摘要:
A thermal processing system (1) includes a reaction vessel (2) capable of forming a silicon nitride film on semiconductor wafers (10) through interaction between hexachlorodisilane and ammonia, and an exhaust pipe (16) connected to the reaction vessel (2). The reaction vessel 2 is heated at a temperature in the range of 500 to 900° C. and the exhaust pipe (16) is heated at 100° C. before disassembling and cleaning the exhaust pipe 16. Ammonia is supplied through a process gas supply pipe (13) into the reaction vessel (2), and the ammonia is discharged from the reaction vessel (2) into the exhaust pipe (16).
摘要:
A method of and an apparatus for measuring mercury present in a hydrocarbon, wherein a gas (G) such as an air containing no mercury is allowed to flow through a column filled with an adsorbent material effective to adsorb mercury, and a hydrocarbon sample to be measured is injected into the column to allow the mercury contained therein to be adsorbed by the adsorbent material while removing a volatile component other than mercury therefrom, and measuring the amount of mercury using mercury measuring instrument.
摘要:
A method is disclosed for dispersing a pigment to obtain a pigment dispersion. The method involves dispersing 100 parts by weight of a pigment, 0.1 to 30 parts by weight of a specific pigment dispersing agent and 5 to 300 parts by weight of a water-based resin in 100 to 2,000 parts by weight of an aqueous medium having a water-soluble organic solvent concentration of 4 to 15% by weight. Pigments are obtained which are suitable for the production of water-based coating compositions or water-based inks excellent in fluidity, storage stability, gloss of a coating, sharpness and tinting strength.
摘要:
A method is provided for forming a circuit board which comprises a copper plate and an insulating layer of photosensitive polyimide resin formed on the copper plate, the insulating layer leaving an exposed portion of a surface of the copper plate where an LSI is to be mounted. After Au plating is applied to the exposed surface of the copper plate, the LSI is mounted fixedly. A connection pattern having bonding pads is formed by copper plating on the insulating layer. The bonding pads and the LSI are connected by Au wire bonding on the Au plating applied on the bonding pads.
摘要:
In general, the invention features compounds useful for the synthesis of analogs of halichondrin B, such as eribulin or pharmaceutically acceptable salts thereof, e.g., eribulin mesylate. Exemplary compounds are of formula (I), (II), or (III):
摘要:
A thin film transistor array substrate includes a polysilicon layer having a predetermined pattern shape formed over a substrate, a first gate insulating film provided over the substrate and on the surface of the polysilicon layer and having a same polished surface as the surface of the polysilicon layer and a second gate insulating film formed to cover the polysilicon layer and the first gate insulating film.
摘要:
A vertical heat processing apparatus for performing a heat process on a plurality of target substrates all together includes a vertical process container configured to accommodate the target substrates and having a transfer port at a bottom; a holder configured to support the target substrates at intervals in a vertical direction inside the process container; and a heater disposed around the process container, and configured to supply heat rays through a sidewall of the process container, so as to heat an interior of the process container. A thermal buffer member is disposed between the heater and a lower end side of the process container to surround the lower end side, and is configured to decrease transmissibility of the lower end side for heat rays between the heater and target substrates inside the process container.
摘要:
A film formation apparatus for a semiconductor process includes a cleaning gas supply circuit, a concentration measuring section, and an information processor. The cleaning gas supply circuit is configured to supply a cleaning gas into a reaction chamber to perform cleaning of removing from an inner surface of the reaction chamber a by-product film derived from a film formation gas. The concentration measuring section is disposed in an exhaust system to monitor concentration of a predetermined component contained in exhaust gas from the reaction chamber. The information processor is configured to compare a measurement value obtained by the concentration measuring section with a preset value and to thereby determine an end point of the cleaning.