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    In-plane electromagnetic MEMS pump
    3.
    发明授权
    In-plane electromagnetic MEMS pump 有权
    平面电磁MEMS泵

    公开(公告)号：US08690830B2

    公开(公告)日：2014-04-08

    申请号：US12801162

    申请日：2010-05-26

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    IPC分类号： A61M1/00 ,  A61K9/22

    CPC分类号： F04B43/043

    摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

    摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。

    MEMS thermal actuator and method of manufacture
    4.
    发明申请
    MEMS thermal actuator and method of manufacture 有权
    MEMS热致动器及其制造方法

    公开(公告)号：US20080191303A1

    公开(公告)日：2008-08-14

    申请号：US11705739

    申请日：2007-02-14

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    IPC分类号： H01L31/058 ,  H01L21/00

    CPC分类号： H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

    MEMS thermal actuator and method of manufacture
    6.
    发明授权
    MEMS thermal actuator and method of manufacture 有权
    MEMS热致动器及其制造方法

    公开(公告)号：US07622783B2

    公开(公告)日：2009-11-24

    申请号：US11705739

    申请日：2007-02-14

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    IPC分类号： H01L29/82

    CPC分类号： H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

    In-plane electromagnetic mems pump
    7.
    发明申请
    In-plane electromagnetic mems pump 有权
    平面电磁脉冲泵

    公开(公告)号：US20110295229A1

    公开(公告)日：2011-12-01

    申请号：US12801162

    申请日：2010-05-26

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Steven S. Hovey ,  Paul J. Rubel

    IPC分类号： A61M5/168 ,  B23P15/00 ,  A61M5/142 ,  F04B53/10

    CPC分类号： F04B43/043

    摘要： A micromechanical pumping system is formed on a substrate surface. The pumping system uses a pumping element which pumps a fluid through valves which move in a plane substantially parallel to the substrate surface. An electromagnetic actuating mechanism may also be fabricated on the surface of the substrate. Magnetic flux produced by a coil around a permeable core may be coupled to a permeable member affixed to a pumping element. The permeable member and pumping element may be configured to move in a plane parallel to the substrate. The electromagnetic actuating mechanism gives the pumping system a large throw and substantial force, such that the fluid pumped by the pumping system may be pumped through a transdermal cannula to deliver a therapeutic substance to the tissue underlying the skin of a patient.

    摘要翻译： 在基板表面上形成微机械泵送系统。 泵送系统使用泵送元件，该元件通过在基本上平行于衬底表面的平面中移动的阀来泵送流体。 也可以在基板的表面上制造电磁致动机构。 线圈围绕可渗透芯体产生的磁通可以耦合到固定到泵送元件的可渗透构件。 可渗透构件和泵送元件可以构造成在平行于衬底的平面中移动。 电磁致动机构使泵送系统产生大的冲击力和相当大的力，使得由泵送系统泵送的流体可以泵送通过透皮插管，以将治疗物质递送到患者皮肤下方的组织。

    MEMS thermal actuator and method of manufacture
    8.
    发明授权
    MEMS thermal actuator and method of manufacture 失效
    MEMS热致动器及其制造方法

    公开(公告)号：US07759152B2

    公开(公告)日：2010-07-20

    申请号：US12382142

    申请日：2009-03-10

    申请人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    发明人： Gregory A. Carlson ,  John S. Foster ,  Christopher S. Gudeman ,  Paul J. Rubel

    IPC分类号： H01L21/00

    CPC分类号： H01H1/0036 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    摘要： A separated MEMS thermal actuator is disclosed which is largely insensitive to creep in the cantilevered beams of the thermal actuator. In the separated MEMS thermal actuator, a inlaid cantilevered drive beam formed in the same plane, but separated from a passive beam by a small gap. Because the inlaid cantilevered drive beam and the passive beam are not directly coupled, any changes in the quiescent position of the inlaid cantilevered drive beam may not be transmitted to the passive beam, if the magnitude of the changes are less than the size of the gap.

