公开(公告)号：US20050009315A1

公开(公告)日：2005-01-13

申请号：US10784144

申请日：2004-02-23

Applicant: Woon-bae Kim ,  Sung-hoon Choa ,  Min-seog Choi

Inventor： Woon-bae Kim ,  Sung-hoon Choa ,  Min-seog Choi

IPC: B81C1/00 ,  B81B3/00 ,  B81B7/00 ,  H01L21/00 ,  H01L21/44 ,  H01L21/4763 ,  H01L21/60 ,  H01L23/10 ,  H01L23/12

CPC classification number: B81B7/0006 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for manufacturing micro electro-mechanical systems includes forming an insulation layer on an upper surface of a semiconductor substrate, forming a structure layer on an upper surface of the insulation layer and etching the structure layer, forming an under bump metal on a predetermined position of an upper surface of the structure layer, forming a via hole in a glass substrate corresponding to the position of the under bump metal and in a shape such that the via hole is larger in diameter at an upper surface of the glass substrate than at a lower surface of the glass substrate, wherein the glass substrate is bonded to the upper surface of the structure layer and creates a vacuum chamber that protects a structure of the structure layer, and arranging a solder ball in the via hole and bonding the solder ball to the under bump metal.

Abstract translation: 一种制造微电子机械系统的方法，包括在半导体衬底的上表面上形成绝缘层，在绝缘层的上表面上形成结构层并蚀刻结构层，在预定位置上形成凹凸金属 所述结构层的上表面在对应于所述凸块下金属的位置的玻璃基板中形成通孔，并且所述通孔在所述玻璃基板的上表面处的直径比在 玻璃基板的下表面，其中玻璃基板结合到结构层的上表面，并且形成保护结构层的结构的真空室，并且在通孔中布置焊球并将焊球接合到 下凸块金属。

公开(公告)号：US08523555B2

公开(公告)日：2013-09-03

申请号：US13621204

申请日：2012-09-15

Applicant: Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

Inventor： Hae-sung Kim ,  Hyoung-soo Ko ,  Seung-bum Hong ,  Jin-seung Sohn ,  Sung-hoon Choa ,  Chee-kheng Lim

IPC: B29C59/00

CPC classification number: G03F1/14 ,  B29C59/002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T428/24917

Abstract: A nano imprint master and a method of manufacturing the same are provided. The method includes: implanting conductive metal ions into a substrate including quartz to form a conductive layer inside the quartz substrate; coating a resist on the quartz substrate in which the conductive layer is formed, to form a resist coating layer; exposing the resist coating layer to an electron beam to form micropatterns; etching the quartz substrate by using the resist coating layer, in which the micropatterns are formed, as a mask; and removing the resist coating layer to obtain a master in which micropatterns are formed.

Abstract translation: 提供了纳米压印母版及其制造方法。 该方法包括：将导电金属离子注入包括石英的衬底中，以在石英衬底内形成导电层; 在其上形成导电层的石英基板上涂覆抗蚀剂，以形成抗蚀剂涂层; 将抗蚀剂涂层暴露于电子束以形成微图案; 通过使用其中形成有微图案的抗蚀剂涂层作为掩模来蚀刻石英基板; 并除去抗蚀剂涂层以获得形成微图案的母版。

公开(公告)号：US08248906B2

公开(公告)日：2012-08-21

申请号：US11964328

申请日：2007-12-26

Applicant: Seung-bum Hong ,  Sung-hoon Choa ,  Ju-hwan Jung ,  Hyoung-soo Ko ,  Yong Kwan Kim

Inventor： Seung-bum Hong ,  Sung-hoon Choa ,  Ju-hwan Jung ,  Hyoung-soo Ko ,  Yong Kwan Kim

IPC: G11B9/00

CPC classification number: G11B9/02

Abstract: A ferroelectric hard disk device is provided and includes: a ferroelectric media having a bottom electrode and a ferroelectric layer disposed on the bottom electrode; and a head formed above the ferroelectric media, the head being operative to write and reproduce information on the ferroelectric layer.

