Abstract:
A latching mechanism for a MEMS actuator as, for example, a mirror in an N×N fiber optic switch, maintains a thermally actuated mirror in its actuated position even in the event of a power interruption by a pair of clamps, which clamp against an actuator arm. Such actuator arm is thermally actuated by a bent beam type of thermal actuator. To provide for effective fabrication using the MEMS technique (microelectromechanical system), on for example, a silicon substrate where the entire moveable structure is a suspended mechanism, the clamps are fabricated in a normally closed position. In this position they typically interfere with the line of motion of an enlarged portion of an actuator arm being directly in the line of motion or with a post and slot technique.
Abstract:
An integrated two-dimensional tunable filter array for a matrix of fiber-optic input-output light channels includes a tunable filter chip array sandwiched between a first semiconductive wafer in which the guiding grooves for the input light channels terminate in a 45° reflecting surface causing a 90° turn of the light beams into each tunable filter of the array. Then a third semiconductive substrate is bonded to the other side of the tunable filter array to receive the reflected light beams. A 45° mirror on a {111} plane may be formed by slow etching of a {100} type wafer or the use of a {100} type wafer with a 9.7° off axis cut.
Abstract:
A micromechanical optical modulator includes an input optical waveguide that projects a beam across a gap to an output optical waveguide. A phase shifting gate is mounted between the input and output optical waveguides and has a light transmissive panel which may have at least two sections of different thicknesses. The phase shifting gate is translatable between a position in which the beam of light is transmitted and a second position in which a section of the gate panel is interposed in the beam path and the beam of light is reflected by interference effects. A micromechanical actuator may be connected to the phase shifting gate to switch it between its positions. The optical waveguides may be mounted at an angle to the surfaces of the sections of the gate such that when the beam is reflected from the gate it is directed to a second output optical waveguide, which receives the beam and directs it on a new path, thereby allowing switching of optical beam paths in an optical communication system. The optical modulator may also be used as a sensor to detect effects which displace the phase shifting gate, such as in an accelerometer in which a mass is connected to the gate to move the gate when the mass is subjected to accelerations.
Abstract:
According to some embodiments, a micro-electrical mechanical system apparatus includes an actuator within a plane and at least one movable mirror oriented substantially normal to the plane. The actuator may move the movable mirror with respect to a fixed mirror oriented substantially normal to the plane and substantially parallel to the movable mirror. The space between the fixed and movable mirrors might comprise, for example, a Fabry-Perot filter cavity for a spectrometer.
Abstract:
According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.
Abstract:
A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.
Abstract:
According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.
Abstract:
An energy harvesting device capable of harvesting multiple forms of energy. The device includes a base, a piezoelectric cantilever, and a carbon nanotube film. The piezoelectric cantilever includes a piezoelectric layer disposed between a top electrode and a bottom electrode. A proximate end of the piezoelectric cantilever is supported by the base. The base does not support a distal end of the piezoelectric cantilever. The piezoelectric cantilever is capable of converting vibration energy into electrical power. The carbon nanotube film is capable of absorbing electromagnetic radiation and thermal radiation, and thereafter transmitting heat to the piezoelectric layer. The piezoelectric layer is mechanically deformed in response to said heating, thereby generating electrical power.
Abstract:
According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.
Abstract:
A system and method for managing optical power for controlling thermal alteration of a sample undergoing spectroscopic analysis is provided. The system includes a moveable laser beam generator for irradiating the sample and a beam shaping device for moving and shaping the laser beam to prevent thermal overload or build up in the sample. The moveable laser beam generator includes at least one beam shaping device selected from the group consisting of at least one optical lens, at least one optical diffractor, at least one optical path difference modulator, at least one moveable mirror, at least one Micro-Electro-Mechanical Systems (MEMS) integrated circuit (IC), and/or a liquid droplet. The system also includes an at least two degree of freedom (2 DOF) moveable substrate platform and a controller for controlling the laser beam generator and the substrate platform, and for analyzing light reflected from the sample.