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公开(公告)号：US20190148905A1
公开(公告)日：2019-05-16
申请号：US16232637
申请日：2018-12-26
Applicant: GIGAPHOTON INC.
Inventor： Hiroshi UMEDA , Osamu WAKABAYASHI
IPC: H01S3/097 , H01S3/0975 , H01S3/104
Abstract: A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a tinting of a switch signal to be input to a corresponding switch.
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公开(公告)号：US20180013258A1
公开(公告)日：2018-01-11
申请号：US15713761
申请日：2017-09-25
Applicant: Gigaphoton Inc.
Inventor： Hiroshi UMEDA , Takeshi ASAYAMA , Osamu WAKABAYASHI
IPC: H01S3/097 , H01L21/67 , H01S3/139 , B23K26/00 , H01L21/02 , H01S3/23 , H01S3/13 , H01S3/00 , H01S3/104 , H01S3/225
CPC classification number: H01S3/09702 , B23K26/00 , B23K26/0608 , H01L21/02686 , H01L21/67115 , H01S3/0057 , H01S3/104 , H01S3/1305 , H01S3/1394 , H01S3/225 , H01S3/2308 , H01S3/2383
Abstract: The laser system may include a delay circuit unit, first and second trigger-correction units, and a clock generator. The delay circuit unit may receive a trigger signal, output a first delay signal obtained by delaying the trigger signal by a first delay time, and output a second delay signal obtained by delaying the trigger signal by a second delay time. The first trigger-correction unit may receive the first delay signal and output a first switch signal obtained by delaying the first delay signal by a first correction time. The second trigger-correction unit may receive the second delay signal and output a second switch signal obtained by delaying the second delay signal by a second correction time. The clock generator may generate a clock signal that is common to the delay circuit unit and the first and second trigger-correction units.
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3.发明申请TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS 有权目标供应设备，室内和极端超紫外线发光装置公开(公告)号：US20140008552A1
公开(公告)日：2014-01-09
申请号：US13929668
申请日：2013-06-27
Applicant: Gigaphoton Inc.
Inventor： Hiroshi UMEDA , Taku YAMAZAKI , Hakaru MIZOGUCHI , Toshihiro NISHISAKA
IPC: G03F7/20
CPC classification number: H05G2/008 , G03F7/20 , G03F7/70033 , H05G2/001 , H05G2/006
Abstract: A target supply apparatus mounted in a chamber in which extreme ultraviolet light is generated by introducing a target material and a laser beam into the chamber may include a target generator having a nozzle, a first pipe configured to cover the nozzle, a cover opening provided in the first pipe to allow the target material to pass through the first pipe, and a first valve configured to open and close the cover opening.
Abstract translation: 安装在通过将目标材料和激光束引入室中而产生极紫外光的室中的目标供给装置可以包括具有喷嘴的目标发生器，被配置为覆盖喷嘴的第一管， 允许目标材料通过第一管的第一管和构造成打开和关闭盖开口的第一阀。
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4.发明申请公开(公告)号：US20210367394A1
公开(公告)日：2021-11-25
申请号：US17397375
申请日：2021-08-09
Inventor： Weihua JIANG , Hiroshi UMEDA
IPC: H01S3/097 , H01S3/0975 , H01S3/038
Abstract: A high-voltage pulse generation device configured to apply a pulsed high voltage to the space between a pair of discharge electrodes disposed in a laser chamber of a gas laser apparatus includes n transformer cores that form a transformer, where n is a natural number greater than or equal to two, n primary electric circuits of the transformer, the n primary electric circuits each having a first terminal connected to a reference potential and a second terminal connected to a charger, the n primary electric circuits each including one or more primary coils, one or more diodes connected in parallel to the one or more primary coils, and one or more pulse generators connected in parallel to the one or more primary coils, and a secondary electric circuit of the transformer, the secondary electric circuit including a secondary coil and connected to the pair of discharge electrodes.
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公开(公告)号：US20210367393A1
公开(公告)日：2021-11-25
申请号：US17396928
申请日：2021-08-09
Inventor： Weihua JIANG , Hiroshi UMEDA , Koji KAKIZAKI
Abstract: A high voltage pulse generation device includes n transformer cores configuring a transformer, n being a natural number of 2 or more, each of the n transformer cores being configured to form a magnetic circuit along a first plane and to have a width in a first direction parallel to the first plane larger than a width in a second direction parallel to the first plane and perpendicular to the first direction; n primary electric circuits of the transformer connected in parallel to each other, each of the n primary electric circuits including at least one primary coil, and m pulse generation units connected in parallel to the at least one primary coil, m being a natural number equal to or more than 2; and a secondary electric circuit of the transformer including a secondary coil and connected to a pair of discharge electrodes.
