公开(公告)号：US08274046B1

公开(公告)日：2012-09-25

申请号：US13111851

申请日：2011-05-19

Applicant: Weiming Ren ,  Zhongwei Chen

Inventor： Weiming Ren ,  Zhongwei Chen

IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

CPC classification number: H01J37/28 ,  G21K1/093 ,  H01J37/05 ,  H01J2237/049 ,  H01J2237/057 ,  H01J2237/153

Abstract: This invention provides a monochromator for reducing energy spread of a primary charged particle beam in charged particle apparatus, which comprises a beam adjustment element, two Wien-filter type dispersion units and an energy-limit aperture. In the monochromator, a double symmetry in deflection dispersion and fundamental trajectory along a straight optical axis is formed, which not only fundamentally avoids incurring off-axis aberrations that actually cannot be compensated but also ensures the exit beam have a virtual crossover which is stigmatic, dispersion-free and inside the monochromator. Therefore, using the monochromator in SEM can reduce chromatic aberrations without additionally incurring adverse impacts, so as to improve the ultimate imaging resolution. The improvement of the ultimate imaging resolution will be more distinct for Low-Voltage SEM and the related apparatuses which are based on LVSEM principle, such as the defect inspection and defect review in semiconductor yield management. The present invention also provides two ways to build a monochromator into a SEM, one is to locate a monochromator between the electron source and the condenser, and another is to locate a monochromator between the beam-limit aperture and the objective. The former provides an additional energy-angle depending filtering, and obtains a smaller effective energy spread.

Abstract translation: 本发明提供一种用于减少带电粒子装置中的初级带电粒子束的能量扩散的单色仪，其包括光束调节元件，两个维恩滤波器型色散单元和能量限制孔径。 在单色仪中，形成沿着直线光轴的偏转色散和基本轨迹的双重对称性，其不仅从根本上避免了实际上不能被补偿的偏轴像差，而且还确保出射光束具有虚拟的虚拟交叉， 无色分离和单色仪内部。 因此，在SEM中使用单色仪可以减少色差，而不会产生不利影响，从而提高最终的成像分辨率。 对于低电压SEM和基于LVSEM原理的相关设备，如半导体产量管理中的缺陷检查和缺陷检查，最终成像分辨率的提高将会更加明显。 本发明还提供了在扫描电镜中构建单色仪的两种方法，一种是在电子源和电容器之间定位单色仪，另一种是在光束极限孔径和物镜之间定位单色仪。 前者提供额外的能量角取决于滤波，并获得较小的有效能量扩展。

公开(公告)号：US20110260055A1

公开(公告)日：2011-10-27

申请号：US12764902

申请日：2010-04-21

Applicant: JOE WANG ,  VAN-DUC NGUYEN ,  YI-XIANG WANG ,  JACK JAU ,  ZHONGWEI CHEN

Inventor： JOE WANG ,  VAN-DUC NGUYEN ,  YI-XIANG WANG ,  JACK JAU ,  ZHONGWEI CHEN

IPC: H01J37/21 ,  G01N23/22 ,  G01B11/24 ,  H01J37/28

CPC classification number: G01B11/22 ,  G01N23/04 ,  G01N23/20058 ,  G01N2223/32 ,  G01N2223/3301 ,  G01N2223/3302 ,  G01N2223/646 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/2487

Abstract: The present invention generally relates to dynamic focus adjustment for an image system. With the assistance of a height detection sub-system, present invention provides an apparatus and methods for micro adjusting an image focusing according the specimen surface height variation by altering the field strength of an electrostatic lens between objective lens and sample stage/or a bias voltage applied to the sample surface. Merely by way of example, the invention has been applied to a scanning electron inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as observation tool with a height detection apparatus.

Abstract translation: 本发明一般涉及图像系统的动态聚焦调整。 本发明借助于高度检测子系统，提供了一种用于通过改变物镜和样品台之间的静电透镜的场强/或偏置电压来根据样本表面高度变化来微调整图像聚焦的装置和方法 应用于样品表面。 仅作为示例，本发明已经应用于扫描电子检查系统。 但是应当认识到，本发明可以应用于使用带有带电粒子束的其它系统作为具有高度检测装置的观察工具。

公开(公告)号：US20110139996A1

公开(公告)日：2011-06-16

申请号：US12636007

申请日：2009-12-11

Applicant: ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

Inventor： ZHONGWEI CHEN ,  WEIMING REN ,  KENICHI KANAI ,  XUEDONG LIU

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/1405

Abstract: The present invention relates to a multi-axis magnetic lens for a charged particle beam system. The apparatus eliminates the undesired non-axisymmetric transverse magnetic field components from the magnetic field generated by a common excitation coil and leaves the desired axisymmetric field for focusing each particle beam employed within the system.

