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公开(公告)号：US07093486B2
公开(公告)日：2006-08-22
申请号：US11051884
申请日：2005-02-04
IPC分类号： G01N9/04
CPC分类号： G01C19/5656 , G01C19/5719 , G01P2015/084 , Y10T29/49007
摘要： The present invention discloses a resonator gyroscope comprising a vibrationally isolated resonator including a proof mass, a counterbalancing plate having an extensive planar region, and one or more flexures interconnecting the proof mass and counterbalancing plate. A baseplate is affixed to the resonator by the one or more flexures and sense and drive electrodes are affixed to the baseplate proximate to the extensive planar region of the counterbalancing plate for exciting the resonator and sensing movement of the gyroscope. The isolated resonator transfers substantially no net momentum to the baseplate when the resonator is excited.
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公开(公告)号：US07040163B2
公开(公告)日：2006-05-09
申请号：US10639134
申请日：2003-08-12
IPC分类号： G01P9/04
CPC分类号： G01C19/5684 , Y10T29/49002 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49128 , Y10T29/49155
摘要： The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.
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公开(公告)号：US06944931B2
公开(公告)日：2005-09-20
申请号：US10639135
申请日：2003-08-12
IPC分类号： B81C3/00 , G01C19/5684 , G01R3/00
CPC分类号： B81C3/001 , G01C19/5684 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.
摘要翻译： 本发明公开了一种具有整体式谐振器的惯性传感器。 典型的传感器包括用于感测惯性传感器的运动的平面机械谐振器和用于容纳谐振器的壳体。 谐振器和壳体的壁通过蚀刻工艺来定义。 制造谐振器的典型方法包括蚀刻基板，将晶片接合到蚀刻的基板上，通过蚀刻晶片以形成平面机械谐振器和壳体的壁并将端盖晶片结合到壁上以完成壳体。
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14.发明授权公开(公告)号：US06823734B1
公开(公告)日：2004-11-30
申请号：US10423456
申请日：2003-04-25
IPC分类号： G01P904
CPC分类号： B81B3/0062 , B81B2201/0242 , G01C19/56 , Y10T74/1275
摘要： The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.
摘要翻译： 本发明公开了一种隔离静电偏置谐振器陀螺仪。 陀螺仪包括具有第一和第二差分振动模式的隔离谐振器，支撑隔离谐振器的基板，固定到基板上用于激励第一差分振动模式的多个激励，固定到基板的多个感测电极，用于感测 陀螺仪通过第二差分振动模式的移动和固定到基板上的多个偏置电极，用于微调谐振器的隔离并基本上最小化第一和第二差动振动模式之间的频率分配。 通常，隔离谐振器包括校验块和平衡板，其中偏置电极设置在下面的底板上。
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公开(公告)号：US07493814B2
公开(公告)日：2009-02-24
申请号：US11615872
申请日：2006-12-22
申请人： David Whelan , A. Dorian Challoner
发明人： David Whelan , A. Dorian Challoner
IPC分类号： G01P9/04
CPC分类号： G01C19/5684
摘要： Operation of a planar resonator gyroscope with in-plane parasitic modes of vibration to obtain improved performance is disclosed. A planar resonator gyroscope, such as a disc resonator gyroscope, may be operated with embedded electrodes. The embedded electrodes may be disposed adjacent to the planar resonator and proximate to one or more anti-nodes of a parasitic vibration mode. A sensed amplitude of the parasitic mode is applied in differential signals used to operate the gyroscope. A feedback controller for damping the parasitic mode applies a drive voltage generated from the proportional voltage to one or more drive electrodes adjacent to the planar resonator disposed proximate to one or more anti-nodes of the parasitic vibration mode of the planar resonator. Parasitic in-plane modes may be thus damped in operating the gyroscope with active damping applied through an analog operational amplifier or digital feedback.
