公开(公告)号：US08617417B2

公开(公告)日：2013-12-31

申请号：US13107199

申请日：2011-05-13

申请人： Tadashi Inaba ,  Kazutaka Takahashi ,  Tomonori Takahashi ,  Atsushi Mizutani

发明人： Tadashi Inaba ,  Kazutaka Takahashi ,  Tomonori Takahashi ,  Atsushi Mizutani

IPC分类号： C09K13/00

CPC分类号： C11D11/0047 ,  C11D7/265 ,  C11D7/3209 ,  C11D7/3218 ,  C11D7/5004

摘要： Provided are a cleaning composition which is capable of inhibiting the metal of a semiconductor substrate from corrosion, and has an excellent removability of plasma etching residues and/or ashing residues on the semiconductor substrate, a method for producing a semiconductor device, and a cleaning method using the cleaning composition. The cleaning composition for removing plasma etching residues and/or ashing residues formed on a semiconductor substrate, and a preparation method and a cleaning method for a semiconductor device, using the cleaning composition, wherein the cleaning composition includes (Component a) water; (Component b) an amine compound; (Component c) hydroxylamine and/or a salt thereof; (Component d) a quaternary ammonium compound; (Component e) an organic acid; and (Component f) a water-soluble organic solvent; and has a pH of 6 to 9.

摘要翻译： 本发明提供能够抑制半导体衬底的金属腐蚀并且具有优异的半导体衬底上的等离子体蚀刻残留物和/或灰化残留物的可除去性的清洁组合物，半导体器件的制造方法和清洁方法 使用清洁组合物。 用于除去形成在半导体衬底上的等离子体蚀刻残渣和/或灰化残留物的清洁组合物，以及使用该清洁组合物的半导体器件的制备方法和清洁方法，其中所述清洁组合物包含（组分a）水; （组分b）胺化合物; （组分c）羟胺和/或其盐; （组分d）季铵化合物; （组分e）有机酸; 和（组分f）水溶性有机溶剂; pH为6〜9。

公开(公告)号：US07585347B2

公开(公告)日：2009-09-08

申请号：US11375089

申请日：2006-03-14

申请人： Manabu Isomura ,  Tatsuya Hishiki ,  Makoto Teranishi ,  Tomonori Takahashi

发明人： Manabu Isomura ,  Tatsuya Hishiki ,  Makoto Teranishi ,  Tomonori Takahashi

IPC分类号： B01D39/06 ,  B01D24/00 ,  B01D39/14 ,  B01D53/22 ,  C04B35/48

CPC分类号： B01D63/061 ,  B01D63/066 ,  B01D65/003 ,  B01D65/02 ,  B01D71/02 ,  B01D71/024 ,  B01D71/025 ,  B01D2321/162 ,  B01D2321/168 ,  C02F1/44 ,  C03C8/24 ,  C04B38/0012 ,  C04B38/0051 ,  C04B2111/00793 ,  C04B35/00 ,  C04B41/5022

摘要： A ceramic filter is provided, including a base body having partition walls made of a ceramic porous body and defining cells, filter membranes provided on the partition walls which are made of a ceramic porous body having an average pore diameter smaller than that of the surface of each partition wall, and a glass seal provided to cover at least the end face of the base body. The glass seal includes an alkali-free glass containing silica (SiO2) in an amount of 55 to 65 mol %, zirconia (ZrO2) in an amount of 1 to 10 mol % and at least one kind of alkaline earth metal oxide selected from calcia, baria and strontia, but which does not substantially contain zinc oxide.

摘要翻译： 提供一种陶瓷过滤器，包括具有由陶瓷多孔体制成的分隔壁并限定单元的基体，设置在隔壁上的过滤膜，其由具有平均孔径小于表面的平均孔径的陶瓷多孔体制成 每个分隔壁和设置成至少覆盖基体的端面的玻璃密封件。 玻璃密封件包括含有55〜65摩尔％的二氧化硅（SiO 2），1〜10摩尔％的氧化锆（ZrO 2）和选自氧化钙中的至少一种碱土金属氧化物的无碱玻璃 ，baria和strontia，但其实质上不含氧化锌。

