TEMPORARY ADHESIVE FOR PRODUCTION OF SEMICONDUCTOR DEVICE, AND ADHESIVE SUPPORT AND PRODUCTION METHOD OF SEMICONDUCTOR DEVICE USING THE SAME
    12.
    发明申请
    TEMPORARY ADHESIVE FOR PRODUCTION OF SEMICONDUCTOR DEVICE, AND ADHESIVE SUPPORT AND PRODUCTION METHOD OF SEMICONDUCTOR DEVICE USING THE SAME 审中-公开
    用于制造半导体器件的临时粘合剂,以及使用该半导体器件的半导体器件的粘合支持和生产方法

    公开(公告)号:US20150184032A1

    公开(公告)日:2015-07-02

    申请号:US14641656

    申请日:2015-03-09

    Abstract: By a temporary adhesive for production of semiconductor device containing (A) a polymer compound having a thermal decomposition initiation temperature of 250° C. or more, and (B) a radical polymerizable monomer, and an adhesive support and a production method of semiconductor device using the same, a temporary adhesive for production of semiconductor device, which can temporarily support a member to be processed (for example, a semiconductor wafer) with a high adhesive force even under high temperature condition (for example, at 100° C.) when the member to be processed is subjected to a mechanical or chemical processing, which reduces a problem of generation of gas therefrom in the temporary support even under high temperature condition, and which can easily release the temporary support for the member processed without imparting damage to the member processed, and an adhesive support and a production method of semiconductor device using the same can be provided.

    Abstract translation: 通过使用含有(A)热分解开始温度为250℃以上的高分子化合物和(B)自由基聚合性单体的半导体装置的临时粘合剂,以及粘合剂支持体和半导体装置的制造方法 使用它们,即使在高温条件下(例如,在100℃)下也可以以高粘合力临时支撑待处理的部件(例如,半导体晶片)的用于生产半导体器件的临时粘合剂。 当待加工的构件经受机械或化学处理时,即使在高温条件下也能在临时支撑体中减少气体产生的问题,并且能够容易地释放所加工的构件的临时支撑而不损害 可以提供加工构件,并且可以提供使用其的半导体装置的粘合剂支持体和制造方法。

    LAMINATE AND APPLICATION THEREOF
    18.
    发明申请
    LAMINATE AND APPLICATION THEREOF 审中-公开
    层压板及其应用

    公开(公告)号:US20160167337A1

    公开(公告)日:2016-06-16

    申请号:US15052122

    申请日:2016-02-24

    Abstract: Provided are a temporary bonding layer laminate for producing a semiconductor device, which can reliably and easily provide a temporary support for the device wafer when the device wafer is subjected to a mechanical or chemical treatment and can easily provide a release from the temporary support for the device wafer while not damaging the device wafer even after undergoing a process at a high temperature; and a composition for forming a protective layer, a composition for forming a release layer, and a kit, each of which is used for the production of the laminate.The laminate has a device wafer, a protective layer, a release layer, and a support substrate in this order, in which the protective layer is in contact only with the device wafer and the release layer, the release layer is in contact only with the protective layer and the support substrate, and the release layer contains a fluorine atom and/or a silicon atom.

    Abstract translation: 提供一种用于制造半导体器件的临时接合层层压体,当器件晶片经受机械或化学处理时,其可以可靠且容易地为器件晶片提供临时支撑,并且可以容易地从临时支撑件释放 即使在高温下进行处理也不会损坏器件晶片; 和用于形成保护层的组合物,用于形成剥离层的组合物和试剂盒,其用于制备层压体。 该层压体依次具有器件晶片,保护层,剥离层和支撑基板,其中保护层仅与器件晶片和释放层接触,释放层仅与 保护层和支撑基板,剥离层含有氟原子和/或硅原子。

    TEMPORARY BONDING LAMINATES FOR USED IN MANUFACTURE OF SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES
    19.
    发明申请
    TEMPORARY BONDING LAMINATES FOR USED IN MANUFACTURE OF SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING SEMICONDUCTOR DEVICES 有权
    用于制造半导体器件的临时粘结层压板及制造半导体器件的方法

    公开(公告)号:US20160035612A1

    公开(公告)日:2016-02-04

    申请号:US14865961

    申请日:2015-09-25

    Abstract: Provided is temporary bonding laminates for used in a manufacture of semiconductor devices, by which a member to be processed (a semiconductor wafer or the like) can be temporarily supported securely and readily during a mechanical or chemical process of the member to be processed and then the processed member can be readily released from the temporary support without damaging the processed member even after a high temperature process, and processes for manufacturing semiconductor devices. The temporary bonding laminate includes (A) a release layer and (B) an adhesive layer, wherein the release layer (A) comprises (a1) a first release layer having a softening point of 200° C. or more and adjoining the adhesive layer (B), and (a2) a second release layer adjoining the first release layer (a1); the second release layer (a2) contains a resin; and the resin after curing has a capable of being dissolved at 5% by mass or more, at 25° C., in at least one kind of solvents selected from hexane and the like.

    Abstract translation: 提供了用于制造半导体器件的临时粘合层压体,通过该半导体器件可以在待加工构件的机械或化学过程中可靠且容易地暂时支撑待加工构件(半导体晶片等),然后 即使在高温处理之后,处理过的构件也可以容易地从临时支撑体释放而不损坏处理的构件,以及用于制造半导体器件的工艺。 临时粘合层压体包括(A)剥离层和(B)粘合剂层,其中剥离层(A)包含(a1)软化点为200℃以上的第一剥离层,并且与粘合剂层相邻 (B),和(a2)与第一剥离层(a1)相邻的第二剥离层。 第二剥离层(a2)含有树脂; 固化后的树脂在25℃,5质量%以上溶解于选自己烷等的至少一种溶剂中。

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