Abstract translation: 提供了一种铁电硬盘装置，包括：铁电介质，具有设置在底部电极上的底部电极和铁电体层; 以及形成在铁电介质上方的头部，头部用于在铁电层上写入和再现信息。

公开(公告)号：US08206803B2

公开(公告)日：2012-06-26

申请号：US11854124

申请日：2007-09-12

Applicant: Seung-bum Hong ,  Simon Buehlmann ,  Shin-ae Jun ,  Sung-hoon Choa ,  Eun-joo Jang ,  Yong-kwan Kim

Inventor： Seung-bum Hong ,  Simon Buehlmann ,  Shin-ae Jun ,  Sung-hoon Choa ,  Eun-joo Jang ,  Yong-kwan Kim

IPC: B32B3/02

CPC classification number: G11B5/7325 ,  B82Y10/00 ,  G11B5/743 ,  G11B9/02 ,  G11B9/08 ,  G11B9/1472

Abstract: Provided is an information storage medium using nanocrystal particles, a method of manufacturing the information storage medium, and an information storage apparatus including the information storage medium. The information storage medium includes a conductive layer, a first insulating layer formed on the conductive layer, a nanocrystal layer that is formed on the first insulating layer and includes conductive nanocrystal particles that can trap charges, and a second insulating layer formed on the nanocrystal layer.

Abstract translation: 提供了使用纳米晶粒的信息存储介质，信息存储介质的制造方法以及包括信息存储介质的信息存储装置。 所述信息存储介质包括导电层，形成在所述导电层上的第一绝缘层，形成在所述第一绝缘层上并包含可以捕获电荷的导电纳米晶体颗粒的纳米晶体层，以及形成在所述纳米晶体层上的第二绝缘层 。

公开(公告)号：US20120056355A1

公开(公告)日：2012-03-08

申请号：US13298404

申请日：2011-11-17

Applicant: Eun-Hyoung CHO ,  Sung Hoon CHOA ,  Jin Seung SOHN ,  Byung Kyu LEE ,  Du Hyun LEE

Inventor： Eun-Hyoung CHO ,  Sung Hoon CHOA ,  Jin Seung SOHN ,  Byung Kyu LEE ,  Du Hyun LEE

IPC: B29C59/16

CPC classification number: B05D5/02 ,  B29C47/92 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/00 ,  G03F7/0002 ,  Y10S977/887

Abstract: A process and an apparatus for performing a UV nano-imprint lithography are provided. The process uses a polymer pad which allows a uniform application of pressure to a patterned template and an easy removal of a residual resin layer. The apparatus includes a tilt and decentering corrector which allows an accurate alignment of layers during the nano-imprint lithography process.

Abstract translation: 提供了一种用于进行UV纳米压印光刻的工艺和设备。 该方法使用聚合物垫，其允许对图案化模板均匀施加压力并容易地除去残留的树脂层。 该设备包括倾斜和偏心校正器，其允许在纳米压印光刻工艺期间精确地对准层。

公开(公告)号：US20110207240A1

公开(公告)日：2011-08-25

申请号：US13064894

申请日：2011-04-25

Applicant: Chee-kheng Lim ,  Eun-hyoung Cho ,  Sung-hoon Choa

Inventor： Chee-kheng Lim ,  Eun-hyoung Cho ,  Sung-hoon Choa

IPC: H01L21/8239

CPC classification number: G11C11/14 ,  G11C19/0808 ,  Y10S977/933 ,  Y10S977/935

Abstract: An information storage device using movement of magnetic domain walls includes a writing magnetic layer having a magnetic domain wall. A stack structure is formed on the writing magnetic layer. The stack structure includes a connecting magnetic layer and an information storing magnetic layer stacked sequentially. The information storage device also includes a reader for reading information stored in the information storing magnetic layer.

Abstract translation: 使用磁畴壁移动的信息存储装置包括具有磁畴壁的书写磁性层。 在写磁层上形成堆叠结构。 堆叠结构包括依次堆叠的连接磁性层和存储磁性层的信息。 信息存储装置还包括用于读取存储在信息存储磁性层中的信息的读取器。

公开(公告)号：US07965470B2

公开(公告)日：2011-06-21

申请号：US11781311

申请日：2007-07-23

Applicant: Chee-kheng Lim ,  Sung-hoon Choa

Inventor： Chee-kheng Lim ,  Sung-hoon Choa

IPC: G11B5/33

CPC classification number: G11B5/00 ,  G11B2005/0002 ,  G11C11/14 ,  G11C19/0808 ,  G11C19/0841

Abstract: Provided are an information storage device using movement of a magnetic domain wall, and methods of manufacturing and operating the information storage device. The information storage device includes a storage track having magnetic domains and a writer for recording data to the storage track, wherein the writer comprises: a first magnetic layer and a second magnetic layer that is formed to cover a portion of the first magnetic layer and has a smaller magnetic anisotropic energy than the first magnetic layer.

