Scanning exposure apparatus, and device manufacturing method
    11.
    发明授权
    Scanning exposure apparatus, and device manufacturing method 有权
    扫描曝光装置和装置制造方法

    公开(公告)号:US07148948B2

    公开(公告)日:2006-12-12

    申请号:US11019106

    申请日:2004-12-22

    申请人: Kazuo Sano

    发明人: Kazuo Sano

    IPC分类号: G03B27/52 G03B27/72

    摘要: A scanning exposure apparatus includes an illumination optical system for illuminating a pattern of an original through an opening being conjugate or approximately conjugate with the pattern of the original, and a changing mechanism for changing a width of the opening with respect to a scan direction of the original. The changing mechanism includes a light blocking plat, and a plurality of driving mechanisms for moving the light blocking plate. The plurality of driving mechanisms is provided at different positions with respect to the light blocking plate and also are arranged to be driven by an actuator. At least one of the plurality of driving mechanisms includes a guiding mechanism for allowing a deviation between a position of an object to be driven by the actuator and a position of the light blocking plate, with respect to a direction different from a direction of displacement of the object to be driven.

    摘要翻译: 扫描曝光装置包括:照明光学系统,用于通过与原稿的图案共轭或大致共轭的开口照射原稿的图案;以及改变机构,用于相对于原稿的扫描方向改变开口的宽度 原版的。 改变机构包括遮光平板和用于移动遮光板的多个驱动机构。 多个驱动机构设置在相对于遮光板的不同位置处,并且还被布置成由致动器驱动。 所述多个驱动机构中的至少一个包括引导机构,用于允许所述致动器驱动的物体的位置与所述遮光板的位置之间的偏差相对于与所述致动器的位移方向不同的方向 要驱动的对象。

    CCM calculating system, CCM calculating method and recording medium
    12.
    发明授权
    CCM calculating system, CCM calculating method and recording medium 有权
    CCM计算系统,CCM计算方法和记录介质

    公开(公告)号:US07148900B2

    公开(公告)日:2006-12-12

    申请号:US09879958

    申请日:2001-06-14

    IPC分类号: G09G5/02

    摘要: The object of the invention is to provide a CCM calculating system being relatively inexpensive and alleviating the necessity of a spectrophotometer, a CCM calculating method and a recording medium. A CCM calculating system according to the invention calculates a blending ratio of colorants based on stored color data 16. The system has an input device 5(20b) for inputting data of color specification values corresponding to a desired target color; and a data operation unit 1(20c) for calculating a blending ratio of colorants for reproducing the target color, based on the input data of color specification values and stored color data. Since the blending ratio of colorants for reproducing the desired target color may be calculated based on the input color specification value data and stored color data, such CCM calculation may be performed without the necessity of a spectrophotometer.

    摘要翻译: 本发明的目的是提供一种相对便宜的CCM计算系统,并且减轻了分光光度计,CCM计算方法和记录介质的必要性。 根据本发明的CCM计算系统基于存储的颜色数据16计算着色剂的混合比。 该系统具有输入装置5(20b),用于输入对应于期望目标色彩的颜色规格值的数据; 以及数据操作单元1(20c),用于基于颜色指定值和存储的颜色数据的输入数据来计算用于再现目标颜色的着色剂的混合比。 由于可以基于输入颜色指定值数据和存储的颜色数据来计算用于再现期望目标色彩的着色剂的混合比例,所以可以在不需要分光光度计的情况下执行这种CCM计算。

    Fatigue crack position detection apparatus
    13.
    发明授权
    Fatigue crack position detection apparatus 失效
    疲劳裂纹位置检测装置

    公开(公告)号:US4716459A

    公开(公告)日:1987-12-29

    申请号:US912582

    申请日:1986-09-16

    摘要: A distance between a distal end of a crack formed in a fatigue test piece on which a reference line is scribed, and the reference line, is monitored. The reference line and the crack are scanned with an ITV camera to prepare the fatigue test piece having the crack of a predetermined length. Luminance levels are integrated from a video signal obtained by scanning each raster in the same direction as that of the reference line to obtain a maximum luminance level, and the reference line position is detected from the maximum luminance level. At the same time, continuity of a high-level value is discriminated from the video signal, and a crack distal end position is detected from the discrimination result. A difference between both the detected positions is calculated, and the test piece is machined so that the difference corresponds to the predetermined length.

