Dew formation testing device and dew formation testing method
    12.
    发明授权
    Dew formation testing device and dew formation testing method 有权
    露点测试装置和露点测试方法

    公开(公告)号:US08763480B2

    公开(公告)日:2014-07-01

    申请号:US13266475

    申请日:2010-04-05

    IPC分类号: G01N25/68 G01N17/00

    CPC分类号: G01N17/00 G01N25/68

    摘要: A dew formation testing device has an adjustment tank capable of adjusting the temperature and humidity of air to predetermined temperature and humidity, a testing tank installed separately from the adjustment tank and having a sample base that has a mounting surface, onto which a testing sample W can be placed, and that is capable to cool the mounting surface, and ducts that link the adjustment unit and the testing tank. The testing tank is provided with an air guide member that, when air flowing into the testing tank through the duct flows onto the sample base from a side of the sample base, guides the air in the direction tilted downward at a predetermined angle, the guidance being performed at a position right above the sample base at an end thereof which is on the upstream side of the air flow.

    摘要翻译: 露水测试装置具有能够将空气的温度和湿度调节到预定温度和湿度的调节罐,与调节罐分开安装并具有安装表面的样品基底的测试罐,测试样品W 可以放置,并且能够冷却安装表面,以及连接调节单元和测试槽的管道。 试验箱设置有空气引导构件,当通过导管流入试验箱的空气从试样基体的一侧流入样品基底时,以向预定角度向下倾斜的方向引导空气,引导 在位于空气流的上游侧的端部的样品基底的正上方的位置进行。

    Film forming apparatus
    13.
    发明授权
    Film forming apparatus 有权
    成膜装置

    公开(公告)号:US07967961B2

    公开(公告)日:2011-06-28

    申请号:US11661084

    申请日:2005-08-29

    IPC分类号: C23C14/34

    摘要: There is provided a film forming apparatus which is capable of forming a film on both surfaces of a substrate by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.In a film forming chamber 2 the pressure of which is controlled, while a rotating drum 7 is rotated by the driving of a drive motor 8, a film is formed on the top surface of a substrate 12 on a substrate tray 13 held on a substrate holder 10 by cathodes 17a and 17b for outer surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, and also a film is formed on the back surface of the substrate 12 on the substrate tray 13 held on the substrate holder 10 by cathodes 14a and 14b for inner surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, by which a high-quality film is formed on both surfaces of the substrate 12 by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.

    摘要翻译: 提供一种成膜装置,其能够通过将衬底的温度上升抑制到预定值以上而以高效率连续溅射在衬底的两个表面上形成膜。 在通过驱动电动机8的驱动使旋转鼓7旋转的同时控制压力的成膜室2中,在保持在基板上的基板托盘13上的基板12的顶面上形成有膜 通过用于外部表面的阴极17a和17b的保持器10 电压或电流 施加电压或高频电压,并且通过用于内部表面的阴极14a和14b在保持在衬底保持器10上的衬底托盘13上的衬底12的背面上形成膜。 电压或电流 施加电压或高频电压,通过将基板的温度上升抑制到规定值以上,通过高效率地连续溅射,在基板12的两面形成高质量的膜。

    ENVIRONMENT TESTING APPARATUS CAPABLE OF CONTROLLING CONDENSATION AMOUNT, AND CONTROL METHOD THEREFOR
    14.
    发明申请
    ENVIRONMENT TESTING APPARATUS CAPABLE OF CONTROLLING CONDENSATION AMOUNT, AND CONTROL METHOD THEREFOR 有权
    控制冷凝量的环境测试装置及其控制方法

    公开(公告)号:US20110126616A1

    公开(公告)日:2011-06-02

    申请号:US13055053

    申请日:2009-06-22

    IPC分类号: G01N25/62

    摘要: An object of the present invention is to provide an environment testing apparatus capable of achieving, on the surface of a test object, a stable condensation status with less variation in the condensation amount than that of already existing-art. The environment testing apparatus 100 includes a regulator 4. On the basis of a signal from a condensation amount sensor 9, the regulator 4 controls the temperature of a cooling/heating plate 6 between a deviation-added value of the wet bulb temperature obtained from the wet bulb 11, and a deviation-added value of the dew-point temperature inside the test chamber 1.