Abstract translation: 提供了使用磁畴壁的移动的信息存储装置，以及制造和操作信息存储装置的方法。 信息存储装置包括具有磁畴的存储轨道和用于将数据记录到存储轨道的写入器，其中写入器包括：第一磁性层和第二磁性层，形成为覆盖第一磁性层的一部分并具有 比第一磁性层更小的磁各向异性能量。

公开(公告)号：US07964427B2

公开(公告)日：2011-06-21

申请号：US12759648

申请日：2010-04-13

Applicant: Yun-kwon Park ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song

Inventor： Yun-kwon Park ,  Sang-wook Kwon ,  Duck-hwan Kim ,  Jong-seok Kim ,  Sung-hoon Choa ,  In-sang Song

IPC: H01L21/00

CPC classification number: H01L25/165 ,  H01L2924/0002 ,  H01L2924/09701 ,  H03H9/1057 ,  H01L2924/00

Abstract: A RF system which includes a silicon substrate formed with at least one via-hole filled with conductive material so that both sides of the silicon substrate are electrically connected with one another; at least one flat device formed on one side of the silicon substrate; and at least one RF MEMS device formed on the other side of the silicon substrate.

Abstract translation: 一种RF系统，包括形成有填充有导电材料的至少一个通孔的硅衬底，使得硅衬底的两侧彼此电连接; 形成在所述硅衬底的一侧上的至少一个平面器件; 以及形成在硅衬底的另一侧上的至少一个RF MEMS器件。

公开(公告)号：US07835167B2

公开(公告)日：2010-11-16

申请号：US11980418

申请日：2007-10-31

Applicant: Chee-kheng Lim ,  In-kyeong Yoo ,  Sung-hoon Choa

Inventor： Chee-kheng Lim ,  In-kyeong Yoo ,  Sung-hoon Choa

IPC: G11C19/00 ,  G11C11/00 ,  G11C11/14 ,  G11C11/15

CPC classification number: G11C11/14 ,  G11C19/0808 ,  G11C19/0841 ,  G11C21/00 ,  Y10T428/11

Abstract: Example embodiments may provide data storage devices using movement of a magnetic domain wall and/or a method of operating magnetic domain data storage devices. The data storage device may include a first magnetic layer for writing data having two magnetic domains magnetized in different directions, a second magnetic layer for storing data at a side of the first magnetic layer, a data recording device connected to the first magnetic layer and the second magnetic layer, and a plurality of reading heads configured to read the second magnetic layer. The data storage device may store a larger amount of data without requiring moving mechanical systems.

Abstract translation: 示例性实施例可以使用磁畴壁的移动和/或操作磁畴数据存储设备的方法来提供数据存储设备。 数据存储装置可以包括用于写入具有不同方向磁化的两个磁畴的数据的第一磁性层，用于在第一磁性层的一侧存储数据的第二磁性层，连接到第一磁性层的数据记录装置和 第二磁性层和被配置为读取第二磁性层的多个读取头。 数据存储设备可以存储更大量的数据，而不需要移动机械系统。

公开(公告)号：US20090061035A1

公开(公告)日：2009-03-05

申请号：US12035702

申请日：2008-02-22

Applicant: Eun-hyoung CHO ,  Sung-hoon CHOA ,  Jin-seung SOHN ,  Du-hyun LEE

Inventor： Eun-hyoung CHO ,  Sung-hoon CHOA ,  Jin-seung SOHN ,  Du-hyun LEE

IPC: B29C35/08

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

Abstract: Provided is a dual-side imprinting lithography system that includes a medium supporting unit that supports a medium wherein both surfaces of the medium are coated with a ultraviolet (UV) hardening resin; a first mold supporting unit and a second mold supporting unit that respectively support a first mold and a second mold, disposed respectively above the medium supporting unit and under the medium supporting unit; a vertical moving device that moves vertically at least one of the medium supporting unit, the first mold supporting unit, and the second mold supporting unit; a first UV radiating device that is installed above the first mold supporting unit to radiate UV rays; and a second UV radiating device that is installed under the second mold supporting unit to radiate UV rays.

Abstract translation: 提供了一种双面压印光刻系统，其包括支撑介质的介质支撑单元，其中介质的两个表面都涂覆有紫外线（UV）硬化树脂; 第一模具支撑单元和第二模具支撑单元，其分别支撑分别位于介质支撑单元的上方和介质支撑单元下方的第一模具和第二模具; 垂直移动装置，其垂直移动介质支撑单元，第一模具支撑单元和第二模具支撑单元中的至少一个; 第一UV辐射装置，其安装在第一模具支撑单元上方以辐射紫外线; 以及第二UV辐射装置，其安装在所述第二模具支撑单元的下方以辐射紫外线。