公开(公告)号：US06479315B1

公开(公告)日：2002-11-12

申请号：US09724514

申请日：2000-11-27

Applicant: Andrew J. Zosel ,  Peter M. Gulvin ,  Jingkuang Chen ,  Joel A. Kubby ,  Chuang-Chia Lin ,  Alex T. Tran

Inventor： Andrew J. Zosel ,  Peter M. Gulvin ,  Jingkuang Chen ,  Joel A. Kubby ,  Chuang-Chia Lin ,  Alex T. Tran

IPC: H01L2100

CPC classification number: B81C1/00666 ,  B81B2203/058 ,  B81C2201/014 ,  B81C2201/0164 ,  B81C2201/056 ,  G02B26/0833

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilicon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.

Abstract translation: 本发明提供一种微机械或微机电结构。 该结构通过包括在衬底层上限定由绝缘体层分离的单晶硅层上的结构的方法制造; 沉积和蚀刻单晶硅层上的多晶硅层，剩余的多晶硅形成结构的机械或光学元件; 暴露单晶硅层的选定区域; 并释放形成的结构。

公开(公告)号：US5989445A

公开(公告)日：1999-11-23

申请号：US098695

申请日：1998-06-17

Applicant: Kensall D. Wise ,  Jingkuang Chen

Inventor： Kensall D. Wise ,  Jingkuang Chen

IPC: A61M5/32 ,  B41J2/16 ,  H01L21/00 ,  B44C1/22

CPC classification number: B41J2/1628 ,  A61M5/32 ,  B41J2/1601 ,  B41J2/1631 ,  A61M5/3291 ,  Y10S239/19 ,  Y10S366/01

Abstract: Microchannels for conducting and expelling a fluid are embedded in a surface of a silicon substrate. A channel seal is made of plural cross structures formed integrally with the silicon substrate. The cross structures are arranged sequentially over each channel, each cross structure having a chevron shape. The microchannel is sealed by oxidizing at least partially the cross structures, whereby the spaces therebetween are filled. A dielectric seal which overlies the thermally oxidized cross structures forms a complete seal and a substantially planar top surface to the silicon substrate. The dielectric seal is formed of a low pressure chemical vapor deposition (LPCVD) dielectric layer. The channel is useful in the production of an ink jet print in head, and has a polysilicon heater overlying the dielectric seal. A current passing through the heater causes a corresponding increase in the temperature of the ink in the microchannel, causing same to be expelled therefreom. After expulsion of the fluid, the microchannel is refilled by capillary action. Control circuitry, including bonding pads and sensors, can be formed integrally on the silicon substrate. In drug or chemical delivery systems, sensors and/or stimulation circuitry for sensing or inducing neural and other response can be formed directly in the silicon substrate which contains the microchannel. The sensor is disposed in close proximity to the chemical distribution nozzle, facilitating neural and other studies. Microvalve arrangements can be formed with the microchannel, controlled by the on-chip circuitry.

Abstract translation: 用于导电和排出流体的微通道嵌入在硅衬底的表面中。 通道密封由与硅基板一体形成的多个横向结构构成。 交叉结构依次布置在每个通道上，每个交叉结构具有人字形。 通过至少部分地氧化交叉结构来密封微通道，由此填充它们之间的空间。 覆盖在热氧化交叉结构上的电介质密封件形成完整的密封和基本平坦的顶部表面到硅衬底。 电介质密封由低压化学气相沉积（LPCVD）介电层形成。 该通道在头部中的喷墨打印生产中是有用的，并且具有叠加在电介质密封上的多晶硅加热器。 通过加热器的电流导致微通道中的墨水的温度相应增加，从而导致其在那里被排出。 在排出流体之后，通过毛细管作用重新填充微通道。 包括接合焊盘和传感器的控制电路可以一体地形成在硅衬底上。 在药物或化学物质输送系统中，用于感测或诱导神经和其他反应的传感器和/或刺激电路可以直接形成在包含微通道的硅衬底中。 传感器靠近化学分配喷嘴设置，便于神经和其他研究。 可以利用芯片电路控制的微通道形成微型阀组件。

公开(公告)号：US20110003405A1

公开(公告)日：2011-01-06

申请号：US12495827

申请日：2009-07-01

Applicant: Chingwen Yeh ,  James B. Boyce ,  Kathleen Boyce ,  Jingkuang Chen ,  Feixia Pan ,  Joel A. Kubby

