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公开(公告)号：US20180329290A1
公开(公告)日：2018-11-15
申请号：US15979813
申请日：2018-05-15
CPC分类号： G03F1/64 , G03F1/62 , G03F7/70825 , G03F7/70975 , G03F7/70983
摘要： The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.
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公开(公告)号：US20140363744A1
公开(公告)日：2014-12-11
申请号：US14295726
申请日：2014-06-04
申请人： IMEC VZW
IPC分类号： H01M4/13 , H01M10/0525 , H01M10/058 , H01M10/056
CPC分类号： H01M4/13 , H01M4/0416 , H01M10/0525 , H01M10/056 , H01M10/0562 , H01M10/0565 , H01M10/058 , H01M2300/0065 , H01M2300/0071 , H01M2300/0082 , Y10T29/49115
摘要： A solid-state battery cell includes an anode, a cathode, and a solid electrolyte matrix. At least the anode or the cathode may include an active electrode material having pores. Further, an inner surface of the pores may be coated with a first surface-ion diffusion enhancement coating. The solid electrolyte matrix may further include an electrically insulating matrix for a solid electrolyte. The electrically insulating matrix may have pores or passages and an inner surface of the pores or the passages may be coated with a second surface-ion diffusion enhancement coating.
摘要翻译： 固体电池单元包括阳极，阴极和固体电解质基质。 至少阳极或阴极可以包括具有孔的活性电极材料。 此外，孔的内表面可以涂覆有第一表面离子扩散增强涂层。 固体电解质基质还可以包括用于固体电解质的电绝缘基质。 电绝缘基质可以具有孔或通道，并且孔或内部表面可以用第二表面离子扩散增强涂层涂覆。
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公开(公告)号：US20210191255A1
公开(公告)日：2021-06-24
申请号：US17131297
申请日：2020-12-22
申请人： IMEC VZW
IPC分类号： G03F1/64
摘要： According to an aspect of the present disclosure there is provided a method for forming an EUVL pellicle, the method comprising: coating a carbon nanotube, CNT, membrane, and mounting the CNT membrane to a pellicle frame, wherein coating the CNT membrane comprises: pre-coating CNTs of the membrane with a seed material, and forming an outer coating on the pre-coated CNTs, the outer coating covering the pre-coated CNTs, the forming of the outer coating comprising depositing a coating material on the pre-coated CNTs by atomic layer deposition.
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公开(公告)号：US20180329289A1
公开(公告)日：2018-11-15
申请号：US15979800
申请日：2018-05-15
发明人： Emily Gallagher , Cedric Huyghebaert , Ivan Pollentier , Hanns Christoph Adelmann , Marina Timmermans , Jae Uk Lee
IPC分类号： G03F1/64 , C01B32/159 , G03F1/22
摘要： The present disclosure relates to a method for forming a carbon nanotube pellicle membrane for an extreme ultraviolet lithography reticle, the method comprising: bonding together overlapping carbon nanotubes of at least one carbon nanotube film by pressing the at least one carbon nanotube film between a first pressing surface and a second pressing surface, thereby forming a free-standing carbon nanotube pellicle membrane. The present disclosure also relates to a method for forming a pellicle for extreme ultraviolet lithography and for forming a reticle system for extreme ultraviolet lithography respectively.
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公开(公告)号：US20180162115A1
公开(公告)日：2018-06-14
申请号：US15836737
申请日：2017-12-08
发明人： Steven Brems , Cedric Huyghebaert , Ken Verguts , Stefan De Gendt
IPC分类号： B32B43/00 , B32B9/00 , B32B15/04 , B32B37/00 , C01B32/184 , C01B32/194 , C07F7/08 , C07F7/10 , C25F5/00
CPC分类号： B32B43/006 , B32B9/007 , B32B15/04 , B32B37/00 , B32B37/025 , B32B37/18 , B32B38/10 , B32B2311/06 , B81C1/00 , C01B32/184 , C01B32/194 , C01B2204/02 , C07F7/081 , C07F7/10 , C25F5/00 , Y02P20/582 , Y10T156/11 , Y10T156/19
摘要： The disclosed technology generally relates to preparing two-dimensional material layers, and more particularly to releasing a graphene layer from a template substrate. According to an aspect, a method of releasing a graphene layer includes providing a template substrate on which the graphene layer is provided, the method comprising: subjecting the graphene layer and the template substrate to a water treatment by soaking the graphene layer and the template substrate in water such that water is intercalated between the template substrate and the graphene layer; and subjecting the graphene layer and the template substrate to a delamination process, thereby releasing the graphene layer from the template substrate.