    摘要翻译: 本发明的目的是提供一种环境测试装置,其能够在测试对象的表面上获得具有比现有技术更少的凝结量变化的稳定的冷凝状态。 环境试验装置100包括调节器4.基于来自冷凝量传感器9的信号,调节器4将冷却/加热板6的温度控制在从 湿球11,以及试验室1内的露点温度的偏差附加值。

    Cooling apparatus
    15.
    发明授权
    Cooling apparatus 有权
    冷却装置

    公开(公告)号:US07558064B2

    公开(公告)日:2009-07-07

    申请号:US11195418

    申请日:2005-08-01

    IPC分类号: H05K7/20 G01R31/02 F28B9/00

    摘要: The cooling apparatus comprises an air supply system, a water supply system, and a sprayer, and has a structure such that water and compressed air are mixed and the air is sprayed together with the water converted into mist onto the upper surface of a device attached to a socket of a burn-in board. The heat generated by the device is removed via the mist and air that falls on the upper surface. When a burn-in test is conducted the cooling apparatus adjusts the water and air supply so that the device is cooled to the target temperature.

    摘要翻译: 该冷却装置包括供气系统,供水系统和喷雾器,并且具有使水和压缩空气混合并将空气与转化成雾的水一起喷射到附接装置的上表面上的结构 到老化板的插座。 由装置产生的热量通过落在上表面上的雾气和空气除去。 当进行老化测试时,冷却装置调节水和空气供应,使得该装置被冷却到目标温度。

    Cooling apparatus
    16.
    发明申请
    Cooling apparatus 有权
    冷却装置

    公开(公告)号:US20060023424A1

    公开(公告)日:2006-02-02

    申请号:US11195418

    申请日:2005-08-01

    IPC分类号: H05K7/20

    摘要: The cooling apparatus comprises an air supply system, a water supply system, and a sprayer, and has a structure such that water and compressed air are mixed and the air is sprayed together with the water converted into mist onto the upper surface of a device attached to a socket of a burn-in board. The amount of heat generated by the device that generates a large amount of heat is removed via the heat including a large latent heat when the mist that falls on the upper surface is evaporated, and the burn-in is conducted, while the device is being cooled to the target temperature.

    摘要翻译: 该冷却装置包括供气系统,供水系统和喷雾器,并且具有使水和压缩空气混合并将空气与转化成雾的水一起喷射到附接装置的上表面上的结构 到老化板的插座。 当设置在上面的雾被蒸发时,通过包括大的潜热的热量消除由产生大量热量的装置产生的热量,并且在装置被进行时进行老化 冷却至目标温度。

    Cooling apparatus
    17.
    发明申请
    Cooling apparatus 有权
    冷却装置

    公开(公告)号:US20060021364A1

    公开(公告)日:2006-02-02

    申请号:US11195500

    申请日:2005-08-01

    IPC分类号: F28D3/00 F25D23/12 F28D5/00

    摘要: A cooling apparatus configured such that a cooling body provided with heat-dissipating plates is pressed against a device to which a socket of a burn-in board is attached, and air is provided by a blower such that the air passes between the heat-dissipating plates, and compressed air provided from a compressed air supply system is discharged by a nozzle so that it directly hits a portion of the cooling upper surface of the cooling body. By means of the cooling effects from these two types of air, a device generating a large amount of heat can be cooled with good temperature accuracy.

    摘要翻译: 一种冷却装置,其构造成使得设置有散热板的冷却体被压靠在安装有老化板的插座的装置上,并且空气由鼓风机提供,使得空气在散热板 板和压缩空气供给系统提供的压缩空气通过喷嘴排出,从而直接撞击冷却体的冷却上表面的一部分。 通过这两种类型的空气的冷却效果,可以以良好的温度精度冷却产生大量热量的装置。

    Vehicle control apparatus
    18.
    发明申请
    Vehicle control apparatus 有权
    车辆控制装置

    公开(公告)号:US20050215396A1

    公开(公告)日:2005-09-29

    申请号:US11055990

    申请日:2005-02-14

    摘要: A vehicle control apparatus is configured to avoid a forward lunging of a vehicle during a downshift while decelerating. The vehicle control apparatus has a clutch element that operatively coupled to an output of an engine to perform a gear shift operation and a controller that controls engine speed during shifts. If deceleration fuel cutoff conditions are met immediately after engine speed control accompanying a gear shift, delaying the start of fuel cutoff is prohibited and fuel cutoff is started right away whenever the deceleration operating conditions immediately prior to the start of engine speed control have been sustained for at least a specific length of time. On the other hand, if the deceleration duration is less than the specified time, the start of fuel cutoff is delayed so as to avoid catalyst overheating.

    摘要翻译: 车辆控制装置被配置为在减速期间避免在降档期间车辆的正向着车。 车辆控制装置具有可操作地联接到发动机的输出以执行换挡操作的离合器元件和在换档期间控制发动机转速的控制器。 如果伴随变速的发动机转速控制后立即满足减速燃料切断条件,则在紧接着发动机转速控制开始之前的减速运行条件已被维持的情况下,禁止延迟燃料切断的开始并立即开始燃油切断 至少要具体一段时间。 另一方面,如果减速持续时间小于指定时间,燃料切断开始被延迟,以避免催化剂过热。