公开(公告)号：US20070125704A1

公开(公告)日：2007-06-07

申请号：US11672574

申请日：2007-02-08

申请人： Manabu ISOMURA ,  Tomonori Takahashi ,  Kenji Mutoh ,  Minoru Ohta ,  Makoto Itoh

发明人： Manabu ISOMURA ,  Tomonori Takahashi ,  Kenji Mutoh ,  Minoru Ohta ,  Makoto Itoh

IPC分类号： B01D24/00

CPC分类号： B01D67/0046 ,  B01D39/2068 ,  B01D69/12 ,  B01D71/024 ,  B01D2325/04 ,  B01D2325/28 ,  C02F1/444 ,  C04B38/0054 ,  C04B41/009 ,  C04B41/52 ,  C04B41/89 ,  C04B2111/00801 ,  C04B2111/2092 ,  C04B35/46 ,  C04B41/0072 ,  C04B41/4539 ,  C04B41/5022 ,  C04B41/5031 ,  C04B41/5041 ,  C04B35/10 ,  C04B38/00

摘要： A ceramic filter is provided including a substrate, a separation layer comprising titania and having an average pore size in a range of 0.08 to 1 μm and a thickness in a range of 5 to 20 μm, and an intermediate layer formed between the substrate and the separation layer. The intermediate layer includes aggregate particles that are bonded together with glass frits, and aggregate particles of the intermediate layer are smaller than aggregate particles of the substrate and larger than aggregate particles of the separation layer.

摘要翻译： 提供一种陶瓷过滤器，其包括基材，包含二氧化钛并且平均孔径在0.08-1μm的范围内，厚度在5-20μm范围内的分离层，以及形成在基材和 分离层。 中间层包括用玻璃料粘合在一起的聚集体颗粒，中间层的聚集颗粒小于基体的聚集颗粒并且大于分离层的聚集颗粒。

公开(公告)号：US5674301A

公开(公告)日：1997-10-07

申请号：US447844

申请日：1995-05-23

申请人： Osamu Sakai ,  Tomonori Takahashi

发明人： Osamu Sakai ,  Tomonori Takahashi

IPC分类号： B01D53/22 ,  B01B1/00 ,  B01J8/00 ,  B01J12/00 ,  B01J15/00 ,  B01J19/24 ,  B01J23/89 ,  B01J32/00 ,  B01J35/02 ,  B01J35/04 ,  C01B3/32 ,  C01B3/38 ,  C01B3/40 ,  C01B3/50 ,  C01B3/56 ,  B01J7/00

CPC分类号： C01B3/501 ,  B01B1/005 ,  B01J12/007 ,  B01J15/005 ,  B01J19/2475 ,  B01J19/2485 ,  B01J8/009 ,  C01B3/323 ,  C01B3/38 ,  C01B3/505 ,  B01J2208/00017 ,  B01J2208/00274 ,  B01J2208/00548 ,  C01B2203/0233 ,  C01B2203/0405 ,  C01B2203/041 ,  C01B2203/047 ,  C01B2203/0475 ,  C01B2203/1023 ,  C01B2203/1223 ,  Y02P20/52 ,  Y10S48/05

摘要： A hydrogen preparing apparatus is disclosed which reforms a hydrocarbon and/or a hydrocarbon containing an oxygen atom to obtain a hydrogen-containing gas and separates hydrogen from this hydrogen-containing gas. The apparatus includes a porous substrate and a hydrogen separating film which is formed on a predetermined surface portion of the porous substrate and which selectively separates hydrogen, a reforming catalyst for reforming the hydrocarbon being supported in the pores of the porous substrate. A reforming catalyst for reforming the hydrocarbon is supported on a honeycomb carrier, and the hydrogen separating film is arranged on the downstream side of the honeycomb carrier. The surface area of the catalyst per unit volume of the apparatus can be increased, whereby the apparatus can be miniaturized. A hydrogen separating efficiency can also be improved. The hydrogen manufacturing apparatus can be prevented from being damaged by a difference of expansion between the porous substrate and the container.

