Low friction sliding hard disk drive system
    2.
    发明授权
    Low friction sliding hard disk drive system 失效
    低摩擦滑动硬盘驱动系统

    公开(公告)号:US5949612A

    公开(公告)日:1999-09-07

    申请号:US515140

    申请日:1995-08-15

    摘要: A operationally contacting hard disk drive system has reduced friction due to lower capillary adhesion between the disk surface and a transducer in a substantially continuous sliding relationship with the surface. The disk surface has an adhesion-reducing texture that includes a microscopic RMS roughness in a range between about 1.5 and 5.5 nanometers, or a number of asperities having a mean plane to peak height in a range between about 6 and 50 nanometers. The roughness may increase in a radially graded fashion to compensate for the increased linear velocity and concomitant frictional power loss near the outer diameter of the disk. It is important that the uppermost reaches of the textured surface are smooth but not flat in order to obtain lasting low friction operation, which is accomplished by constructing the surface with a highest approximately one percent having an average radius of curvature in a range between 2 microns and 100 microns. An area of the slider in apparent contact with the disk surface is preferably less than 1000 square microns, and a ratio between this nominal area and the mean to peak height is less than 0.3 meters. The slider may also include a substantial thickness of partially wetting material in contact with the disk, or may alternatively be textured with deep grooves or materials having differing wear rates, in order to provide reduced frictional adhesion despite wear of the slider.

    摘要翻译: 操作上接触的硬盘驱动系统由于在与表面基本上连续的滑动关系中的盘表面和换能器之间较低的毛细管粘附力而减少了摩擦。 盘表面具有减粘纹理,其包括在约1.5和5.5纳米之间的范围内的微观RMS粗糙度,或者具有在约6和50纳米之间的范围内的平均平面至峰高的数量的凹凸。 粗糙度可以以径向渐变的方式增加,以补偿在盘的外径附近的增加的线速度和伴随的摩擦功率损耗。 重要的是纹理表面的最上层是光滑的而不是平坦的,以便获得持久的低摩擦操作,这是通过将平均曲率半径在2微米之间的范围内构造最高约百分之一的表面来实现的 和100微米。 与盘表面明显接触的滑块的面积优选地小于1000平方微米,并且该标称面积与平均高峰之间的比例小于0.3米。 滑块还可以包括与盘相接触的部分润湿材料的相当厚度,或者可替代地使用具有不同磨损率的深沟槽或材料进行纹理化,以便尽管滑块的磨损来提供降低的摩擦粘附。

    In-plane electromagnetic MEMS pump
    3.
    发明授权
    In-plane electromagnetic MEMS pump 有权
    平面电磁MEMS泵

    公开(公告)号:US08690830B2

    公开(公告)日:2014-04-08

    申请号:US12801162

    申请日:2010-05-26

    IPC分类号: A61M1/00 A61K9/22

    CPC分类号: F04B43/043

    摘要: A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

    摘要翻译: 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件,该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力,使得由泵送系统泵送的流体可以泵送通过透皮插管,以将治疗物质递送到患者皮肤下方的组织。

    Wafer bonding material with embedded conductive particles
    4.
    发明授权
    Wafer bonding material with embedded conductive particles 有权
    具有嵌入式导电颗粒的晶片接合材料

    公开(公告)号:US07972683B2

    公开(公告)日:2011-07-05

    申请号:US11896648

    申请日:2007-09-05

    IPC分类号: H01L29/12 B29C65/48 H01B1/02

    摘要: A material for bonding a first wafer to a second wafer, which includes an insulating adhesive with conductive particles embedded in the adhesive substance. When the adhesive is applied and melted or fused, and pressure is applied between the first wafer and the second wafer, the first wafer approaches the second wafer until a minimum separation is reached, defined by a dimension of the conductive particles. Each of the first wafer and the second wafer may have circuitry formed thereon, and the conductive particles may form a conductive path between the circuitry on one wafer and the circuitry on the other wafer. Advantageously, the high fusing temperature required by the insulating adhesive may also serve to activate a getter material, formed in the device cavity between the first wafer and the second wafer.