摘要翻译： 公开了具有面内寄生振动模式的平面谐振器陀螺仪的操作以获得改进的性能。 可以使用嵌入式电极来操作诸如盘式谐振器陀螺仪的平面谐振器陀螺仪。 嵌入式电极可以布置成与平面谐振器相邻并且靠近寄生振动模式的一个或多个反节点。 在用于操作陀螺仪的差分信号中应用感测到的寄生模式的幅度。 用于阻尼寄生模式的反馈控制器将从比例电压产生的驱动电压施加到靠近平面谐振器的寄生振动模式的一个或多个反节点设置的平面谐振器附近的一个或多个驱动电极。 在通过模拟运算放大器或数字反馈施加的主动阻尼的陀螺仪的操作中，寄生面内模式可能被阻尼。
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公开(公告)号：US07100444B2
公开(公告)日：2006-09-05
申请号：US10405178
申请日：2003-04-02
申请人： A. Dorian Challoner
发明人： A. Dorian Challoner
IPC分类号： G01P9/04
CPC分类号： G01C19/5719 , G01P2015/084 , Y10T29/49007 , Y10T74/12
摘要： The present invention discloses a resonator gyroscope comprising a resonator including two bodies, each with a center of mass and transverse inertia symmetry about an axis that are substantially coincident and each supported by one or more elastic elements and wherein the bodies together forming two differential rocking modes of vibration transverse to the axis with substantially equal frequencies and wherein the two bodies transfer substantially no net momentum to the baseplate when the resonator is excited. The gyroscope further includes a baseplate affixed to the resonator by the one or more elastic elements.
摘要翻译： 本发明公开了一种谐振器陀螺仪，其包括谐振器，该谐振器包括两个主体，每个主体具有围绕基本上重合的轴的质心和横向惯性对称性，并且各自由一个或多个弹性元件支撑，并且其中主体一起形成两个差分摇摆模式 振动横向于具有基本相等频率的轴，并且其中当谐振器被激励时，两个主体基本上不传递净动量到基板。 陀螺仪还包括通过一个或多个弹性元件固定到谐振器的基板。
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公开(公告)号：US5816538A
公开(公告)日：1998-10-06
申请号：US322859
申请日：1994-10-13
CPC分类号： G05D1/0883 , B64G1/24 , B64G1/28 , B64G1/281 , B64G1/288 , B64G1/38 , B64G2001/245
摘要： The invention provides a method for controlling the precession of a spinning spacecraft (20) which allows the spacecraft body to respond to an input torque without the nutation normally attendant when an input torque is applied about one transverse axis to accelerate a spinning spacecraft about that one axis. Dynamic decoupling eliminates nutation through the impression of additional derived feedback torques (44,46) to the input torque control of a spinning spacecraft to oppose or cancel the intrinsic cross-coupling terms (34,36) of the spinning spacecraft's gyrodynamics that give rise to the nutation. Thus, a single spacecraft design can provide the benefits of a spinning bus such as a simplified thruster control system for orbit control, improved temperature environment for many payload elements, spin-averaging of body-fixed disturbances and gyro drift errors, and propellant management as well as the major benefit of a body-stabilized or non-rotation spacecraft design which is freedom from nutation and hence improved performance.
摘要翻译： 本发明提供了一种用于控制旋转航天器（20）的进动的方法，其允许航天器主体响应输入扭矩而不需要在一个横轴上施加输入扭矩时通常伴随的章动，从而加速关于该旋转航空器的旋转航天器 轴。 动态去耦消除了通过额外的派生反馈转矩（44,46）到旋转航天器的输入转矩控制的印象，以反对或消除旋转航天器的陀螺动力学的内在交叉耦合术语（34,36），从而产生 章动 因此，单个航天器设计可以提供旋转总线的优点，例如用于轨道控制的简化的推进器控制系统，用于许多有效载荷元件的改善的温度环境，身体固定的扰动的旋转平均和陀螺仪漂移误差，以及推进剂管理 以及身体稳定或非旋转航天器设计的主要优点，其免于章动，从而改善性能。
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18.发明授权Spacecraft with modulated thrust electrostatic ion thruster and associated method 失效具有调制推力静电离子推进器的航天器及相关方法
公开(公告)号：US4825646A
公开(公告)日：1989-05-02
申请号：US41564
申请日：1987-04-23
CPC分类号： F03H1/0037 , B64G1/281 , B64G1/405 , B64G1/242 , B64G1/26
摘要： An axial electrostatic ion thruster for use on a dual-spin stabilized spacecraft is disclosed. The thruster is mounted on the spun portion of the spacecraft and continuously fired for an integral number of spin periods to provide north-south velocity and attitude control. To achieve zero attitude precession with a statically imbalanced despun platform, or an intentional attitude precession generally, the ion thrust is spin-synchronously varied between two non-zero levels to achieve a prescribed Fourier component amplitude and phase at the spin frequency. Modulation of the thrust is achieved with constant ion beam current by complementary modulation of the beam voltage, V.sub.B, and accel voltage, V.sub.A by varying the ion extraction system grid voltages. This varies the thrust while maintaining a constant total accelerating voltage V.sub.TOT =V.sub.B +.vertline.V.sub.A .vertline..