Inventor： Chingwen Yeh ,  James B. Boyce ,  Kathleen Boyce ,  Jingkuang Chen ,  Feixia Pan ,  Joel A. Kubby

IPC: H01L21/30

CPC classification number: B81C1/00158 ,  Y10T29/42

Abstract: Method and device for forming a membrane includes providing a glass substrate, and depositing a thin layer of chromium on the glass substrate. The thin layer of chromium is patterned to form a deflection electrode and interconnect leads. A sacrificial layer of aluminum is deposited on top of the patterned chromium layer, then the sacrificial layer is patterned to define anchor regions. On top of the sacrificial layer, a thick layer of chromium is deposited, and the thick layer of chromium is patterned to form a membrane. The sacrificial layer is then etched to release the membrane.

Abstract translation: 用于形成膜的方法和装置包括提供玻璃基板，以及在玻璃基板上沉积薄层的铬。 图案化薄层的铬以形成偏转电极和互连引线。 在图案化的铬层的顶部上沉积铝的牺牲层，然后将牺牲层图案化以限定锚定区域。 在牺牲层的顶部，沉积厚厚的铬层，并且将厚的铬层图案化以形成膜。 然后蚀刻牺牲层以释放膜。

公开(公告)号：US06990265B2

公开(公告)日：2006-01-24

申请号：US10721849

申请日：2003-11-25

Applicant: Joel A. Kubby ,  Pinyen Lin ,  Jingkuang Chen ,  Yi Su

Inventor： Joel A. Kubby ,  Pinyen Lin ,  Jingkuang Chen ,  Yi Su

IPC: G02B6/26

CPC classification number: G02B6/356 ,  G02B6/12021 ,  G02B6/12033 ,  G02B6/2938 ,  G02B6/3508 ,  G02B6/3512 ,  G02B6/3584 ,  G02B6/3596 ,  G02B2006/12061 ,  G02B2006/12097 ,  G02B2006/12107 ,  G02B2006/12145 ,  G02B2006/12164

Abstract: A micro-optical device having an aligned waveguide switch. The device includes a stationary input part, a stationary output part and a movable part. The stationary input part and the stationary output part each have a plurality of input and output waveguides, respectively. The movable part has a plurality of switching waveguides and is movable relative to the stationary input and output parts. A stop block limits movement of the movable part in order to align at least one of the switching waveguides with the applicable input waveguide(s) and output waveguide(s). The movement of the movable part is substantially transverse.

Abstract translation: 具有对准的波导开关的微型光学器件。 该装置包括固定输入部分，固定输出部分和可动部分。 固定输入部分和固定输出部分别分别具有多个输入和输出波导。 可移动部件具有多个开关波导，并且可相对于固定的输入和输出部件移动。 止动块限制了可移动部件的移动，以便将至少一个开关波导与可应用的输入波导和输出波导对准。 可移动部件的运动基本上是横向的。

公开(公告)号：US06861341B2

公开(公告)日：2005-03-01

申请号：US09683857

申请日：2002-02-22

Applicant: Jingkuang Chen ,  Yi Su

Inventor： Jingkuang Chen ,  Yi Su

IPC: H01L27/14 ,  H01L21/8234 ,  H01L21/8238 ,  H01L21/84 ,  H01L27/06 ,  H01L27/08 ,  H01L27/092 ,  H01L27/12 ,  H01L29/786 ,  H01L49/00 ,  H01L21/265 ,  H01L21/425

CPC classification number: B81C1/00246 ,  B81B2201/047 ,  B81C2203/0735 ,  H01L21/823493 ,  H01L21/823892 ,  H01L21/84 ,  H01L27/0617 ,  H01L27/1203

Abstract: A heterogeneous device comprises a substrate and a plurality of heterogeneous circuit devices defined in the substrate. In embodiments, a plurality of heterogeneous circuit devices are integrated by successively masking and ion implanting the substrate. The heterogeneous device may further comprise at least one microelectromechanical system-based element and/or at least one photodiode. In embodiments, the heterogeneous circuit devices comprise at least one CMOS transistor and at least one DMOS transistor. In embodiments, the substrate comprises a layer of silicon or a layer of p-type silicon. In other embodiments, the substrate comprises a silicon-on-insulator wafer comprising a single-crystal-silicon layer or a single-crystal-P-silicon layer, a substrate and an insulator layer therebetween.