    摘要翻译： 公开了一种分离的MEMS热致动器，其对热致动器的悬臂梁中的蠕变基本上不敏感。 在分离的MEMS热致动器中，嵌入的悬臂式驱动梁形成在同一平面上，但与被动梁分开，间隙小。 由于嵌入的悬臂驱动梁和被动梁不直接耦合，镶嵌悬臂驱动梁的静止位置的任何变化可能不会传递到被动梁，如果变化的幅度小于间隙的大小 。

    Hysteretic MEMS thermal device and method of manufacture
    9.
    发明授权
    Hysteretic MEMS thermal device and method of manufacture 有权
    迟滞MEMS热装置及其制造方法

    公开(公告)号：US07944113B2

    公开(公告)日：2011-05-17

    申请号：US12318634

    申请日：2009-01-05

    申请人： Paul J. Rubel

    发明人： Paul J. Rubel

    IPC分类号： H01L41/08

    CPC分类号： F03G7/06 ,  B81B3/0059 ,  B81B2201/018 ,  B81B2201/032 ,  B81B2201/054 ,  H01H61/02 ,  H01H61/04 ,  H01H2001/0047 ,  H01H2001/0068 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00 ,  Y10T29/49105

    摘要： A MEMS hysteretic thermal actuator may have a plurality of beams disposed over a heating element formed on the surface of the substrate. The plurality of beams may be coupled to a passive beam which is not disposed over the heating element. One of the plurality of beams may be formed in a first plane parallel to the substrate, whereas another of the plurality of beams may be formed in a second plane closer to the surface of the substrate. When the heating element is activated, it heats the plurality of beams such that they move the passive beam in a trajectory that is neither parallel to nor perpendicular to the surface of the substrate. When the beams are cooled, they may move in a different trajectory, approaching the substrate before moving laterally across it to their initial positions. By providing one electrical contact on the distal end of the passive beam and another stationary electrical contact on the substrate surface, the MEMS hysteretic actuator may form a reliable electrical switch that is relatively simple to manufacture and operate.

    摘要翻译： MEMS迟滞热致动器可以具有设置在形成在基板的表面上的加热元件上的多个光束。 多个光束可以耦合到未设置在加热元件上方的无源光束。 多个光束中的一个可以形成在平行于衬底的第一平面中，而多个光束中的另一个可以形成在靠近衬底表面的第二平面中。 当加热元件被激活时，它加热多个光束，使得它们以不平行于或垂直于衬底表面的轨迹移动被动束。 当梁被冷却时，它们可以以不同的轨迹移动，在横向移动到其初始位置之前接近基板。 通过在被动束的远端上提供一个电接触，并在衬底表面上提供另一个固定的电触点，MEMS滞后致动器可形成可靠的电开关，其制造和操作相对简单。

    Singly attached MEMS thermal device and method of manufacture
    10.
    发明授权
    Singly attached MEMS thermal device and method of manufacture 有权
    单独连接的MEMS热设备及其制造方法

    公开(公告)号：US07724121B2

    公开(公告)日：2010-05-25

    申请号：US11516489

    申请日：2006-09-07

    申请人： Paul J. Rubel

    发明人： Paul J. Rubel

    IPC分类号： H01H71/18 ,  H01H61/00 ,  F16K31/02 ,  H02N10/00

    CPC分类号： H01H1/0036 ,  B81B3/0024 ,  B81B2201/031 ,  F03G7/06 ,  H01H2061/006 ,  H01H2061/008

    摘要： An improved MEMS thermal actuator has a cantilevered beam and a conductive circuit having two driving arms, an inner arm adjacent to the cantilevered beam, and an outer arm adjacent to the inner arm. Current flows through the inner and outer arms to heat the conductive circuit, causing it to expand relative to the cantilevered beam. A tether ties the conductive circuit to the cantilevered beam, so that upon expansion, the conductive circuit causes the cantilevered beam to deflect about its anchor point. However, only the inner arm of the driving beam is coupled to the cantilevered beam. Since the outer arm of the conductive circuit is not coupled to the cantilevered beam, the overall stiffness of the actuator may be decreased. In addition, serpentines may be placed in the outer arm of the conductive circuit, in order to further decrease the stiffness of this beam. The actuator may therefore be made more efficient, in that the deflection of the cantilevered beam may be increased for a given input current.

    摘要翻译： 改进的MEMS热致动器具有悬臂梁和具有两个驱动臂的导电电路，与悬臂梁相邻的内臂以及与内臂相邻的外臂。 电流流过内臂和外臂以加热导电电路，使其相对于悬臂梁膨胀。 系统将导电电路连接到悬臂梁，使得在膨胀时，导电电路使悬臂梁绕其锚点偏转。 然而，只有驱动梁的内臂联接到悬臂梁。 由于导电电路的外臂未连接到悬臂梁，所以致动器的整体刚度可能会降低。 此外，蛇形管可以放置在导电电路的外臂中，以便进一步降低该梁的刚度。 因此，可以使致动器更有效，因为对于给定的输入电流，可以增加悬臂梁的偏转。