公开(公告)号：US20060158658A1

公开(公告)日：2006-07-20

申请号：US11335871

申请日：2006-01-19

Applicant: Xavier Colonna De Lega ,  Peter De Groot

Inventor： Xavier Colonna De Lega ,  Peter De Groot

IPC: G01B11/02

CPC classification number: G01B9/023 ,  G01B9/02004 ,  G01B9/02027 ,  G01B9/02043 ,  G01B9/02044 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02074 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B11/0675 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/21 ,  G01N21/211

Abstract: Disclosed is a system including: (i) an interferometer configured to direct test electromagnetic radiation to a test surface and reference electromagnetic radiation to a reference surface and subsequently combine the electromagnetic radiation to form an interference pattern, the electromagnetic radiation being derived from a common source; (ii) a multi-element detector; and (iii) one or more optics configured to image the interference pattern onto the detector so that different elements of the detector correspond to different illumination angles of the test surface by the test electromagnetic radiation. The apparatus is configured to operate in a first mode in which the combined light is directed to the detector so that the different regions of the detector correspond to the different illumination angles of the test surface by the test light, and a second mode in which the different regions of the detector correspond to the different regions of the test surface illuminated by the test light to enable a profiling mode of operation.

公开(公告)号：US07023562B2

公开(公告)日：2006-04-04

申请号：US10238547

申请日：2002-09-10

Applicant: Xavier Colonna De Lega

Inventor： Xavier Colonna De Lega

IPC: G01B9/02

CPC classification number: G02B5/1871 ,  G02B6/02138

Abstract: Methods and systems for interferometrically characterizing diffractive elements are disclosed.

Abstract translation: 公开了用于干涉测量表征衍射元件的方法和系统。

公开(公告)号：US06714307B2

公开(公告)日：2004-03-30

申请号：US10190353

申请日：2002-07-03

Applicant: Peter J. De Groot ,  Xavier Colonna De Lega

Inventor： Peter J. De Groot ,  Xavier Colonna De Lega

IPC: G01B902

CPC classification number: G01N21/9515 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B11/306 ,  G01B2290/25

Abstract: Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g., spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference wavefronts.

公开(公告)号：US20120089365A1

公开(公告)日：2012-04-12

申请号：US13267408

申请日：2011-10-06

Applicant: Martin Fay ,  Jan Liesener ,  Peter de Groot ,  Xavier Colonna de Lega

Inventor： Martin Fay ,  Jan Liesener ,  Peter de Groot ,  Xavier Colonna de Lega

IPC: G01B11/24 ,  G01B11/06 ,  G06F17/10 ,  G06F19/00

CPC classification number: G01B11/2441 ,  G01B9/02011 ,  G01B9/02029 ,  G01B9/0203 ,  G01B9/02043 ,  G01B9/02083 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2210/56 ,  G01B2290/70

Abstract: A method includes fitting a function to a subset of reflectivity data comprising values for the reflectivity of a test object for different wavelengths, different scattering angles, and/or different polarization states; determining values for the function at certain wavelengths and scattering angles and/or polarization states; and determining information about the test object based on the determined values.

Abstract translation: 一种方法包括将功能拟合到包括不同波长，不同散射角和/或不同极化状态的测试对象的反射率的值的反射率数据子集; 确定在某些波长和散射角度和/或偏振状态下的功能的值; 以及基于所确定的值来确定关于所述测试对象的信息。

公开(公告)号：US07978337B2

公开(公告)日：2011-07-12

申请号：US12267077

申请日：2008-11-07

Applicant: Peter De Groot ,  Xavier Colonna De Lega

Inventor： Peter De Groot ,  Xavier Colonna De Lega

IPC: G01B9/02 ,  G02B21/00

CPC classification number: G02B21/0004

Abstract: In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.

Abstract translation: 在一个方面，本发明的特征在于包括使用显微镜将光引导到测试对象并将从测试对象反射的光引导到检测器的方法，其中光包括具有正交偏振态的分量，改变光路长度差 （OPD），在改变组件之间的OPD的同时获取来自检测器的干扰信号，并且基于所获取的干扰信号确定关于测试对象的信息。

公开(公告)号：US07948636B2

公开(公告)日：2011-05-24

申请号：US12701690

申请日：2010-02-08

Applicant: Peter De Groot ,  Michael J Darwin ,  Robert Stoner ,  Gregg M. Gallatin ,  Xavier Colonna De Lega

Inventor： Peter De Groot ,  Michael J Darwin ,  Robert Stoner ,  Gregg M. Gallatin ,  Xavier Colonna De Lega

IPC: G01B11/02

CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G03F7/70625

Abstract: Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.