摘要翻译： 公开了一种氢气制备装置，其改造烃和/或含有氧原子的烃，以获得含氢气体并从该含氢气体中分离出氢。 该装置包括多孔基材和氢分离膜，其形成在多孔基材的预定表面部分上并选择性地分离氢;重整催化剂，用于重整在多孔基材的孔中负载的烃。 将用于重整烃的重整催化剂负载在蜂窝状载体上，氢分离膜配置在蜂窝载体的下游侧。 可以增加装置的每单位体积的催化剂的表面积，从而可以使装置小型化。 氢分离效率也可以提高。 可以防止氢制造装置被多孔基材与容器之间的膨胀差异所损坏。

公开(公告)号：US5602326A

公开(公告)日：1997-02-11

申请号：US546542

申请日：1995-10-20

申请人： Tomonori Takahashi ,  Toshihiro Yoshida ,  Takao Murase ,  Nobuhide Kato ,  Yuji Katsuda

发明人： Tomonori Takahashi ,  Toshihiro Yoshida ,  Takao Murase ,  Nobuhide Kato ,  Yuji Katsuda

IPC分类号： G01N27/04 ,  G01N27/12 ,  G01N27/407 ,  G01N27/416 ,  G01N27/419 ,  G01N33/00 ,  G01N7/00

CPC分类号： G01N27/419 ,  G01N27/4074 ,  G01N33/0013

摘要： A metal oxide semiconductor element is arranged in a measuring chamber in which an atmosphere is introduced. A resistance of the metal oxide semiconductor element is varied corresponding to a concentration of a specific gas component. An oxygen pump, having a solid-electrolyte element with an oxygen ion transmitting property and a pair of electrodes arranged on both sides of the solid-electrolyte element, is provided. One electrode of the oxygen pump is arranged in the measuring chamber. The measuring chamber is communicated with the atmosphere through a hole as a gas diffusion resistant means. A resistance of the metal oxide semiconductor element is measured when the metal oxide semiconductor element is exposed in the atmosphere so as to obtain a concentration of a specific gas component, while an oxygen partial pressure in the measuring chamber is controlled by the oxygen pump.

摘要翻译： 金属氧化物半导体元件布置在其中引入气氛的测量室中。 金属氧化物半导体元件的电阻根据特定气体成分的浓度而变化。 提供了具有氧离子透过性的固体电解质元件和布置在固体电解质元件两侧的一对电极的氧气泵。 氧气泵的一个电极设置在测量室中。 测量室通过作为气体扩散阻挡装置的孔与大气连通。 当金属氧化物半导体元件在大气中暴露以获得特定气体成分的浓度，同时测量室中的氧分压由氧气泵控制​​时，测量金属氧化物半导体元件的电阻。

公开(公告)号：US5348794A

公开(公告)日：1994-09-20

申请号：US110492

申请日：1993-08-23

申请人： Tomonori Takahashi ,  Masato Kimura ,  Masataka Oka ,  Isamu Ogasawara

发明人： Tomonori Takahashi ,  Masato Kimura ,  Masataka Oka ,  Isamu Ogasawara

IPC分类号： B29C55/02 ,  B29C55/04 ,  B29C55/18 ,  B32B27/34

CPC分类号： B29C55/18 ,  B29C55/023 ,  B29C55/04 ,  B32B27/34 ,  B29K2077/00 ,  B29K2995/0026 ,  Y10S428/91 ,  Y10T428/2495 ,  Y10T428/24967 ,  Y10T428/31725 ,  Y10T428/31728 ,  Y10T428/31736 ,  Y10T428/31743 ,  Y10T428/31746 ,  Y10T428/3175

摘要： A multilayered packaging material having good piercing resistance and tearability and being excellent in appearance, transparency and so forth, can be produced by orienting multilayered structure which is composed of a polyamide resin layer and other thermoplastic resin layer(s) at a monoaxially stretching ratio of 1.5- to 7.0-fold in such a manner that the thickness of the polyamide resin layer is 3 to 30 .mu.m and the thickness(es) of the other thermoplastic resin layer(s) is (are) at least twice as much as that of the polyamide resin layer.

