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11.发明申请公开(公告)号：US20130186940A1
公开(公告)日：2013-07-25
申请号：US13681875
申请日：2012-11-20
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： C04B37/00
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。
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公开(公告)号：US20130180976A1
公开(公告)日：2013-07-18
申请号：US13682225
申请日：2012-11-20
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。
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公开(公告)号：US10991616B2
公开(公告)日：2021-04-27
申请号：US16215526
申请日：2018-12-10
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/67 , H01L21/687 , H01L21/683
摘要： A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.
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14.发明授权公开(公告)号：US10593584B2
公开(公告)日：2020-03-17
申请号：US15341843
申请日：2016-11-02
IPC分类号： H01T23/00 , H01L21/683 , B23Q3/15 , B23K1/00 , C04B37/00 , H01L21/687 , B23K1/19 , B23K1/20 , B23K1/008 , B23K103/18 , B23K103/00 , B23K101/42
摘要： An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C. to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C. to 750 C.
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15.发明申请公开(公告)号：US20170240475A1
公开(公告)日：2017-08-24
申请号：US15489014
申请日：2017-04-17
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： C04B37/00 , B32B37/10 , H01L21/67 , H01L21/683 , H01L21/687 , B32B9/00 , B32B37/06
CPC分类号： C04B37/006 , B23K1/0016 , B23K1/008 , B23K1/19 , B23K1/20 , B23K3/087 , B23K35/005 , B23K35/286 , B23K35/38 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B37/06 , B32B37/10 , C04B35/645 , C04B37/001 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/60 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , F16B11/006 , H01L21/67103 , H01L21/6833 , H01L21/68757 , H01L21/68785 , H01L21/68792 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be on a non-diffusable type, such as aluminum nitride, alumina, beryllium oxide, and zirconia, and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
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16.发明授权Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing 有权用于密封连接板和轴装置的方法，包括用于半导体加工的陶瓷材料公开(公告)号：US08684256B2
公开(公告)日：2014-04-01
申请号：US13681930
申请日：2012-11-20
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veyster
IPC分类号： B23K31/02
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。
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公开(公告)号：US20140014642A1
公开(公告)日：2014-01-16
申请号：US13831670
申请日：2013-03-15
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/02
CPC分类号： H01L21/02002 , H01L21/67103 , H01L21/67248 , H01L21/68792 , H05B3/283 , H05B2203/002 , H05B2203/037
摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.
摘要翻译： 具有多个热电偶的多区加热器，使得可以独立地监测不同的加热器区域的温度。 独立的热电偶可以使它们的导线从加热器的轴线导出，该通道在接合过程中被封闭，该连接过程导致气密密封适于承受轴的内部气氛和处理室中的处理化学品。 热电偶及其引线可以用接合工艺封闭，其中通道盖用铝钎焊到加热器板。
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公开(公告)号：US20130189022A1
公开(公告)日：2013-07-25
申请号：US13682079
申请日：2012-11-20
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： F16B9/00
CPC分类号： B23K1/0008 , B23K1/0016 , B23K1/19 , B23K1/20 , B23K35/005 , B23K35/286 , B23K2103/10 , B32B3/30 , B32B7/14 , B32B9/005 , B32B9/04 , B32B9/041 , B32B15/20 , B32B18/00 , C04B35/645 , C04B37/001 , C04B37/006 , C04B2235/6562 , C04B2235/6565 , C04B2235/6567 , C04B2235/6581 , C04B2235/6582 , C04B2235/945 , C04B2237/121 , C04B2237/122 , C04B2237/126 , C04B2237/127 , C04B2237/34 , C04B2237/343 , C04B2237/348 , C04B2237/36 , C04B2237/365 , C04B2237/366 , C04B2237/368 , C04B2237/592 , C04B2237/61 , C04B2237/64 , C04B2237/66 , C04B2237/68 , C04B2237/704 , C04B2237/708 , C04B2237/72 , C04B2237/76 , C04B2237/765 , C04B2237/80 , C04B2237/84 , F16B9/00 , H01L21/67103 , H01L21/6831 , H05B1/00 , Y10T403/46 , Y10T428/31504 , Y10T428/31678
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
摘要翻译： 一种用于将陶瓷片与密封接头接合的方法，包括在两片之间钎焊连续的接合材料层。 接合材料的润湿和流动通过接合材料的选择，接合温度，温度时间，接合气氛等因素来控制。 陶瓷片可以是氮化铝，并且可以在受控气氛下用铝合金钎焊。 接头材料适于随后在衬底处理期间承受处理腔室内的环境，以及可在加热器或静电吸盘的轴内看到的氧化气氛。
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19.发明申请公开(公告)号：US20200185262A1
公开(公告)日：2020-06-11
申请号：US16215526
申请日：2018-12-10
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： H01L21/687 , H01L21/67 , H01L21/683
摘要： A method for the joining of ceramic pieces into an assembly adapted to be used in semiconductor processing. The joined pieces are adapted to withstand the environments within a process chamber during substrate processing, chamber cleaning processes, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The ceramic pieces may be aluminum nitride and the pieces may be brazed with aluminum. The joint material is adapted to withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck. The joint is adapted to provide a hermetic seal across the joint. The joined pieces are adapted to be separated at a later time should rework or replacement of one of the pieces be desired.
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公开(公告)号：US10646941B2
公开(公告)日：2020-05-12
申请号：US15419952
申请日：2017-01-30
发明人： Alfred Grant Elliot , Brent Donald Alfred Elliot , Frank Balma , Richard Erich Schuster , Dennis George Rex , Alexander Veytser
IPC分类号： B23K31/02 , B23K1/00 , H05B1/00 , B32B18/00 , B32B9/00 , B32B15/20 , C04B37/00 , B23K1/19 , B23K1/20 , B23K35/28 , B23K35/00 , C04B35/645 , B32B9/04 , F16B9/00 , B32B3/30 , B32B7/14 , H01L21/67 , H01L21/683 , B23K103/10
摘要： A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
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