    摘要翻译: 用于将第一晶片接合到第二晶片的材料,其包括具有嵌入粘合物质中的导电颗粒的绝缘粘合剂。 当粘合剂被施加并熔化或熔化并且在第一晶片和第二晶片之间施加压力时,第一晶片接近第二晶片,直至达到由导电颗粒尺寸限定的最小分离。 第一晶片和第二晶片中的每一个可以具有在其上形成的电路,并且导电粒子可以在一个晶片上的电路和另一个晶片上的电路之间形成导电路径。 有利地,绝缘粘合剂所需的高定影温度也可以用于激活形成在第一晶片和第二晶片之间的器件空腔中的吸气剂材料。

    Configurable power supply using MEMS switch
    5.
    发明申请
    Configurable power supply using MEMS switch 有权
    可配置电源采用MEMS开关

    公开(公告)号:US20110130721A1

    公开(公告)日:2011-06-02

    申请号:US12929257

    申请日:2011-01-11

    摘要: Systems and methods for forming a configurable power supply uses a plurality of dual substrate MEMS switches to couple a plurality of power cells to provide a selectable, or variable, output voltage. The same circuit may output two different voltages to power two different circuits of the device, or may distribute the load evenly amongst the cells. Thus, the configurable power supply may extend the lifetime and improve the reliability of the device, or decrease its weight, size and cost.

    摘要翻译: 用于形成可配置电源的系统和方法使用多个双衬底MEMS开关来耦合多个功率单元以提供可选择的或可变的输出电压。 相同的电路可以输出两个不同的电压来为装置的两个不同电路供电,或者可以在电池之间均匀地分配负载。 因此,可配置电源可延长使用寿命并提高设备的可靠性,或降低其重量,尺寸和成本。

    MEMS thermal actuator and method of manufacture
    6.
    发明申请
    MEMS thermal actuator and method of manufacture 有权
    MEMS热致动器及其制造方法

    公开(公告)号:US20080191303A1

    公开(公告)日:2008-08-14

    申请号:US11705739

    申请日:2007-02-14

    IPC分类号: H01L31/058 H01L21/00

    摘要: A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译: 公开了一种分离的MEMS热致动器,其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中,嵌入的悬臂式驱动梁形成在同一平面上,但与被动梁分开,间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合,镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁,如果变化的幅度小于间隙的大小 。

    Process for bonding lubricants to a thin film storage media
    7.
    发明授权
    Process for bonding lubricants to a thin film storage media 失效
    将润滑剂粘合到薄膜存储介质上的工艺

    公开(公告)号:US5631081A

    公开(公告)日:1997-05-20

    申请号:US341856

    申请日:1994-11-18

    摘要: The present invention is a method for bonding a lubricant onto the surface of rotating storage media. In particular, the method bonds reactive and non-reactive lubricants onto the carbon based protective coating of a magnetic storage disk. The lubricant is first applied onto the disk surface through conventional coating techniques, such as dipping, spinning, spraying, or vapor deposition. The thickness of the applied coating is thicker than the final bonded thickness of the lubricant. Typically, the applied thickness of the film is approximately 30 Angstroms. The lubricant coated disk surface is then exposed to low energy electron irradiation. The energy level of the accelerated electrons is below 100 eV. The lubricated film is exposed to a dosage level of approximately 1000 microcoulombs per square centimeter. This dosage level bonds approximately 15 Angstroms of lubricant to the disk surface. The non-bonded or excess lubricant is then rinsed off in a liquid freon or other suitable rinse.

    摘要翻译: 本发明是将润滑剂粘合到旋转存储介质的表面上的方法。 特别地,该方法将反应性和非反应性润滑剂粘合到磁存储盘的碳基保护涂层上。 润滑剂首先通过常规的涂覆技术(例如浸渍,纺丝,喷涂或气相沉积)施加到盘表面上。 施加的涂层的厚度比润滑剂的最终粘合厚度厚。 通常,膜的施加厚度为约30埃。 然后将润滑剂涂覆的盘表面暴露于低能量电子辐射。 加速电子的能级低于100eV。 润滑膜暴露于每平方厘米约1000微库仑的剂量水平。 该剂量水平将大约15埃的润滑剂粘合到盘表面。 然后将非粘合或多余的润滑剂在液体氟利昂或其他合适的冲洗液中冲洗掉。