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公开(公告)号：US09982360B2
公开(公告)日：2018-05-29
申请号：US14486678
申请日：2014-09-15
申请人： IMEC VZW
CPC分类号： C25F5/00 , B32B37/025 , B32B38/0008 , C01B32/19 , C01B32/194 , H01L21/187 , Y10T428/30
摘要： A method for transferring a graphene layer from a metal substrate to a second substrate is provided comprising: providing a graphene layer on the metal substrate, adsorbing hydrogen atoms on the metal substrate by passing protons through the graphene layer, treating the metal substrate having adsorbed hydrogen atoms thereon in such a way as to form hydrogen gas from the adsorbed hydrogen atoms, thereby detaching the graphene layer from the metal substrate, transferring the graphene layer to the second substrate, and optionally reusing the metal substrate by repeating the aforementioned steps.
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公开(公告)号：US11599019B2
公开(公告)日：2023-03-07
申请号：US17131297
申请日：2020-12-22
申请人： IMEC VZW
摘要： According to an aspect of the present disclosure there is provided a method for forming an EUVL pellicle, the method comprising: coating a carbon nanotube, CNT, membrane, and mounting the CNT membrane to a pellicle frame, wherein coating the CNT membrane comprises: pre-coating CNTs of the membrane with a seed material, and forming an outer coating on the pre-coated CNTs, the outer coating covering the pre-coated CNTs, the forming of the outer coating comprising depositing a coating material on the pre-coated CNTs by atomic layer deposition.
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公开(公告)号：US10353284B2
公开(公告)日：2019-07-16
申请号：US15979813
申请日：2018-05-15
摘要： The present disclosure provides a lithographic reticle system comprising a reticle, a first pellicle membrane mounted in front of the reticle, and a second pellicle membrane mounted in front of the first pellicle membrane, wherein the first pellicle membrane is arranged between the reticle and the second pellicle membrane, and wherein the second pellicle membrane is releasably mounted in relation to the first pellicle membrane and the reticle.
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公开(公告)号：US20180329291A1
公开(公告)日：2018-11-15
申请号：US15979827
申请日：2018-05-15
发明人： Marina Timmermans , Emily Gallagher , Ivan Pollentier , Hanns Christoph Adelmann , Cedric Huyghebaert , Jae Uk Lee
IPC分类号： G03F1/64
摘要： The present disclosure relates to a method for forming a pellicle for extreme ultraviolet lithography, the method comprising: forming a coating of a first material on a peripheral region of a main surface of a carbon nanotube pellicle membrane, the membrane including a carbon nanotube film, arranging the carbon nanotube pellicle membrane on a pellicle frame with the peripheral region facing a support surface of the pellicle frame, wherein the support surface of the pellicle frame is formed by a second material, and bonding together the coating of the carbon nanotube pellicle membrane and the pellicle support surface by pressing the carbon nanotube pellicle membrane and the pellicle support surface against each other. The present disclosure relates also relates to a method for forming a reticle system for extreme ultraviolet lithography.
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公开(公告)号：US20240210343A1
公开(公告)日：2024-06-27
申请号：US18392429
申请日：2023-12-21
申请人： IMEC VZW
IPC分类号： G01N27/12
CPC分类号： G01N27/128
摘要： In a first aspect, a nanopore sensing device is provided that includes: (i) a nanopore having a first orifice and second orifice, and a length running from the first to the second orifice; and (ii) one or more sensors for sensing an electric feature in the nanopore; wherein the nanopore sensing device comprises a plurality of sensing layers arranged along the length, each sensing layer being part of one of the sensors and each adjacent pair of sensing layers being separated by an isolating layer, and at least one of the sensors is a field-effect transistor.
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