摘要:
Gas distribution assemblies and susceptor assemblies made up of a plurality of pie-shaped segments which can be individually leveled, moved or changed. Processing chambers comprising the gas distribution assemblies, the susceptor assemblies and sensors with feedback circuits to adjust the gap between the susceptor and gas distribution assembly are also described. Methods of using the gas distribution assemblies, susceptor assemblies and processing chambers are also described.
摘要:
The present invention generally provides method and apparatus for non-contact temperature measurement in a semiconductor processing chamber. Particularly, the present invention provides methods and apparatus for non-contact temperature measurement for temperature below 500° C. One embodiment of the present invention provides an apparatus for processing semiconductor substrates. The apparatus comprises a target component comprises a material with higher emissivity than the one or more substrates.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide a an enhanced mobile device that includes a CPU, a low latency transceiver, and a high latency transceiver. The enhanced mobile device is in communication with a console via both the low latency transceiver and the high latency transceiver. The console also includes a CPU, a low latency transceiver, and a high latency transceiver. In some embodiments, the low latency communication channel is used to transmit control messages to an entertainment console whereas the high latency communication channel is used to communicate data between the mobile device and the entertainment console. The dual-mode communication may be used in different scenarios, including with an entertainment console for gaming, viewing videos, and the like.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide an enhanced mobile device that includes a CPU, a low latency transceiver, and a high latency transceiver. The enhanced mobile device is in communication with a console via both the low latency transceiver and the high latency transceiver. The console also includes a CPU, a low latency transceiver, and a high latency transceiver. In some embodiments, the low latency communication channel is used to transmit control messages to an entertainment console whereas the high latency communication channel is used to communicate data between the mobile device and the entertainment console. The dual-mode communication may be used in different scenarios, including with an entertainment console for arena gaming and other entertainment applications.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide a an enhanced mobile device that includes a CPU, a low latency transceiver, and a high latency transceiver. The enhanced mobile device is in communication with a console via both the low latency transceiver and the high latency transceiver. The console also includes a CPU, a low latency transceiver, and a high latency transceiver. In some embodiments, the low latency communication channel is used to transmit control messages to an entertainment console whereas the high latency communication channel is used to communicate data between the mobile device and the entertainment console. The dual-mode communication may be used in different scenarios, including with an entertainment console for gaming, viewing videos, and the like.
摘要:
Apparatuses and systems are disclosed for exhausting by-products from a processing chamber. In an embodiment, a dual exhaust system for removing by-products from a processing chamber includes a first exhaust line and a second exhaust line with each line having a pressure control valve and a particle trap for removing by-products. A portion of the first exhaust line may be coupled in parallel with the second exhaust line. The second exhaust line can be isolated from the first exhaust line and cleaned while the first exhaust line is removing by-products from the processing chamber or vice versa. In one embodiment, an exhaust system for removing by-products from a processing chamber includes an exhaust line and valves for removing the by-products. The valves are designed to operate at a high temperature such that the heated by-products are in a vapor phase while being removed through the exhaust line.
摘要:
An apparatus and method provides the capability of mirroring storage between geographically remote locations in an asynchronous manner that does not require all writes on primary storage to be performed in the same order on the mirrored storage. The mirroring of the present invention is “logical mirroring”, which does not require identical disk drives, and which supports mirroring between geographically remote locations to protect against catastrophic site failure. A sequence number is assigned to data written to primary storage before the data is transferred to the mirrored storage. The mirrored storage can write data asynchronously, which may result in some data being written before previous data on the mirrored storage. When a system failure occurs that requires use of the mirrored storage, the mirrored storage is first quiesced to allow all pending writes to occur. If the mirrored storage has no missing data corresponding to a sequence number that is lower than the highest sequence number of data written to the mirrored storage, the mirrored storage may be used. If, however, the mirrored storage has missing data corresponding to a sequence number that is lower than the highest sequence number of data written to the mirrored storage, the mirrored storage cannot be used.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide an enhanced mobile device that includes a low latency transceiver and a high latency transceiver. In some cases, the enhanced mobile device is operated by a customer and configured to interact with a point of service computing system via both the low and high latency transceivers to facilitate a customer interaction at a point of service location. For example, the enhanced mobile device may transmit via its high latency transceiver an indication that it is en route to the point of service location. Upon arrival at the point of service location, the enhanced mobile device may transmit via its low latency transceiver an indication that the customer has arrived at the point of service location. The point of service computing system may then provide a service based on the information received from the enhanced mobile device.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide a an enhanced mobile device that includes a CPU, a low latency transceiver, and a high latency transceiver. The enhanced mobile device is in communication with a console via both the low latency transceiver and the high latency transceiver. The console also includes a CPU, a low latency transceiver, and a high latency transceiver. In some embodiments, the low latency communication channel is used to transmit control messages to an entertainment console whereas the high latency communication channel is used to communicate data between the mobile device and the entertainment console. The dual-mode communication may be used in different scenarios, including entertainment applications, such as with dual-mode eyeglasses.
摘要:
Methods, systems, and techniques for dual-mode communication are provided. Example embodiments provide an enhanced mobile device that includes a low latency transceiver and a high latency transceiver. In some cases, the enhanced mobile device is operated by a customer and configured to interact with a point of service computing system via both the low and high latency transceivers to facilitate a customer interaction at a point of service location. For example, the enhanced mobile device may transmit via its high latency transceiver an indication that it is en route to the point of service location. Upon arrival at the point of service location, the enhanced mobile device may transmit via its low latency transceiver an indication that the customer has arrived at the point of service location. The point of service computing system may then provide a service based on the information received from the enhanced mobile device.