摘要翻译： 通过将由聚酰胺树脂层和其它热塑性树脂层构成的多层结构以单轴拉伸比为单轴的方式制造具有良好的耐刺穿性和撕裂性，外观，透明性等优异的多层包装材料 为使聚酰胺树脂层的厚度为3〜30μm，其他热塑性树脂层的厚度为（s）的至少2倍，为1.5〜7.0倍。 的聚酰胺树脂层。

公开(公告)号：US5238882A

公开(公告)日：1993-08-24

申请号：US894640

申请日：1992-06-05

申请人： Tomonori Takahashi ,  Manabu Isomura ,  Keiji Matsuhiro

发明人： Tomonori Takahashi ,  Manabu Isomura ,  Keiji Matsuhiro

IPC分类号： C04B35/584 ,  C04B35/593

CPC分类号： C04B35/5935 ,  C04B35/584

摘要： Silicon nitride sintered bodies are disclosed which contain silicon carbide therein and in which intergranular phases between silicon nitride particles are substantially crystallized. Further, a manufacturing method of the sintered bodies is disclosed, in which a silicon carbide powdery raw material is used as an additive when preparing raw powders and the intergranular phases are crystallized during a temperature descending stage following a firing. Silicone carbide effectivley promotes densification of the structure of the sintered body and crystallization of the intergranular phases, thereby making it possible to provide the sintered bodies having intergranular phases with little glass phases uncrystallized and excellent high-temperature strengths.

摘要翻译： 公开了在其中含有碳化硅并且其中氮化硅颗粒之间的晶间相基本上结晶的氮化硅烧结体。 此外，公开了烧结体的制造方法，其中在制备原料粉末时使用碳化硅粉末原料作为添加剂，并且在烧制之后的温度下降阶段期间晶间相结晶。 有机碳化物有利于促进烧结体的结构的致密化和晶间相的结晶化，从而可以提供具有很少的玻璃相的晶间相的烧结体，并且具有优异的高温强度。

公开(公告)号：US5177038A

公开(公告)日：1993-01-05

申请号：US521567

申请日：1990-05-10

申请人： Tomonori Takahashi ,  Manabu Isomura ,  Keiji Matsuhiro

发明人： Tomonori Takahashi ,  Manabu Isomura ,  Keiji Matsuhiro

IPC分类号： C04B35/584 ,  C04B35/593

CPC分类号： C04B35/5935 ,  C04B35/584

摘要： Silicon nitride sintered bodies are disclosed which contain silicon carbide therein and in which intergranular phases between silicon nitride particles are substantially crystallized. Further, a manufacturing method of the sintered bodies is disclosed, in which a silicon carbide powdery raw material is used as an additive when preparing raw powders and the intergranular phases are crystallized during a temperature descending stage following a firing. Silicon carbide effectively promotes densification of the structure of the sintered body and crystallization of the intergranular phases, thereby making it possible to provide the sintered bodies having intergranular phases with little glass phases uncrystallized and excellent high-temperature strengths.

公开(公告)号：US5137853A

公开(公告)日：1992-08-11

申请号：US740096

申请日：1991-08-05

申请人： Shuichi Ichikawa ,  Tomonori Takahashi

发明人： Shuichi Ichikawa ,  Tomonori Takahashi

IPC分类号： C04B35/113

CPC分类号： C04B35/113

摘要： A beta alumina sintered body having no tantalum component in an intergranular phase is manufactured by mixing raw materials consisting essentially of 8.0-10.0 wt % of sodium oxide, 3.0-5.5 wt % of magnesium oxide and/or 0.1-2.0 wt % of lithium oxide, 0.01-0.5 wt % of tantalum oxide, and the remainder of aluminum oxide to obtain raw material powders; forming the raw material powders to obtain a formed body; and sintering the formed body.

摘要翻译： 通过混合基本上由8.0-10.0重量％的氧化钠，3.0-5.5重量％的氧化镁和/或0.1-2.0重量％的氧化锂组成的原料来制造晶间相中没有钽成分的β氧化铝烧结体 ，0.01-0.5重量％的氧化钽，剩余的氧化铝得到原料粉末; 形成原料粉末以获得成形体; 并烧结成形体。

公开(公告)号：US4940680A

公开(公告)日：1990-07-10

申请号：US247373

申请日：1988-09-21

申请人： Tomonori Takahashi

发明人： Tomonori Takahashi

IPC分类号： C04B35/584 ,  C04B35/593

CPC分类号： C04B35/593 ,  C04B35/584

摘要： A silicon nitride sintered member including a silicon nitride sintered body and a dense silicon nitride coating layer covering the surface of the silicon nitride sintered body. An intergranular phase of the silicon nitride sintered body is substantially composed of crystals.