公开(公告)号：US07313958B2

公开(公告)日：2008-01-01

申请号：US10471635

申请日：2002-09-25

Applicant: Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

Inventor： Rainer Willig ,  Jochen Franz ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Dieter Maurer ,  Christian Doering ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Johannes Classen ,  Christoph Lang ,  Jens Frey

IPC: G01C19/00

CPC classification number: G01C19/5747

Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.

Abstract translation: 提出了具有基板和科里奥利元件的旋转速率传感器，科里奥利元件位于基板的表面上方; 提供了一种驱动装置，通过该驱动装置将科里奥利元件引入平行于第一轴线的振动; 提供了一种检测装置，通过该检测装置可以基于设置成基本上垂直于第一轴线的第二轴线中的科里奥利力检测科里奥利元件的偏移; 所述第一和第二轴平行于所述基板的表面; 指定为相对于所述基板至少部分移动的传感器元件; 提供力传递装置; 所述力输送装置被提供以在所述基底和所述传感器元件中的至少一个之间传递静态力效应。

公开(公告)号：US06705164B2

公开(公告)日：2004-03-16

申请号：US10258336

申请日：2003-03-19

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.

Abstract translation: 一种偏转速率传感器，包括在衬底表面上并排布置的第一和第二科里奥利元件。 诱导科里奥利元件平行于第一轴线Y振荡。由于科里奥利力，科里奥利元件在垂直于第一轴线Y的第二轴线X中偏转。第一和第二科里奥利元件的振荡发生在 在没有科里奥利力的作用下彼此平行的两条直线的路径上相互相反。

公开(公告)号：US6140709A

公开(公告)日：2000-10-31

申请号：US306181

申请日：1999-05-06

Applicant: Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

Inventor： Horst Muenzel ,  Michael Offenberg ,  Udo Bischof ,  Eckhard Graf ,  Markus Lutz

IPC: H01L23/12 ,  B81B7/00 ,  B81C1/00 ,  G01C19/56 ,  G01P15/08 ,  H01L21/60 ,  H01L23/48 ,  H01L29/40 ,  H01L25/52

CPC classification number: G01P15/0802 ,  B81C1/00301 ,  B81C1/00801 ,  G01C19/56 ,  H01L24/02 ,  B81B2207/07 ,  B81B2207/097 ,  B81C2201/014 ,  B81C2201/053 ,  H01L2224/0401 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01013 ,  H01L2924/01014 ,  H01L2924/01033 ,  H01L2924/01068 ,  H01L2924/01072 ,  H01L2924/01074

Abstract: A bonding pad structure, in particular for a micromechanical sensor, includes a substrate, an electrically insulating sacrificial layer provided on the substrate, a patterned conductor path layer buried in the sacrificial layer, a contact hole provided in the sacrificial layer, and a bonding pad base, composed of an electrically conductive material. The bonding pad base has a first region extending over the sacrificial layer, and a second layer in contact with the conductor path region and extending through the contact hole. A protective layer is provided at least temporarily on the sacrificial layer in a specific region beneath and around the bonding pad base to prevent underetching of the sacrificial layer beneath the bonding pad base during etching of the sacrificial layer in such a way that the substrate and/or the conductor path is exposed.

Abstract translation: 特别是用于微机械传感器的焊盘结构包括衬底，设置在衬底上的电绝缘牺牲层，埋在牺牲层中的图案化导体通路层，设置在牺牲层中的接触孔，以及焊盘 基底，由导电材料组成。 焊盘基部具有在牺牲层上延伸的第一区域，以及与导体路径区域接触并延伸穿过接触孔的第二层。 保护层至少临时地设置在接合焊盘基座的下面和周围的特定区域中的牺牲层上，以防止牺牲层在蚀刻牺牲层期间的牺牲层的去抛光，使得衬底和/ 或导体路径露出。

公开(公告)号：US20090174148A1

公开(公告)日：2009-07-09

申请号：US12086893

申请日：2006-11-24

Applicant: Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

Inventor： Udo Bischof ,  Holger Hoefer ,  Volker Schmitz ,  Axel Grosse ,  Lutz Mueller ,  Ralf Hausner

IPC: F16J15/02

CPC classification number: B81C1/00293 ,  B81C2203/0145

Abstract: An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.

Abstract translation: 具有基板的集成部件，该基板具有围绕机械结构的空腔。 空腔由特定组成的流体在特定压力下填充，机械结构的机械性能受到流体的影响。

公开(公告)号：US06368885B1

公开(公告)日：2002-04-09

申请号：US09641438

申请日：2000-08-17

Applicant: Michael Offenberg ,  Udo Bischof

Inventor： Michael Offenberg ,  Udo Bischof

IPC: G01R3126

CPC classification number: G01C19/5769 ,  B81C1/00801 ,  B81C2201/053 ,  G01P15/0802 ,  Y10S438/902 ,  Y10S438/928 ,  Y10S438/976

Abstract: A method for manufacturing a micromechanical component, in particular, a surface-micromechanical yaw sensor, includes the following steps: providing a substrate having a front side and a back side; forming a micromechanical pattern on the front side; applying a protective layer on the micromechanical pattern on the front side; forming a micromechanical pattern on the back side, a resting on the micromechanical pattern on the front side taking place at least temporarily; removing the protective layer on the front side; and optionally further processing the micromechanical pattern on the front side and/or the micromechanical pattern on the back side.

Abstract translation: 一种用于制造微机械部件，特别是表面微机械偏航传感器的方法包括以下步骤：提供具有前侧和后侧的基板; 在前侧形成微机械图案; 在前侧的微机械图案上施加保护层; 在后侧形成微机械图案，其至少暂时发生在正面上的微机械图案上; 去除前侧的保护层; 并且可选地进一步处理前侧上的微机械图案和/或后侧的微机械图案。