Abstract translation: 异质器件包括衬底和限定在衬底中的多个异质电路器件。 在实施例中，通过依次掩蔽和离子注入衬底来整合多个异构电路器件。 异质装置还可以包括至少一个基于微机电系统的元件和/或至少一个光电二极管。 在实施例中，异质电路器件包括至少一个CMOS晶体管和至少一个DMOS晶体管。 在实施例中，衬底包括硅层或p型硅层。 在其它实施例中，衬底包括绝缘体上硅晶片，其包括单晶硅层或单晶P硅层，衬底和绝缘体层之间。

公开(公告)号：US06661070B2

公开(公告)日：2003-12-09

申请号：US10193804

申请日：2002-07-11

Applicant: Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

Inventor： Andrew J. Zosel ,  Joel A. Kubby ,  Peter M. Gulvin ,  Chuang-Chia Lin ,  Jingkuang Chen ,  Alex T. Tran

IPC: H01L2982

CPC classification number: B81C1/00666 ,  B81B2203/058 ,  B81C2201/014 ,  B81C2201/0164 ,  B81C2201/056 ,  G02B26/0833

Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.

公开(公告)号：US06510275B1

公开(公告)日：2003-01-21

申请号：US09986399

申请日：2001-11-08

Applicant: Alex Tran ,  Joel A. Kubby ,  Jingkuang Chen ,  Peter Gulvin ,  Kathleen A. Feinberg ,  Yi Su

Inventor： Alex Tran ,  Joel A. Kubby ,  Jingkuang Chen ,  Peter Gulvin ,  Kathleen A. Feinberg ,  Yi Su

IPC: G02B600

CPC classification number: G02B6/3636 ,  G02B6/136 ,  G02B6/30 ,  G02B6/3652 ,  G02B6/3692 ,  G02B2006/12097

Abstract: A micro-optoelectromechanical system based device with aligned structures comprises at least one optical structure formed in a silicon layer of the device and at least one optical fiber connection structure that is self-aligned with the at least one optical structure. In embodiments, the at least one optical fiber connection structure is formed in a substrate of the device and may comprise a V-groove. In other embodiments, the at least one optical structure may comprise a waveguide. A nitride layer may be formed on at least a portion of the waveguide. In various embodiments, the silicon layer may be a single-crystal-silicon layer of a silicon-on-insulator wafer. A method for fabricating a micro-optoelectromechanical system based device with aligned structures is provided in which the at least one optical structure and the at least one optical fiber connection structure are defined using the same masking layer.

Abstract translation: 具有对准结构的基于微光机电系统的器件包括形成在器件的硅层中的至少一个光学结构以及与所述至少一个光学结构自对准的至少一个光纤连接结构。 在实施例中，至少一个光纤连接结构形成在器件的衬底中，并且可以包括V形槽。 在其他实施例中，所述至少一个光学结构可以包括波导。 可以在波导的至少一部分上形成氮化物层。 在各种实施例中，硅层可以是绝缘体上硅晶片的单晶硅层。 提供一种用于制造具有对准结构的基于微光机电系统的装置的方法，其中使用相同的掩模层限定所述至少一个光学结构和所述至少一个光纤连接结构。

公开(公告)号：US06379989B1

公开(公告)日：2002-04-30

申请号：US09468141

申请日：1999-12-21

Applicant: Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

Inventor： Joel A. Kubby ,  Jingkuang Chen ,  Alex T. Tran

IPC: H01L2100

CPC classification number: G02B6/43 ,  G02B6/4214

Abstract: A microoptomechanical structure produced by defining a microoptical structure in a single-crystal silicon layer separated by an insulator layer from a handle wafer, such as a SOI wafer, selectively etching the single crystal silicon layer, depositing a sacrificial oxide layer on the etched single crystal silicon layer, depositing and etching a polysilicon layer on the sacrificial oxide layer, with remaining polysilcon forming hinge elements, and releasing formed microoptical structures. Embodiments use an oxide as an insulator, and other embodiments provide for wafer bonding of the silicon layer to the insulator layer.

