公开(公告)号：US20170033527A1

公开(公告)日：2017-02-02

申请号：US15290518

申请日：2016-10-11

Applicant: Gigaphoton Inc.

Inventor： Akira SUWA ,  Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Tomoyuki OHKUBO ,  Hiroshi UMEDA ,  Hisakazu KATSUUMI

IPC: H01S3/097 ,  H01S3/041 ,  H01G4/258 ,  H01G4/14 ,  H01G4/30

CPC classification number: H01S3/09702 ,  H01G4/14 ,  H01G4/18 ,  H01G4/258 ,  H01G4/30 ,  H01S3/0305 ,  H01S3/036 ,  H01S3/0385 ,  H01S3/041 ,  H01S3/097 ,  H01S3/2251 ,  H01S3/2256

Abstract: A gas laser device may include: a laser chamber containing laser gas; a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; and a condenser including a polyimide dielectric and configured to supply power to between the first discharge electrode and the second discharge electrode.

Abstract translation: 气体激光装置可以包括：包含激光气体的激光室; 设置在激光室中的第一放电电极; 第二放电电极，设置成与激光室中的第一放电电极相对; 以及包括聚酰亚胺电介质并且被配置为向第一放电电极和第二放电电极之间供电的电容器。

公开(公告)号：US20170346252A1

公开(公告)日：2017-11-30

申请号：US15680474

申请日：2017-08-18

Applicant: Gigaphoton Inc.

Inventor： Hisakazu KATSUUMI ,  Kazuya TAKEZAWA ,  Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Takeshi ASAYAMA

IPC: H01S3/038 ,  H01S3/0977 ,  H01S3/09 ,  H01S3/225 ,  H01S3/036

CPC classification number: H01S3/038 ,  H01S3/032 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/08009 ,  H01S3/0906 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0977 ,  H01S3/134 ,  H01S3/225

Abstract: An excimer laser chamber device may include: a the laser chamber; a first electrode provided in the laser chamber; a second electrode provided in the laser chamber to face the first electrode; an electrode holder provided in the laser chamber to be connected to a high voltage; at least one connecting terminal including a first anchored portion anchored to the first electrode and a second anchored portion anchored to the electrode holder, the at least one connecting terminal being configured to electrically connect the first electrode and the electrode holder; a guide member held by the electrode holder, the guide member being configured to position the first electrode in a direction substantially perpendicular to both a direction of electric discharge between the first electrode and the second electrode and a longitudinal direction of the first electrode; and an electrode-gap-varying unit configured to move the first electrode in a direction substantially parallel to the direction of electric discharge.

公开(公告)号：US20230275386A1

公开(公告)日：2023-08-31

申请号：US18311949

申请日：2023-05-04

Applicant: Gigaphoton Inc.

Inventor： Tsukasa HORI ,  Yasuaki KIYOTA ,  Hisakazu KATSUUMI

IPC: H01S3/038

CPC classification number: H01S3/0385 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0388 ,  H01S3/223

Abstract: Discharge electrodes include a cathode and an anode. The anode is disposed to face the cathode in a discharge direction perpendicular to a longitudinal direction of the cathode, and includes an electrode base 1, and a coating layer that covers a portion of a surface of the electrode base. First corners in a cross section perpendicular to the longitudinal direction connect first straight sections formed of first side surfaces that are side surfaces of the electrode base to a first curved section formed of a first discharge surface that is a discharge surface of the electrode base. The first corners are closer to the cathode in the discharge direction than second corners connecting second straight sections formed of second side surfaces that are side surfaces of the coating layer to a second curved section formed of a second discharge surface that is a discharge surface of the coating layer.

公开(公告)号：US20160365696A1

公开(公告)日：2016-12-15

申请号：US15245245

申请日：2016-08-24

Applicant: Gigaphoton Inc.

Inventor： Hiroaki TSUSHIMA ,  Kouji KAKIZAKI ,  Takashi MATSUNAGA ,  Takeshi ASAYAMA ,  Hisakazu KATSUUMI ,  Hiroshi UMEDA ,  Hiroyuki IKEDA

IPC: H01S3/036 ,  H01S3/225 ,  H01S3/038 ,  H01S3/041 ,  H01S3/04

CPC classification number: H01S3/036 ,  H01S3/038 ,  H01S3/0384 ,  H01S3/0407 ,  H01S3/041 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/09702 ,  H01S3/09713 ,  H01S3/134 ,  H01S3/225

Abstract: A laser chamber including a first space and a second space in communication with the first space may include: a first discharge electrode disposed in the first space; a second discharge electrode disposed in the first space to face the first discharge electrode; a fan disposed in the first space and configured to flow laser gas between the first discharge electrode and the second discharge electrode; a peaking condenser disposed in the second space; and an electrical insulating member configured to partition the first space and the second space from one another, and disposed to allow the laser gas to pass through between the first space and the second space.