Abstract translation: 本发明涉及带电粒子束系统的多轴磁透镜。 该装置从由公共的励磁线圈产生的磁场中消除不期望的非轴对称的横向磁场分量，并且留下用于聚焦在系统内采用的每个粒子束的期望的轴对称场。

公开(公告)号：US20100159305A1

公开(公告)日：2010-06-24

申请号：US11376768

申请日：2006-03-15

Applicant: Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

Inventor： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

IPC: H01M4/92 ,  H01M4/88

CPC classification number: H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

Abstract: Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

Abstract translation: 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

公开(公告)号：US20100150429A1

公开(公告)日：2010-06-17

申请号：US12335458

申请日：2008-12-15

Applicant: Jack JAU ,  Zhongwei CHEN ,  Yi Xiang WANG ,  Chung-Shih PAN ,  Joe WANG ,  Xuedong LIU ,  Weiming REN ,  Wei FANG

Inventor： Jack JAU ,  Zhongwei CHEN ,  Yi Xiang WANG ,  Chung-Shih PAN ,  Joe WANG ,  Xuedong LIU ,  Weiming REN ,  Wei FANG

IPC: G06K9/00

CPC classification number: G06T7/001 ,  G01N23/04 ,  G01N2223/102 ,  G01N2223/426 ,  G01N2223/611 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: The present invention relates to a defect review system, and/or particularly, to an apparatus and method of defect review sampling, review method and classification on a semiconductor wafer or a pattern lithography reticle during integrated circuit fabrication. These objects are achieved in comparing a reviewed image with a reference image pick-up through a smart sampling filter. A clustering computer system base on high speed network will provide data cache and save operation time and memory. A smart review sampling filter automatically relocate abnormal pattern or defects and classify the device location extracted from design database and/or from golden die image on the same substrate. The column of the present defect review system is comprised of the modified SORIL type objective lens. This column provides solution of improving throughput during sample review, material identification better image quality, and topography image of defect. One embodiment of the present invent adopts an optical auto focusing system to compromise micro height variation due wafer surface topography. And another embodiment adopts surface charge control system to regulate the charge accumulation due to electron irradiation during the review process.

Abstract translation: 本发明涉及一种缺陷评估系统，和/或特别涉及在集成电路制造期间对半导体晶片或图案光刻掩模版进行缺陷评估抽样，评估方法和分类的装置和方法。 通过智能采样滤波器将经检查的图像与参考图像拾取进行比较，实现了这些目的。 基于高速网络的集群计算机系统将提供数据缓存，节省操作时间和内存。 智能检查采样过滤器自动重新定位异常模式或缺陷，并将从设计数据库中提取的设备位置和/或从相同基板上的金色模具图像分类。 本缺陷检查系统的列由改进的SORIL型物镜组成。 该栏提供了在样本审查期间提高吞吐量，材料识别更好的图像质量和缺陷的地形图像的解决方案。 本发明的一个实施例采用光学自动聚焦系统来破坏由晶片表面形貌引起的微高度变化。 另一个实施例采用表面电荷控制系统来调节在检查过程中由电子辐射引起的电荷累积。

公开(公告)号：US11935720B1

公开(公告)日：2024-03-19

申请号：US18491725

申请日：2023-10-20

Applicant: Dazhi Chen ,  Zhongwei Chen

Inventor： Dazhi Chen ,  Zhongwei Chen

IPC: H01J1/304

CPC classification number: H01J1/3044 ,  H01J2201/30415 ,  H01J2201/30426 ,  H01J2201/30496

Abstract: A field-emission type electron source includes (i) a single-crystal tungsten rod having a sharpened terminus and (ii) a mass of ZrO formed only on a portion of the surface, or the entire surface, of the sharpened terminus. In preferred design, the single-crystal tungsten rod is placed in a gaseous medium that consists of oxygen and a non-oxygen gas. The molar ratio between oxygen and the non-oxygen gas is greater than 1:1.

公开(公告)号：US20220108865A1

公开(公告)日：2022-04-07

申请号：US17302031

申请日：2021-04-21

Applicant: Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/141 ,  H01J37/147 ,  H01J37/20 ,  H01J37/28

Abstract: The present invention provides an apparatus of charged-particle beam such as an electron microscope with co-condensers. A source of charged particles is configured to emit a beam of charged particles, and the co-condensers including two or more magnetic condensers are configured to coherently focus the beam to a single crossover spot. The invention exhibits numerous technical merits such as continuous image resolution tuning, and automatic switching between multiple resolutions, among others.