摘要翻译： 公开了一种用于双自旋稳定的航天器的轴向静电离子推进器。 推进器安装在航天器的旋转部分，并连续射击一整个旋转周期，以提供南北速度和姿态控制。 为了通过静态不平衡的解码平台实现零姿态进动，或通常有意的姿态进动，离子推力在两个非零水平之间自旋同步地变化，以实现在自旋频率下的规定的傅立叶分量幅度和相位。 通过改变离子提取系统电网电压，通过对束电压，VB和加速电压VA的互补调制，通过恒定的离子束电流来实现推力的调制。 这可以改变推力，同时保持恒定的总加速电压VTOT = VB + | VA|。
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19.发明申请ISOLATED ACTIVE TEMPERATURE REGULATOR FOR VACUUM PACKAGING OF A DISC RESONATOR GYROSCOPE 有权用于DISC共振器陀螺仪的真空包装的隔离有源温度调节器公开(公告)号：US20100300201A1
公开(公告)日：2010-12-02
申请号：US12473084
申请日：2009-05-27
申请人： Howard H. Ge , A. Dorian Challoner
发明人： Howard H. Ge , A. Dorian Challoner
CPC分类号： G01C19/5712 , B81B7/0048 , B81B7/0096 , B81B2201/0242 , G01C25/00 , Y10T29/49007 , Y10T29/4902 , Y10T29/49083 , Y10T29/49105
摘要： A micromachined thermal and mechanical isolator for MEMS die that may include two layers, a first layer with an active temperature regulator comprising a built-in heater and temperature sensor and a second layer having mechanical isolation beams supporting the die. The isolator may be inserted between a MEMS die of a disc resonator gyroscope (DRG) chip and the leadless chip carrier (LCC) package to isolate the die from stress and temperature gradients. Thermal and mechanical stress to the DRG can be significantly reduced in addition to mitigating temperature sensitivity of the DRG chip. The small form can drastically reduce cost and power consumption of the MEMS inertial sensor and enable new applications such as smart munitions, compact and integrated space navigation solutions, with significant potential cost savings over the existing inertial systems.
摘要翻译： 一种用于MEMS管芯的微加工热和机械隔离器，其可以包括两层，具有主动温度调节器的第一层，其包括内置加热器和温度传感器，以及具有支撑所述管芯的机械隔离梁的第二层。 隔离器可以插入在盘式谐振器陀螺仪（DRG）芯片的MEMS管芯和无引线芯片载体（LCC）封装之间，以将管芯与应力和温度梯度隔离。 除了降低DRG芯片的温度敏感性之外，DRG的热和机械应力可以显着降低。 这种小型化可以大大降低MEMS惯性传感器的成本和功耗，并实现了诸如智能弹药，紧凑型和集成的空间导航解决方案等新应用，相比现有的惯性系统具有显着的潜在成本。
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公开(公告)号：US20080295622A1
公开(公告)日：2008-12-04
申请号：US11757395
申请日：2007-06-04
申请人： A. Dorian Challoner
发明人： A. Dorian Challoner
IPC分类号： G01C19/28
CPC分类号： G01C19/5684 , Y10T74/1275
摘要： Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. A gyroscope die may be attached to its package substrate on a central disc area that is inboard of its embedded electrodes. This configuration eliminates contact of the die with the package substrate beneath the embedded electrodes allowing the internal electrode support structure to expand or contract freely without stress as its temperature changes. The central attachment can also be used diminish the package temperature gradients on the periphery of the die, if the thermal conductivity of the central disc attachment material is higher than the package substrate. Temperature gradients across the resonator also lead to thermoelastic damping asymmetry and rate drift. In addition, the electrical connections to the die may be formed by vertical vias within the central disc attachment area or by thin wirebonds to peripheral I/O pads on the gyro chip.
摘要翻译： 公开了平面谐振器陀螺仪的包装技术，例如盘式谐振器陀螺仪（DRG）。 陀螺仪芯片可以在其封装衬底上附着在其嵌入电极内侧的中心盘区域上。 这种配置消除了裸片与嵌入电极下面的封装衬底的接触，允许内部电极支撑结构随着其温度变化而自由地膨胀或收缩而不受应力。 如果中心盘附件材料的导热率高于封装衬底，也可以使用中心附件来减小管芯周围的封装温度梯度。 谐振器的温度梯度也导致热弹性阻尼不对称和速率漂移。 此外，与芯片的电连接可以由中心盘附接区域内的垂直通孔形成，也可以通过与陀螺仪芯片上的周边I / O焊盘的薄引线键合而形成。
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