摘要:
The present invention relates to a preparation method of α-alumina nano powder, and more particularly to a preparation method of α-alumina nano powder that has a uniform particle shape and size distribution, is capable of being produced at a low temperature, and contains less than 20 ppm of alkali metals such as Na and K. the α-alumina nano powder is prepared by glycolating aluminium alkoxide in glycol solution containing the α-iron oxide or α-alumina nucleation seed and carrying out glyco thermal reaction.
摘要:
This invention relates to a method for preparing a Zinc Sulfide powder, and provides a method for preparing a single crystalline powder of Zinc Sulfide (ZnS) a high crystallinity comprising a step of conducting a hydrothermal reaction of a) Zinc Oxide or Zinc acetate as Zinc source and b) thioacetamide or thiourea as Sulfur source at a temperature of 180 to 230° C. and a fluorescent substance using the same as a source.
摘要:
The present invention relates to a preparation method of α-alumina nano powder, and more particularly to a preparation method of α-alumina nano powder that has a uniform particle shape and size distribution, is capable of being produced at a low temperature, and contains less than 20 ppm of alkali metals such as Na and K. the α-alumina nano powder is prepared by glycolating aluminium alkoxide in glycol solution containing the α-iron oxide or α-alumina nucleation seed and carrying out glyco thermal reaction.
摘要:
The present invention relates to a method for preparing cerium oxide which enables preparation of cerium oxide showing improved polishing performance, cerium oxide prepared therefrom, and CMP slurry comprising the same.The method for preparing cerium oxide comprises the step of contacting cerium oxide with primary alcohol to increase specific surface area of the cerium oxide 10% or more.
摘要:
The present invention relates to a method for preparing cerium carbonate which enables preparation of hexagonal cerium carbonate by a simplified process, a cerium carbonate powder prepared thereby, and a method for preparing a cerium oxide powder using the same.The method for preparing cerium carbonate comprises the step of contact-reacting orthorhombic cerium carbonate with a primary alcohol aqueous solution comprising water and primary alcohol at a weight ratio of 1:0.1 or more at a temperature of 160° C. or more to form hexagonal cerium carbonate.
摘要:
The present invention relates to a method for preparing cerium carbonate which enables preparation of hexagonal cerium carbonate by a simplified process, a cerium carbonate powder prepared thereby, and a method for preparing a cerium oxide powder using the same.The method for preparing cerium carbonate comprises the step of contact-reacting orthorhombic cerium carbonate with a primary alcohol aqueous solution comprising water and primary alcohol at a weight ratio of 1:0.1 or more at a temperature of 160° C. or more to form hexagonal cerium carbonate.
摘要:
The present invention relates to a method for preparing cerium oxide which enables preparation of cerium oxide showing improved polishing performance, cerium oxide prepared therefrom, and CMP slurry comprising the same.The method for preparing cerium oxide comprises the step of contacting cerium oxide with primary alcohol to increase specific surface area of the cerium oxide 10% or more.
摘要:
Disclosed is a method for preparing cerium carbonate that can prepare cerium carbonate having uniform crystal structure, shape and size with high productivity. The method for preparing cerium carbonate comprises: continuously introducing a reaction solution comprising cerium precursor and urea in a tubular reactor including an inlet, an outlet, and one or more reaction tubes through the inlet; reacting the cerium precursor with urea at an elevated temperature in the reaction tube; and, continuously discharging cerium carbonate formed by the reaction of the cerium precursor and urea to the outlet.
摘要:
The present invention relates to a CMP slurry composition comprising an abrasive particle; a dispersant; an ionic polymer additive; and a non-ionic polymer additive including a polyolefin-polyethylene glycol copolymer including at least two polyethylene glycol repeat unit as a backbone and at least a polyethylene glycol repeating unit as a side chain, and a polishing method with using the slurry composition. The CMP slurry composition shows a low polishing rate to a single-crystalline silicon layer or a polysilicon layer and a high polishing rate to a silicon oxide layer, resulting in having an excellent polishing selectivity.
摘要:
The present invention relates to crystalline cerium oxide prepared in a simple, economical, and efficient manner, of which crystal structure, shape, and size can be easily adjusted and that exhibits excellent polishing properties, and a preparation method thereof. The crystalline cerium oxide can be prepared as sub-micron crystalline cerium oxide that has a mean volume diameter and a diameter standard deviation within a predetermined range.