    摘要翻译: PCT No.PCT / JP86 / 00028第 371日期1986年9月16日 102(e)1986年9月16日PCT PCT 1月24日PCT公布。 出版物WO86 / 04410 日期:1986年7月31日。监视在其上划线的疲劳试片上形成的裂纹的远端与基准线之间的距离。 使用ITV照相机对参考线和裂纹进行扫描,以制备具有预定长度的裂纹的疲劳试验片。 从通过扫描每个光栅获得的视频信号与参考线的方向相同的方向集成亮度水平以获得最大亮度水平,并且从最大亮度水平检测参考线位置。 同时,从视频信号中辨别出高电平值的连续性,并根据识别结果检测裂纹远端位置。 计算两个检测位置之间的差异,并且加工试样,使得该差异对应于预定长度。

    Swirling burners for use in hot blast stoves
    14.
    发明授权
    Swirling burners for use in hot blast stoves 失效
    旋流燃烧器用于热风炉

    公开(公告)号:US4054409A

    公开(公告)日:1977-10-18

    申请号:US685686

    申请日:1976-05-12

    CPC分类号: F23D14/02 C21B9/00 F23D14/62

    摘要: The swirling burner comprises a vertical combustion chamber and an annular blast member located beneath the combustion chamber and provided with a central cylindrical space and a plurality of alternately superposed fuel gas passages and air passages. These passages are communicated with the cylindrical space through blow openings which are inclined in the same direction with respect to the radii of the cylindrical space. In a modification, the burner is further combined with straight blowing type burner for promoting the effect of the air-gas mixing.

    摘要翻译: 旋流燃烧器包括位于燃烧室下方的垂直燃烧室和环形喷射构件,并且设置有中心圆柱形空间和多个交替重叠的燃料气体通道和空气通道。 这些通道通过相对于圆柱形空间的半径沿相同方向倾斜的吹扫开口与圆柱形空间连通。 在改进中,燃烧器进一步与直吹型燃烧器结合,以促进空气混合的效果。

    Film thickness-measuring apparatus using linearly polarized light
    17.
    发明授权
    Film thickness-measuring apparatus using linearly polarized light 失效
    使用线偏振光的膜厚测量装置

    公开(公告)号:US4850711A

    公开(公告)日:1989-07-25

    申请号:US62242

    申请日:1987-06-11

    IPC分类号: G01B11/06 G01N21/21

    CPC分类号: G01B11/065 G01N21/211

    摘要: A linearly polarized light beam is applied to the surface of a film and is reflected therefrom. The beam is then split into three light beams by three or four optical flats. These light beams are applied to photoelectric conversion devices after passing through analyzers with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters .psi. and .DELTA. are calculated from these three electric signals.

    摘要翻译: 将线偏振光束施加到膜的表面并从其反射。 然后将光束通过三个或四个光学平面分成三个光束。 这些光束经过具有固定分析角度的分析仪后,被施加到光电转换装置。 光电转换装置将光束转换成表示这些光束强度的电信号。 从这三个电信号计算出两个椭偏参数psi和DELTA。

    Grazing incidence spectrometer
    18.
    发明授权
    Grazing incidence spectrometer 失效
    放射入射光谱仪

    公开(公告)号:US4380393A

    公开(公告)日:1983-04-19

    申请号:US247757

    申请日:1981-03-26

    IPC分类号: G01J3/20 G01J3/18 G01J3/38

    CPC分类号: G01J3/1833

    摘要: A grazing incidence spectrometer is provided with an entrance slit and a diffraction grating for diffracting the light rays incident thereon from the entrance slit and for imaging the light rays as a plurality of spectral lines. The diffraction grating is a curved diffraction grating having a predetermined principal radius of curvature and the groove patterns thereof are formed at unequal intervals so as to make the image plane thereof substantially planar. The entrance slit is disposed within a Rowland circle so as to satisfy0.7.ltoreq.r/R cos .alpha..ltoreq.0.9,where R is the principal radius of curvature of the curved diffraction grating, r is the distance between the entrance slit and the curved diffraction grating, and .alpha. is the angle of incidence of the principal ray incident from the entrance slit onto the curved diffraction grating.

    摘要翻译: 放射入射光谱仪设置有入射狭缝和衍射光栅,用于衍射从入射狭缝入射到其上的光线并用于将光线成像为多条光谱线。 衍射光栅是具有预定主曲率半径的弯曲衍射光栅,并且其凹槽图案以不等间隔形成,以使其图像平面基本上平坦。 入口狭缝设置在Rowland圆内,以便满足0.7

    Plane diffraction grating based on surface normal rotation and its application to an optical system
    19.
    发明授权
    Plane diffraction grating based on surface normal rotation and its application to an optical system 失效
    基于表面正转的平面衍射光栅及其在光学系统中的应用

