公开(公告)号：US09656910B2

公开(公告)日：2017-05-23

申请号：US15016781

申请日：2016-02-05

申请人： CORNING INCORPORATED

发明人： Brandon Allen Bazemore ,  Jeffrey Alan Decker ,  Jiangwei Feng ,  Diane Kimberlie Guilfoyle ,  Daniel Ralph Harvey ,  Yuhui Jin ,  Laurent Joubaud ,  Xavier Gerard Lafosse ,  Alexander Mikhailovich Streltsov ,  Ljerka Ukrainczyk

IPC分类号： C03C15/00 ,  C03B23/00 ,  C03C21/00 ,  C03C23/00 ,  C03C3/083 ,  C03C3/085 ,  C03C3/091 ,  C03C3/097 ,  B23K26/00 ,  B23K26/38 ,  B23K26/082 ,  B23K26/362 ,  B23K26/40 ,  C03C17/32 ,  B23K101/18 ,  B23K101/40 ,  B23K103/00 ,  C03B23/023 ,  C03B23/025 ,  C03B23/03 ,  C03B23/035

CPC分类号： C03C15/00 ,  B23K26/0006 ,  B23K26/082 ,  B23K26/361 ,  B23K26/362 ,  B23K26/38 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/18 ,  B23K2101/40 ,  B23K2103/00 ,  B23K2103/50 ,  B23K2103/54 ,  C03B23/0066 ,  C03B23/023 ,  C03B23/0235 ,  C03B23/025 ,  C03B23/03 ,  C03B23/0352 ,  C03C3/083 ,  C03C3/085 ,  C03C3/091 ,  C03C3/097 ,  C03C17/328 ,  C03C21/00 ,  C03C21/002 ,  C03C23/0025 ,  C03C2218/328 ,  C03C2218/34 ,  C03C2218/355 ,  Y02P40/57 ,  Y10T428/24331

摘要： Methods of forming a glass article are disclosed. In one embodiment, a method of forming a glass article includes translating a pulsed laser beam on a glass substrate sheet to form a laser damage region between a first surface and a second surface of the glass substrate sheet. The method further includes applying an etchant solution to the glass substrate sheet to remove a portion of the glass substrate sheet about the laser damage region. The method may further include strengthening the glass substrate sheet by an ion-exchange strengthening process, and coating the glass substrate sheet with an acid-resistant coating. Also disclosed are methods where the laser damage region has an initial geometry that changes to a desired geometry following the reforming of the glass substrate sheet such that the initial geometry of the laser damage region compensates for the bending of the glass substrate sheet.

公开(公告)号：US20160102009A1

公开(公告)日：2016-04-14

申请号：US14972352

申请日：2015-12-17

申请人： CORNING INCORPORATED

发明人： Heather Debra Boek ,  Robert Carl Burket ,  Daniel Ralph Harvey ,  Alexander Mikhailovich Streltsov

IPC分类号： C03B33/08 ,  C03C23/00 ,  B23K26/386 ,  C03C15/02

CPC分类号： C03B33/082 ,  B23K26/382 ,  B23K26/384 ,  B23K26/386 ,  B23K26/389 ,  B23K26/40 ,  B23K26/402 ,  B23K2103/50 ,  C03C15/00 ,  C03C15/02 ,  C03C23/0025 ,  G02B6/1225 ,  G02B6/136

摘要： A method of fabricating a high-density array of holes in glass is provided, comprising providing a glass piece having a front surface, then irradiating the front surface of the glass piece with a UV laser beam focused to a focal point within +/−100 μm of the front surface of the glass piece most desirably within +/−50 μm of the front surface. The lens focusing the laser has a numerical aperture desirably in the range of from 0.1 to 0.4, more desirably in the range of from 0.1 to 0.15 for glass thickness between 0.3 mm and 0.63 mm, even more desirably in the range of from 0.12 to 0.13, so as to produce open holes extending into the glass piece 100 from the front surface 102 of the glass piece, the holes having an diameter the in range of from 5 to 15 μm, and an aspect ratio of at least 20:1. For thinner glass, in the range of from 0.1-0.3 mm, the numerical aperture is desirably from 0.25 to 0.4, more desirably from 0.25 to 0.3, and the beam is preferably focused to within +/−30 μm of the front surface of the glass. The laser is desirable operated at a repetition rate of about 15 kHz or below. An array of holes thus produced may then be enlarged by etching. The front surface may be polished prior to etching, if desired.

摘要翻译： 提供一种在玻璃中制造高密度孔阵列的方法，包括提供具有前表面的玻璃片，然后用聚焦在+/- 100内的焦点的UV激光束照射玻璃片的前表面 玻璃片的前表面的μm最理想地在前表面的+/-50μm内。 聚焦激光器的透镜的数值孔径希望在0.1至0.4的范围内，更优选在0.1至0.15的范围内，对于玻璃厚度在0.3mm至0.63mm之间，甚至更优选在0.12至0.13的范围内 从玻璃片的前表面102产生从玻璃片100延伸的露出孔，其直径在5至15μm，纵横比至少为20:1的孔中。 对于较薄的玻璃，在0.1-0.3mm的范围内，数值孔径期望地为0.25至0.4，更优选为0.25至0.3，并且该光束优选地聚焦在该光束的前表面的+/-30μm内 玻璃。 期望激光器以约15kHz或更低的重复率操作。 然后可以通过蚀刻来扩大由此产生的孔阵列。 如果需要，前表面可以在蚀刻之前被抛光。