公开(公告)号：US11295927B1

公开(公告)日：2022-04-05

申请号：US17302031

申请日：2021-04-21

Applicant: Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

Inventor： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC: H01J37/141 ,  H01J37/147 ,  H01J37/28 ,  H01J37/20

Abstract: The present invention provides an apparatus of charged-particle beam such as an electron microscope with co-condensers. A source of charged particles is configured to emit a beam of charged particles, and the co-condensers including two or more magnetic condensers are configured to coherently focus the beam to a single crossover spot. The invention exhibits numerous technical merits such as continuous image resolution tuning, and automatic switching between multiple resolutions, among others.

公开(公告)号：US20150376013A1

公开(公告)日：2015-12-31

申请号：US14654215

申请日：2013-12-20

Applicant: Aiping YU ,  Victor CHABOT ,  Zhongwei CHEN

Inventor： Aiping Yu ,  Victor Chabot ,  Zhongwei Chen

IPC: C01B31/04

CPC classification number: C01B31/0469 ,  C01B32/19 ,  C01B2204/02 ,  C01B2204/04

Abstract: A method of producing single or few-layer graphene comprises exfoliating graphite with a polymer to form a graphene-polymer composite and subsequently treating the composite to disassociate graphene. The exfoliation process is conducted using sonication. The graphene is disassociated from the polymer by a treatment step such as acid hydrolysis. The method results in highly pure graphene.

Abstract translation: 生产单层或几层石墨烯的方法包括用聚合物去除石墨以形成石墨烯 - 聚合物复合材料，随后处理复合材料以分离石墨烯。 剥离过程使用超声处理进行。 石墨烯通过诸如酸水解的处理步骤与聚合物分离。 该方法产生高纯度石墨烯。

公开(公告)号：US09214680B2

公开(公告)日：2015-12-15

申请号：US12224197

申请日：2007-02-24

Applicant: Yan Yushan ,  Zhongwei Chen

Inventor： Yan Yushan ,  Zhongwei Chen

IPC: B01J23/56 ,  H01M4/92 ,  C22C5/04 ,  H01M4/88 ,  H01M8/10

CPC classification number: H01M4/92 ,  C22C5/04 ,  H01M4/8814 ,  H01M4/921 ,  H01M4/928 ,  H01M2008/1095 ,  Y02E60/50 ,  Y02E60/523

Abstract: Electrocatalyst durability has been recently recognized as one of the most important issues that have to be addressed before the commercialization of the proton exchange membrane fuel cells (PEMFCs). The present invention is directed to a new class of cathode catalysts based on supportless platinum nanotubes (PtNTs) and platinum alloy nanotubes, for example, platinum-palladium nanotubes (PtPdNTs), that have remarkable durability and high catalytic activity. Due to their unique combination of dimensions at multiple length scales, the platinum nanotubes of the present invention can provide high platinum surface area due to their nanometer-sized wall thickness, and have the potential to eliminate or alleviate most of the degradation pathways of the commercial carbon supported platinum catalyst (Pt/C) and unsupported platinum-black (PtB) as a result of their micrometer-sized length. The platinum nanotube catalysts of the present invention asymptotically approach a maximum of about twenty percent platinum surface area loss in durability test, while the commercial PtB and Pt/C catalysts lose about fifty-one percent and ninety percent of their initial surface area, respectively. Moreover, the PtNT and PtPdNT catalysts of the present invention show higher mass activity and much higher specific activity than commercial Pt/C and PtB catalysts.

Abstract translation: 电催化剂耐久性最近被认为是在质子交换膜燃料电池（PEMFC）商业化之前必须解决的最重要的问题之一。 本发明涉及一类新型的基于无支撑铂纳米管（PtNTs）和铂合金纳米管（例如铂 - 钯纳米管（PtPdNTs））的阴极催化剂，其具有显着的耐久性和高催化活性。 由于它们在多个长度尺度上的独特的尺寸组合，本发明的铂纳米管由于其纳米尺寸的壁厚可以提供高的铂表面积，并且具有消除或减轻商业的大部分降解途径的潜力 碳负载的铂催化剂（Pt / C）和无支撑的铂黑（PtB），由于其微米尺寸的长度。 本发明的铂纳米管催化剂在耐久性试验中渐近地接近约百分之二十的铂表面积损失，而商业PtB和Pt / C催化剂分别损失其初始表面积的百分之五十一和百分之九十。 此外，本发明的PtNT和PtPdNT催化剂显示比商业Pt / C和PtB催化剂更高的质量活性和更高的比活性。