摘要:
The present invention relates to a method for forming an insulating film with a low relative dielectric constant. A method for forming an insulating film in terms of a plasma chemical vapor deposition, characterized in that a Si supply gas, an oxygen supply gas, and a fluorine supply gas are used a material gas to form said insulating film, and said insulating film is formed under a film forming condition that a density of said insulating film to be formed is equal to or more than 2.25 g/cm3.
摘要翻译:本发明涉及一种形成具有低相对介电常数的绝缘膜的方法。 一种用于形成等离子体化学气相沉积的绝缘膜的方法,其特征在于,使用Si供应气体,供氧气体和氟供应气体来形成所述绝缘膜,并且所述绝缘膜是 在所形成的绝缘膜的密度等于或大于2.25g / cm 3的成膜条件下形成。
摘要:
An FM radar system of more simple construction, smaller size, lower cost and improved performance is provided in which circulators of any type in the prior art are eliminated by constructing a transceiver comprised of a transmitting part and a receiving part, each formed on a common dielectric plate and having a dedicated transmitting antenna and a dedicated receiving antenna respectively. The antennas comprise planar array antennas, in contrast to the solid antennas used in prior art systems. The planar array antennas are also formed on the single dielectric plate. The transmitting part comprises a plurality of transmission antennas and a plurality of frequency multipliers coupled to said transmission antennas. The receiving part comprises a plurality of receiving antennas which are coupled to a plurality of switches through a plurality of mixers, frequency multipliers, and low noise amplifiers.
摘要:
A semiconductor device has a first insulating film formed over a semiconductor substrate, a first opening formed in the first insulating film, a first manganese oxide film formed along an inner wall of the first opening, a first copper wiring embedded in the first opening, and a second manganese oxide film formed on the first copper wiring including carbon.
摘要:
The method for fabricating a semiconductor device comprises the steps of: forming a dummy electrode 22n and a dummy electrode 22p; forming a metal film 32 on the dummy electrode 22p; conducting a thermal treatment at a first temperature to substitute the dummy electrode 22n with an electrode 34a of a material containing the constituent material of the metal film 32; forming a metal film 36 on the dummy electrode 22n; and conducting a thermal treatment at a second temperature, which is lower than the first temperature and at which an interdiffusion of constituent materials between the electrode 34a and the metal film 36 does not take place, to substitute the second dummy electrode with an electrode 34b of a material containing the constituent material of the metal film 36.
摘要:
A three-valued switching circuit having one control input terminal and one output terminal and including at least two transistors constituting a differential pair, and one constant current source connected to a common emitter terminal of the at least two transistors, in which a collector of one of said at least two transistors is connected to said output terminal to output three kinds of current values from said output terminal in response to a three-valued logic control signal applied to said control input terminal.
摘要:
An FM radar system of more simple construction, smaller size, lower cost and improved performance is provided in which circulators of any type in the prior art are eliminated by constructing a transceiver comprised of a transmitting part and a receiving part, each formed on a common dielectric plate and having a dedicated transmitting antenna and a dedicated receiving antenna respectively. The antennas comprise planar array antennas, in contrast to the solid antennas used in prior art systems. The planar array antennas are also formed on the single dielectric plate. The transmitting part comprises a plurality of transmission antennas and a plurality of frequency multipliers coupled to said transmission antennas. The receiving part comprises a plurality of receiving antennas which are coupled to a plurality of switches through a plurality of mixers, frequency multipliers, and low noise amplifiers.
摘要:
A resin or amorphous carbon layer is coated on a substrate and then fluorinated by exposing it in a F.sub.2 gas atmosphere. The thus fluorinated resin or amorphous carbon layer can be excellent in dielectric constant and thermal resistance. The resin may be photo-sensitive so that the resin can be patterned before the fluorination. Alternatively, the resin can be fluorinated before patterning.
摘要:
A tail pipe of an exhaust muffler of an internal combustion engine extends and terminates in a delivery opening to which air blown from a blower is flowed, and an exhaust vent of the tail pipe is disposed so as to open in a downstream direction of the air blown from the delivery opening.
摘要:
A noise reduction circuit arrangement for video signals under low brightness condition has a high-pass filter which detects the level of a video signal to switch the amount of passage of a high-frequency band component in accordance with a magnitude of the level. The video signal, produced from an image pickup element, is supplied to a low-pass filter and the high-pass filter. The high-frequency band component produced from the high-pass filter and changed in amplitude in accordance with the level of the video signal and a low-frequency band component produced from the low-pass filter are added at an adder so as to effect aperture correction in principle. The high-frequency band to be added is so controlled as to more decrease when the brightness of the video signal is low than when the brightness is not low.