Abstract translation: 通过在由诸如SOI晶片的处理晶片分离的绝缘体层的单晶硅层中限定微光学结构而产生的微机电结构，选择性地蚀刻单晶硅层，在蚀刻的单晶上沉积牺牲氧化物层 硅层，沉积和蚀刻牺牲氧化物层上的多晶硅层，形成铰链元件，并释放形成的微光学结构。 实施例使用氧化物作为绝缘体，并且其它实施例提供硅层与绝缘体层的晶片结合。

公开(公告)号：US6022482A

公开(公告)日：2000-02-08

申请号：US905759

申请日：1997-08-04

Applicant: Jingkuang Chen ,  Biay-Cheng Hseih

Inventor： Jingkuang Chen ,  Biay-Cheng Hseih

IPC: B41J2/05 ,  B41J2/14 ,  B41J2/16 ,  G01D15/00 ,  G11B5/265

CPC classification number: B41J2/1433 ,  B41J2/14072 ,  B41J2/14129 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/14475 ,  B41J2202/13

Abstract: A method and structure are described for a monolithic roofshooter ink jet printhead which has nozzles and ink channels formed in a polyimide layer overlying a silicon substrate. Resistor heaters, addressing logic circuitry, and ink inlets are formed in a silicon substrate. A fabrication process, simple and monolithic, is performed at low temperatures resulting in a structure which has nozzle diameters of 30 .mu. separated by distances of 10 .mu. or less. This structure results in a printhead which has a printing resolution of 630 dpi.

Abstract translation: 对于在覆盖硅衬底的聚酰亚胺层中形成的喷嘴和油墨通道的单片屋顶喷墨打印头描述了一种方法和结构。 电阻加热器，寻址逻辑电路和墨水入口形成在硅衬底中。 在低温下进行简单且整体的制造工艺，得到喷嘴直径为30微米，间距为10微米或更小的结构。 该结构导致打印分辨率为630dpi的打印头。

公开(公告)号：US5992769A

公开(公告)日：1999-11-30

申请号：US489069

申请日：1995-06-09

Applicant: Kensall D. Wise ,  Jingkuang Chen

Inventor： Kensall D. Wise ,  Jingkuang Chen

IPC: A61M5/32 ,  B41J2/16 ,  B05B1/14 ,  B41J2/05

CPC classification number: B41J2/1628 ,  A61M5/32 ,  B41J2/1601 ,  B41J2/1631 ,  A61M5/3291 ,  Y10S239/19 ,  Y10S366/01

Abstract: Microchannels for conducting and expelling a fluid are embedded in a surface of a silicon substrate. A channel seal is made of plural cross structures formed integrally with the silicon substrate. The cross structures are arranged sequentially over each channel, each cross structure having a chevron shape. The microchannel is sealed by oxidizing at least partially the cross structures, whereby the spaces therebetween are filled. A dielectric seal which overlies the thermally oxidized cross structures forms a complete seal and a substantially planar top surface to the silicon substrate. The dielectric seal is formed of a low pressure chemical vapor deposition (LPCVD) dielectric layer. The channel is useful in the production of an ink jet print head, and has a polysilicon heater overlying the dielectric seal. A current passing through the heater causes a corresponding increase in the temperature of the ink in the microchannel, causing same to be expelled therefreom. After expulsion of the fluid, the microchannel is refilled by capillary action. Control circuitry, including bonding pads and sensors, can be formed integrally on the silicon substrate. In drug or chemical delivery systems, sensors and/or stimulation circuitry for sensing or inducing neural and other response can be formed directly in the silicon substrate which contains the microchannel. The sensor is disposed in close proximity to the chemical distribution nozzle, facilitating neural and other studies. Microvalve arrangements can be formed with the microchannel, controlled by the on-chip circuitry.

Abstract translation: 用于导电和排出流体的微通道嵌入在硅衬底的表面中。 通道密封由与硅基板一体形成的多个横向结构构成。 交叉结构依次布置在每个通道上，每个交叉结构具有人字形。 通过至少部分地氧化交叉结构来密封微通道，由此填充它们之间的空间。 覆盖在热氧化交叉结构上的电介质密封件形成完整的密封件和基本平坦的顶部表面。 电介质密封由低压化学气相沉积（LPCVD）介电层形成。 该通道在生产喷墨打印头中是有用的，并且具有覆盖在电介质密封件上的多晶硅加热器。 通过加热器的电流导致微通道中的墨水的温度相应增加，从而导致其在那里被排出。 在排出流体之后，通过毛细管作用重新填充微通道。 包括接合焊盘和传感器的控制电路可以一体地形成在硅衬底上。 在药物或化学物质输送系统中，用于感测或诱导神经和其他反应的传感器和/或刺激电路可以直接形成在包含微通道的硅衬底中。 传感器靠近化学分配喷嘴设置，便于神经和其他研究。 可以利用芯片电路控制的微通道形成微型阀组件。