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公开(公告)号：US20240339797A1
公开(公告)日：2024-10-10
申请号：US18746278
申请日：2024-06-18
Applicant: Gigaphoton Inc.
Inventor： Yoichi SASAKI , Hiroshi UMEDA , Jeffrey P. SERCEL , Michael von DADELSZEN
CPC classification number: H01S3/038 , G03F7/70025
Abstract: A gas laser device includes a laser chamber including an opening, an electrical insulating portion blocking the opening, a first electrode, and a second electrode facing the first electrode. The first electrode includes a contact region contacting the surface of the electrical insulating portion, an opposing surface facing the second electrode, and a first curved surface included in a region between the contact region and the opposing surface and convexly curved toward an outer side of the first electrode. In a cross section of the first electrode along a surface extending in a separation direction of the first electrode and the second electrode, the contact region is located on an inner side of the first electrode with respect to the first curved surface, and the first curved surface is a part of a circumference of a circle or an ellipse which does not intersect the electrical insulating portion.
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公开(公告)号：US20230268710A1
公开(公告)日：2023-08-24
申请号：US18310089
申请日：2023-05-01
Applicant: Gigaphoton Inc.
Inventor： Youichi YAMANOUCHI , Hiroshi UMEDA , Kazuki NAGAI , Takeshi UEYAMA
IPC: H01S3/0977 , H01S3/097
CPC classification number: H01S3/0977 , H01S3/09702
Abstract: A gas laser apparatus according to an aspect of the present disclosure includes a main discharge circuit that supplies main discharge voltage that causes main discharge to a pair of main discharge electrodes, and a pre-ionization circuit that supplies pre-ionization voltage that causes corona discharge to a pre-ionization electrode. The main discharge circuit includes a step-up pulse transformer, a main capacitor and a switch connected to a primary side of the step-up pulse transformer, a first power source that charges the main capacitor, a first capacitor connected in parallel to a secondary side of the step-up pulse transformer, a first magnetic switch connected to the first capacitor, and a peaking capacitor connected in parallel to the first capacitor through the first magnetic switch and to the main discharge electrodes. An interval between start timings of the corona discharge and the main discharge is 30 ns to 60 ns inclusive.
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公开(公告)号：US20170338618A1
公开(公告)日：2017-11-23
申请号：US15671572
申请日：2017-08-08
Inventor： Weihua JIANG , Hiroshi UMEDA , Hakaru MIZOGUCHI , Takashi MATSUNAGA , Hiroaki TSUSHIMA , Tomoyuki OHKUBO
CPC classification number: H01S3/09702 , H01S3/036 , H01S3/038 , H01S3/041 , H01S3/08009 , H01S3/0971 , H01S3/10069 , H01S3/134 , H01S3/225
Abstract: A high-voltage pulse generator may include a number “n” (n is a natural number of not less than 2) of primary electric circuits connected in parallel to one another on the primary side of a pulse transformer, and a secondary electric circuit of the pulse transformer, which is connected to a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus. The “n” primary electric circuits may include a number “n” of primary coils connected in parallel to one another, a number “n” of capacitors respectively connected in parallel to the “n” primary coils, and a number “n” of switches respectively connected in series to the “n” capacitors. The “n” primary electric circuits may be connected to a number “n” of chargers for charging the “n” capacitors, respectively. The secondary electric circuit may include a number “n” of secondary coils connected in series to one another, and a number “n” of diodes each connected to opposite ends of each of the “n” secondary coils, to prevent a reverse current flowing from the pair of discharge electrodes toward the secondary coils.
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公开(公告)号：US20170033527A1
公开(公告)日：2017-02-02
申请号：US15290518
申请日：2016-10-11
Applicant: Gigaphoton Inc.
Inventor： Akira SUWA , Kouji KAKIZAKI , Hiroaki TSUSHIMA , Tomoyuki OHKUBO , Hiroshi UMEDA , Hisakazu KATSUUMI
CPC classification number: H01S3/09702 , H01G4/14 , H01G4/18 , H01G4/258 , H01G4/30 , H01S3/0305 , H01S3/036 , H01S3/0385 , H01S3/041 , H01S3/097 , H01S3/2251 , H01S3/2256
Abstract: A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.
Abstract translation: 气体激光装置可以包括：包含激光气体的激光室; 设置在激光室中的第一放电电极; 第二放电电极，设置成与激光室中的第一放电电极相对; 以及包括聚酰亚胺电介质并且被配置为向第一放电电极和第二放电电极之间供电的电容器。
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15.发明申请EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD FOR EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权极光超紫外光发生装置及极光紫外线发光装置的控制方法公开(公告)号：US20160227638A1
公开(公告)日：2016-08-04
申请号：US15096769
申请日：2016-04-12
Applicant: GIGAPHOTON INC.
Inventor： Tsukasa HORI , Fumio IWAMOTO , Hiroshi UMEDA
IPC: H05G2/00
Abstract: In an example of the present invention is an extreme ultraviolet light generation apparatus including: a droplet supply device configured to successively supply droplets; a charging electrode being configured to control charging of droplets supplied from the droplet supply unit; and a target controller configured to control electric polarities of the droplets supplied from the droplet supply unit by controlling potential of the charging electrode in such a way that successive droplets join together to become a target droplet, wherein the droplets controlled in charging by the charging electrode include a plurality of groups each composed of successive droplets, and, in each of the groups, a droplet at one end is charged positively or negatively, a droplet at the other end is uncharged or charged in a polarity being the same as a polarity of an adjacent droplet in a group adjacent to the droplet at the other end.
