhailovich Borisov ,  Alexander Yurivich Vinokhodov ,  Vladimir Alexeevich Vodchits

IPC: H01S003/22 ,  H01S003/223

CPC classification number: H01S3/038 ,  H01S3/0384 ,  H01S3/0975 ,  H01S3/0977 ,  H01S3/225

Abstract: A device for use with a repetitively pulsed gas laser provides self-initiated UV preliminary ionization of the active volume of a laser, which has extended high-voltage and grounded electrodes disposed parallel to one another, to which peaking capacitors distributed along the length of the electrodes are connected in a low-inductance manner. The low-voltage contacts of the peaking capacitors are either connected directly to the grounded electrode or, if this connection is interrupted, dielectric plates are inserted that are disposed either on one side or on both sides of the grounded electrode. If the capacitors are charged rapidly, a surface discharge which effects UV pre-ionization of the volume of the main discharge and is uniformly distributed over the whole surface of the dielectric plates is produced on the surface of the dielectric plates. The device provides improved output parameters of the laser and increased service life both of the gas mixture and of structural components of the electric discharge system.

Abstract translation: 与重复脉冲气体激光器一起使用的装置提供激光器的有源体积的自发UV预电离，激光器的有源体积具有扩展的彼此平行设置的高电压和接地电极，峰值电容器沿着 电极以低电感方式连接。 峰值电容器的低电压触点直接连接到接地电极，或者如果连接中断，则插入布置在接地电极的一侧或两侧的电介质板。 如果电容器被快速充电，则在电介质板的表面上产生在主放电体积上实现UV预电离并均匀分布在电介质板的整个表面上的表面放电。 该装置提供了改进的激光输出参数，并且提高了气体混合物和放电系统的结构部件的使用寿命。

公开(公告)号：US20020031159A1

公开(公告)日：2002-03-14

申请号：US09865908

申请日：2001-05-24

Applicant: Lambda Physik AG

Inventor： Marcus Serwazi ,  Thomas Junemann

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

公开(公告)号：US20020031157A1

公开(公告)日：2002-03-14

申请号：US09842281

申请日：2001-04-24

Applicant: Lambda Physik AG

Inventor： Peter Heist ,  Matthias Kramer ,  Juergen Kleinschmidt ,  Sergei Govorkov ,  Marcus Serwazi ,  Thomas Junemann

IPC: H01S003/22 ,  H01S003/223

CPC classification number: G03F7/70025 ,  G03F7/70041 ,  G03F7/70575 ,  H01S3/036 ,  H01S3/038 ,  H01S3/134 ,  H01S3/22 ,  H01S3/225 ,  H01S3/2258

Abstract: An excimer or molecular fluorine laser system includes a discharge chamber containing a gas mixture, multiple electrodes connected to a power supply circuit for energizing the gas mixture, a resonator for generating a laser beam, a processor, and means for monitoring an amplified spontaneous emission (ASE) signal of the laser, such as preferably an ASE detector. The processor receives a signal from the preferred ASE detector indicative of the ASE signal of the laser. Based on the signal from the ASE detector, the processor determines whether to initiate a responsive action for adjusting a parameter of the laser system.

Abstract translation: 准分子或分子氟激光系统包括包含气体混合物的放电室，连接到用于激励气体混合物的电源电路的多个电极，用于产生激光束的谐振器，处理器和用于监测放大的自发发射的装置 ASE）信号，例如优选ASE检测器。 处理器从优选的ASE检测器接收指示激光的ASE信号的信号。 基于来自ASE检测器的信号，处理器确定是否启动用于调整激光系统的参数的响应动作。