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Patent Agency Ranking
公开(公告)号：US20210167568A1
公开(公告)日：2021-06-03
申请号：US17153513
申请日：2021-01-20
Applicant: Gigaphoton Inc.
Inventor： Hiroshi UMEDA , Osamu WAKABAYASHI
IPC: H01S3/097 , H01S3/0971 , H01S3/225 , H01S3/036 , H01S3/134 , H01S3/0975 , H01S3/104
Abstract: A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a timing of a switch signal to be input to a corresponding switch.
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公开(公告)号：US20160365696A1
公开(公告)日：2016-12-15
申请号：US15245245
申请日：2016-08-24
Applicant: Gigaphoton Inc.
Inventor： Hiroaki TSUSHIMA , Kouji KAKIZAKI , Takashi MATSUNAGA , Takeshi ASAYAMA , Hisakazu KATSUUMI , Hiroshi UMEDA , Hiroyuki IKEDA
CPC classification number: H01S3/036 , H01S3/038 , H01S3/0384 , H01S3/0407 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/09702 , H01S3/09713 , H01S3/134 , H01S3/225
Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.
Abstract translation: 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。
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公开(公告)号：US20140209819A1
公开(公告)日：2014-07-31
申请号：US14159909
申请日：2014-01-21
Applicant: GIGAPHOTON INC.
Inventor： Hiroshi UMEDA
Abstract: A target supply device may include a tank including a nozzle, a first electrode disposed within the tank, a first potential setting unit configured to set a potential at the first electrode to a first potential, a second electrode provided with a first through-hole and disposed so that a center axis of the nozzle is positioned within the first through-hole, a second potential setting unit configured to set a potential at the second electrode to a second potential that is different from the first potential, and a charge neutralization unit configured to neutralize a charge of the target material that passes through a first region located between the second electrode and the plasma generation region.
Abstract translation: 目标供给装置可以包括：罐，包括喷嘴，设置在罐内的第一电极;第一电位设定单元，被配置为将第一电极处的电位设定为第一电位;第二电极，设置有第一通孔; 被配置为使得喷嘴的中心轴线位于第一通孔内;第二电位设定单元，被配置为将第二电极处的电位设定为与第一电位不同的第二电位;以及电荷中和单元， 以中和通过位于第二电极和等离子体产生区域之间的第一区域的目标材料的电荷。
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公开(公告)号：US20130228709A1
公开(公告)日：2013-09-05
申请号：US13689393
申请日：2012-11-29
Applicant: GIGAPHOTON INC.
Inventor： Hiroshi UMEDA , Hakaru MIZOGUCHI
IPC: H01J43/00
CPC classification number: H01J43/00 , G03F7/0002 , G03F7/70033 , H05G2/005 , H05G2/006 , H05G2/008
Abstract: A target supply device includes a reservoir for storing a liquid target material, a first electrode electrically connected to the liquid target material stored in the reservoir, a nozzle having a through-hole through which the liquid target material stored in the reservoir is discharged, a first power supply for applying a first potential to the first electrode, a circuit electrically connected to the first electrode and configured to suppress a potential variation of the first electrode, a second electrode provided to face the through-hole in the nozzle, and a second power supply for applying a second potential that is different from the first potential to the second electrode.
Abstract translation: 目标供应装置包括用于储存液体目标材料的储存器，与存储在储存器中的液体目标材料电连接的第一电极，具有通过储存在储存器中的液体目标材料排出的通孔的喷嘴， 用于向第一电极施加第一电位的第一电源，电连接到第一电极并被配置为抑制第一电极的电位变化的电路，设置成面对喷嘴中的通孔的第二电极，以及第二电极 用于向第二电极施加不同于第一电位的第二电位的电源。
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公开(公告)号：US20240396284A1
公开(公告)日：2024-11-28
申请号：US18796335
申请日：2024-08-07
Applicant: Gigaphoton Inc.
Inventor： Takeshi UEYAMA , Hiroshi UMEDA
Abstract: A gas laser device includes a power source, a main capacitor, a solid-state switch, a step-up transformer, a first magnetic pulse compression circuit including a first transfer capacitor and a first magnetic switch, and connected to a secondary side of the step-up transformer, a second magnetic pulse compression circuit including a second transfer capacitor and a second magnetic switch, and connected subsequently to the first magnetic pulse compression circuit, a peaking capacitor connected subsequently to the second magnetic pulse compression circuit, a pair of discharge electrodes, a regenerative transformer transferring charges generated by the discharge electrodes to the main capacitor after main discharge, and a reset circuit resetting the first magnetic switch and the second magnetic switch. Potential of the cathode electrode in a period of 0.5 μs to 20 μs both inclusive after the main discharge starts is within a range of −200 V to 200 V both inclusive.
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