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68 条记录 (耗时 0.026 秒)

    Methods and systems for optical inspection of surfaces based on laser screening
    12.
    发明授权
    Methods and systems for optical inspection of surfaces based on laser screening 有权
    基于激光筛选的表面光学检测方法和系统

    公开(公告)号：US07342218B2

    公开(公告)日：2008-03-11

    申请号：US10327534

    申请日：2002-12-19

    申请人： Gilad Almogy ,  Haim Feldman

    发明人： Gilad Almogy ,  Haim Feldman

    IPC分类号： H01J3/14 ,  G01N27/00

    CPC分类号： G01N21/8806 ,  G02B26/10

    摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.

    摘要翻译： 一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

    Focus error correction method and apparatus
    13.
    发明授权
    Focus error correction method and apparatus 有权
    聚焦误差校正方法及装置

    公开(公告)号：US6124924A

    公开(公告)日：2000-09-26

    申请号：US220340

    申请日：1998-12-24

    申请人： Haim Feldman ,  Ron Naftali ,  Gilad Almogy ,  Amir Komeem

    发明人： Haim Feldman ,  Ron Naftali ,  Gilad Almogy ,  Amir Komeem

    IPC分类号： G02B7/34 ,  G03F7/20 ,  G03F9/00 ,  G11B7/09 ,  G01B11/26

    CPC分类号： G03F7/70483 ,  G02B7/34 ,  G03F7/70358 ,  G03F9/7026 ,  G11B7/0908 ,  G11B7/0917

    摘要： Scanning method and apparatus for maintaining a desired position of an article are presented. The apparatus comprises an illumination unit, a focusing optics and a focus detection unit. The illumination unit generates an incident light beam for illuminating an elongated region of the article and producing light returned from the illuminated region. The focusing optics focuses the incident beam onto a focal plane and collects at least a portion of the returned light. The focus detection unit comprises an imaging optics and a detector having a sensing surface responsive to light impinging thereon for generating data representative thereof. The imaging optics is capable of forming first and second images on the sensing surface. The first and second images are formed by first and second spatially separated substantially identical light components of the collected returned light, respectively, which propagate symmetrically relative to an optical axis of the focusing optics. A position of the first image relative to the second image is indicative of the position of the article relative to the focal plane.

    摘要翻译： 提出了用于维持制品所需位置的扫描方法和装置。 该装置包括照明单元，聚焦光学元件和焦点检测单元。 照明单元产生用于照亮物品的细长区域并产生从照明区域返回的光的入射光束。 聚焦光学器件将入射光束聚焦在焦平面上并收集返回光的至少一部分。 焦点检测单元包括成像光学器件和具有响应于其上的光照射的感测表面的检测器，用于产生代表其的数据。 成像光学器件能够在感测表面上形成第一和第二图像。 第一和第二图像分别由收集的返回光的第一和第二空间分离的基本相同的光分量形成，其相对于聚焦光学器件的光轴对称地传播。 第一图像相对于第二图像的位置指示物品相对于焦平面的位置。

    System and method to enable detection of viral infection by users of electronic communication devices
    15.
    发明授权
    System and method to enable detection of viral infection by users of electronic communication devices 有权
    用于电子通信设备的用户检测病毒感染的系统和方法

    公开(公告)号：US09075909B2

    公开(公告)日：2015-07-07

    申请号：US13680289

    申请日：2012-11-19

    申请人： Gal Almogy ,  Gilad Almogy

    发明人： Gal Almogy ,  Gilad Almogy

    IPC分类号： G06F9/44 ,  G06N7/02 ,  G06N7/06 ,  G06F19/00

    CPC分类号： G16H50/20 ,  G06F19/00 ,  G16H50/80 ,  Y02A90/24

    摘要： A non-transitory computer readable medium that stores instructions for causing a computerized system to perform the following operations: determining, by the computerized system, that a first person is infected by a first infectious disease; wherein the determination is associated with a first person infection probability attribute; detecting, by the computerized system, based upon location information collected during at least a portion of a first infectious disease manifestation period, the location information being indicative of locations of the first person and other persons, a second person that was within an infection distance from the first person and is potentially infected by the first infectious disease; calculating, by the computerized system, a second person infection probability attribute; and updating, by the computerized system, the first person infection probability attribute in response to the second person infection probability attribute.

    摘要翻译： 存储用于使计算机化系统执行以下操作的指令的非暂时计算机可读介质：由计算机化系统确定第一人被第一感染性疾病感染; 其中所述确定与第一人感染概率属性相关联; 由所述计算机化系统基于在第一感染性疾病表现期间的至少一部分期间收集的位置信息来检测所述位置信息，所述位置信息指示所述第一人和其他人的位置，所述位置信息在距离 第一个人并且可能被第一感染性疾病感染; 通过计算机化系统计算第二人感染概率属性; 并且由所述计算机化系统更新响应于所述第二人感染概率属性的所述第一人感染概率属性。

    CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING AN IMAGE
    18.
    发明申请
    CHARGED PARTICLE DETECTOR ASSEMBLY, CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING AN IMAGE 有权
    充电颗粒检测器组件，充电颗粒光束装置和用于产生图像的方法

    公开(公告)号：US20080191134A1

    公开(公告)日：2008-08-14

    申请号：US11923421

    申请日：2007-10-24

    申请人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    发明人： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

    IPC分类号： G01N23/00 ,  G01T1/00

    CPC分类号： H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

    摘要： A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

    摘要翻译： 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

    System and method for process variation monitor
    20.
    发明授权
    System and method for process variation monitor 有权
    过程变化监测系统和方法

    公开(公告)号：US07054480B2

    公开(公告)日：2006-05-30

    申请号：US11038449

    申请日：2005-01-18

    申请人： Evgeni Levin ,  Gilad Almogy ,  Efrat Rozenman

    发明人： Evgeni Levin ,  Gilad Almogy ,  Efrat Rozenman

    IPC分类号： G06F19/00 ,  G01N21/88 ,  G06K9/00

    CPC分类号： G06T7/001 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/8896 ,  G06T2207/30148 ,  Y10S430/146

    摘要： A method to extend the process monitoring capabilities of a semiconductor wafer optical inspection system so as to be able to detect low-resolution effects of process variations over the surface of a wafer at much higher sensitivity than heretofore possible. The method consists, in essence, of grouping sensed pixels by geometric blocks over the inspected surface and comparing each block with a corresponding one from another die on the same wager, from another wager of from a stored model image. In one embodiment of the invention, pixel values are compared directly and differences are thresholded at a considerably lower level than during a defects detection process. In another embodiment, there is calculated a signature for each block, based on the sensed light intensity values, and corresponding signatures are compared.

    摘要翻译： 扩展半导体晶片光学检查系统的过程监控能力的方法，以便能够以比以前更高的灵敏度检测晶片表面上的工艺变化的低分辨率效应。 本方法基本上包括通过检查表面上的几何块对感测像素进行分组，并且从相同下注的另一个模具中将每个块与来自另一个管芯的对应的块相比较，从另一个来自存储的模型图像的冲量。 在本发明的一个实施例中，像素值被直接比较，并且差异以比在缺陷检测处理期间低得多的阈值阈值化。 在另一个实施例中，基于感测的光强度值计算每个块的签名，并对相应的签名进行比较。