Abstract translation: 公开了一种干涉测量分析方法，其包括将可对应于测试对象的不同表面位置的多个干涉测量信号的信息与对应于测试对象的多个模型的信息进行比较，其中多个模型由一系列特征参数化 或更多的未解决的测试对象的横向特征; 并基于该比较输出关于未解决的表面特征的信息。

公开(公告)号：US20110032535A1

公开(公告)日：2011-02-10

申请号：US12535357

申请日：2009-08-04

Applicant: Jan Liesener ,  Xavier Colonna de Lega ,  Peter de Groot

Inventor： Jan Liesener ,  Xavier Colonna de Lega ,  Peter de Groot

IPC: G01B11/02

CPC classification number: G01B9/02043 ,  G01B9/02057 ,  G01B9/02083 ,  G01B9/0209 ,  G01B2290/70 ,  G03F7/70633 ,  H01L23/544 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Systems are disclosed that include an interferometer configured to direct test light to an overlay test pad and subsequently combine it with reference light, the test and reference light being derived from a common source, one or more optics configured to direct at least a portion of the combined light to a multi-element detector so that different regions of the detector correspond to different illumination angles of the overlay test pad by the test light, the detector being configured to produce an interference signal based on the combined light, and an electronic processor in communication with the multi-element detector. The overlay test pad comprises a first patterned structure and a second patterned structure and the electronic processor is configured to determine information about the relative alignment between the first and second patterned structures based on the interference signal.

Abstract translation: 公开了一种系统，其包括被配置为将测试光引导到覆盖测试焊盘并随后将其与参考光组合的干涉仪，测试和参考光源自公共源，一个或多个光学器件被配置为引导至少一部分 将光组合到多元件检测器，使得检测器的不同区域对应于测试光的覆盖测试垫的不同照明角度，检测器被配置为基于组合的光产生干涉​​信号，以及电子处理器 与多元素检测器通信。 覆盖测试焊盘包括第一图案化结构和第二图案化结构，并且电子处理器被配置为基于干扰信号来确定关于第一和第二图案化结构之间的相对对准的信息。

公开(公告)号：US07884947B2

公开(公告)日：2011-02-08

申请号：US11758252

申请日：2007-06-05

Applicant: Xavier Colonna De Lega ,  Peter De Groot

Inventor： Xavier Colonna De Lega ,  Peter De Groot

IPC: G01B11/02

CPC classification number: G01B9/02027 ,  G01B9/02043 ,  G01B9/02044 ,  G01B9/02057 ,  G01B9/02074 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/211

Abstract: Disclosed is an apparatus which includes: an interferometer configured to direct broadband spatially coherent test light to a test surface of a test object over a range of illumination angles and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source; and multi-element detector; and one or more optics configured to direct at least a portion of the combined light to the detector so that different elements of the detector correspond to different illumination angles of a region of the test surface illuminated by the test light.

Abstract translation: 公开了一种装置，其包括：干涉仪，其被配置为在宽度范围的照射角度下将宽带空间相干测试光引导到测试对象的测试表面，并随后将其与参考光组合以形成干涉图案，所述测试和参考光为 源自一个共同的来源; 多元素检测器; 以及一个或多个光学器件，被配置为将组合的光的至少一部分引导到检测器，使得检测器的不同元件对应于由测试光照射的测试表面的区域的不同照明角度。

公开(公告)号：US20090262362A1

公开(公告)日：2009-10-22

申请号：US12427079

申请日：2009-04-21

Applicant: Peter de Groot ,  Jan Liesener ,  Xavier Colonna de Lega

Inventor： Peter de Groot ,  Jan Liesener ,  Xavier Colonna de Lega

IPC: G01B11/02 ,  H05K3/00 ,  H01J9/42

CPC classification number: G01B9/02084 ,  G01B9/02057 ,  G01B9/0209 ,  G01B2290/70 ,  G01N21/95607 ,  G03F7/70633 ,  Y10T29/49004

Abstract: In general, in a first aspect, the invention features a system including an interferometer configured to direct test light to an overlay target and subsequently combine it with reference light to form an interference pattern, the test and reference light being derived from a common source, a multi-element detector, one or more optics to image the overlay target on the multi-element detector; and an electronic processor in communication with the multi-element detector. The overlay target includes a first pattern and a second pattern and the electronic processor is configured to determine information about the relative alignment between the first and second patterns.

Abstract translation: 通常，在第一方面，本发明的特征在于一种包括干涉仪的系统，该干涉仪被配置为将测试光引导到覆盖目标，并随后将其与参考光组合以形成干涉图案，测试和参考光源自公共源， 多元素检测器，用于对多元件检测器上的覆盖目标进行成像的一个或多个光学元件; 以及与多元件检测器通信的电子处理器。 覆盖目标包括第一图案和第二图案，并且电子处理器被配置为确定关于第一图案和第二图案之间的相对对准的信息。

公开(公告)号：US20090128827A1

公开(公告)日：2009-05-21

申请号：US12267077

申请日：2008-11-07

Applicant: Peter de Groot ,  Xavier Colonna de Lega

Inventor： Peter de Groot ,  Xavier Colonna de Lega

IPC: G01B9/02

CPC classification number: G02B21/0004

Abstract: In one aspect, the disclosure features methods that include using a microscope to direct light to a test object and to direct the light reflected from the test object to a detector, where the light includes components having orthogonal polarization states, varying an optical path length difference (OPD) between the components of the light, acquiring an interference signal from the detector while varying the OPD between the components, and determining information about the test object based on the acquired interference signal.

Abstract translation: 在一个方面，本发明的特征在于包括使用显微镜将光引导到测试对象并将从测试对象反射的光引导到检测器的方法，其中光包括具有正交偏振态的分量，改变光路长度差 （OPD），在改变组件之间的OPD的同时获取来自检测器的干扰信号，并且基于所获取的干扰信号确定关于测试对象的信息。