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20 条记录 (耗时 0.031 秒)

    In-plane electromagnetic mems pump
    11.
    发明申请
    In-plane electromagnetic mems pump 有权
    平面电磁脉冲泵

    公开(公告)号：US20110295229A1

    公开(公告)日：2011-12-01

    申请号：US12801162

    申请日：2010-05-26

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    IPC分类号： A61M5/168 ,  B23P15/00 ,  A61M5/142 ,  F04B53/10

    CPC分类号： F04B43/043

    摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

    摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。

    MEMS thermal actuator and method of manufacture
    12.
    发明授权
    MEMS thermal actuator and method of manufacture 失效
    MEMS热致动器及其制造方法

    公开(公告)号：US07759152B2

    公开(公告)日：2010-07-20

    申请号：US12382142

    申请日：2009-03-10

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    IPC分类号： H01L21/00

    CPC分类号： H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

    Wafer bonding material with embedded conductive particles
    13.
    发明授权
    Wafer bonding material with embedded conductive particles 有权
    具有嵌入式导电颗粒的晶片接合材料

    公开(公告)号：US07972683B2

    公开(公告)日：2011-07-05

    申请号：US11896648

    申请日：2007-09-05

    申请人： Christopher S. Gudeman ,  Steven H. Hovey ,  Ian R. Johnston

    发明人： Christopher S. Gudeman ,  Steven H. Hovey ,  Ian R. Johnston

    IPC分类号： H01L29/12 ,  B29C65/48 ,  H01B1/02

    CPC分类号： H01L23/10 ,  B81C1/00269 ,  B81C2203/0109 ,  B81C2203/019 ,  H01B1/02 ,  H01B1/023 ,  H01B1/026 ,  H01L2924/0002 ,  H01L2924/01079 ,  Y10T428/12528 ,  Y10T428/24909 ,  H01L2924/00

    摘要： A material for bonding a first wafer to a second wafer, which includes an insulating adhesive with conductive particles embedded in the adhesive substance. When the adhesive is applied and melted or fused, and pressure is applied between the first wafer and the second wafer, the first wafer approaches the second wafer until a minimum separation is reached, defined by a dimension of the conductive particles. Each of the first wafer and the second wafer may have circuitry formed thereon, and the conductive particles may form a conductive path between the circuitry on one wafer and the circuitry on the other wafer. Advantageously, the high fusing temperature required by the insulating adhesive may also serve to activate a getter material, formed in the device cavity between the first wafer and the second wafer.

    摘要翻译： 用于将第一晶片接合到第二晶片的材料，其包括具有嵌入粘合物质中的导电颗粒的绝缘粘合剂。 当粘合剂被施加并熔化或熔化并且在第一晶片和第二晶片之间施加压力时，第一晶片接近第二晶片，直至达到由导电颗粒尺寸限定的最小分离。 第一晶片和第二晶片中的每一个可以具有在其上形成的电路，并且导电粒子可以在一个晶片上的电路和另一个晶片上的电路之间形成导电路径。 有利地，绝缘粘合剂所需的高定影温度也可以用于激活形成在第一晶片和第二晶片之间的器件空腔中的吸气剂材料。

    Silicon substrate as a light modulator sacrificial layer
    18.
    发明授权
    Silicon substrate as a light modulator sacrificial layer 有权
    硅衬底作为光调制器牺牲层

    公开(公告)号：US07027202B1

    公开(公告)日：2006-04-11

    申请号：US10377994

    申请日：2003-02-28

    申请人： James Hunter ,  Christopher S. Gudeman

    发明人： James Hunter ,  Christopher S. Gudeman

    IPC分类号： G02B26/00 ,  G02B26/02 ,  G02B5/18

    CPC分类号： G02B26/0808 ,  G02B5/1857

    摘要： An optical MEM device is fabricated with a patterned device layer formed on a silicon wafer. Preferably, the patterned device layer is patterned with plurality of ribbons and/or access trenches. The central portion of the ribbon is released from the silicon wafer using a selective etch process, wherein a cavity is formed under the central portion of the ribbon, while opposing ribbon ends remain attached to the wafer. The selective etching process preferably utilizes an enchant comprising xenon difluoride. In accordance with further embodiments, the silicon wafer is doped, patterned or otherwise modified to enhance the selectivity of the etching process.

    摘要翻译： 制造具有形成在硅晶片上的图案化器件层的光学MEM器件。 优选地，图案化的器件层被图案化为多个带和/或接入沟槽。 带的中心部分使用选择性蚀刻工艺从硅晶片释放，其中在带的中心部分形成空腔，而相对的带端部保持连接到晶片。 选择性蚀刻工艺优选利用包含氙二氟化物的附魔。 根据另外的实施例，硅晶片被掺杂，图案化或以其他方式修改以增强蚀刻工艺的选择性。

    Low friction sliding hard disk drive system
    19.
    发明授权
    Low friction sliding hard disk drive system 失效
    低摩擦滑动硬盘驱动系统

    公开(公告)号：US5949612A

    公开(公告)日：1999-09-07

    申请号：US515140

    申请日：1995-08-15

    申请人： Christopher S. Gudeman ,  Michael H. Azarian ,  Michael A. Baldwinson ,  Keith R. Berding ,  Kaynam Chun ,  Garrett A. Garrettson ,  Harold J. Hamilton ,  Robert D. Hempstead ,  Dimitre A. Latev ,  Mark A. Lauer

