摘要:
A scanning exposure apparatus includes an illumination optical system for illuminating a pattern of an original through an opening being conjugate or approximately conjugate with the pattern of the original, and a changing mechanism for changing a width of the opening with respect to a scan direction of the original. The changing mechanism includes a light blocking plat, and a plurality of driving mechanisms for moving the light blocking plate. The plurality of driving mechanisms is provided at different positions with respect to the light blocking plate and also are arranged to be driven by an actuator. At least one of the plurality of driving mechanisms includes a guiding mechanism for allowing a deviation between a position of an object to be driven by the actuator and a position of the light blocking plate, with respect to a direction different from a direction of displacement of the object to be driven.
摘要:
The object of the invention is to provide a CCM calculating system being relatively inexpensive and alleviating the necessity of a spectrophotometer, a CCM calculating method and a recording medium. A CCM calculating system according to the invention calculates a blending ratio of colorants based on stored color data 16. The system has an input device 5(20b) for inputting data of color specification values corresponding to a desired target color; and a data operation unit 1(20c) for calculating a blending ratio of colorants for reproducing the target color, based on the input data of color specification values and stored color data. Since the blending ratio of colorants for reproducing the desired target color may be calculated based on the input color specification value data and stored color data, such CCM calculation may be performed without the necessity of a spectrophotometer.
摘要:
A distance between a distal end of a crack formed in a fatigue test piece on which a reference line is scribed, and the reference line, is monitored. The reference line and the crack are scanned with an ITV camera to prepare the fatigue test piece having the crack of a predetermined length. Luminance levels are integrated from a video signal obtained by scanning each raster in the same direction as that of the reference line to obtain a maximum luminance level, and the reference line position is detected from the maximum luminance level. At the same time, continuity of a high-level value is discriminated from the video signal, and a crack distal end position is detected from the discrimination result. A difference between both the detected positions is calculated, and the test piece is machined so that the difference corresponds to the predetermined length.
摘要:
The swirling burner comprises a vertical combustion chamber and an annular blast member located beneath the combustion chamber and provided with a central cylindrical space and a plurality of alternately superposed fuel gas passages and air passages. These passages are communicated with the cylindrical space through blow openings which are inclined in the same direction with respect to the radii of the cylindrical space. In a modification, the burner is further combined with straight blowing type burner for promoting the effect of the air-gas mixing.
摘要:
There is provided a print ink system used for printing “a print IT shopping-linked printed matter” used in a commodity sales method in which a commodity can be ordered by converting a commodity information image in an imaged partition into an electric signal and transmitting it via a predetermined network, and by replying the order of the commodity, the order for the commodity is received and the commodity is sent, and furthermore, charging for the commodity cost is performed. The print ink system uses a combination of a print ink (a) for printing “a visible image of a commodity” (A) and a print ink (b) for printing “a commodity information code” (B).
摘要:
A conical diffraction grazing incidence spectroscope for performing wavelength scanning by rotating a diffraction grating about an axis set parallel to groves in a grazing surface of the grating.
摘要:
A linearly polarized light beam is applied to the surface of a film and is reflected therefrom. The beam is then split into three light beams by three or four optical flats. These light beams are applied to photoelectric conversion devices after passing through analyzers with fixed analyzing angles. The photoelectric conversion devices convert the beams into electric signals representing the intensities of these light beams. Two ellipsometric parameters .psi. and .DELTA. are calculated from these three electric signals.
摘要:
A grazing incidence spectrometer is provided with an entrance slit and a diffraction grating for diffracting the light rays incident thereon from the entrance slit and for imaging the light rays as a plurality of spectral lines. The diffraction grating is a curved diffraction grating having a predetermined principal radius of curvature and the groove patterns thereof are formed at unequal intervals so as to make the image plane thereof substantially planar. The entrance slit is disposed within a Rowland circle so as to satisfy0.7.ltoreq.r/R cos .alpha..ltoreq.0.9,where R is the principal radius of curvature of the curved diffraction grating, r is the distance between the entrance slit and the curved diffraction grating, and .alpha. is the angle of incidence of the principal ray incident from the entrance slit onto the curved diffraction grating.
摘要翻译:放射入射光谱仪设置有入射狭缝和衍射光栅,用于衍射从入射狭缝入射到其上的光线并用于将光线成像为多条光谱线。 衍射光栅是具有预定主曲率半径的弯曲衍射光栅,并且其凹槽图案以不等间隔形成,以使其图像平面基本上平坦。 入口狭缝设置在Rowland圆内,以便满足0.7 r / Rcosαα = 0。
摘要:
A plane diffraction grating based on surface normal rotation according to the present invention is designed so that the profile of the grooves at a radial area is determined depending on a rotational position of the area about a rotational center defined as a foot of the rotational axis on the surface of the plane diffraction grating. An optical system such as a spectrometer or a monochromator according to the present invention uses such a plane diffraction grating, and requires a special arrangement. The optical system includes: a plane diffraction grating as described above; a mechanism for rotating the plane diffraction grating about the rotational axis; an incidence optical system for casting a converging beam of light on a point of the surface of the plane diffraction grating, where the point is set apart from the rotational center. As the diffraction grating is rotated about the rotational center, the point on which the incident converging beam of light is cast rotates about the rotation center, where the diffracting condition is optimized anywhere around the rotational center or for any scanning wavelength. The surface of the plane diffraction grating can be covered with a multiple-layer coating to improve diffraction efficiency. When such a multiple-layer is coated, the unit thickness of the multiple-layer coating at an area is also determined depending on the rotational position of the area about the rotational center.
摘要:
A projection exposure apparatus for transferring, by projection exposure, a pattern of a first object onto a second object while scanning the first and second objects in synchronism with each other. The apparatus includes an illumination optical system having (i) a secondary light source forming device for forming a secondary light source and (ii) a slit disposed with a space from the first object and from a plane conjugate thereto. The illumination optical system is operable to illuminate the first object with light supplied from a light source of a pulse light emission type and having a slit-like irradiation region defined through the slit on a light path of the illumination optical system. The slit-like irradiation region on the first object has a light intensity distribution of a trapezoidal shape with respect to the scan direction. The apparatus further includes a projection optical system for projecting the pattern of the first object onto the second object and a control device for controlling an exposure parameter in accordance with a contour of a slant of the trapezoidal shape of the light intensity distribution. The exposure parameter is one of d, f, F and V, where d is an optical distance from the slit to the first object or the conjugate plane thereof, f is a focal length of an optical member disposed between the secondary light source and the slit, F is a pulse emission frequency of the light source, and V is a scan speed of the first object in the scan exposure.