    公开(公告)号:US06844973B1

    公开(公告)日:2005-01-18

    申请号:US09642883

    申请日:2000-08-22

    IPC分类号: G01J3/06 G01J3/18 G02B5/18

    摘要: A plane diffraction grating based on surface normal rotation according to the present invention is designed so that the profile of the grooves at a radial area is determined depending on a rotational position of the area about a rotational center defined as a foot of the rotational axis on the surface of the plane diffraction grating. An optical system such as a spectrometer or a monochromator according to the present invention uses such a plane diffraction grating, and requires a special arrangement. The optical system includes: a plane diffraction grating as described above; a mechanism for rotating the plane diffraction grating about the rotational axis; an incidence optical system for casting a converging beam of light on a point of the surface of the plane diffraction grating, where the point is set apart from the rotational center. As the diffraction grating is rotated about the rotational center, the point on which the incident converging beam of light is cast rotates about the rotation center, where the diffracting condition is optimized anywhere around the rotational center or for any scanning wavelength. The surface of the plane diffraction grating can be covered with a multiple-layer coating to improve diffraction efficiency. When such a multiple-layer is coated, the unit thickness of the multiple-layer coating at an area is also determined depending on the rotational position of the area about the rotational center.

    摘要翻译: 根据本发明的基于表面正转的平面衍射光栅被设计成使得在径向区域处的凹槽的轮廓根据围绕旋转中心的旋转中心的旋转中心的旋转位置来确定 平面衍射光栅的表面。 根据本发明的诸如光谱仪或单色仪的光学系统使用这种平面衍射光栅,并且需要特殊的布置。 光学系统包括:如上所述的平面衍射光栅; 用于使平面衍射光栅围绕旋转轴线旋转的机构; 用于在平面衍射光栅的表面的点上投射会聚光束的入射光学系统,其中点与旋转中心分开。 当衍射光栅围绕旋转中心旋转时,入射的会聚光束投射的点围绕旋转中心旋转,其中衍射条件在旋转中心附近或任何扫描波长的任何地方被优化。 平面衍射光栅的表面可以用多层涂层覆盖,以提高衍射效率。 当这种多层被涂覆时,一个区域的多层涂层的单位厚度也取决于围绕旋转中心的区域的旋转位置来确定。

    Projection exposure apparatus, and device manufacturing method using the same
    20.
    发明授权
    Projection exposure apparatus, and device manufacturing method using the same 有权
    投影曝光装置及使用其的装置制造方法

    公开(公告)号:US06577381B2

    公开(公告)日:2003-06-10

    申请号:US09977998

    申请日:2001-10-17

    申请人: Kazuo Sano

    发明人: Kazuo Sano

    IPC分类号: G03B2772

    摘要: A projection exposure apparatus for transferring, by projection exposure, a pattern of a first object onto a second object while scanning the first and second objects in synchronism with each other. The apparatus includes an illumination optical system having (i) a secondary light source forming device for forming a secondary light source and (ii) a slit disposed with a space from the first object and from a plane conjugate thereto. The illumination optical system is operable to illuminate the first object with light supplied from a light source of a pulse light emission type and having a slit-like irradiation region defined through the slit on a light path of the illumination optical system. The slit-like irradiation region on the first object has a light intensity distribution of a trapezoidal shape with respect to the scan direction. The apparatus further includes a projection optical system for projecting the pattern of the first object onto the second object and a control device for controlling an exposure parameter in accordance with a contour of a slant of the trapezoidal shape of the light intensity distribution. The exposure parameter is one of d, f, F and V, where d is an optical distance from the slit to the first object or the conjugate plane thereof, f is a focal length of an optical member disposed between the secondary light source and the slit, F is a pulse emission frequency of the light source, and V is a scan speed of the first object in the scan exposure.

    摘要翻译: 一种投影曝光装置,用于通过投影曝光将第一物体的图案彼此同步地扫描第一物体和第二物体,从而将第一物体的图案转印到第二物体上。 该装置包括照明光学系统,其具有:(i)用于形成次级光源的次级光源形成装置,以及(ii)从第一物体和与其共轭的平面设置的狭缝。 照明光学系统可操作以用从照明光学系统的光路上通过狭缝限定的具有脉冲发光型光源的狭缝状照射区域供给的光照射第一物体。 第一物体上的狭缝状照射区域相对于扫描方向具有梯形形状的光强度分布。 该装置还包括用于将第一物体的图案投影到第二物体上的投影光学系统和用于根据光强度分布的梯形形状的倾斜轮廓来控制曝光参数的控制装置。 曝光参数是d,f,f和v之一,其中d是从狭缝到第一物体或其共轭平面的光学距离,f是设置在二次光源和 F是光源的脉冲发射频率,V是扫描曝光中的第一物体的扫描速度。