    发明人： Christopher S. Gudeman ,  Michael H. Azarian ,  Michael A. Baldwinson ,  Keith R. Berding ,  Kaynam Chun ,  Garrett A. Garrettson ,  Harold J. Hamilton ,  Robert D. Hempstead ,  Dimitre A. Latev ,  Mark A. Lauer

    IPC分类号： G11B5/31 ,  G11B5/73 ,  G11B5/84 ,  B05D5/12

    CPC分类号： G11B5/72 ,  G11B5/3106 ,  G11B5/7325 ,  G11B5/8404 ,  Y10S428/90

    摘要： A operationally contacting hard disk drive system has reduced friction due to lower capillary adhesion between the disk surface and a transducer in a substantially continuous sliding relationship with the surface. The disk surface has an adhesion-reducing texture that includes a microscopic RMS roughness in a range between about 1.5 and 5.5 nanometers, or a number of asperities having a mean plane to peak height in a range between about 6 and 50 nanometers. The roughness may increase in a radially graded fashion to compensate for the increased linear velocity and concomitant frictional power loss near the outer diameter of the disk. It is important that the uppermost reaches of the textured surface are smooth but not flat in order to obtain lasting low friction operation, which is accomplished by constructing the surface with a highest approximately one percent having an average radius of curvature in a range between 2 microns and 100 microns. An area of the slider in apparent contact with the disk surface is preferably less than 1000 square microns, and a ratio between this nominal area and the mean to peak height is less than 0.3 meters. The slider may also include a substantial thickness of partially wetting material in contact with the disk, or may alternatively be textured with deep grooves or materials having differing wear rates, in order to provide reduced frictional adhesion despite wear of the slider.

    摘要翻译： 操作上接触的硬盘驱动系统由于在与表面基本上连续的滑动关系中的盘表面和换能器之间较低的毛细管粘附力而减少了摩擦。 盘表面具有减粘纹理，其包括在约1.5和5.5纳米之间的范围内的微观RMS粗糙度，或者具有在约6和50纳米之间的范围内的平均平面至峰高的数量的凹凸。 粗糙度可以以径向渐变的方式增加，以补偿在盘的外径附近的增加的线速度和伴随的摩擦功率损耗。 重要的是纹理表面的最上层是光滑的而不是平坦的，以便获得持久的低摩擦操作，这是通过将平均曲率半径在2微米之间的范围内构造最高约百分之一的表面来实现的 和100微米。 与盘表面明显接触的滑块的面积优选地小于1000平方微米，并且该标称面积与平均高峰之间的比例小于0.3米。 滑块还可以包括与盘相接触的部分润湿材料的相当厚度，或者可替代地使用具有不同磨损率的深沟槽或材料进行纹理化，以便尽管滑块的磨损来提供降低的摩擦粘附。

    Process and apparatus for controlled laser texturing of magnetic recording disk
    20.
    发明授权
    Process and apparatus for controlled laser texturing of magnetic recording disk 失效
    用于磁记录盘受控激光纹理化的工艺和设备

    公开(公告)号：US5586040A

    公开(公告)日：1996-12-17

    申请号：US419885

    申请日：1995-04-11

    申请人： Peter M. Baumgart ,  Christopher S. Gudeman ,  Douglas J. Krajnovich ,  Steven W. Meeks ,  Thao A. Nguyen ,  Fior D. Sargent ,  Andrew C. Tam ,  Gerard H. Vurens

    发明人： Peter M. Baumgart ,  Christopher S. Gudeman ,  Douglas J. Krajnovich ,  Steven W. Meeks ,  Thao A. Nguyen ,  Fior D. Sargent ,  Andrew C. Tam ,  Gerard H. Vurens

    IPC分类号： G11B5/60 ,  G11B5/82 ,  G11B5/84 ,  G11B33/10 ,  G06F19/00 ,  B05D3/06

    CPC分类号： G11B5/8408 ,  G11B5/82 ,  G11B5/8404 ,  G11B33/10 ,  G11B5/6011

    摘要： Controlled laser texturing of a magnetic recording disk is accomplished by use of a textured test band on the disk and an analyzing laser system to provide feedback to the texturing laser. The analyzing laser system determines, from diffracted laser light, the average height of the laser-induced bumps formed in the test band by the texturing laser. The analyzing laser beam is directed to the substrate surface and overlaps a group of individual bumps formed in a repetitive pattern. A scanning linear photodector array receives light diffracted from the surface. The digitized output of the array is the angular distribution of diffracted light intensities and is used to compute the average height of the bumps in the test band. The disk is then translated radially so that the texturing laser is aligned with the region of the disk where the textured landing zone is to be placed. Then, in response to the computed value of average bump height in the test band, a correction signal or signals is output to modify one or more parameters of the texturing laser so that the texturing laser can form bumps of the correct average height in the textured landing zone.

    摘要翻译： 通过使用磁盘上的纹理测试带和分析激光系统来对纹理激光器提供反馈来实现磁记录盘的受控激光纹理化。 分析激光系统通过衍射激光确定通过纹理激光在测试带中形成的激光诱发凸块的平均高度。 分析激光束被引导到衬底表面并与重复形成的一组单独的凸块重叠。 扫描线性光电二极管阵列接收从表面衍射的光。 阵列的数字化输出是衍射光强度的角度分布，用于计算测试带中的凸块的平均高度。 然后盘被径向地转动，使得纹理化激光与要被放置纹理着色区的盘的区域对齐。 然后，响应于测试频带中的平均凸块高度的计算值，输出校正信号或信号以修改纹理化激光器的一个或多个参数，使得纹理化激光器可以形成纹理中正确平均高度的凸起 着陆区。