Abstract translation: 本发明的一个实例是一种极紫外光发生装置，包括：液滴供给装置，被配置为连续供应液滴; 充电电极被配置为控制从液滴供应单元供应的液滴的充电; 以及目标控制器，其被配置为通过控制充电电极的电位来控制从液滴供给单元提供的液滴的电极性，使得连续的液滴接合在一起成为目标液滴，其中通过充电电极控制的液滴 包括多个由连续的液滴组成的组，并且在每个组中，一端的液滴是正或负的，另一端的液滴不带电或充电，极性与极性相同 在另一端与液滴相邻的组中的相邻液滴。
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Patent Agency Ranking
公开(公告)号：US20140138561A1
公开(公告)日：2014-05-22
申请号：US14084558
申请日：2013-11-19
Applicant: GIGAPHOTON INC.
Inventor： Hiroshi UMEDA , Takashi OHARA , Osamu WAKABAYASHI
IPC: G01J3/10
Abstract: A target supply device may include a tank having a nozzle, a first electrode provided with a first through-hole, a second electrode provided with a second through-hole, a third electrode disposed within the tank, an anchoring portion configured to anchor the first electrode and the second electrode to the tank so that insulation among the nozzle, the first electrode, and the second electrode is maintained, and so that a center axis of the nozzle is positioned within the first through-hole and the second through-hole, a first projecting portion that is an integrated part of at least one of the first electrode and the second electrode and that is configured to project toward the nozzle, and a second projecting portion that is an integrated part of at least the second electrode and that is configured to project so as to be positioned between the first electrode and the second electrode.
Abstract translation: 目标供给装置可以包括具有喷嘴的罐，设置有第一通孔的第一电极，设置有第二通孔的第二电极，设置在罐内的第三电极，锚定部分， 电极和第二电极连接到罐，使得保持喷嘴，第一电极和第二电极之间的绝缘，并且使得喷嘴的中心轴线位于第一通孔和第二通孔内， 第一突出部，其是第一电极和第二电极中的至少一个的一体部分，并且被构造成朝向喷嘴突出;第二突出部，其是至少第二电极的一体部分， 被配置成突出以便定位在第一电极和第二电极之间。
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公开(公告)号：US20240405501A1
公开(公告)日：2024-12-05
申请号：US18799432
申请日：2024-08-09
Applicant: Gigaphoton Inc.
Inventor： Youichi YAMANOUCHI , Hiroshi UMEDA , Takeshi UEYAMA
IPC: H01S3/0975 , H01S3/097
Abstract: A gas laser device includes a chamber configured to enclose a laser gas as including a pair of discharge electrodes having a longitudinal direction oriented along a predetermined direction and facing each other with a space therebetween; a plurality of capacitors arranged along the predetermined direction, each of the capacitors having one terminal electrically connected to one of the discharge electrodes and the other terminal electrically connected to the other of the discharge electrodes; and first and second magnetic switches each electrically connected to the one discharge electrode and the one terminal of each of the capacitors and electrically connected to each other in parallel. The second magnetic switch is arranged closer to a center of the one discharge electrode in the predetermined direction than the first magnetic switch, and a Vt product of the first magnetic switch is smaller than a Vt product of the second magnetic switch.
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公开(公告)号：US20240405497A1
公开(公告)日：2024-12-05
申请号：US18799444
申请日：2024-08-09
Applicant: Gigaphoton Inc.
Inventor： Yoichi SASAKI , Kouji KAKIZAKI , Hiroshi UMEDA
Abstract: In a chamber of a gas laser apparatus, a distance from an imaginary axis extending along a predetermined direction to a first end portion between first and second primary electrodes increases from one side toward the other side in the predetermined direction, and a distance from the imaginary axis to a second end portion decreases from the one side toward the other side in the predetermined direction.
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公开(公告)号：US20180102622A1
公开(公告)日：2018-04-12
申请号：US15836878
申请日：2017-12-10
Applicant: Gigaphoton Inc.
Inventor： Kouji KAKIZAKI , Akira SUWA , Osamu WAKABAYASHI , Hiroshi UMEDA
CPC classification number: H01S3/2308 , H01S3/005 , H01S3/09702 , H01S3/0971 , H01S3/10007 , H01S3/10015 , H01S3/10038 , H01S3/10069 , H01S3/104 , H01S3/134 , H01S3/2222 , H01S3/225 , H01S3/2316
Abstract: The excimer laser device receives data on a target value of pulse energy from an external device and outputs a pulse laser beam. The excimer laser device includes a master oscillator, at least one power amplifier including a chamber provided in an optical path of the pulse laser beam outputted from the master oscillator, a pair of electrodes provided in the chamber, and an electric power source configured to apply voltage to the pair of electrodes, and a controller configured to control the electric power source of one power amplifier of the at least one power amplifier to stop applying the voltage to the pair of electrodes based on the target value of the pulse energy.
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公开(公告)号：US20170231075A1
公开(公告)日：2017-08-10
申请号：US15498902
申请日：2017-04-27
Applicant: Gigaphoton Inc.
Inventor： Hiroshi UMEDA , Kazukiyo KAMIKANNA
Abstract: An extreme ultraviolet light generation device may include: a chamber earthed to a ground, in which extreme ultraviolet light is generated by irradiating a metal target supplied inside with laser light; a target supply unit earthed to the ground and configured to output the target supplied into the chamber from a nozzle; an extraction electrode configured to exert electrostatic force on the target by applying a negative first potential to the extraction electrode; a first power supply configured to apply the first potential to the extraction electrode; an acceleration electrode unit configured to accelerate the target by applying a negative second potential lower than the first potential to the acceleration electrode unit; a second power supply configured to apply the second potential to the acceleration electrode unit; and a charge neutralizer disposed inside the acceleration electrode unit and configured to emit electrons onto the target.
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