Abstract translation: 包括与第一空间连通的第一空间和第二空间的激光室可以包括：设置在第一空间中的第一放电电极; 设置在所述第一空间中以面对所述第一放电电极的第二放电电极; 风扇，设置在所述第一空间中并且被配置为使所述第一放电电极和所述第二放电电极之间的激光气体流动; 设置在所述第二空间中的峰化冷凝器; 以及电绝缘构件，其被配置为将所述第一空间和所述第二空间彼此分隔开，并且被设置成允许所述激光气体在所述第一空间和所述第二空间之间通过。

公开(公告)号：US20180138650A1

公开(公告)日：2018-05-17

申请号：US15864017

申请日：2018-01-08

Applicant: Gigaphoton Inc.

Inventor： Hisakazu KATSUUMI ,  Hiroaki TSUSHIMA

IPC: H01S3/03 ,  G03F7/20 ,  H01L21/67

CPC classification number: H01S3/03 ,  G03F7/2053 ,  G03F7/70025 ,  H01L21/67225 ,  H01S3/0323 ,  H01S3/036 ,  H01S3/09705 ,  H01S3/09713 ,  H01S3/225

Abstract: A laser chamber may include a first discharge electrode, a second discharge electrode, a fan making a laser gas flow through a discharge space between the first and second discharge electrodes, a first insulating member disposed on upstream side and downstream side of the first discharge electrode in the laser gas flow, a first metal damper member disposed on upstream side of the second discharge electrode and a second insulating member disposed on downstream side of the second discharge electrode in the laser gas flow, and a second metal damper member disposed on downstream side of the second insulating member in the laser gas flow. In a boundary portion between the second metal damper member and the second insulating member, a first discharge space side surface of the second metal damper member may be located further toward the opposite side to the discharge space than a second discharge space side surface of the second insulating member. A first corner formed by the first surface and a first side surface of the second metal damper member, the first side surface being on the side of the second insulating member, may be in contact with a second side surface of the second insulating member, the second side surface being on the side of the second metal damper member.

公开(公告)号：US20160308324A1

公开(公告)日：2016-10-20

申请号：US15198433

申请日：2016-06-30

Applicant: Gigaphoton Inc.

Inventor： Hiroyuki IKEDA ,  Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Hisakazu KATSUUMI

IPC: H01S3/038 ,  H01S3/097 ,  H01S3/225 ,  H01S3/036

CPC classification number: H01S3/038 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/09702 ,  H01S3/134 ,  H01S3/225 ,  H01S3/2258

Abstract: A laser chamber for a discharge excited gas laser apparatus may include: a first discharge electrode disposed in the laser chamber; a second discharge electrode disposed to face the first discharge electrode in the laser chamber; a fan configured to flow laser gas between the first discharge electrode and the second discharge electrode; a first insulating member disposed upstream and downstream of a laser gas flow from the first discharge electrode; a metallic damper member disposed upstream of the laser gas flow from the second discharge electrode; and a second insulating member disposed downstream of the laser gas flow from the second discharge electrode.

Abstract translation: 用于放电激发气体激光装置的激光室可以包括：设置在激光室中的第一放电电极; 第二放电电极，设置成与激光室中的第一放电电极相对; 风扇，被配置为在所述第一放电电极和所述第二放电电极之间流动激光气体; 设置在来自所述第一放电电极的激光气流的上游和下游的第一绝缘构件; 设置在来自所述第二放电电极的激光气流的上游的金属阻尼构件; 以及设置在来自第二放电电极的激光气流的下游的第二绝缘构件。

公开(公告)号：US20160172817A1

公开(公告)日：2016-06-16

申请号：US14956709

申请日：2015-12-02

Applicant: Gigaphoton Inc.

Inventor： Kouji KAKIZAKI ,  Hiroaki TSUSHIMA ,  Junichi FUJIMOTO ,  Natsushi SUZUKI ,  Hisakazu KATSUUMI

IPC: H01S3/0971 ,  H01S3/038

CPC classification number: H01S3/09713 ,  H01S3/0384 ,  H01S3/08009 ,  H01S3/0977

Abstract: A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.

Abstract translation: 在使用了初步电离的激光装置的激光室中使用的初步电离放电装置包括：电介质管; 设置在电介质管内的初级电离内电极; 以及设置在电介质管外侧的初电离电极。 所述预电离外电极包括：接触板部，被配置为接触所述电介质管; 以及弹性部，其构造成在所述接触板部推压所述电介质管的方向上施加力。